of iron group metals

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CPC
C23C16/406

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

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C23C16/406of iron group metals

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Patents Grantslast 30 patents

Information Patent Grant
Method of forming a transition metal containing film on a substrate...
- Patent number 12,173,402
- Issue date Dec 24, 2024
- ASM IP Holding B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrocatalyst with a NiMoO4 layer with nanoflower morphology
- Patent number 12,139,798
- Issue date Nov 12, 2024
- King Fahd University of Petroleum & Minerals
- Muhammad Ali Ehsan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anti-coking iron spinel surface
- Patent number 12,065,744
- Issue date Aug 20, 2024
- Nova Chemicals (International) S.A.
- Evan Mah
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Corrosion-resistant coated article and thermal chemical vapor depos...
- Patent number 12,036,765
- Issue date Jul 16, 2024
- Silcotek Corp.
- Min Yuan
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Grant
Method for preparing chlorine adsorption material for use in waste...
- Patent number 11,896,955
- Issue date Feb 13, 2024
- FUZHOU UNIVERSITY
- Minghua Liu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
NiMoO4 nanoflowers on nickel foam as electrocatalysts for water oxi...
- Patent number 11,767,601
- Issue date Sep 26, 2023
- King Fahd University of Petroleum & Minerals
- Muhammad Ali Ehsan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device
- Patent number 11,495,695
- Issue date Nov 8, 2022
- FLOSFIA INC.
- Masahiro Sugimoto
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabricating correlated electron material (CEM) devices
- Patent number 11,450,804
- Issue date Sep 20, 2022
- CERFE LABS, INC.
- Carlos Alberto Paz de Araujo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for forming electrocatalyst structures and electrodes compr...
- Patent number 11,316,169
- Issue date Apr 26, 2022
- West Virginia University
- Xueyan Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Zinc-based plated steel material having excellent sealer adhesion
- Patent number 11,299,639
- Issue date Apr 12, 2022
- Posco
- Yeon-Ho Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrochemical doping of thin metal layers employing underpotentia...
- Patent number 11,225,714
- Issue date Jan 18, 2022
- Lam Research Corporation
- Kailash Venkatraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Anti-coking iron spinel surface
- Patent number 11,186,905
- Issue date Nov 30, 2021
- Nova Chemicals (International) S.A.
- Evan Mah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Corrosion-resistant coated article and thermal chemical vapor depos...
- Patent number 11,161,324
- Issue date Nov 2, 2021
- Silcotek Corp.
- Min Yuan
- B32 - LAYERED PRODUCTS
Information Patent Grant
Substrate processing apparatus and metal member
- Patent number 11,035,037
- Issue date Jun 15, 2021
- Kokusai Electric Corporation
- Tetsuaki Inada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Volatile dihydropyrazinly and dihydropyrazine metal complexes
- Patent number 10,914,001
- Issue date Feb 9, 2021
- VERSUM MATERIALS US, LLC
- John Anthony Thomas Norman
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Fabricating correlated electron material (CEM) devices
- Patent number 10,797,238
- Issue date Oct 6, 2020
- ARM Ltd.
- Carlos Alberto Paz de Araujo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coated tool
- Patent number 10,744,568
- Issue date Aug 18, 2020
- KYOCERA Corporation
- Kou Ri
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of forming a transition metal containing film on a substrate...
- Patent number 10,731,249
- Issue date Aug 4, 2020
- ASM IP Holding B.V.
- Timo Hatanpää
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal complexes containing allyl ligands
- Patent number 10,723,749
- Issue date Jul 28, 2020
- Merck Patent GmbH
- Bin Xi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fabrication of correlated electron material devices method to contr...
- Patent number 10,580,982
- Issue date Mar 3, 2020
- ARM Limited
- Kimberly Gay Reid
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrochemical doping of thin metal layers employing underpotentia...
- Patent number 10,501,846
- Issue date Dec 10, 2019
- Lam Research Corporation
- Kailash Venkatraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt-containing compounds, their synthesis, and use in cobalt-con...
- Patent number 10,309,010
- Issue date Jun 4, 2019
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Satoko Gatineau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-metal films, alternating film multilayers, formation methods...
- Patent number 10,214,817
- Issue date Feb 26, 2019
- The Board of Trustees of the University of Illinois
- Christos G. Takoudis
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alcohol compound
- Patent number 10,155,784
- Issue date Dec 18, 2018
- Adeka Corporation
- Atsushi Sakurai
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Alkoxide compound and raw material for forming thin film
- Patent number 10,118,940
- Issue date Nov 6, 2018
- Adeka Corporation
- Senji Wada
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Metal silicide, metal germanide, methods for making the same
- Patent number 10,043,880
- Issue date Aug 7, 2018
- ASM International N.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Volatile dihydropyrazinly and dihydropyrazine metal complexes
- Patent number 9,994,954
- Issue date Jun 12, 2018
- VERSUM MATERIALS US, LLC
- John Anthony Thomas Norman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal alkoxide compound, thin-film-forming material, method for pro...
- Patent number 9,896,468
- Issue date Feb 20, 2018
- Adeka Corporation
- Atsushi Sakurai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cobalt-containing compounds, their synthesis, and use in cobalt-con...
- Patent number 9,790,247
- Issue date Oct 17, 2017
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Satoko Gatineau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Doped metal germanide and methods for making the same
- Patent number 9,634,106
- Issue date Apr 25, 2017
- ASM International N.V.
- Viljami J. Pore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
PROCESS FOR FORMING A COATING
- Publication number 20250145521
- Publication date May 8, 2025
- PILKINGTON GROUP LIMITED
- Jun NI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Anti-Coking Iron Spinel Surface
- Publication number 20250019816
- Publication date Jan 16, 2025
- NOVA CHEMICALS (INTERNATIONAL) S.A.
- Evan Mah
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
NICKEL-IRON-OXIDE THIN FILMS AS AN ELECTROCATALYST FOR WATER OXIDATION
- Publication number 20240417871
- Publication date Dec 19, 2024
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Muhammad Ali EHSAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THERMAL CHEMICAL VAPOR DEPOSITION COATING PROCESS
- Publication number 20240359430
- Publication date Oct 31, 2024
- SILCOTEK CORP.
- Min YUAN
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
PASSIVATION LAYER, PREPARATION METHOD THEREFOR AND APPLICATION THEREOF
- Publication number 20240332535
- Publication date Oct 3, 2024
- SHENZHEN YUANSU OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Weizhen WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTRODE PROTECTIVE LAYER, AND PREPARATION METHOD THEREFOR AND USE...
- Publication number 20240322186
- Publication date Sep 26, 2024
- SHENZHEN YUANSU OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Weizhen WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROCATALYST WITH A NiMoO4 LAYER WITH NANOFLOWER MORPHOLOGY
- Publication number 20240124991
- Publication date Apr 18, 2024
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Muhammad Ali EHSAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CATALYST, ELECTRODE AND MANUFACTURING METHODS THEREOF
- Publication number 20240018674
- Publication date Jan 18, 2024
- Centre National de la Recherche Scientifique
- Maxime DUFOND
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IN SITU DOPING OF IRONS INTO MOS2 TOWARD TWO-DIMENSIONAL DILUTE MAG...
- Publication number 20230290636
- Publication date Sep 14, 2023
- THE TRUSTEES OF THE STEVENS INSTITUTE OF TECHNOLOGY
- Eui-Hyeok Yang
- C01 - INORGANIC CHEMISTRY
Information Patent Application
ELECTROCATALYST STRUCTURES FOR AN ELECTRODE
- Publication number 20220320526
- Publication date Oct 6, 2022
- West Virginia University
- Xueyan Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF CONTROLLING AN AMOUNT OF SOLUBLE BASE CONTENT OF MATERIAL...
- Publication number 20220298633
- Publication date Sep 22, 2022
- The Regents of the University of Colorado, a Body Corporate
- Alan D. Weimer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD
- Publication number 20220259730
- Publication date Aug 18, 2022
- UNIVERSITETET I OSLO
- Henrik Hovde SØNSTEBY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO INDUCE TUNABLE FERROMAGNETISM WITH PERPENDICULAR MAGNETIC...
- Publication number 20220199323
- Publication date Jun 23, 2022
- Rutgers, The State University of New Jersey
- Seongshik Oh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PHOTOCATALYST AND PREPARATION METHOD THEREFOR
- Publication number 20220143261
- Publication date May 12, 2022
- JCHI Global
- Young Dok KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Anti-Coking Iron Spinel Surface
- Publication number 20220119933
- Publication date Apr 21, 2022
- NOVA CHEMICALS (INTERNATIONAL) S.A.
- Evan Mah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION-RESISTANT COATED ARTICLE AND THERMAL CHEMICAL VAPOR DEPOS...
- Publication number 20220009203
- Publication date Jan 13, 2022
- SILCOTEK CORP.
- Min YUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20210296511
- Publication date Sep 23, 2021
- FLOSFIA INC.
- Masahiro SUGIMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR PREPARING CHLORINE ADSORPTION MATERIAL FOR USE IN WASTE...
- Publication number 20210031170
- Publication date Feb 4, 2021
- FUZHOU UNIVERSITY
- Minghua LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FABRICATING CORRELATED ELECTRON MATERIAL (CEM) DEVICES
- Publication number 20200357992
- Publication date Nov 12, 2020
- ARM Limited
- Carlos Alberto Paz de Araujo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A TRANSITION METAL CONTAINING FILM ON A SUBSTRATE...
- Publication number 20200340113
- Publication date Oct 29, 2020
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF FORMING NICKEL-CONTAINING FILMS
- Publication number 20200106012
- Publication date Apr 2, 2020
- Applied Materials, Inc.
- Hung Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PATTERNING METAL REGIONS ON METAL OXIDE FILMS/METAL FILMS BY SELECT...
- Publication number 20200087783
- Publication date Mar 19, 2020
- Board of Regents, The University of Texas System
- Roger BONNECAZE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROCHEMICAL DOPING OF THIN METAL LAYERS EMPLOYING UNDERPOTENTIA...
- Publication number 20200063256
- Publication date Feb 27, 2020
- LAM RESEARCH CORPORATION
- Kailash Venkatraman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CERAMIC REINFORCED ZIRCONIUM ALLOY NUCLEAR FUEL CLADDING WITH INTER...
- Publication number 20200048766
- Publication date Feb 13, 2020
- Westinghouse Electric Company LLC
- EDWARD J. LAHODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROCATALYST STRUCTURES FOR AN ELECTRODE
- Publication number 20190379057
- Publication date Dec 12, 2019
- West Virginia University
- Xueyan Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Metal Complexes Containing Allyl Ligands
- Publication number 20190359640
- Publication date Nov 28, 2019
- Merck Patent GmbH
- Bin XI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Volatile dihydropyrazinly and dihydropyrazine metal complexes
- Publication number 20190292659
- Publication date Sep 26, 2019
- VERSUM MATERIALS US, LLC
- John Anthony Thomas Norman
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING A TRANSITION METAL CONTAINING FILM ON A SUBSTRATE...
- Publication number 20190249300
- Publication date Aug 15, 2019
- ASM IP HOLDING B.V.
- Timo Hatanpää
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METAL MEMBER
- Publication number 20190186000
- Publication date Jun 20, 2019
- Kokusai Electric Corporation
- Tetsuaki INADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORROSION-RESISTANT COATED ARTICLE AND THERMAL CHEMICAL VAPOR DEPOS...
- Publication number 20190077118
- Publication date Mar 14, 2019
- SILCOTEK CORP.
- Min YUAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

of iron group metals

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method of forming a transition metal containing film on a substrate...

Electrocatalyst with a NiMoO4 layer with nanoflower morphology

Anti-coking iron spinel surface

Corrosion-resistant coated article and thermal chemical vapor depos...

Method for preparing chlorine adsorption material for use in waste...

NiMoO4 nanoflowers on nickel foam as electrocatalysts for water oxi...

Semiconductor device

Fabricating correlated electron material (CEM) devices

Methods for forming electrocatalyst structures and electrodes compr...

Zinc-based plated steel material having excellent sealer adhesion

Electrochemical doping of thin metal layers employing underpotentia...

Anti-coking iron spinel surface

Corrosion-resistant coated article and thermal chemical vapor depos...

Substrate processing apparatus and metal member

Volatile dihydropyrazinly and dihydropyrazine metal complexes

Fabricating correlated electron material (CEM) devices

Coated tool

Method of forming a transition metal containing film on a substrate...

Metal complexes containing allyl ligands

Fabrication of correlated electron material devices method to contr...

Electrochemical doping of thin metal layers employing underpotentia...

Cobalt-containing compounds, their synthesis, and use in cobalt-con...

Multi-metal films, alternating film multilayers, formation methods...

Alcohol compound

Alkoxide compound and raw material for forming thin film

Metal silicide, metal germanide, methods for making the same

Volatile dihydropyrazinly and dihydropyrazine metal complexes

Metal alkoxide compound, thin-film-forming material, method for pro...

Cobalt-containing compounds, their synthesis, and use in cobalt-con...

Doped metal germanide and methods for making the same

Patents Applicationslast 30 patents

PROCESS FOR FORMING A COATING

Anti-Coking Iron Spinel Surface

NICKEL-IRON-OXIDE THIN FILMS AS AN ELECTROCATALYST FOR WATER OXIDATION

THERMAL CHEMICAL VAPOR DEPOSITION COATING PROCESS

PASSIVATION LAYER, PREPARATION METHOD THEREFOR AND APPLICATION THEREOF

ELECTRODE PROTECTIVE LAYER, AND PREPARATION METHOD THEREFOR AND USE...

ELECTROCATALYST WITH A NiMoO4 LAYER WITH NANOFLOWER MORPHOLOGY

CATALYST, ELECTRODE AND MANUFACTURING METHODS THEREOF

IN SITU DOPING OF IRONS INTO MOS2 TOWARD TWO-DIMENSIONAL DILUTE MAG...

ELECTROCATALYST STRUCTURES FOR AN ELECTRODE

METHOD OF CONTROLLING AN AMOUNT OF SOLUBLE BASE CONTENT OF MATERIAL...

METHOD

METHOD TO INDUCE TUNABLE FERROMAGNETISM WITH PERPENDICULAR MAGNETIC...

PHOTOCATALYST AND PREPARATION METHOD THEREFOR

Anti-Coking Iron Spinel Surface

CORROSION-RESISTANT COATED ARTICLE AND THERMAL CHEMICAL VAPOR DEPOS...

SEMICONDUCTOR DEVICE

METHOD FOR PREPARING CHLORINE ADSORPTION MATERIAL FOR USE IN WASTE...

FABRICATING CORRELATED ELECTRON MATERIAL (CEM) DEVICES

METHOD OF FORMING A TRANSITION METAL CONTAINING FILM ON A SUBSTRATE...

METHODS OF FORMING NICKEL-CONTAINING FILMS

PATTERNING METAL REGIONS ON METAL OXIDE FILMS/METAL FILMS BY SELECT...

ELECTROCHEMICAL DOPING OF THIN METAL LAYERS EMPLOYING UNDERPOTENTIA...

CERAMIC REINFORCED ZIRCONIUM ALLOY NUCLEAR FUEL CLADDING WITH INTER...

ELECTROCATALYST STRUCTURES FOR AN ELECTRODE

Metal Complexes Containing Allyl Ligands

Volatile dihydropyrazinly and dihydropyrazine metal complexes

METHOD OF FORMING A TRANSITION METAL CONTAINING FILM ON A SUBSTRATE...

SUBSTRATE PROCESSING APPARATUS AND METAL MEMBER

CORROSION-RESISTANT COATED ARTICLE AND THERMAL CHEMICAL VAPOR DEPOS...