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Mounting, supporting, spacing or insulating electrodes
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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/03
Mounting, supporting, spacing or insulating electrodes
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Patents Grants
last 30 patents
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Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,961,627
Issue date
Apr 16, 2024
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Systems, devices, and methods for contaminant resistant insulative...
Patent number
11,894,212
Issue date
Feb 6, 2024
TAE TECHNOLOGIES, INC.
Christopher J. Killer
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Corona/plasma treatment machine
Patent number
11,848,175
Issue date
Dec 19, 2023
3DT LLC
Donald J. Weyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus using multiple beams of charged particles
Patent number
11,804,356
Issue date
Oct 31, 2023
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multistage-connected multipole, multistage multipole unit, and char...
Patent number
11,769,650
Issue date
Sep 26, 2023
HITACHI HIGH-TECH CORPORATION
Hideto Dohi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Height measuring device, charged particle beam apparatus, and heigh...
Patent number
11,754,388
Issue date
Sep 12, 2023
Jeol Ltd.
Yukinori Aida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,705,252
Issue date
Jul 18, 2023
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Plasma processing apparatus
Patent number
11,664,198
Issue date
May 30, 2023
Tokyo Electron Limited
Hirofumi Ohta
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam lithography system
Patent number
11,610,758
Issue date
Mar 21, 2023
KKT HOLDINGS SYNDICATE
Tzu-Yi Kuo
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Aberration corrector and multiple electron beam irradiation apparatus
Patent number
11,605,523
Issue date
Mar 14, 2023
NuFlare Technology, Inc.
Kazuhiko Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for treating substrate
Patent number
11,587,770
Issue date
Feb 21, 2023
Semes Co., Ltd.
Jamyung Gu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration corrector and multiple electron beam irradiation apparatus
Patent number
11,574,793
Issue date
Feb 7, 2023
NuFlare Technology, Inc.
Kazuhiko Inoue
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Aberration corrector and method of aligning aberration corrector
Patent number
11,501,947
Issue date
Nov 15, 2022
ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
Matthias Firnkes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Radiation detector and radiation detection apparatus
Patent number
11,444,213
Issue date
Sep 13, 2022
Fondazione Bruno Kessler
Antonino Picciotto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems, devices, and methods for contaminant resistant insulative...
Patent number
11,355,303
Issue date
Jun 7, 2022
TAE TECHNOLOGIES, INC.
Christopher J. Killer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus using multiple beams of charged particles
Patent number
11,289,304
Issue date
Mar 29, 2022
ASML Netherlands B.V.
Xuerang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Detecting method and detecting equipment therefor
Patent number
11,237,414
Issue date
Feb 1, 2022
HKC CORPORATION LIMITED
Chung-Kuang Chien
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
11,094,426
Issue date
Aug 17, 2021
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Anode, and x-ray generating tube, x-ray generating apparatus, and r...
Patent number
10,998,161
Issue date
May 4, 2021
Canon Kabushiki Kaisha
Yasuo Ohashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Cleaning method and plasma processing apparatus
Patent number
10,991,551
Issue date
Apr 27, 2021
Tokyo Electron Limited
Mohd Fairuz Bin Budiman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle device, structure manufacturing method, and struct...
Patent number
10,879,029
Issue date
Dec 29, 2020
Nikon Corporation
Atsushi Yamada
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Low conductance self-shielding insulator for ion implantation systems
Patent number
10,679,818
Issue date
Jun 9, 2020
Axcelis Technologies, Inc.
John F. Baggett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Monochromator and charged particle beam apparatus comprising the same
Patent number
10,622,183
Issue date
Apr 14, 2020
Korea Research Institute of Standards and Science
Takashi Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Vacuum chamber arrangement for charged particle beam generator
Patent number
10,586,625
Issue date
Mar 10, 2020
ASML Netherlands B.V.
Alexander Hendrik Vincent Van Veen
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Liquid treatment apparatus including flow channel, first and second...
Patent number
10,562,797
Issue date
Feb 18, 2020
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Tatsushi Ohyama
C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information
Patent Grant
Electron-beam spot optimization
Patent number
10,529,529
Issue date
Jan 7, 2020
Moxtek, Inc.
Dustin Peterson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Insulating structure
Patent number
10,497,546
Issue date
Dec 3, 2019
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Hiroshi Kawaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Shielded, transmission-target, x-ray tube
Patent number
10,453,643
Issue date
Oct 22, 2019
Moxtek, Inc.
Dustin Peterson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sustained self-sputtering of lithium for lithium physical vapor dep...
Patent number
10,443,121
Issue date
Oct 15, 2019
View, Inc.
Martin John Neumann
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Liquid processing apparatus including container, first and second e...
Patent number
10,446,375
Issue date
Oct 15, 2019
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Minoru Egawa
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Patents Applications
last 30 patents
Information
Patent Application
CHARGED PARTICLE DEVICE AND METHOD
Publication number
20240087835
Publication date
Mar 14, 2024
ASML NETHERLANDS B.V.
Albertus Victor Gerardus MANGNUS
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
Publication number
20240071711
Publication date
Feb 29, 2024
ASML NETHERLANDS B.V.
Xuerang HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHAMBER INSULATION PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDI...
Publication number
20230411126
Publication date
Dec 21, 2023
SEMES CO., LTD.
Dongmok LEE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE AND METHOD FOR SUBSTRATE TRANSPORT IN VACUUM PROCESSING SYSTEMS
Publication number
20230402266
Publication date
Dec 14, 2023
VON ARDENNE Asset GmbH & Co. KG
Falk MILDE
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20230402258
Publication date
Dec 14, 2023
Samsung Electronics Co., Ltd.
Yunhwan KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20230386696
Publication date
Nov 30, 2023
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
TUNABLE PLASMA EXCLUSION ZONE IN SEMICONDUCTOR FABRICATION
Publication number
20230369023
Publication date
Nov 16, 2023
Taiwan Semiconductor Manufacturing Company Limited
Che Wei Yang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURING...
Publication number
20230335380
Publication date
Oct 19, 2023
Tokyo Electron Limited
Takaaki KATO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF NUCLEAR REPROGRAMMING
Publication number
20230282445
Publication date
Sep 7, 2023
KYOTO UNIVERSITY
Shinya Yamanaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA SOURCE FOR SEMICONDUCTOR PROCESSING
Publication number
20230238221
Publication date
Jul 27, 2023
Applied Materials, Inc.
Vladimir Nagorny
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PLASMA PROCESSING DEVICE, AND PLASMA PROCESSING METHOD
Publication number
20230223239
Publication date
Jul 13, 2023
Satoru KAWAKAMI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Arcing Reduction in Wafer Bevel Edge Plasma Processing
Publication number
20230215692
Publication date
Jul 6, 2023
LAM RESEARCH CORPORATION
Xuefeng Hua
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD AND PLA...
Publication number
20230207265
Publication date
Jun 29, 2023
SEMES CO., LTD.
Shant ARAKELYAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS GAS SUPPLYING UNIT AND SUBSTRATE TREATING APPARATUS INCLUDI...
Publication number
20230197415
Publication date
Jun 22, 2023
SEMES CO., LTD.
In Seong LIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CATHODE MECHANISM OF ELECTRON EMISSION SOURCE, AND METHOD FOR MANUF...
Publication number
20230132046
Publication date
Apr 27, 2023
NuFlare Technology, Inc.
Ryoei KOBAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Optimization of Radiofrequency Signal Ground Return in Plasma Proce...
Publication number
20230059495
Publication date
Feb 23, 2023
LAM RESEARCH CORPORATION
Alexei Marakhtanov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INTERLOCKING FASTENING UPPER ELECTRODE ASSEMBLY HAVING IMPROVED FAS...
Publication number
20230032767
Publication date
Feb 2, 2023
TEM CO., LTD.
Jin Kyung PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WORKPIECE SUPPORT SYSTEM FOR PLASMA TREATMENT AND METHOD OF USING T...
Publication number
20230018842
Publication date
Jan 19, 2023
Nordson Corporation
Zhao JIANGANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ACTIVE GAS GENERATION APPARATUS
Publication number
20230013017
Publication date
Jan 19, 2023
TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
Ren ARITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ABERRATION CORRECTOR AND METHOD OF ALIGNING ABERRATION CORRECTOR
Publication number
20220375713
Publication date
Nov 24, 2022
ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
Matthias Firnkes
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Corona/Plasma Treatment Machine
Publication number
20220310358
Publication date
Sep 29, 2022
3DT LLC
Donald J. Weyer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS USING MULTIPLE BEAMS OF CHARGED PARTICLES
Publication number
20220223366
Publication date
Jul 14, 2022
ASML NETHERLANDS B.V.
Xuerang HU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSULATING STRUCTURE, METHOD FOR MANUFACTURING INSULATING STRUCTURE...
Publication number
20220154328
Publication date
May 19, 2022
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Yuuji Ishida
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20220115215
Publication date
Apr 14, 2022
KELK LTD.
Atsushi Kobayashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THREAD PROFILES FOR SEMICONDUCTOR PROCESS CHAMBER COMPONENTS
Publication number
20220102117
Publication date
Mar 31, 2022
Applied Materials, Inc.
Reyn Tetsuro WAKABAYASHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Multistage-Connected Multipole, Multistage Multipole Unit, and Char...
Publication number
20220037113
Publication date
Feb 3, 2022
Hitachi High-Tech Corporation
Hideto DOHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
INSULATOR FOR AN ION IMPLANTATION SOURCE
Publication number
20220037115
Publication date
Feb 3, 2022
Taiwan Semiconductor Manufacturing Company Limited
Tsung-Min LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS, SYSTEM, AND METHOD FOR IMPEDANCE ADJUSTMENT OF PROCESSIN...
Publication number
20210398779
Publication date
Dec 23, 2021
PIOTECH INC.
Giyoul Kim
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
VACUUM CHAMBER ARRANGEMENT FOR CHARGED PARTICLE BEAM GENERATOR
Publication number
20210383941
Publication date
Dec 9, 2021
ASML NETHERLANDS B.V.
Alexander Hendrik Vincent VAN VEEN
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Application
Height Measuring Device, Charged Particle Beam Apparatus, and Heigh...
Publication number
20210207945
Publication date
Jul 8, 2021
JEOL Ltd.
Yukinori Aida
H01 - BASIC ELECTRIC ELEMENTS