Movement of the container or support of the charge in the furnace or in the charging facilities

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  • Information Patent Application

    PROCESSING APPARATUS

    • Publication number 20200227293
    • Publication date Jul 16, 2020
    • TOKYO ELECTRON LIMITED
    • Masato KADOBE
    • F27 - FURNACES KILNS OVENS RETORTS
  • Information Patent Application

    SUBSTRATE PROCESSING APPARATUS AND PURGING METHOD

    • Publication number 20200083078
    • Publication date Mar 12, 2020
    • TOKYO ELECTRON LIMITED
    • Moriyoshi Kinoshita
    • H01 - BASIC ELECTRIC ELEMENTS