Multipoles

Industry

CPC
H01J2237/1516

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/1516Multipoles

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Method, device and system for reducing off-axial aberration in elec...
- Patent number 12,176,179
- Issue date Dec 24, 2024
- FEI Company
- Maarten Bischoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 12,087,541
- Issue date Sep 10, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam deflection device, aberration corrector, monochromator, and ch...
- Patent number 12,062,519
- Issue date Aug 13, 2024
- HITACHI HIGH-TECH CORPORATION
- Pieter Kruit
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduction of thermal magnetic field noise in TEM corrector systems
- Patent number 11,915,904
- Issue date Feb 27, 2024
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope device and electron beam inspection ap...
- Patent number 11,908,657
- Issue date Feb 20, 2024
- Zhongke Jingyuan Electron Limited
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,887,807
- Issue date Jan 30, 2024
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, device and system for reducing off-axial aberration in elec...
- Patent number 11,817,290
- Issue date Nov 14, 2023
- FEI Company
- Maarten Bischoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wien filter and charged particle beam imaging apparatus
- Patent number 11,756,761
- Issue date Sep 12, 2023
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam manipulation device and method for manipulati...
- Patent number 11,705,301
- Issue date Jul 18, 2023
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,587,758
- Issue date Feb 21, 2023
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, device and system for reducing off-axial aberration in elec...
- Patent number 11,587,759
- Issue date Feb 21, 2023
- FEI Company
- Maarten Bischoff
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of influencing a charged particle beam, multipole device, an...
- Patent number 11,501,946
- Issue date Nov 15, 2022
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, multi-beamlet assembly, and method...
- Patent number 11,495,433
- Issue date Nov 8, 2022
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduction of thermal magnetic field noise in TEM corrector systems
- Patent number 11,437,216
- Issue date Sep 6, 2022
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-charged particle beam irradiation apparatus and multi-charged...
- Patent number 11,417,495
- Issue date Aug 16, 2022
- NuFlare Technology, Inc.
- Kazuhiko Inoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wien filter and charged particle beam imaging apparatus
- Patent number 11,239,044
- Issue date Feb 1, 2022
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,107,657
- Issue date Aug 31, 2021
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 10,879,031
- Issue date Dec 29, 2020
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration-corrected multibeam source, charged particle beam device...
- Patent number 10,784,072
- Issue date Sep 22, 2020
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device, field curvature corrector, and method...
- Patent number 10,784,070
- Issue date Sep 22, 2020
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Thomas Kemen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low voltage scanning electron microscope and method for specimen ob...
- Patent number 10,777,382
- Issue date Sep 15, 2020
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration corrector and charged particle beam device
- Patent number 10,755,888
- Issue date Aug 25, 2020
- Jeol Ltd.
- Shigeyuki Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 10,643,820
- Issue date May 5, 2020
- Hermes Microvision Inc.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 10,395,886
- Issue date Aug 27, 2019
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of eliminating thermally induced beam drift in an electron b...
- Patent number 10,340,114
- Issue date Jul 2, 2019
- KLA-Tencor Corporation
- Sameet K Shriyan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 10,276,347
- Issue date Apr 30, 2019
- Hermes Microvision Inc.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 10,109,456
- Issue date Oct 23, 2018
- Hermes Microvision Inc.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam lens device, charged particle beam device, and method of...
- Patent number 9,984,848
- Issue date May 29, 2018
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Jürgen Frosien
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 9,691,586
- Issue date Jun 27, 2017
- Hermes-Microvision, Inc.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 9,691,588
- Issue date Jun 27, 2017
- Hermes-Microvision, Inc.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...
- Publication number 20240371600
- Publication date Nov 7, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTOR, A CHARGED PARTICLE BEAM APPARATUS, A METHOD O...
- Publication number 20240355576
- Publication date Oct 24, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Florian Lampersberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Determining Focal Properties in a Target Beam Field of a...
- Publication number 20240304415
- Publication date Sep 12, 2024
- IMS Nanofabrication GmbH
- Christoph Spengler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A MULTIPOLE DEVICE, METHOD OF INFLUENCING AN ELEC...
- Publication number 20240274396
- Publication date Aug 15, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER
- Publication number 20240170252
- Publication date May 23, 2024
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Adjusting Charged Particle Optical System and Charged Par...
- Publication number 20240145211
- Publication date May 2, 2024
- JEOL Ltd.
- Shigeyuki Morishita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20240128044
- Publication date Apr 18, 2024
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUIRING APPARATUS AND MULTI-ELECTRON BE...
- Publication number 20240079200
- Publication date Mar 7, 2024
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Simple Spherical Aberration Corrector for SEM
- Publication number 20240047170
- Publication date Feb 8, 2024
- FEI Company
- Ali MOHAMMADI-GHEIDARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged particle optics components and their fabrication
- Publication number 20240047171
- Publication date Feb 8, 2024
- FEI Company
- Ali MOHAMMADI-GHEIDARI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON-OPTICAL DEVICE
- Publication number 20240038485
- Publication date Feb 1, 2024
- ASML NETHERLANDS B.V.
- Stijn Wilem Herman Karel STEENBRINK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, DEVICE AND SYSTEM FOR REDUCING OFF-AXIAL ABERRATION IN ELEC...
- Publication number 20240029993
- Publication date Jan 25, 2024
- FEI Company
- Maarten BISCHOFF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Adjustable Permanent Magnetic Lens Having Shunting Device
- Publication number 20230360878
- Publication date Nov 9, 2023
- IMS Nanofabrication GmbH
- Dietmar Puchberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20230282441
- Publication date Sep 7, 2023
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, DEVICE AND SYSTEM FOR REDUCING OFF-AXIAL ABERRATION IN ELEC...
- Publication number 20230223231
- Publication date Jul 13, 2023
- FEI Company
- Maarten BISCHOFF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC MIRROR CHROMATIC ABERRATION CORRECTORS
- Publication number 20230215682
- Publication date Jul 6, 2023
- FEI Company
- Alexander HENSTRA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE STRUCTURE FOR GUIDING A CHARGED PARTICLE BEAM
- Publication number 20230170177
- Publication date Jun 1, 2023
- Friedrich-Alexander-Universitat Erlangen-Nurnberg
- Robert ZIMMERMANN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...
- Publication number 20230005704
- Publication date Jan 5, 2023
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang Meng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERTAIN IMPROVEMENTS OF MULTI-BEAM GENERATING AND MULTI-BEAM DEFLEC...
- Publication number 20220392734
- Publication date Dec 8, 2022
- Carl Zeiss MultiSEM GmbH
- Yanko Sarov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCTION OF THERMAL MAGNETIC FIELD NOISE IN TEM CORRECTOR SYSTEMS
- Publication number 20220392736
- Publication date Dec 8, 2022
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, MULTI-BEAMLET ASSEMBLY, AND METHOD...
- Publication number 20220336186
- Publication date Oct 20, 2022
- lCT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF INFLUENCING A CHARGED PARTICLE BEAM, MULTIPOLE DEVICE, AN...
- Publication number 20220277921
- Publication date Sep 1, 2022
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM MANIPULATION DEVICE AND METHOD FOR MANIPULATI...
- Publication number 20220230836
- Publication date Jul 21, 2022
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Benjamin John Cook
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCTION OF THERMAL MAGNETIC FIELD NOISE IN TEM CORRECTOR SYSTEMS
- Publication number 20220208507
- Publication date Jun 30, 2022
- FEI Company
- Alexander Henstra
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam Deflection Device, Aberration Corrector, Monochromator, and Ch...
- Publication number 20220172920
- Publication date Jun 2, 2022
- Hitachi High-Tech Corporation
- Pieter KRUIT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WIEN FILTER AND CHARGED PARTICLE BEAM IMAGING APPARATUS
- Publication number 20220157556
- Publication date May 19, 2022
- Zhongke Jingyuan Electron Limited, Beijing (CN)
- Qinglang MENG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20220148851
- Publication date May 12, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND MULTI-CHARGED...
- Publication number 20210319974
- Publication date Oct 14, 2021
- NuFlare Technology, Inc.
- Kazuhiko INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD, DEVICE AND SYSTEM FOR REDUCING OFF-AXIAL ABERRATION IN ELEC...
- Publication number 20210272767
- Publication date Sep 2, 2021
- FEI Company
- Maarten BISCHOFF
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20210233736
- Publication date Jul 29, 2021
- ASML Netherlands B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method, device and system for reducing off-axial aberration in elec...

Apparatus of plural charged-particle beams

Beam deflection device, aberration corrector, monochromator, and ch...

Reduction of thermal magnetic field noise in TEM corrector systems

Scanning electron microscope device and electron beam inspection ap...

Apparatus of plural charged-particle beams

Method, device and system for reducing off-axial aberration in elec...

Wien filter and charged particle beam imaging apparatus

Charged particle beam manipulation device and method for manipulati...

Apparatus of plural charged-particle beams

Method, device and system for reducing off-axial aberration in elec...

Method of influencing a charged particle beam, multipole device, an...

Charged particle beam apparatus, multi-beamlet assembly, and method...

Reduction of thermal magnetic field noise in TEM corrector systems

Multi-charged particle beam irradiation apparatus and multi-charged...

Wien filter and charged particle beam imaging apparatus

Apparatus of plural charged-particle beams

Apparatus of plural charged-particle beams

Aberration-corrected multibeam source, charged particle beam device...

Charged particle beam device, field curvature corrector, and method...

Low voltage scanning electron microscope and method for specimen ob...

Aberration corrector and charged particle beam device

Apparatus of plural charged-particle beams

Apparatus of plural charged-particle beams

Method of eliminating thermally induced beam drift in an electron b...

Apparatus of plural charged-particle beams

Apparatus of plural charged-particle beams

Multi-beam lens device, charged particle beam device, and method of...

Apparatus of plural charged-particle beams

Apparatus of plural charged-particle beams

Patents Applicationslast 30 patents

METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...

ABERRATION CORRECTOR, A CHARGED PARTICLE BEAM APPARATUS, A METHOD O...

Method for Determining Focal Properties in a Target Beam Field of a...

METHOD OF FORMING A MULTIPOLE DEVICE, METHOD OF INFLUENCING AN ELEC...

MULTI-BEAM GENERATING UNIT WITH INCREASED FOCUSING POWER

Method of Adjusting Charged Particle Optical System and Charged Par...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

MULTI-ELECTRON BEAM IMAGE ACQUIRING APPARATUS AND MULTI-ELECTRON BE...

Simple Spherical Aberration Corrector for SEM

Charged particle optics components and their fabrication

ELECTRON-OPTICAL DEVICE

METHOD, DEVICE AND SYSTEM FOR REDUCING OFF-AXIAL ABERRATION IN ELEC...

Adjustable Permanent Magnetic Lens Having Shunting Device

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

METHOD, DEVICE AND SYSTEM FOR REDUCING OFF-AXIAL ABERRATION IN ELEC...

ELECTROSTATIC MIRROR CHROMATIC ABERRATION CORRECTORS

ELECTRODE STRUCTURE FOR GUIDING A CHARGED PARTICLE BEAM

SCANNING ELECTRON MICROSCOPE DEVICE AND ELECTRON BEAM INSPECTION AP...

CERTAIN IMPROVEMENTS OF MULTI-BEAM GENERATING AND MULTI-BEAM DEFLEC...

REDUCTION OF THERMAL MAGNETIC FIELD NOISE IN TEM CORRECTOR SYSTEMS

CHARGED PARTICLE BEAM APPARATUS, MULTI-BEAMLET ASSEMBLY, AND METHOD...

METHOD OF INFLUENCING A CHARGED PARTICLE BEAM, MULTIPOLE DEVICE, AN...

CHARGED PARTICLE BEAM MANIPULATION DEVICE AND METHOD FOR MANIPULATI...

REDUCTION OF THERMAL MAGNETIC FIELD NOISE IN TEM CORRECTOR SYSTEMS

Beam Deflection Device, Aberration Corrector, Monochromator, and Ch...

WIEN FILTER AND CHARGED PARTICLE BEAM IMAGING APPARATUS

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

MULTI-CHARGED PARTICLE BEAM IRRADIATION APPARATUS AND MULTI-CHARGED...

METHOD, DEVICE AND SYSTEM FOR REDUCING OFF-AXIAL ABERRATION IN ELEC...

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS