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CPC
H01L21/67706

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67706Mechanical details

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for treating objects and apparatus for carrying out the method
- Patent number 12,217,990
- Issue date Feb 4, 2025
- RENA Technologies GmbH
- Benedikt Straub
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Portable robotic semiconductor pod loader
- Patent number 12,217,991
- Issue date Feb 4, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chih-Kuo Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling substrate transfer system and the substrate t...
- Patent number 12,211,719
- Issue date Jan 28, 2025
- Tokyo Electron Limited
- Wataru Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device and method for moving an object into a processing station, c...
- Patent number 12,205,838
- Issue date Jan 21, 2025
- Atotech Deutschland GmbH
- Rüdiger Pretscher
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Stocker system for wafer cassette
- Patent number 12,176,232
- Issue date Dec 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Guancyun Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatuses for executing a direct transfer of a semiconductor devi...
- Patent number 12,165,895
- Issue date Dec 10, 2024
- Cowles Semi, LLC
- Andrew Huska
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated material handling systems
- Patent number 12,154,809
- Issue date Nov 26, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yen Le Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for manufacturing organic light emitting diode...
- Patent number 12,156,460
- Issue date Nov 26, 2024
- LOTI CO., LTD.
- Woo-Bin Im
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus with linear bearing
- Patent number 12,142,505
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Inspection system
- Patent number 12,131,930
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Asaf Schlezinger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport vehicle
- Patent number 12,119,253
- Issue date Oct 15, 2024
- Murata Machinery, Ltd.
- Wataru Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Traveling vehicle system
- Patent number 12,116,021
- Issue date Oct 15, 2024
- Murata Machinery, Ltd.
- Haruki Ogo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ceiling traveling vehicle system and method for detecting obstacle
- Patent number 12,119,252
- Issue date Oct 15, 2024
- Murata Machinery, Ltd.
- Haruki Ogo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer inspection system
- Patent number 12,117,485
- Issue date Oct 15, 2024
- Tokyo Electron Limited
- Junichi Hagihara
- G01 - MEASURING TESTING
Information Patent Grant
Calibration of an electronics processing system
- Patent number 12,115,683
- Issue date Oct 15, 2024
- Applied Materials, Inc.
- Nicholas Michael Bergantz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
PECVD apparatus
- Patent number 12,112,928
- Issue date Oct 8, 2024
- GUANGZHOU AIFO LIGHT COMMUNICATION TECHNOLOGY COMPANY LTD.
- Guoqiang Li
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate transfer systems and methods of use thereof
- Patent number 12,106,991
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Jeffrey C. Hudgens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gripper device, conveyance vehicle, and conveyance method
- Patent number 12,106,990
- Issue date Oct 1, 2024
- Murata Machinery, Ltd.
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transfer device and wafer transfer method
- Patent number 12,100,606
- Issue date Sep 24, 2024
- SHENYANG KINGSEMI CO., LTD.
- Tianyao Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overhead hoist transport device and method of using the same
- Patent number 12,094,744
- Issue date Sep 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chuan Wei Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor processing system
- Patent number 12,080,570
- Issue date Sep 3, 2024
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Heng Tao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for transporting wafers
- Patent number 12,062,561
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Chih Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Air curtain for defect reduction
- Patent number 12,062,562
- Issue date Aug 13, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Wei-Chih Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Overhead conveyance vehicle
- Patent number 12,057,338
- Issue date Aug 6, 2024
- Murata Machinery, Ltd.
- Makoto Kobayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for determining a substrate position in a closed chamber and...
- Patent number 12,046,493
- Issue date Jul 23, 2024
- China Thumph International Engineering Co., Ltd.
- Shou Peng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for continuous substrate cassette loading
- Patent number 12,046,498
- Issue date Jul 23, 2024
- Applied Materials, Inc.
- Asaf Schlezinger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning module, substrate processing apparatus including cleaning...
- Patent number 12,033,847
- Issue date Jul 9, 2024
- Ebara Corporation
- Toshio Mizuno
- B24 - GRINDING POLISHING
Information Patent Grant
Systems for improved efficiency of ball mount cleaning and methods...
- Patent number 12,005,481
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Ying-Hao Wang
- B08 - CLEANING
Information Patent Grant
Substrate holding apparatus, substrate processing apparatus having...
- Patent number 12,002,704
- Issue date Jun 4, 2024
- Ebara Corporation
- Makoto Kashiwagi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate carrying apparatus
- Patent number 11,996,310
- Issue date May 28, 2024
- Shibaura Mechatronics Corporation
- Masaaki Furuya
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
MULTI-SUBSTRATE PROCESSING SYSTEM
- Publication number 20250034708
- Publication date Jan 30, 2025
- Applied Materials, Inc.
- Ala MORADIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
BLACK WHEELS FOR TRANSPORTING ULTRA-THIN SILICON WAFER
- Publication number 20250038026
- Publication date Jan 30, 2025
- TCL ZHONGHUAN RENEWABLE ENERGY TECHNOLOGY CO., LTD.
- Muren BAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Transport Facility
- Publication number 20250022734
- Publication date Jan 16, 2025
- DAIFUKU CO., LTD.
- Daichi Tomida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION SYSTEM
- Publication number 20240429078
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Asaf SCHLEZINGER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF
- Publication number 20240420981
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Jeffrey C. Hudgens
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING LINE FOR PROCESSING A SUBSTRATE USED FOR THE MANUFACTURE...
- Publication number 20240416645
- Publication date Dec 19, 2024
- Applied Materials Italia S.R.L.
- Davide COLLA
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
APPARATUS AND METHODS FOR CLEANING A PACKAGE
- Publication number 20240395571
- Publication date Nov 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ying-Hao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED MATERIAL HANDLING SYSTEMS
- Publication number 20240387219
- Publication date Nov 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Yen Le LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING AND TRANSFER EQUIPMENT, WAFER TREATMENT EQUIPMENT, TRANSFE...
- Publication number 20240379405
- Publication date Nov 14, 2024
- EBARA CORPORATION
- KOTARO TOYOSAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OVERHEAD HOIST TRANSPORT DEVICE AND METHOD OF USING THE SAME
- Publication number 20240371671
- Publication date Nov 7, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chuan Wei LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIR CURTAIN FOR DEFECT REDUCTION
- Publication number 20240355660
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Wei-Chih LIAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONTACT APPARATUS FOR ARRANGING SEMICONDUCTOR DEVICES
- Publication number 20240355648
- Publication date Oct 24, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Zi Chow LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR TRANSPORTING WAFERS
- Publication number 20240355659
- Publication date Oct 24, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wei-Chih CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATIONAL INDEXER WITH WAFER EDGE GRIP
- Publication number 20240332054
- Publication date Oct 3, 2024
- LAM RESEARCH CORPORATION
- Eric Bramwell Britcher
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROTATIONAL INTERFACE, CARRIER TRANSFER SYSTEM INCLUDING THE SAME, A...
- Publication number 20240332053
- Publication date Oct 3, 2024
- Samsung Electronics Co., Ltd.
- HOCHAN LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS AND HEAT TREATMENT...
- Publication number 20240304472
- Publication date Sep 12, 2024
- SCREEN Holdings Co., Ltd.
- Tomohiro UENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, ELECTR...
- Publication number 20240297054
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Naoki MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...
- Publication number 20240282619
- Publication date Aug 22, 2024
- EBARA CORPORATION
- Makoto KASHIWAGI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE ETCHING APPARATUS AND SUBSTRATE ETCHING METHOD
- Publication number 20240242980
- Publication date Jul 18, 2024
- SAMSUNG DISPLAY CO., LTD.
- Yonghyun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE AND METHOD FOR OPERATING THE SAME
- Publication number 20240234164
- Publication date Jul 11, 2024
- Samsung Electronics Co., Ltd.
- Won Keun CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE
- Publication number 20240222097
- Publication date Jul 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Hsiang CHENG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TRANSFERRING APPARATUS, AND LIQUID PROCESSING APPARATUS A...
- Publication number 20240222174
- Publication date Jul 4, 2024
- SEMES CO., LTD.
- Seul Gi CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GRIPPER MODULE FOR GRIPPING A CARRIER, SUBSTRATE TRANSFER APPARATUS...
- Publication number 20240222175
- Publication date Jul 4, 2024
- Semes Co., Ltd.
- Jaehyun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS WITH ENHANCED CHAMBER USABILITY...
- Publication number 20240222176
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Yoshiyuki Umeoka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HUMIDITY CONTROL DEVICE IN PROCESS SPACE, HUMIDITY CONTROL SYSTEM I...
- Publication number 20240210057
- Publication date Jun 27, 2024
- SEMES CO., LTD.
- Yunhwa HONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATION SYSTEM AND METHOD
- Publication number 20240213067
- Publication date Jun 27, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Tsung-Sheng KUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CASSETTE TRANSPORT DEVICE AND CASSETTE TRANSPORT SYSTEM INCLUDING T...
- Publication number 20240213068
- Publication date Jun 27, 2024
- SAMSUNG DISPLAY CO., LTD.
- Min Chul JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MANUFACTURING DEVICE OF DISPLAY DEVICE
- Publication number 20240206307
- Publication date Jun 20, 2024
- Japan Display Inc.
- Takanobu TAKENAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEPARATION METHOD OF BONDED SUBSTRATES
- Publication number 20240194492
- Publication date Jun 13, 2024
- SKY TECH INC.
- JUNG-HUA CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER PICKING AND PLACING APPARATUS
- Publication number 20240186165
- Publication date Jun 6, 2024
- HERMES-EPITEK CORPORATION
- Cheng-Huang Kuo
- H01 - BASIC ELECTRIC ELEMENTS

Mechanical details

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for treating objects and apparatus for carrying out the method

Portable robotic semiconductor pod loader

Method of controlling substrate transfer system and the substrate t...

Device and method for moving an object into a processing station, c...

Stocker system for wafer cassette

Apparatuses for executing a direct transfer of a semiconductor devi...

Automated material handling systems

Method and apparatus for manufacturing organic light emitting diode...

Transport apparatus with linear bearing

Inspection system

Transport vehicle

Traveling vehicle system

Ceiling traveling vehicle system and method for detecting obstacle

Wafer inspection system

Calibration of an electronics processing system

PECVD apparatus

Substrate transfer systems and methods of use thereof

Gripper device, conveyance vehicle, and conveyance method

Wafer transfer device and wafer transfer method

Overhead hoist transport device and method of using the same

Semiconductor processing system

Method for transporting wafers

Air curtain for defect reduction

Overhead conveyance vehicle

Method for determining a substrate position in a closed chamber and...

Method and apparatus for continuous substrate cassette loading

Cleaning module, substrate processing apparatus including cleaning...

Systems for improved efficiency of ball mount cleaning and methods...

Substrate holding apparatus, substrate processing apparatus having...

Substrate carrying apparatus

Patents Applicationslast 30 patents

MULTI-SUBSTRATE PROCESSING SYSTEM

BLACK WHEELS FOR TRANSPORTING ULTRA-THIN SILICON WAFER

Transport Facility

INSPECTION SYSTEM

SUBSTRATE TRANSFER SYSTEMS AND METHODS OF USE THEREOF

PROCESSING LINE FOR PROCESSING A SUBSTRATE USED FOR THE MANUFACTURE...

APPARATUS AND METHODS FOR CLEANING A PACKAGE

AUTOMATED MATERIAL HANDLING SYSTEMS

CLEANING AND TRANSFER EQUIPMENT, WAFER TREATMENT EQUIPMENT, TRANSFE...

OVERHEAD HOIST TRANSPORT DEVICE AND METHOD OF USING THE SAME

AIR CURTAIN FOR DEFECT REDUCTION

CONTACT APPARATUS FOR ARRANGING SEMICONDUCTOR DEVICES

METHOD FOR TRANSPORTING WAFERS

ROTATIONAL INDEXER WITH WAFER EDGE GRIP

ROTATIONAL INTERFACE, CARRIER TRANSFER SYSTEM INCLUDING THE SAME, A...

LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS AND HEAT TREATMENT...

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, ELECTR...

SUBSTRATE HOLDING APPARATUS, SUBSTRATE PROCESSING APPARATUS HAVING...

SUBSTRATE ETCHING APPARATUS AND SUBSTRATE ETCHING METHOD

SUBSTRATE PROCESSING DEVICE AND METHOD FOR OPERATING THE SAME

METHODS FOR PROCESSING A SEMICONDUCTOR SUBSTRATE

SUBSTRATE TRANSFERRING APPARATUS, AND LIQUID PROCESSING APPARATUS A...

GRIPPER MODULE FOR GRIPPING A CARRIER, SUBSTRATE TRANSFER APPARATUS...

SEMICONDUCTOR PROCESSING APPARATUS WITH ENHANCED CHAMBER USABILITY...

HUMIDITY CONTROL DEVICE IN PROCESS SPACE, HUMIDITY CONTROL SYSTEM I...

SEMICONDUCTOR FABRICATION SYSTEM AND METHOD

CASSETTE TRANSPORT DEVICE AND CASSETTE TRANSPORT SYSTEM INCLUDING T...

MANUFACTURING DEVICE OF DISPLAY DEVICE

SEPARATION METHOD OF BONDED SUBSTRATES

WAFER PICKING AND PLACING APPARATUS