Motorised movement

Industry

CPC
H01J2237/20278

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/20278Motorised movement

Industries

Patents Grantslast 30 patents

Information Patent Grant
Systems and methods of clamp compensation
- Patent number 12,057,286
- Issue date Aug 6, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods of clamp compensation
- Patent number 11,562,877
- Issue date Jan 24, 2023
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and technique for profile modulation using high tilt angles
- Patent number 11,551,904
- Issue date Jan 10, 2023
- Applied Materials, Inc.
- Venkataramana R. Chavva
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system and operating method of the same
- Patent number 11,538,705
- Issue date Dec 27, 2022
- ADVANCED MICRO-FABRICATION EQUIPMENT INC. CHINA
- Larry Lei
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam etching system
- Patent number 11,373,842
- Issue date Jun 28, 2022
- JIANGSU LEUVEN INSTRUMENTS CO. LTD
- Na Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage driving system and apparatus or device such as apparatus of c...
- Patent number 11,355,312
- Issue date Jun 7, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nano-coating protection method for electrical devices
- Patent number 11,313,039
- Issue date Apr 26, 2022
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Multiple arc chamber source
- Patent number 11,183,365
- Issue date Nov 23, 2021
- Axcelis Technologies, Inc.
- Joshua Max Abeshaus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Paint hardening device and paint hardening method
- Patent number 11,097,310
- Issue date Aug 24, 2021
- Toyota Jidosha Kabushiki Kaisha
- Atsuo Nabeshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Moveable detector
- Patent number 11,087,953
- Issue date Aug 10, 2021
- Bruker Nano GmbH
- Daniel Goran
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nano-coating protection method for electrical connectors
- Patent number 11,041,244
- Issue date Jun 22, 2021
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nano-coating protection method for electrical connectors
- Patent number 10,975,471
- Issue date Apr 13, 2021
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nano-coating protection method for electrical connectors
- Patent number 10,975,472
- Issue date Apr 13, 2021
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nano-coating protection method for electrical connectors
- Patent number 10,934,623
- Issue date Mar 2, 2021
- Jiangsu Favored Nanotechnology Co., LTD
- Jian Zong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for producing a TEM sample
- Patent number 10,741,360
- Issue date Aug 11, 2020
- Carl Zeiss Microscopy GmbH
- Josef Biberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample carrier and electron microscope
- Patent number 10,699,870
- Issue date Jun 30, 2020
- Jeol Ltd.
- Shuho Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum processing apparatus and mass spectrometer
- Patent number 10,643,831
- Issue date May 5, 2020
- Shimadzu Corporation
- Tomoyoshi Matsushita
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus, and method and program for limitin...
- Patent number 10,636,619
- Issue date Apr 28, 2020
- Hitachi High-Tech Science Corporation
- Hiroyuki Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nondestructive sample imaging
- Patent number 10,468,230
- Issue date Nov 5, 2019
- BAE Systems Information and Electronic Systems Integration Inc.
- Eugene M. Lavely
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage apparatus and charged particle beam apparatus
- Patent number 10,366,912
- Issue date Jul 30, 2019
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece transport and positioning apparatus
- Patent number 10,361,060
- Issue date Jul 23, 2019
- Howard Hughes Medical Institute
- John H. Price
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece holder for workpiece transport apparatus
- Patent number 10,186,397
- Issue date Jan 22, 2019
- Howard Hughes Medical Institute
- John H. Price
- G01 - MEASURING TESTING
Information Patent Grant
Double-tilt sample holder for transmission electron microscope
- Patent number 10,103,000
- Issue date Oct 16, 2018
- Beijing University of Technology
- Xiaodong Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for setting a temperature of an object within a c...
- Patent number 10,074,512
- Issue date Sep 11, 2018
- Applied Materials Israel Ltd.
- Chun-Hsiang Yen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device and charged particle beam device using the same
- Patent number 9,887,064
- Issue date Feb 6, 2018
- Hitachi High-Technologies Corporation
- Akira Nishioka
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Specimen holder for a charged particle microscope
- Patent number 9,741,527
- Issue date Aug 22, 2017
- FEI Company
- Tomas Vystavel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing method, and multi charged parti...
- Patent number 9,691,585
- Issue date Jun 27, 2017
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Actuator, sample positioning device, and charged particle beam system
- Patent number 9,618,101
- Issue date Apr 11, 2017
- Jeol Ltd.
- Shuichi Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection apparatus
- Patent number 9,601,302
- Issue date Mar 21, 2017
- Ebara Corporation
- Shoji Yoshikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Specimen sample holder for workpiece transport apparatus
- Patent number 9,601,305
- Issue date Mar 21, 2017
- Howard Hughes Medical Institute
- John H. Price
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20240404782
- Publication date Dec 5, 2024
- HITACHI HIGH-TECH CORPORATION
- Hirohisa ENOMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAGE DEVICE
- Publication number 20240363305
- Publication date Oct 31, 2024
- HITACHI HIGH-TECH CORPORATION
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF CLAMP COMPENSATION
- Publication number 20240339286
- Publication date Oct 10, 2024
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample Holder and Sample Processing Apparatus
- Publication number 20240331970
- Publication date Oct 3, 2024
- JEOL Ltd.
- Jun Watanabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Stage Device, Charged Particle Beam Device, and Vacuum Device
- Publication number 20240258063
- Publication date Aug 1, 2024
- Hitachi High-Tech Corporation
- Motohiro TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GUIDE PIN, SYSTEM FOR PRECISELY CONTROLLING SPECIMEN INCLUDING THE...
- Publication number 20240203686
- Publication date Jun 20, 2024
- Samsung Electronics Co., Ltd.
- Kilho Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CALCULATE WAFERS THICKNESS OUT OF WAFER MAPPING PROCESS
- Publication number 20240178022
- Publication date May 30, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Ofer Dudovitch
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE HOLDER FOR TRANSMISSION ELECTRON MICROSCOPE, SAMPLE ANALYSIS...
- Publication number 20240153734
- Publication date May 9, 2024
- Samsung Electronics Co., Ltd.
- Yeoseon Choi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET PROCESSING DEVICE AND TARGET PROCESSING METHOD
- Publication number 20240096601
- Publication date Mar 21, 2024
- KIOXIA Corporation
- Takeharu MOTOKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRI...
- Publication number 20230420232
- Publication date Dec 28, 2023
- Applied Materials, Inc.
- Tomohiko Kitajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS
- Publication number 20230395358
- Publication date Dec 7, 2023
- Samsung Electronics Co., Ltd.
- Daewoong Heo
- B08 - CLEANING
Information Patent Application
INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRI...
- Publication number 20230369031
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Tomohiko Kitajima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR DIRECTING CHARGED PARTICLE BEAM TOWARDS A...
- Publication number 20230326706
- Publication date Oct 12, 2023
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Tilting Element Of Manipulation Stage
- Publication number 20230326708
- Publication date Oct 12, 2023
- TESCAN Brno, s.r.o.
- Jiri Marsik
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARRIER FOR END EFFECTOR, TRANSPORTATION APPARATUS INCLUDING THE SA...
- Publication number 20230317434
- Publication date Oct 5, 2023
- SEMES CO., LTD.
- Jae Won SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL
- Publication number 20230298884
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- Jun Qian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230282456
- Publication date Sep 7, 2023
- KIOXIA Corporation
- Tomohiro TAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INERT GAS SAMPLE TRANSFER FOR BEAM SYSTEMS
- Publication number 20230245850
- Publication date Aug 3, 2023
- FEI Company
- Libor Novák
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MACHINE SYSTEM AND MANUFACTURING METHOD USING THEREOF
- Publication number 20230229133
- Publication date Jul 20, 2023
- TENGXI TECHNOLOGY CO. LTD.
- WEI-HAN LO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20230212735
- Publication date Jul 6, 2023
- Applied Materials, Inc.
- Nagabhushana NANJUNDAPPA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EMITTER AND METHOD FOR PLASMA FUSING OF MATERIALS
- Publication number 20230189424
- Publication date Jun 15, 2023
- Essentium IPCo, LLC
- William Jack MacNeish
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20230141911
- Publication date May 11, 2023
- TOKYO ELECTRON LIMITED
- Dai KITAGAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE HOLDING DEVICE
- Publication number 20230140269
- Publication date May 4, 2023
- NISSIN ION EQUIPMENT CO., LTD.
- Yusuke Otsuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF CLAMP COMPENSATION
- Publication number 20230120177
- Publication date Apr 20, 2023
- FEI Company
- Edwin Verschueren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR HIGH THROUGHPUT DEFECT INSPECTION IN A CHARGE...
- Publication number 20230116381
- Publication date Apr 13, 2023
- ASML NETHERLANDS B.V.
- Long MA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD
- Publication number 20230067873
- Publication date Mar 2, 2023
- SEMES CO., LTD.
- Chung Woo LEE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Electron Beam Inspection System
- Publication number 20220406560
- Publication date Dec 22, 2022
- JEOL Ltd.
- Ryuichi Kusakabe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR MEDICAL PACKAGING
- Publication number 20220372620
- Publication date Nov 24, 2022
- Applied Materials, Inc.
- Lance A. Scudder
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
NOVEL STAGE DRIVING SYSTEM AND APPARATUS OR DEVICE SUCH AS APPARATU...
- Publication number 20220108869
- Publication date Apr 7, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System And Technique For Profile Modulation Using High Tilt Angles
- Publication number 20220076915
- Publication date Mar 10, 2022
- Applied Materials, Inc.
- Venkataramana R. Chavva
- H01 - BASIC ELECTRIC ELEMENTS

Motorised movement

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods of clamp compensation

Systems and methods of clamp compensation

System and technique for profile modulation using high tilt angles

Plasma processing system and operating method of the same

Ion beam etching system

Stage driving system and apparatus or device such as apparatus of c...

Nano-coating protection method for electrical devices

Multiple arc chamber source

Paint hardening device and paint hardening method

Moveable detector

Nano-coating protection method for electrical connectors

Nano-coating protection method for electrical connectors

Nano-coating protection method for electrical connectors

Nano-coating protection method for electrical connectors

Method for producing a TEM sample

Sample carrier and electron microscope

Vacuum processing apparatus and mass spectrometer

Charged particle beam apparatus, and method and program for limitin...

Nondestructive sample imaging

Stage apparatus and charged particle beam apparatus

Workpiece transport and positioning apparatus

Workpiece holder for workpiece transport apparatus

Double-tilt sample holder for transmission electron microscope

System and method for setting a temperature of an object within a c...

Stage device and charged particle beam device using the same

Specimen holder for a charged particle microscope

Multi charged particle beam writing method, and multi charged parti...

Actuator, sample positioning device, and charged particle beam system

Inspection apparatus

Specimen sample holder for workpiece transport apparatus

Patents Applicationslast 30 patents

CHARGED PARTICLE BEAM DEVICE

STAGE DEVICE

SYSTEMS AND METHODS OF CLAMP COMPENSATION

Sample Holder and Sample Processing Apparatus

Stage Device, Charged Particle Beam Device, and Vacuum Device

GUIDE PIN, SYSTEM FOR PRECISELY CONTROLLING SPECIMEN INCLUDING THE...

CALCULATE WAFERS THICKNESS OUT OF WAFER MAPPING PROCESS

SAMPLE HOLDER FOR TRANSMISSION ELECTRON MICROSCOPE, SAMPLE ANALYSIS...

TARGET PROCESSING DEVICE AND TARGET PROCESSING METHOD

INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRI...

SEMICONDUCTOR SUBSTRATE PROCESSING APPARATUS

INTEGRATED METHOD AND TOOL FOR HIGH QUALITY SELECTIVE SILICON NITRI...

APPARATUS AND METHOD FOR DIRECTING CHARGED PARTICLE BEAM TOWARDS A...

Tilting Element Of Manipulation Stage

CARRIER FOR END EFFECTOR, TRANSPORTATION APPARATUS INCLUDING THE SA...

ULTRATHIN ATOMIC LAYER DEPOSITION FILM ACCURACY THICKNESS CONTROL

PLASMA PROCESSING APPARATUS

INERT GAS SAMPLE TRANSFER FOR BEAM SYSTEMS

SEMICONDUCTOR MACHINE SYSTEM AND MANUFACTURING METHOD USING THEREOF

SUBSTRATE PROCESSING SYSTEM

EMITTER AND METHOD FOR PLASMA FUSING OF MATERIALS

SUBSTRATE PROCESSING SYSTEM

SUBSTRATE HOLDING DEVICE

SYSTEMS AND METHODS OF CLAMP COMPENSATION

SYSTEM AND METHOD FOR HIGH THROUGHPUT DEFECT INSPECTION IN A CHARGE...

SUBSTRATE TREATING APPARATUS AND SUBSTRATE TREATING METHOD

Electron Beam Inspection System

SYSTEMS AND METHODS FOR MEDICAL PACKAGING

NOVEL STAGE DRIVING SYSTEM AND APPARATUS OR DEVICE SUCH AS APPARATU...

System And Technique For Profile Modulation Using High Tilt Angles