of A three - B five compounds

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H01L21/30635

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/30635of A three - B five compounds

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Patents Grantslast 30 patents

Information Patent Grant
Method and device for manufacturing structure
- Patent number 12,054,847
- Issue date Aug 6, 2024
- Sumitomo Chemical Company, Limited
- Fumimasa Horikiri
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Apparatus and method for etching one side of a semiconductor layer...
- Patent number 11,519,094
- Issue date Dec 6, 2022
- NexWafe GmbH
- Stefan Reber
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Method of manufacture using complementary conductivity-selective we...
- Patent number 11,195,722
- Issue date Dec 7, 2021
- Georgia Tech Research Corporation
- Shyh-Chiang Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabrication with electrochemical apparatus
- Patent number 11,101,149
- Issue date Aug 24, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Andrew Joseph Kelly
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for GaN vertical microcavity surface emitting laser (VCSEL)
- Patent number 11,043,792
- Issue date Jun 22, 2021
- Yale University
- Jung Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Group III nitride semiconductor and method for producing same
- Patent number 10,923,346
- Issue date Feb 16, 2021
- PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
- Akihiko Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabrication with electrochemical apparatus
- Patent number 10,720,344
- Issue date Jul 21, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Andrew Joseph Kelly
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Deep photoenhanced wet material etching using high-power ultraviole...
- Patent number 10,685,843
- Issue date Jun 16, 2020
- MicroLink Devices, Inc.
- Christopher Youtsey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-color monolithic light-emitting diodes and methods for making...
- Patent number 10,573,684
- Issue date Feb 25, 2020
- X Development LLC
- Martin Friedrich Schubert
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Systems and methods for perforation and ohmic contact formation for...
- Patent number 10,522,363
- Issue date Dec 31, 2019
- MicroLink Devices, Inc.
- Christopher Youtsey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor fabrication with electrochemical apparatus
- Patent number 10,468,275
- Issue date Nov 5, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Andrew Joseph Kelly
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Conductivity based on selective etch for GaN devices and applicatio...
- Patent number 10,458,038
- Issue date Oct 29, 2019
- Yale University
- Yu Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-color monolithic light-emitting diodes and methods for making...
- Patent number 10,424,614
- Issue date Sep 24, 2019
- X Development LLC
- Martin Friedrich Schubert
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Multi-color monolithic light-emitting diodes and methods for making...
- Patent number 10,181,495
- Issue date Jan 15, 2019
- X Development LLC
- Martin Friedrich Schubert
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Process for fabricating vertically-aligned gallium arsenide semicon...
- Patent number 10,147,789
- Issue date Dec 4, 2018
- Korea Research Institute of Standards and Science
- Woo Lee
- B82 - NANO-TECHNOLOGY
Information Patent Grant
High density vertical nanowire stack for field effect transistor
- Patent number 10,147,804
- Issue date Dec 4, 2018
- International Business Machines Corporation
- Kangguo Cheng
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Selective, electrochemical etching of a semiconductor
- Patent number 9,922,838
- Issue date Mar 20, 2018
- Rensselaer Polytechnic Institute
- Rajendra P. Dahal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for the reuse of gallium nitride epitaxial substrates
- Patent number 9,773,704
- Issue date Sep 26, 2017
- The Regents of the University of California
- Casey O. Holder
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lateral electrochemical etching of III-nitride materials for microf...
- Patent number 9,583,353
- Issue date Feb 28, 2017
- Yale University
- Jung Han
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for the reuse of gallium nitride epitaxial substrates
- Patent number 9,396,943
- Issue date Jul 19, 2016
- The Regents of the University of California
- Casey O. Holder
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Quantum-size-controlled photoelectrochemical etching of semiconduct...
- Patent number 9,276,382
- Issue date Mar 1, 2016
- Sandia Corporation
- Arthur J. Fischer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Conductivity based on selective etch for GaN devices and applicatio...
- Patent number 9,206,524
- Issue date Dec 8, 2015
- Yale University
- Yu Zhang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for the reuse of gallium nitride epitaxial substrates
- Patent number 9,147,733
- Issue date Sep 29, 2015
- The Regents of the University of California
- Casey O. Holder
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method for the reuse of gallium nitride epitaxial substrates
- Patent number 8,866,149
- Issue date Oct 21, 2014
- The Regents of the University of California
- Casey O. Holder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor substrate and manufacturing method for the same
- Patent number 7,642,179
- Issue date Jan 5, 2010
- Canon Kabuhsiki Kaisha
- Hajime Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Control of photoelectrochemical (PEC) etching by modification of th...
- Patent number 7,550,395
- Issue date Jun 23, 2009
- The Regents of the University of California
- Evelyn L. Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating nitride-based compound semiconductor element
- Patent number 7,148,149
- Issue date Dec 12, 2006
- Matsushita Electric Industrial Co., Ltd.
- Hiroshi Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern formation method using light-induced suppression of etching
- Patent number 7,070,702
- Issue date Jul 4, 2006
- QinetiQ Limited
- Robert W Eason
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoelectrochemical undercut etching of semiconductor material
- Patent number 6,884,740
- Issue date Apr 26, 2005
- The Regents of the University of California
- Evelyn L. Hu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor etching process and apparatus
- Patent number 6,521,118
- Issue date Feb 18, 2003
- Technion Research and Development Foundation
- David Starosvetsky
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTROCHEMICAL SYSTEMS AND METHODS FOR FINISHING SiC WAFERS
- Publication number 20240071743
- Publication date Feb 29, 2024
- Pallidus, Inc.
- Mark Land
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING STRUCTURE
- Publication number 20220384614
- Publication date Dec 1, 2022
- SCIOCS COMPANY LIMITED
- Osamu ICHIKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING STRUCTURE
- Publication number 20220270887
- Publication date Aug 25, 2022
- SCIOCS COMPANY LIMITED
- Fumimasa HORIKIRI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SU...
- Publication number 20210187685
- Publication date Jun 24, 2021
- EBARA CORPORATION
- Atsuo Katagiri
- B24 - GRINDING POLISHING
Information Patent Application
Method of Manufacture Using Complementary Conductivity-Selective W...
- Publication number 20200381260
- Publication date Dec 3, 2020
- Georgia Tech Research Corporation
- Shyh-Chiang SHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING DEVICE
- Publication number 20200365410
- Publication date Nov 19, 2020
- Toyota Jidosha Kabushiki Kaisha
- Daisuke SUGIZAKI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
SEMICONDUCTOR FABRICATION WITH ELECTROCHEMICAL APPARATUS
- Publication number 20200350185
- Publication date Nov 5, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Andrew Joseph KELLY
- B82 - NANO-TECHNOLOGY
Information Patent Application
GROUP III NITRIDE SEMICONDUCTOR AND METHOD FOR PRODUCING SAME
- Publication number 20200135447
- Publication date Apr 30, 2020
- Panasonic Intellectual Property Management Co., Ltd.
- Akihiko ISHIBASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR FABRICATION WITH ELECTROCHEMICAL APPARATUS
- Publication number 20200066554
- Publication date Feb 27, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Andrew Joseph KELLY
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Multi-Color Monolithic Light-Emitting Diodes and Methods for Making...
- Publication number 20190198563
- Publication date Jun 27, 2019
- X Development LLC
- Martin Friedrich Schubert
- B82 - NANO-TECHNOLOGY
Information Patent Application
Multi-Color Monolithic Light-Emitting Diodes and Methods for Making...
- Publication number 20190198562
- Publication date Jun 27, 2019
- X Development LLC
- Martin Friedrich Schubert
- B82 - NANO-TECHNOLOGY
Information Patent Application
SELECTIVE, ELECTROCHEMICAL ETCHING OF A SEMICONDUCTOR
- Publication number 20170170025
- Publication date Jun 15, 2017
- Rensselaer Polytechnic Institute
- Rajendra P. DAHAL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR THE REUSE OF GALLIUM NITRIDE EPITAXIAL SUBSTRATES
- Publication number 20150048381
- Publication date Feb 19, 2015
- The Regents of the University of California
- Casey O. Holder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LATERAL ELECTROCHEMICAL ETCHING OF III-NITRIDE MATERIALS FOR MICROF...
- Publication number 20140003458
- Publication date Jan 2, 2014
- Jung Han
- B82 - NANO-TECHNOLOGY
Information Patent Application
METHOD FOR THE REUSE OF GALLIUM NITRIDE EPITAXIAL SUBSTRATES
- Publication number 20130214284
- Publication date Aug 22, 2013
- The Regents of the University of California
- Casey O. Holder
- B82 - NANO-TECHNOLOGY
Information Patent Application
Conductivity Based on Selective Etch for GaN Devices and Applicatio...
- Publication number 20130011656
- Publication date Jan 10, 2013
- Yale University
- Yu Zhang
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Control of photoelectrochemical (PEC) etching by modification of th...
- Publication number 20060110926
- Publication date May 25, 2006
- The Regents of the University of California.
- Evelyn L. Hu
- B82 - NANO-TECHNOLOGY
Information Patent Application
Semiconductor substrate and manufacturing method for the same
- Publication number 20060035447
- Publication date Feb 16, 2006
- Hajime Ikeda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Surface treatment method and surface treatment device
- Publication number 20050269577
- Publication date Dec 8, 2005
- Matsushita Electric Industrial Co., Ltd.
- Tetsuzo Ueda
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Method for fabricating nitride-based compound semiconductor element
- Publication number 20050159000
- Publication date Jul 21, 2005
- MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
- Hiroshi Ohno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Photoelectrochemical undercut etching of semiconductor material
- Publication number 20030045120
- Publication date Mar 6, 2003
- Evelyn L. Hu
- H01 - BASIC ELECTRIC ELEMENTS

of A three - B five compounds

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and device for manufacturing structure

Apparatus and method for etching one side of a semiconductor layer...

Method of manufacture using complementary conductivity-selective we...

Semiconductor fabrication with electrochemical apparatus

Method for GaN vertical microcavity surface emitting laser (VCSEL)

Group III nitride semiconductor and method for producing same

Semiconductor fabrication with electrochemical apparatus

Deep photoenhanced wet material etching using high-power ultraviole...

Multi-color monolithic light-emitting diodes and methods for making...

Systems and methods for perforation and ohmic contact formation for...

Semiconductor fabrication with electrochemical apparatus

Conductivity based on selective etch for GaN devices and applicatio...

Multi-color monolithic light-emitting diodes and methods for making...

Multi-color monolithic light-emitting diodes and methods for making...

Process for fabricating vertically-aligned gallium arsenide semicon...

High density vertical nanowire stack for field effect transistor

Selective, electrochemical etching of a semiconductor

Method for the reuse of gallium nitride epitaxial substrates

Lateral electrochemical etching of III-nitride materials for microf...

Method for the reuse of gallium nitride epitaxial substrates

Quantum-size-controlled photoelectrochemical etching of semiconduct...

Conductivity based on selective etch for GaN devices and applicatio...

Method for the reuse of gallium nitride epitaxial substrates

Method for the reuse of gallium nitride epitaxial substrates

Semiconductor substrate and manufacturing method for the same

Control of photoelectrochemical (PEC) etching by modification of th...

Method for fabricating nitride-based compound semiconductor element

Pattern formation method using light-induced suppression of etching

Photoelectrochemical undercut etching of semiconductor material

Semiconductor etching process and apparatus

Patents Applicationslast 30 patents

ELECTROCHEMICAL SYSTEMS AND METHODS FOR FINISHING SiC WAFERS

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING STRUCTURE

METHOD FOR MANUFACTURING STRUCTURE

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND SU...

Method of Manufacture Using Complementary Conductivity-Selective W...

ETCHING DEVICE

SEMICONDUCTOR FABRICATION WITH ELECTROCHEMICAL APPARATUS

GROUP III NITRIDE SEMICONDUCTOR AND METHOD FOR PRODUCING SAME

SEMICONDUCTOR FABRICATION WITH ELECTROCHEMICAL APPARATUS

Multi-Color Monolithic Light-Emitting Diodes and Methods for Making...

Multi-Color Monolithic Light-Emitting Diodes and Methods for Making...

SELECTIVE, ELECTROCHEMICAL ETCHING OF A SEMICONDUCTOR

METHOD FOR THE REUSE OF GALLIUM NITRIDE EPITAXIAL SUBSTRATES

LATERAL ELECTROCHEMICAL ETCHING OF III-NITRIDE MATERIALS FOR MICROF...

METHOD FOR THE REUSE OF GALLIUM NITRIDE EPITAXIAL SUBSTRATES

Conductivity Based on Selective Etch for GaN Devices and Applicatio...

Control of photoelectrochemical (PEC) etching by modification of th...

Semiconductor substrate and manufacturing method for the same

Surface treatment method and surface treatment device

Method for fabricating nitride-based compound semiconductor element

Photoelectrochemical undercut etching of semiconductor material