Moving whole optical system relatively to object

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CPC
H01J2237/0245

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0245Moving whole optical system relatively to object

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and apparatus for inspection
- Patent number 11,875,966
- Issue date Jan 16, 2024
- ASML Netherlands B.V.
- Bernardo Kastrup
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
UV sterilization of container, room, space or defined environment
- Patent number 11,260,138
- Issue date Mar 1, 2022
- BlueMorph, LLC
- Alexander Farren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for inspection
- Patent number 11,094,502
- Issue date Aug 17, 2021
- ASML Netherlands B.V.
- Bernardo Kastrup
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
UV sterilization of container, room, space or defined environment
- Patent number 11,040,121
- Issue date Jun 22, 2021
- BlueMorph, LLC
- Alexander Farren
- A23 - FOODS OR FOODSTUFFS THEIR TREATMENT, NOT COVERED BY OTHER CLASSES
Information Patent Grant
Mirror device, mirror drive method, light irradiation device, and i...
- Patent number 10,962,768
- Issue date Mar 30, 2021
- Hamamatsu Photonics K.K.
- Akira Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radiation analysis apparatus
- Patent number 10,908,104
- Issue date Feb 2, 2021
- Hitachi High-Tech Science Corporation
- Satoshi Nakayama
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Mirror device, mirror drive method, light irradiation device, and i...
- Patent number 10,761,318
- Issue date Sep 1, 2020
- Hamamatsu Photonics K.K.
- Akira Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
UV sterilization of container, room, space or defined environment
- Patent number 10,603,394
- Issue date Mar 31, 2020
- BlueMorph, LLC
- Alexander Farren
- A23 - FOODS OR FOODSTUFFS THEIR TREATMENT, NOT COVERED BY OTHER CLASSES
Information Patent Grant
Integrated circuit analysis systems and methods with localized evac...
- Patent number 10,373,795
- Issue date Aug 6, 2019
- FEI Company
- Yakov Bobrov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,134,564
- Issue date Nov 20, 2018
- Hitachi High-Technologies Corporation
- Taiga Okumura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle beam exposure method and charged-particle beam cor...
- Patent number 10,056,229
- Issue date Aug 21, 2018
- Samsung Electronics Co., Ltd.
- Sukjong Bae
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Grant
Portable UV devices, systems and methods of use and manufacturing
- Patent number 10,046,073
- Issue date Aug 14, 2018
- BlueMorph, LLC
- Alexander Farren
- A23 - FOODS OR FOODSTUFFS THEIR TREATMENT, NOT COVERED BY OTHER CLASSES
Information Patent Grant
Imaging apparatus having a plurality of movable beam columns, and m...
- Patent number 10,026,588
- Issue date Jul 17, 2018
- Keysight Technologies, Inc.
- Kurt Stephen Werder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods, apparatuses, systems and software for treatment of a speci...
- Patent number 9,911,573
- Issue date Mar 6, 2018
- IB Labs, Inc.
- Dimitry Boguslavsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam electron microscope for electron channeling contrast ima...
- Patent number 9,741,532
- Issue date Aug 22, 2017
- International Business Machines Corporation
- Stephen W. Bedell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
UV devices, systems and methods for UV sterilization
- Patent number 9,687,575
- Issue date Jun 27, 2017
- BlueMorph, LLC
- Alexander Farren
- A23 - FOODS OR FOODSTUFFS THEIR TREATMENT, NOT COVERED BY OTHER CLASSES
Information Patent Grant
Scanning electron microscope
- Patent number 9,478,389
- Issue date Oct 25, 2016
- Hitachi High-Technologies Corporation
- Tsunenori Nomaguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 9,263,232
- Issue date Feb 16, 2016
- Hitachi High-Technologies Corporation
- Yusuke Ominami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for surface processing of a substrate using an...
- Patent number 9,206,500
- Issue date Dec 8, 2015
- Boris Druz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composite charged particle beam apparatus
- Patent number 8,642,980
- Issue date Feb 4, 2014
- Hitachi High-Tech Science Corporation
- Xin Man
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope assembly for viewing the wafer plane image of a...
- Patent number 8,642,981
- Issue date Feb 4, 2014
- KLA-Tencor Corporation
- Paul Petric
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Ion beam sample preparation apparatus and methods
- Patent number 8,592,763
- Issue date Nov 26, 2013
- Gatan Inc.
- Steven Thomas Coyle
- G01 - MEASURING TESTING
Information Patent Grant
Vacuumed device and a scanning electron microscope
- Patent number 8,492,716
- Issue date Jul 23, 2013
- B-Nano Ltd.
- Dov Shachal
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Ion beam sample preparation apparatus and methods
- Patent number 8,283,642
- Issue date Oct 9, 2012
- Gatan, Inc.
- Steven Thomas Coyle
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam processing device
- Patent number 8,076,658
- Issue date Dec 13, 2011
- Global Beam Technologies AG
- Franz Vokurka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Portable electron microscope using micro-column
- Patent number 8,071,944
- Issue date Dec 6, 2011
- Cebt Co. Ltd
- Ho Seob Kim
- G01 - MEASURING TESTING
Information Patent Grant
Multi-beam ion/electron spectra-microscope
- Patent number 7,947,951
- Issue date May 24, 2011
- National University of Singapore
- Anjam Khursheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for in-situ sample preparation
- Patent number 7,829,870
- Issue date Nov 9, 2010
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for preparing samples
- Patent number 7,722,818
- Issue date May 25, 2010
- Jeol Ltd.
- Fuminori Hasegawa
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam exposure apparatus
- Patent number 7,230,257
- Issue date Jun 12, 2007
- Canon Kabushiki Kaisha
- Shinji Uchida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND APPARATUS FOR INSPECTION
- Publication number 20240186107
- Publication date Jun 6, 2024
- Bernardo KASTRUP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF ALIGNIN...
- Publication number 20230282443
- Publication date Sep 7, 2023
- Shânêl Ondrej
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UV STERILIZATION OF CONTAINER, ROOM, SPACE OR DEFINED ENVIRONMENT
- Publication number 20220125970
- Publication date Apr 28, 2022
- BLUEMORPH, LLC
- Alexander Farren
- A23 - FOODS OR FOODSTUFFS THEIR TREATMENT, NOT COVERED BY OTHER CLASSES
Information Patent Application
METHOD AND APPARATUS FOR INSPECTION
- Publication number 20210375581
- Publication date Dec 2, 2021
- ASML NETHERLANDS B.V.
- Bernardo KASTRUP
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MIRROR DEVICE, MIRROR DRIVE METHOD, LIGHT IRRADIATION DEVICE, AND I...
- Publication number 20200319452
- Publication date Oct 8, 2020
- HAMAMATSU PHOTONICS K. K.
- Akira TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UV STERILIZATION OF CONTAINER, ROOM, SPACE OR DEFINED ENVIRONMENT
- Publication number 20200230273
- Publication date Jul 23, 2020
- BLUEMORPH, LLC
- Alexander Farren
- A23 - FOODS OR FOODSTUFFS THEIR TREATMENT, NOT COVERED BY OTHER CLASSES
Information Patent Application
UV STERILIZATION OF CONTAINER, ROOM, SPACE OR DEFINED ENVIRONMENT
- Publication number 20200188545
- Publication date Jun 18, 2020
- BLUEMORPH, LLC
- Alexander Farren
- A23 - FOODS OR FOODSTUFFS THEIR TREATMENT, NOT COVERED BY OTHER CLASSES
Information Patent Application
CHARGED-PARTICLE BEAM EXPOSURE METHOD AND CHARGED-PARTICLE BEAM COR...
- Publication number 20180012730
- Publication date Jan 11, 2018
- Samsung Electronics Co., Ltd.
- SUKJONG BAE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20170330724
- Publication date Nov 16, 2017
- Hitachi High-Technologies Corporation
- Taiga OKUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UV Sterilization Of Container, Room, Space Or Defined Environment
- Publication number 20170304473
- Publication date Oct 26, 2017
- BlueMorph LLC
- Alexander Farren
- A23 - FOODS OR FOODSTUFFS THEIR TREATMENT, NOT COVERED BY OTHER CLASSES
Information Patent Application
UV DEVICES, SYSTEMS AND METHODS FOR UV STERILIZATION
- Publication number 20140356229
- Publication date Dec 4, 2014
- Alexander Farren
- A23 - FOODS OR FOODSTUFFS THEIR TREATMENT, NOT COVERED BY OTHER CLASSES
Information Patent Application
COMPOSITE CHARGED PARTICLE BEAM APPARATUS
- Publication number 20130248735
- Publication date Sep 26, 2013
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Xin MAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Beam Sample Preparation Apparatus and Methods
- Publication number 20130228702
- Publication date Sep 5, 2013
- GATAN, INC.
- Steven Thomas Coyle
- G01 - MEASURING TESTING
Information Patent Application
Ion Beam Sample Preparation Apparatus and Methods
- Publication number 20120085939
- Publication date Apr 12, 2012
- GATAN, INC.
- Steven Thomas Coyle
- G01 - MEASURING TESTING
Information Patent Application
VACUUMED DEVICE AND A SCANNING ELECTRON MICROSCOPE
- Publication number 20110210247
- Publication date Sep 1, 2011
- B-NANO LTD.
- Dov Shachal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM PROCESSING DEVICE
- Publication number 20100012860
- Publication date Jan 21, 2010
- ALL WELDING TECHNOLOGIES AG
- Franz Vokurka
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Multi-beam ion/electron spectra-microscope
- Publication number 20090321634
- Publication date Dec 31, 2009
- National University of Singapore
- Anjam Khursheed
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Surface Processing of a Substrate Using an...
- Publication number 20090098306
- Publication date Apr 16, 2009
- Veeco Instruments Inc.
- Boris Druz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Portable Electron Microscope Using Micro-Column
- Publication number 20080315096
- Publication date Dec 25, 2008
- Ho Seob Kim
- G01 - MEASURING TESTING
Information Patent Application
Motioning Equipment for Electron Column
- Publication number 20080210866
- Publication date Sep 4, 2008
- CEBT Co. Ltd.
- Ho Seob Kim
- G11 - INFORMATION STORAGE
Information Patent Application
METHOD AND APPARATUS FOR IN-SITU SAMPLE PREPARATION
- Publication number 20080185517
- Publication date Aug 7, 2008
- Juergen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron beam exposure apparatus
- Publication number 20050205809
- Publication date Sep 22, 2005
- Canon Kabushiki Kaisha
- Shinji Uchida
- B82 - NANO-TECHNOLOGY
Information Patent Application
Apparatus and method for preparing samples
- Publication number 20050118065
- Publication date Jun 2, 2005
- JEOL Ltd.
- Fuminori Hasegawa
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR TILTING A BEAM SYSTEM
- Publication number 20030222221
- Publication date Dec 4, 2003
- Alexander Groholskiy
- H01 - BASIC ELECTRIC ELEMENTS

Moving whole optical system relatively to object

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and apparatus for inspection

UV sterilization of container, room, space or defined environment

Method and apparatus for inspection

UV sterilization of container, room, space or defined environment

Mirror device, mirror drive method, light irradiation device, and i...

Radiation analysis apparatus

Mirror device, mirror drive method, light irradiation device, and i...

UV sterilization of container, room, space or defined environment

Integrated circuit analysis systems and methods with localized evac...

Charged particle beam device

Charged-particle beam exposure method and charged-particle beam cor...

Portable UV devices, systems and methods of use and manufacturing

Imaging apparatus having a plurality of movable beam columns, and m...

Methods, apparatuses, systems and software for treatment of a speci...

Multi-beam electron microscope for electron channeling contrast ima...

UV devices, systems and methods for UV sterilization

Scanning electron microscope

Charged particle beam device

Method and apparatus for surface processing of a substrate using an...

Composite charged particle beam apparatus

Electron microscope assembly for viewing the wafer plane image of a...

Ion beam sample preparation apparatus and methods

Vacuumed device and a scanning electron microscope

Ion beam sample preparation apparatus and methods

Electron beam processing device

Portable electron microscope using micro-column

Multi-beam ion/electron spectra-microscope

Method and apparatus for in-situ sample preparation

Apparatus and method for preparing samples

Electron beam exposure apparatus

Patents Applicationslast 30 patents

METHOD AND APPARATUS FOR INSPECTION

TRANSMISSION CHARGED PARTICLE BEAM APPARATUS, AND METHOD OF ALIGNIN...

UV STERILIZATION OF CONTAINER, ROOM, SPACE OR DEFINED ENVIRONMENT

METHOD AND APPARATUS FOR INSPECTION

MIRROR DEVICE, MIRROR DRIVE METHOD, LIGHT IRRADIATION DEVICE, AND I...

UV STERILIZATION OF CONTAINER, ROOM, SPACE OR DEFINED ENVIRONMENT

UV STERILIZATION OF CONTAINER, ROOM, SPACE OR DEFINED ENVIRONMENT

CHARGED-PARTICLE BEAM EXPOSURE METHOD AND CHARGED-PARTICLE BEAM COR...

CHARGED PARTICLE BEAM DEVICE

UV Sterilization Of Container, Room, Space Or Defined Environment

UV DEVICES, SYSTEMS AND METHODS FOR UV STERILIZATION

COMPOSITE CHARGED PARTICLE BEAM APPARATUS

Ion Beam Sample Preparation Apparatus and Methods

Ion Beam Sample Preparation Apparatus and Methods

VACUUMED DEVICE AND A SCANNING ELECTRON MICROSCOPE

ELECTRON BEAM PROCESSING DEVICE

Multi-beam ion/electron spectra-microscope

Method and Apparatus for Surface Processing of a Substrate Using an...

Portable Electron Microscope Using Micro-Column

Motioning Equipment for Electron Column

METHOD AND APPARATUS FOR IN-SITU SAMPLE PREPARATION

Electron beam exposure apparatus

Apparatus and method for preparing samples

APPARATUS FOR TILTING A BEAM SYSTEM