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Mixing during semiconductor or wafer manufacturing processes
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Physical, chemical processing
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MIXING
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B01F2215/0096
Mixing during semiconductor or wafer manufacturing processes
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Patents Grants
last 30 patents
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Patent Grant
On-demand in-line-blending and supply of chemicals
Patent number
11,318,431
Issue date
May 3, 2022
DIVERSIFIED FLUID SOLUTIONS, LLC
Darren Willey
B24 - GRINDING POLISHING
Information
Patent Grant
Low pressure fluctuation apparatuses for blending fluids, and metho...
Patent number
11,266,959
Issue date
Mar 8, 2022
VERSUM MATERIALS US, LLC
Benjamin Patrick Bayer
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Ultrafine bubble generating method, ultrafine bubble generating app...
Patent number
11,179,652
Issue date
Nov 23, 2021
Canon Kabushiki Kaisha
Masahiko Kubota
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Gas-dissolved liquid producing apparatus
Patent number
11,040,315
Issue date
Jun 22, 2021
Ebara Corporation
Yoichi Nakagawa
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Paddle, plating apparatus equipped with the paddle, and plating method
Patent number
10,946,351
Issue date
Mar 16, 2021
Ebara Corporation
Yasuyuki Masuda
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Grant
Wave absorbing member attachable to paddle and plating apparatus in...
Patent number
10,914,020
Issue date
Feb 9, 2021
Ebara Corporation
Shao Hua Chang
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Diluted solution production method and diluted solution production...
Patent number
10,857,512
Issue date
Dec 8, 2020
Organo Corporation
Yoshifumi Hayashi
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Paddle for use of stirring plating solution and plating apparatus i...
Patent number
10,829,865
Issue date
Nov 10, 2020
Ebara Corporation
Risa Kimura
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Device for adjusting specific resistance value and method for adjus...
Patent number
10,792,623
Issue date
Oct 6, 2020
DIC Corporation
Kazumi Oi
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Systems and methods for generating a conductive liquid comprising d...
Patent number
10,773,221
Issue date
Sep 15, 2020
MKS Instruments, Inc.
Ulrich Alfred Brammer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid supply unit, substrate treating apparatus, and method for re...
Patent number
10,758,875
Issue date
Sep 1, 2020
Semes Co., Ltd.
Byungsun Bang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor processing chamber multistage mixing apparatus
Patent number
10,699,921
Issue date
Jun 30, 2020
Applied Materials, Inc.
Mehmet Tugrul Samir
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Semiconductor processing chamber multistage mixing apparatus
Patent number
10,679,870
Issue date
Jun 9, 2020
Applied Materials, Inc.
Mehmet Tugrul Samir
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Supply-liquid producing apparatus and supply-liquid producing method
Patent number
10,654,017
Issue date
May 19, 2020
Ebara Corporation
Suguru Ozawa
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Diluted solution production method and diluted solution production...
Patent number
10,406,493
Issue date
Sep 10, 2019
Organo Corporation
Yoshifumi Hayashi
G05 - CONTROLLING REGULATING
Information
Patent Grant
Gas mixing device and substrate processing apparatus
Patent number
10,266,945
Issue date
Apr 23, 2019
Tokyo Electron Limited
Jun Yamashita
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and system for a spiral mixer
Patent number
10,035,113
Issue date
Jul 31, 2018
Tokyo Electron Limited
Ronald Nasman
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Fluid mixing hub for semiconductor processing tool
Patent number
10,022,689
Issue date
Jul 17, 2018
Lam Research Corporation
Iqbal A. Shareef
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Liquid processing apparatus, liquid processing method, and storage...
Patent number
9,452,397
Issue date
Sep 27, 2016
Tokyo Electron Limited
Hiroshi Komiya
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Compact device for enhancing the mixing of gaseous species
Patent number
9,327,252
Issue date
May 3, 2016
Applied Materials, Inc.
John W. Lane
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Device for supplying water containing dissolved gas and process for...
Patent number
9,302,298
Issue date
Apr 5, 2016
Kurita Water Industries, Ltd.
Hiroto Tokoshima
B08 - CLEANING
Information
Patent Grant
Compact static mixer and related mixing method
Patent number
8,740,449
Issue date
Jun 3, 2014
Parker-Hannifin Corporation
Kenji Allen Kingsford
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Valve manifold assembly
Patent number
8,726,935
Issue date
May 20, 2014
Entrgeris, Inc.
John A. Leys
F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information
Patent Grant
Apparatus and method for the wet chemical treatment of a product an...
Patent number
8,277,602
Issue date
Oct 2, 2012
Atotech Deutschland GmbH
Sebastian Dünnebeil
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Processing liquid mixing apparatus and method, substrate processing...
Patent number
8,104,948
Issue date
Jan 31, 2012
Tokyo Electron Limited
Keigo Satake
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Method for controlled mixing of fluids via temperature
Patent number
7,946,751
Issue date
May 24, 2011
Entegris, Inc.
J. Karl Niermeyer
G05 - CONTROLLING REGULATING
Information
Patent Grant
Method and system for generating microbubble-contained liquid and m...
Patent number
7,913,984
Issue date
Mar 29, 2011
Sanyo Facilities Industry Co., Ltd.
Yukihiro Noguchi
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Method and apparatus for blending process materials
Patent number
7,905,653
Issue date
Mar 15, 2011
Mega Fluid Systems, Inc.
Jeffrey Alexander Wilmer
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Method and apparatus for recycling process fluids
Patent number
7,743,783
Issue date
Jun 29, 2010
Air Liquide Electronics U.S. LP
David Paul Edwards
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
System and method for multiplexing setpoints
Patent number
7,684,446
Issue date
Mar 23, 2010
Entegris, Inc.
Robert F. Mcloughlin
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
MODULAR MULTI-DIRECTIONAL GAS MIXING BLOCK
Publication number
20230139688
Publication date
May 4, 2023
Applied Materials, Inc.
Daemian Raj Benjamin Raj
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
POINT-OF-USE ULTRASONIC HOMOGENIZER FOR CMP SLURRY AGGLOMERATION RE...
Publication number
20230054165
Publication date
Feb 23, 2023
Applied Materials, Inc.
Chih Chung Chou
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
GAS LIQUID MIXING DEVICE, AND RELATED SYSTEMS AND METHODS
Publication number
20220297068
Publication date
Sep 22, 2022
WHITE KNIGHT FLUID HANDLING INC.
Tom Simmons
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
GAS SOLUTION SUPPLY DEVICE
Publication number
20220105478
Publication date
Apr 7, 2022
EBARA CORPORATION
Suguru OZAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
NOZZLE FLOW STIRRING PIPE
Publication number
20220097092
Publication date
Mar 31, 2022
ASIA IC MIC-PROCESS, INC.
HUNG-HSIN HSU
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
CHEMICAL SOLUTION SUPPLY SYSTEM AND CHEMICAL SOLUTION SUPPLY METHOD
Publication number
20220062804
Publication date
Mar 3, 2022
KIOXIA Corporation
Yuichi Kuroda
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
PADDLE, PLATING APPARATUS EQUIPPED WITH THE PADDLE, AND PLATING METHOD
Publication number
20210154629
Publication date
May 27, 2021
EBARA CORPORATION
Yasuyuki MASUDA
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
GAS MIXING SYSTEM FOR SEMICONDUCTOR FABRICATION
Publication number
20210113972
Publication date
Apr 22, 2021
Taiwan Semiconductor Manufacturing Company Limited
Ming Shing LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods for Generating a Conductive Liquid Comprising D...
Publication number
20200391163
Publication date
Dec 17, 2020
MKS Instruments, Inc.
Ulrich Alfred Brammer
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS
Publication number
20200328098
Publication date
Oct 15, 2020
Applied Materials, Inc.
Mehmet Tugrul Samir
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods for Generating a Dissolved Ammonia Solution wit...
Publication number
20200316536
Publication date
Oct 8, 2020
MKS Instruments, Inc.
Ulrich Alfred Brammer
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
METHOD AND APPARATUS FOR SUPPLYING WATER OF SPECIFIED CONCENTRATION
Publication number
20200316543
Publication date
Oct 8, 2020
KURITA WATER INDUSTRIES LTD.
Hideaki IINO
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
MIXING APPARATUS, MIXING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20200289994
Publication date
Sep 17, 2020
TOKYO ELECTRON LIMITED
Jun Nonaka
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
ULTRAFINE BUBBLE GENERATING METHOD, ULTRAFINE BUBBLE GENERATING APP...
Publication number
20200276514
Publication date
Sep 3, 2020
Canon Kabushiki Kaisha
Hiroyuki Ishinaga
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
ULTRAFINE BUBBLE GENERATING METHOD, ULTRAFINE BUBBLE GENERATING APP...
Publication number
20200276515
Publication date
Sep 3, 2020
Canon Kabushiki Kaisha
Masahiko Kubota
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
DILUTED SOLUTION PRODUCTION METHOD AND DILUTED SOLUTION PRODUCTION...
Publication number
20190388857
Publication date
Dec 26, 2019
ORGANO CORPORATION
YOSHIFUMI HAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS
Publication number
20190333786
Publication date
Oct 31, 2019
Applied Materials, Inc.
Mehmet Tugrul Samir
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
APPARATUS AND METHOD FOR INCREASED PURGE VELOCITY IN SPECIALTY GAS...
Publication number
20190287821
Publication date
Sep 19, 2019
GLOBALFOUNDRIES INC.
Craig DEVARNEY
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
PADDLE FOR USE OF STIRRING PLATING SOLUTION AND PLATING APPARATUS I...
Publication number
20190271095
Publication date
Sep 5, 2019
EBARA CORPORATION
Risa KIMURA
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
GAS-DISSOLVED LIQUID PRODUCING APPARATUS
Publication number
20190262784
Publication date
Aug 29, 2019
EBARA CORPORATION
Yoichi NAKAGAWA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
SEMICONDUCTOR PROCESSING CHAMBER MULTISTAGE MIXING APPARATUS
Publication number
20190252216
Publication date
Aug 15, 2019
Applied Materials, Inc.
Mehmet Tugrul Samir
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
RESISTIVITY ADJUSTMENT DEVICE AND RESISTIVITY ADJUSTMENT METHOD
Publication number
20190224633
Publication date
Jul 25, 2019
DIC CORPORATION
Masato Saito
C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information
Patent Application
WAVE ABSORBING MEMBER ATTACHABLE TO PADDLE AND PLATING APPARATUS IN...
Publication number
20190186038
Publication date
Jun 20, 2019
EBARA CORPORATION
SHAO HUA CHANG
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
CHEMICAL LIQUID PREPARATION METHOD, CHEMICAL LIQUID PREPARATION DEV...
Publication number
20190091640
Publication date
Mar 28, 2019
SCREEN Holdings Co., Ltd.
Hajime NISHIDE
G05 - CONTROLLING REGULATING
Information
Patent Application
GAS SOLUTION PRODUCTION APPARATUS
Publication number
20180353911
Publication date
Dec 13, 2018
EBARA CORPORATION
Yoichi NAKAGAWA
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
PADDLE, PLATING APPARATUS EQUIPPED WITH THE PADDLE, AND PLATING METHOD
Publication number
20180221835
Publication date
Aug 9, 2018
EBARA CORPORATION
Yasuyuki MASUDA
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
LIQUID SUPPLY UNIT, SUBSTRATE TREATING APPARATUS, AND METHOD FOR RE...
Publication number
20180185795
Publication date
Jul 5, 2018
SEMES CO., LTD.
BYUNGSUN BANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Systems and Methods for Generating a Conductive Liquid Comprising D...
Publication number
20180133665
Publication date
May 17, 2018
MKS Instruments, Inc.
Ulrich Alfred Brammer
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
DEVICE FOR ADJUSTING SPECIFIC RESISTANCE VALUE AND METHOD FOR ADJUS...
Publication number
20180078909
Publication date
Mar 22, 2018
DIC CORPORATION
Kazumi Oi
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Gas Mixing Device and Substrate Processing Apparatus
Publication number
20170362704
Publication date
Dec 21, 2017
TOKYO ELECTRON LIMITED
Jun YAMASHITA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...