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H01J2237/0458

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0458movable

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Transmission electron microscope and inspection method using transm...
- Patent number 12,170,184
- Issue date Dec 17, 2024
- HITACHI HIGH-TECH CORPORATION
- Toshie Yaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering apparatus
- Patent number 12,014,911
- Issue date Jun 18, 2024
- Tokyo Electron Limited
- Shota Ishibashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
- Patent number 11,929,232
- Issue date Mar 12, 2024
- ASML Netherlands B.V.
- Frank Nan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,817,289
- Issue date Nov 14, 2023
- HITACHI HIGH-TECH CORPORATION
- Tsunenori Nomaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple-charged particle-beam irradiation apparatus and multiple-c...
- Patent number 11,574,797
- Issue date Feb 7, 2023
- NuFlare Technology, Inc.
- Mitsuhiro Okazawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-leaf collimator and driving system
- Patent number 11,342,093
- Issue date May 24, 2022
- SHANGHAI UNITED IMAGING HEALTHACRE CO., LTD.
- Jian Zhang
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Charged particle beam device
- Patent number 11,335,532
- Issue date May 17, 2022
- HITACHI HIGH-TECH CORPORATION
- Tsunenori Nomaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,183,359
- Issue date Nov 23, 2021
- HITACHI HIGH-TECH CORPORATION
- Kenichi Nishinaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-charged-particle beam writing apparatus and multi-charged-par...
- Patent number 11,145,489
- Issue date Oct 12, 2021
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for implanting ions in wafers
- Patent number 11,056,309
- Issue date Jul 6, 2021
- MI2-FACTORY GMBH
- Florian Krippendorf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Charged particle beam device, interchangeable multi-aperture arrang...
- Patent number 10,978,270
- Issue date Apr 13, 2021
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Dieter Winkler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for charged particle flooding to enhance voltag...
- Patent number 10,784,077
- Issue date Sep 22, 2020
- ASML Netherlands B.V.
- Frank Nan Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,600,612
- Issue date Mar 24, 2020
- Hitachi High-Tech Science Corporation
- Toshiyuki Iwahori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-leaf collimator and driving system
- Patent number 10,510,456
- Issue date Dec 17, 2019
- Shanghai United Imaging Healthcare Co., Ltd.
- Jian Zhang
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Inspection device
- Patent number 10,157,722
- Issue date Dec 18, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus and charged particle beam w...
- Patent number 9,673,018
- Issue date Jun 6, 2017
- NuFlare Technology, Inc.
- Haruyuki Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 9,653,254
- Issue date May 16, 2017
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Actuator, sample positioning device, and charged particle beam system
- Patent number 9,618,101
- Issue date Apr 11, 2017
- Jeol Ltd.
- Shuichi Yuasa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle-optical systems and arrangements and particle-optical comp...
- Patent number 9,384,938
- Issue date Jul 5, 2016
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Selectable coulomb aperture in E-beam system
- Patent number 9,184,024
- Issue date Nov 10, 2015
- Hermes-Microvision, Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interface, a method for observing an object within a non-vacuum env...
- Patent number 9,076,631
- Issue date Jul 7, 2015
- Dov Shachal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Exposure apparatus for forming a reticle
- Patent number 9,058,956
- Issue date Jun 16, 2015
- Samsung Electronics Co., Ltd.
- Jin Choi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Dual-lens-gun electron beam apparatus and methods for high-resoluti...
- Patent number 8,859,982
- Issue date Oct 14, 2014
- KLA-Tencor Corporation
- Xinrong Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam apparatus and method of adjusting ion beam optics
- Patent number 8,822,911
- Issue date Sep 2, 2014
- Hitachi High-Tech Science Corporation
- Yasuhiko Sugiyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Interface, a method for observing an object within a non-vacuum env...
- Patent number 8,779,358
- Issue date Jul 15, 2014
- Dov Shachal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Technique for processing a substrate
- Patent number 8,685,846
- Issue date Apr 1, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Russell J. Low
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Electron microscope
- Patent number 8,664,599
- Issue date Mar 4, 2014
- Jeol Ltd.
- Fumio Hosokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor device, method for controllin...
- Patent number 8,581,216
- Issue date Nov 12, 2013
- Fujitsu Semiconductor Limited
- Katsunari Nishikawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern definition device with multiple multibeam array
- Patent number 8,546,767
- Issue date Oct 1, 2013
- IMS Nanofabrication AG
- Elmar Platzgummer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Inspection device
- Patent number 8,497,476
- Issue date Jul 30, 2013
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
- Publication number 20240379325
- Publication date Nov 14, 2024
- ASML NETHERLANDS B.V.
- Frank Nan ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE STAGE FOR ELECTRON ENHANCED MATERIAL PROCESSING
- Publication number 20240347323
- Publication date Oct 17, 2024
- VELVETCH LLC
- David Irwin Margolese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRO...
- Publication number 20240258065
- Publication date Aug 1, 2024
- CARL ZEISS MICROSCOPY GMBH
- Dirk Preikszas
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...
- Publication number 20230411109
- Publication date Dec 21, 2023
- FEI Company
- Sean M. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM PATTERN FORMING DEVICE AND CHARGED PARTICLE B...
- Publication number 20230298848
- Publication date Sep 21, 2023
- Kabushiki Kaisha Toshiba
- Hiroko NAKAMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SLIT DIAPHRAGM
- Publication number 20230274922
- Publication date Aug 31, 2023
- SINGULUS TECHNOLOGIES AG
- Peter WEIPERT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION
- Publication number 20220375712
- Publication date Nov 24, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20220246385
- Publication date Aug 4, 2022
- HITACHI HIGH-TECH CORPORATION
- Tsunenori NOMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE-CHARGED PARTICLE-BEAM IRRADIATION APPARATUS AND MULTIPLE-C...
- Publication number 20220102113
- Publication date Mar 31, 2022
- NuFlare Technology, Inc.
- Mitsuhiro OKAZAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNING APPARATUS FOR MINIMUM DIVERGENCE ION BEAM
- Publication number 20210398772
- Publication date Dec 23, 2021
- Axcelis Technologies, Inc.
- Shu Satoh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING APPARATUS
- Publication number 20210296103
- Publication date Sep 23, 2021
- TOKYO ELECTRON LIMITED
- Shota ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
- Publication number 20210142979
- Publication date May 13, 2021
- ASML NETHERLANDS B.V.
- Frank Nan ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20210118641
- Publication date Apr 22, 2021
- Hitachi High-Tech Corporation
- Tsunenori NOMAGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Apparatus
- Publication number 20210035770
- Publication date Feb 4, 2021
- Hitachi High-Tech Corporation
- Kenichi NISHINAKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHARGED-PARTICLE BEAM WRITING APPARATUS AND MULTI-CHARGED-PAR...
- Publication number 20200258716
- Publication date Aug 13, 2020
- NuFlare Technology, Inc.
- Hiroshi MATSUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-LEAF COLLIMATOR AND DRIVING SYSTEM
- Publication number 20200118701
- Publication date Apr 16, 2020
- Shanghai United Imaging Healthcare Co., Ltd.
- Jian ZHANG
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...
- Publication number 20190043691
- Publication date Feb 7, 2019
- HERMES MICROVISION, INC.
- Frank Nan ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...
- Publication number 20140361166
- Publication date Dec 11, 2014
- Dov Shachal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXPOSURE APPARATUS FOR FORMING A RETICLE
- Publication number 20140218710
- Publication date Aug 7, 2014
- Samsung Electronics Co., Ltd.
- Jin CHOI
- B82 - NANO-TECHNOLOGY
Information Patent Application
MAGNETIC MASKS FOR AN ION IMPLANT APPARATUS
- Publication number 20140165906
- Publication date Jun 19, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Christopher N. Grant
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL-LENS-GUN ELECTRON BEAM APPARATUS AND METHODS FOR HIGH-RESOLUTI...
- Publication number 20140077077
- Publication date Mar 20, 2014
- Xinrong JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20140014848
- Publication date Jan 16, 2014
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
FOCUSED ION BEAM APPARATUS AND METHOD OF ADJUSTING ION BEAM OPTICS
- Publication number 20130240720
- Publication date Sep 19, 2013
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Yasuhiko SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Particle-Optical Systems and Arrangements and Particle-Optical Comp...
- Publication number 20130187046
- Publication date Jul 25, 2013
- Carl Zeiss SMT GMBH
- Dirk Zeidler
- B82 - NANO-TECHNOLOGY
Information Patent Application
GAS FIELD IONIZATION ION SOURCE, SCANNING CHARGED PARTICLE MICROSCO...
- Publication number 20130087704
- Publication date Apr 11, 2013
- Hitachi High-Technologies Corporation
- Tohru Ishitani
- B82 - NANO-TECHNOLOGY
Information Patent Application
EXPOSURE APPARATUS FOR FORMING A RETICLE AND METHOD OF FORMING A RE...
- Publication number 20130052569
- Publication date Feb 28, 2013
- Jin CHOI
- B82 - NANO-TECHNOLOGY
Information Patent Application
INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...
- Publication number 20120241608
- Publication date Sep 27, 2012
- Dov Shachal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INSPECTION DEVICE
- Publication number 20120235036
- Publication date Sep 20, 2012
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
Focused Ion Beam Device and Focused Ion Beam Processing Method
- Publication number 20120235055
- Publication date Sep 20, 2012
- Hitachi High-Technologies Corporation
- Yuichi Madokoro
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
ELECTRON BEAM COLUMN AND METHODS OF USING SAME
- Publication number 20120138791
- Publication date Jun 7, 2012
- Marian MANKOS
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Transmission electron microscope and inspection method using transm...

Sputtering apparatus

Systems and methods for charged particle flooding to enhance voltag...

Charged particle beam device

Multiple-charged particle-beam irradiation apparatus and multiple-c...

Multi-leaf collimator and driving system

Charged particle beam device

Charged particle beam apparatus

Multi-charged-particle beam writing apparatus and multi-charged-par...

Method and device for implanting ions in wafers

Charged particle beam device, interchangeable multi-aperture arrang...

Systems and methods for charged particle flooding to enhance voltag...

Charged particle beam apparatus

Multi-leaf collimator and driving system

Inspection device

Charged particle beam writing apparatus and charged particle beam w...

Particle-optical systems and arrangements and particle-optical comp...

Actuator, sample positioning device, and charged particle beam system

Particle-optical systems and arrangements and particle-optical comp...

Selectable coulomb aperture in E-beam system

Interface, a method for observing an object within a non-vacuum env...

Exposure apparatus for forming a reticle

Dual-lens-gun electron beam apparatus and methods for high-resoluti...

Focused ion beam apparatus and method of adjusting ion beam optics

Interface, a method for observing an object within a non-vacuum env...

Technique for processing a substrate

Electron microscope

Manufacturing method of semiconductor device, method for controllin...

Pattern definition device with multiple multibeam array

Inspection device

Patents Applicationslast 30 patents

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...

COMPOSITE STAGE FOR ELECTRON ENHANCED MATERIAL PROCESSING

METHOD OF OPERATING A PARTICLE BEAM SYSTEM AND COMPUTER PROGRAM PRO...

METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...

CHARGED PARTICLE BEAM PATTERN FORMING DEVICE AND CHARGED PARTICLE B...

SLIT DIAPHRAGM

SYSTEMS AND METHODS FOR VOLTAGE CONTRAST DEFECT DETECTION

Charged Particle Beam Device

MULTIPLE-CHARGED PARTICLE-BEAM IRRADIATION APPARATUS AND MULTIPLE-C...

TUNING APPARATUS FOR MINIMUM DIVERGENCE ION BEAM

SPUTTERING APPARATUS

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...

Charged Particle Beam Device

Charged Particle Beam Apparatus

MULTI-CHARGED-PARTICLE BEAM WRITING APPARATUS AND MULTI-CHARGED-PAR...

MULTI-LEAF COLLIMATOR AND DRIVING SYSTEM

SYSTEMS AND METHODS FOR CHARGED PARTICLE FLOODING TO ENHANCE VOLTAG...

INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...

EXPOSURE APPARATUS FOR FORMING A RETICLE

MAGNETIC MASKS FOR AN ION IMPLANT APPARATUS

DUAL-LENS-GUN ELECTRON BEAM APPARATUS AND METHODS FOR HIGH-RESOLUTI...

INSPECTION DEVICE

FOCUSED ION BEAM APPARATUS AND METHOD OF ADJUSTING ION BEAM OPTICS

Particle-Optical Systems and Arrangements and Particle-Optical Comp...

GAS FIELD IONIZATION ION SOURCE, SCANNING CHARGED PARTICLE MICROSCO...

EXPOSURE APPARATUS FOR FORMING A RETICLE AND METHOD OF FORMING A RE...

INTERFACE, A METHOD FOR OBSERVING AN OBJECT WITHIN A NON-VACUUM ENV...

INSPECTION DEVICE

Focused Ion Beam Device and Focused Ion Beam Processing Method

ELECTRON BEAM COLUMN AND METHODS OF USING SAME