Mechanical parts of transfer devices

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CPC
H01L21/67766

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/67766Mechanical parts of transfer devices

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,230,540
- Issue date Feb 18, 2025
- Tokyo Electron Limited
- Yoshihiro Kawaguchi
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Control method and substrate transfer system
- Patent number 12,224,193
- Issue date Feb 11, 2025
- Tokyo Electron Limited
- Takehiro Shindo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 12,198,961
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Tsuyoshi Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,183,613
- Issue date Dec 31, 2024
- Tokyo Electron Limited
- Kouzou Kanagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus for processing substrates
- Patent number 12,183,602
- Issue date Dec 31, 2024
- ASM IP Holding B.V.
- Theodorus Oosterlaken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process kit enclosure system
- Patent number 12,165,905
- Issue date Dec 10, 2024
- Applied Materials, Inc.
- Helder Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated semiconductor substrate polishing and cleaning
- Patent number 12,154,810
- Issue date Nov 26, 2024
- GlobalWafers Co., Ltd.
- ShinBae Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transport apparatus with linear bearing
- Patent number 12,142,505
- Issue date Nov 12, 2024
- BROOKS AUTOMATION US, LLC
- Daniel Babbs
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Substrate transfer device
- Patent number 12,136,561
- Issue date Nov 5, 2024
- Samsung Electronics Co., Ltd.
- Sanglyong Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate mapping using deep neural-networks
- Patent number 12,131,454
- Issue date Oct 29, 2024
- Onto Innovation, Inc.
- Jason Paul Remillard
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Substrate storage apparatus and substrate processing system
- Patent number 12,125,729
- Issue date Oct 22, 2024
- Kioxia Corporation
- Kohei Watabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method of manufacturing semicond...
- Patent number 12,116,666
- Issue date Oct 15, 2024
- Kokusai Electric Corporation
- Daigi Kamimura
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate handling device and processing chamber
- Patent number 12,109,681
- Issue date Oct 8, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- You-Hua Chou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 12,087,560
- Issue date Sep 10, 2024
- Semes Co., Ltd.
- Dukhyun Son
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Multi-depth film for optical devices
- Patent number 12,084,761
- Issue date Sep 10, 2024
- Applied Materials, Inc.
- Karl J. Armstrong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing module and method of moving a workpiece
- Patent number 12,080,571
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra Savandaiah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Increased number of load ports on factory interface with robot that...
- Patent number 12,076,854
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Paul B. Reuter
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Airflow detection device and methods of use
- Patent number 12,080,575
- Issue date Sep 3, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yu-Chen Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate transfer apparatus and substrate transfer method
- Patent number 12,077,392
- Issue date Sep 3, 2024
- Tokyo Electron Limited
- Hitoshi Hashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Substrate processing system for processing substrates with an elect...
- Patent number 12,051,602
- Issue date Jul 30, 2024
- ASM IP Holding B.V.
- Jeroen de Jonge
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for humidity control of FOUP during semiconduct...
- Patent number 12,051,609
- Issue date Jul 30, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Sung-Ju Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus
- Patent number 12,046,499
- Issue date Jul 23, 2024
- BROOKS AUTOMATION US, LLC
- Christopher Bussiere
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate handling apparatus and method of handling substrate
- Patent number 12,046,501
- Issue date Jul 23, 2024
- Kawasaki Jukogyo Kabushiki Kaisha
- Haruhiko Tan
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Stacker crane
- Patent number 12,030,759
- Issue date Jul 9, 2024
- Murata Machinery, Ltd.
- Jun Sai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate treating apparatus and substrate transporting method
- Patent number 12,035,576
- Issue date Jul 9, 2024
- SCREEN Holdings Co., Ltd.
- Joji Kuwahara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transfer apparatus having link arms and stockers having the same
- Patent number 12,033,879
- Issue date Jul 9, 2024
- Samsung Electronics Co., Ltd.
- Sangmin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automated assistance in a semiconductor manufacturing environment
- Patent number 12,020,961
- Issue date Jun 25, 2024
- LAVORRO, INC.
- Akshay Oberoi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transport container
- Patent number 12,009,242
- Issue date Jun 11, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jyh-Shiou Hsu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vertical batch furnace assembly with detector to detect cassette
- Patent number 12,009,241
- Issue date Jun 11, 2024
- ASM IP Holding B.V.
- Christianus G. M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer pod transfer assembly
- Patent number 12,002,699
- Issue date Jun 4, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Chih-Wei Chou
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
AUTOMATED SEMICONDUCTOR SUBSTRATE POLISHING AND CLEANING METHODS
- Publication number 20250062148
- Publication date Feb 20, 2025
- GLOBALWAFERS CO., LTD.
- ShinBae Park
- B08 - CLEANING
Information Patent Application
SUBSTRATE TREATMENT SYSTEM
- Publication number 20250029861
- Publication date Jan 23, 2025
- SCREEN Holdings Co., Ltd.
- Akihiro IWASAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NESTING ATMOSPHERIC ROBOT ARMS FOR HIGH THROUGHPUT
- Publication number 20250029860
- Publication date Jan 23, 2025
- LAM RESEARCH CORPORATION
- Richard M. Blank
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT
- Publication number 20250029854
- Publication date Jan 23, 2025
- Lavorro, Inc.
- Akshay OBEROI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT
- Publication number 20250022731
- Publication date Jan 16, 2025
- Lavorro, Inc.
- Akshay OBEROI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS PLATFORM
- Publication number 20250014931
- Publication date Jan 9, 2025
- Beijing E-Town Semiconductor Technology Co., Ltd.
- Haiwei LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE MAPPING USING DEEP NEURAL-NETWORKS
- Publication number 20250014165
- Publication date Jan 9, 2025
- ONTO INNOVATION INC.
- Jason Paul Remillard
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SEMICONDUCTOR TRANSFER DEVICE
- Publication number 20250006534
- Publication date Jan 2, 2025
- Samsung Electronics Co., Ltd.
- Seong Won Yeom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOUP HAVING END EFFECTOR DETECTION SENSOR, AND INTEGRATED DATA MANA...
- Publication number 20240429082
- Publication date Dec 26, 2024
- Samsung Electronics Co., Ltd.
- Kyu Ok LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORTING STRUCTURE AND INSPECTION EQUIPMENT THEREFOF AND CALIBRAT...
- Publication number 20240412996
- Publication date Dec 12, 2024
- GUDENG PRECISION INDUSTRIAL CO., LTD.
- MING-CHIEN CHIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR ALIGNING A WAFER TO A CHUCK
- Publication number 20240412992
- Publication date Dec 12, 2024
- KLA Corporation
- Jaime Poris
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
- Publication number 20240391706
- Publication date Nov 28, 2024
- TOKYO ELECTRON LIMITED
- Hitoshi HASHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EQUIPMENT FRONT END MODULE
- Publication number 20240387217
- Publication date Nov 21, 2024
- ASM IP HOLDING B.V.
- Hsuan Te Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING DEVICE PROVIDE...
- Publication number 20240387220
- Publication date Nov 21, 2024
- DAIKIN FINETECH, LTD.
- Yasunori DEGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AIRFLOW DETECTION DEVICE AND METHODS OF USE
- Publication number 20240379391
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Chen CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INCREASED NUMBER OF LOAD PORTS ON FACTORY INTERFACE WITH ROBOT THAT...
- Publication number 20240375300
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Paul B. Reuter
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240373683
- Publication date Nov 7, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR HUMIDITY CONTROL OF FOUP DURING SEMICONDUCT...
- Publication number 20240347363
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Sung-Ju Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR MANUFACTURING THIN FILM DEVICES
- Publication number 20240339553
- Publication date Oct 10, 2024
- Solaires Entreprises Inc.
- Alfonso Fabian de la Fuente Sanchez
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240334758
- Publication date Oct 3, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD
- Publication number 20240334759
- Publication date Oct 3, 2024
- SCREEN Holdings Co., Ltd.
- Joji KUWAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD
- Publication number 20240321615
- Publication date Sep 26, 2024
- SEMES CO., LTD.
- Sung Jae JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER POD TRANSFER ASSEMBLY
- Publication number 20240321616
- Publication date Sep 26, 2024
- Taiwan Semiconductor Manufacturing Company Limited
- Chih-Wei CHOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS AND HEAT TREATMENT...
- Publication number 20240304472
- Publication date Sep 12, 2024
- SCREEN Holdings Co., Ltd.
- Tomohiro UENO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORT CONTAINER
- Publication number 20240282610
- Publication date Aug 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jyh-Shiou HSU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR INSPECTING VIA HOLE OF WAFER
- Publication number 20240264091
- Publication date Aug 8, 2024
- GOOIL ENGINEERING CO., LTD.
- Seung Gyun Back
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE
- Publication number 20240258136
- Publication date Aug 1, 2024
- Applied Materials, Inc.
- Kirankumar Neelasandra SAVANDAIAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20240258147
- Publication date Aug 1, 2024
- SCREEN Holdings Co., Ltd.
- Kenji AMAHISA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EFEM ROBOT AUTO TEACHING METHODOLOGY
- Publication number 20240249961
- Publication date Jul 25, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Fa Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HANDLING SYSTEM FOR FETCHING A SUBSTRATE
- Publication number 20240242995
- Publication date Jul 18, 2024
- Semsysco GmbH
- Louis Wagner
- H01 - BASIC ELECTRIC ELEMENTS

Mechanical parts of transfer devices

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing system and substrate processing method

Control method and substrate transfer system

Substrate processing apparatus and substrate processing method

Substrate processing system and substrate processing method

Substrate processing apparatus for processing substrates

Process kit enclosure system

Automated semiconductor substrate polishing and cleaning

Transport apparatus with linear bearing

Substrate transfer device

Substrate mapping using deep neural-networks

Substrate storage apparatus and substrate processing system

Substrate processing apparatus and method of manufacturing semicond...

Substrate handling device and processing chamber

Apparatus and method for treating substrate

Multi-depth film for optical devices

Substrate processing module and method of moving a workpiece

Increased number of load ports on factory interface with robot that...

Airflow detection device and methods of use

Substrate transfer apparatus and substrate transfer method

Substrate processing system for processing substrates with an elect...

Systems and methods for humidity control of FOUP during semiconduct...

Substrate processing apparatus

Substrate handling apparatus and method of handling substrate

Stacker crane

Substrate treating apparatus and substrate transporting method

Transfer apparatus having link arms and stockers having the same

Automated assistance in a semiconductor manufacturing environment

Wafer transport container

Vertical batch furnace assembly with detector to detect cassette

Wafer pod transfer assembly

Patents Applicationslast 30 patents

AUTOMATED SEMICONDUCTOR SUBSTRATE POLISHING AND CLEANING METHODS

SUBSTRATE TREATMENT SYSTEM

NESTING ATMOSPHERIC ROBOT ARMS FOR HIGH THROUGHPUT

AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT

AUTOMATED ASSISTANCE IN A SEMICONDUCTOR MANUFACTURING ENVIRONMENT

PROCESS PLATFORM

SUBSTRATE MAPPING USING DEEP NEURAL-NETWORKS

SEMICONDUCTOR TRANSFER DEVICE

FOUP HAVING END EFFECTOR DETECTION SENSOR, AND INTEGRATED DATA MANA...

SUPPORTING STRUCTURE AND INSPECTION EQUIPMENT THEREFOF AND CALIBRAT...

SYSTEM AND METHOD FOR ALIGNING A WAFER TO A CHUCK

SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD

EQUIPMENT FRONT END MODULE

SUBSTRATE PROCESSING MODULE AND SUBSTRATE PROCESSING DEVICE PROVIDE...

AIRFLOW DETECTION DEVICE AND METHODS OF USE

INCREASED NUMBER OF LOAD PORTS ON FACTORY INTERFACE WITH ROBOT THAT...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SYSTEMS AND METHODS FOR HUMIDITY CONTROL OF FOUP DURING SEMICONDUCT...

APPARATUS FOR MANUFACTURING THIN FILM DEVICES

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TRANSPORTING METHOD

SUBSTRATE TRANSFER DEVICE AND SUBSTRATE TRANSFER METHOD

WAFER POD TRANSFER ASSEMBLY

LIGHT IRRADIATION TYPE HEAT TREATMENT APPARATUS AND HEAT TREATMENT...

WAFER TRANSPORT CONTAINER

METHOD FOR INSPECTING VIA HOLE OF WAFER

SUBSTRATE PROCESSING MODULE AND METHOD OF MOVING A WORKPIECE

SUBSTRATE PROCESSING SYSTEM

EFEM ROBOT AUTO TEACHING METHODOLOGY

HANDLING SYSTEM FOR FETCHING A SUBSTRATE