of micro-electro-mechanical resonators or networks

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CPC
H03H3/0072

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Parent Industries

HELECTRICITY H03Electronic circuits H03HIMPEDANCE NETWORKS H03H3/00Apparatus or processes specially adapted for the manufacture of impedance networks, resonating circuits, resonators

Current Industry

H03H3/0072of micro-electro-mechanical resonators or networks

Industries

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Patents Grantslast 30 patents

Information Patent Grant
MEMS resonator with colocated temperature sensor
- Patent number 12,095,447
- Issue date Sep 17, 2024
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 12,081,192
- Issue date Sep 3, 2024
- Stathera IP Holdings, Inc.
- Vamsy P. Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 12,071,342
- Issue date Aug 27, 2024
- Stathera IP Holding, Inc.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vibrator device and method for manufacturing vibrator device
- Patent number 12,052,009
- Issue date Jul 30, 2024
- Seiko Epson Corporation
- Kenichi Kurokawa
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Enhanced electronic sensors
- Patent number 12,034,422
- Issue date Jul 9, 2024
- National Technology & Engineering Solutions of Sandia, LLC
- Fred Patrick Doty
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Piezoelectric MEMS resonators based on porous silicon technologies
- Patent number 12,034,431
- Issue date Jul 9, 2024
- Xiang Zheng Tu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Intraluminal ultrasound imaging device comprising a substrate separ...
- Patent number 11,883,233
- Issue date Jan 30, 2024
- Koninklijke Philips N.V.
- Ronald Dekker
- B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information Patent Grant
Resonance device and manufacturing method of resonance device
- Patent number 11,881,838
- Issue date Jan 23, 2024
- Murata Manufacturing Co., Ltd.
- Kentarou Dehara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator electrode shields
- Patent number 11,799,449
- Issue date Oct 24, 2023
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator with co-located temperature sensor
- Patent number 11,770,112
- Issue date Sep 26, 2023
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 11,764,751
- Issue date Sep 19, 2023
- SiTime Corporation
- Paul M. Hagelin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Resonance device and method for producing resonance device
- Patent number 11,757,425
- Issue date Sep 12, 2023
- Murata Manufacturing Co., Ltd.
- Masakazu Fukumitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Fused quartz dual shell resonator and method of fabrication
- Patent number 11,703,330
- Issue date Jul 18, 2023
- The Regents of the University of California
- Andrei M. Shkel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Three dimensional microstructures with selectively removed regions...
- Patent number 11,703,331
- Issue date Jul 18, 2023
- The Regents of the University of Michigan
- Khalil Najafi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 11,664,781
- Issue date May 30, 2023
- STATHERA IP HOLDINGS INC.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric MEMS resonators based on porous silicon technologies
- Patent number 11,601,111
- Issue date Mar 7, 2023
- Xiang Zheng Tu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Guided wave devices with selectively loaded piezoelectric layers
- Patent number 11,588,466
- Issue date Feb 21, 2023
- Qorvo US, Inc.
- Kushal Bhattacharjee
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator electrode shields
- Patent number 11,545,959
- Issue date Jan 3, 2023
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Electronic package including cavity formed by removal of sacrificia...
- Patent number 11,545,952
- Issue date Jan 3, 2023
- SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Atsushi Takano
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 11,479,460
- Issue date Oct 25, 2022
- STATHERA IP HOLDINGS INC.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 11,469,734
- Issue date Oct 11, 2022
- SiTime Corporation
- Paul M. Hagelin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Clock glitch mitigation apparatus and method
- Patent number 11,442,492
- Issue date Sep 13, 2022
- Intel Corporation
- Mohamed A. Abdelmoneum
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Resonator electrode shields
- Patent number 11,444,600
- Issue date Sep 13, 2022
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method for manufacturing a micromechanical layer structure
- Patent number 11,405,010
- Issue date Aug 2, 2022
- Robert Bosch GmbH
- Stefan Majoni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator device
- Patent number 11,394,360
- Issue date Jul 19, 2022
- QUALCOMM Incorporated
- Je-Hsiung Lan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electromechanically damped resonator devices and methods
- Patent number 11,387,804
- Issue date Jul 12, 2022
- ECOLE TECHNOLOGIE SUPERIEURE
- Alexandre Robichaud
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Communication module
- Patent number 11,342,902
- Issue date May 24, 2022
- SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Chan Yong Jeong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Component with a thin-layer covering and method for its production
- Patent number 11,296,673
- Issue date Apr 5, 2022
- Snaptrack, Inc.
- Thomas Metzger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Frequency compensated oscillator design for process tolerances
- Patent number 11,146,228
- Issue date Oct 12, 2021
- Robert Bosch GmbH
- Markus Lutz
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods and devices for microelectromechanical pressure sensors
- Patent number 11,111,135
- Issue date Sep 7, 2021
- MY01 IP Holdings Inc.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
ION IRRADIATION OF MICROELECTROMECHANICAL RESONATORS
- Publication number 20240297630
- Publication date Sep 5, 2024
- Government of the United States as Represented by the Secretary of the Air Force
- Hengky Chandrahalim
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS RESONATOR AND MEMS RESONATOR PROCESSING METHOD
- Publication number 20240154598
- Publication date May 9, 2024
- HUAWEI TECHNOLOGIES CO., LTD.
- Guoqiang WU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20240128948
- Publication date Apr 18, 2024
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION
- Publication number 20240125599
- Publication date Apr 18, 2024
- The Regents of the University of California
- Andrei M. SHKEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant
- Publication number 20240056054
- Publication date Feb 15, 2024
- SiTime Corporation
- Charles I. Grosjean
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Three Dimensional Microstructures With Selectively Removed Regions...
- Publication number 20240019249
- Publication date Jan 18, 2024
- The Regents of the University of Michigan
- Khalil NAJAFI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
- Publication number 20230308076
- Publication date Sep 28, 2023
- Stathera IP Holdings Inc.
- Vamsy P. Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR AND MANUFACTURING METHOD
- Publication number 20230231538
- Publication date Jul 20, 2023
- KYOCERA Tikitin Oy
- Aarne OJA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
- Publication number 20230208392
- Publication date Jun 29, 2023
- Murata Manufacturing Co., Ltd.
- Yoshiyuki HIGUCHI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE, COLLECTIVE SUBSTRATE, AND RESONANCE DEVICE MANUFA...
- Publication number 20230119602
- Publication date Apr 20, 2023
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Piezoelectric MEMS Resonators based on Porous Silicon Technologies
- Publication number 20230116933
- Publication date Apr 20, 2023
- Xiang Zheng Tu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
BULK ACOUSTIC WAVE DEVICE PACKAGING WITH REDISTRIBUTION USING SILIC...
- Publication number 20230115592
- Publication date Apr 13, 2023
- Skyworks Solutions, Inc.
- Atsushi Takano
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
- Publication number 20230051438
- Publication date Feb 16, 2023
- Stathera IP Holdings Inc.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD OF MANUFACTURING COLLECTIVE SUBSTRATE AND COLLECTIVE SUBSTRATE
- Publication number 20220368301
- Publication date Nov 17, 2022
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME
- Publication number 20220231663
- Publication date Jul 21, 2022
- Murata Manufacturing Co., Ltd.
- Masakazu FUKUMITSU
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Vibrator Device And Method For Manufacturing Vibrator Device
- Publication number 20220158601
- Publication date May 19, 2022
- SEIKO EPSON CORPORATION
- Kenichi KUROKAWA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD
- Publication number 20210371273
- Publication date Dec 2, 2021
- Murata Manufacturing Co., Ltd.
- Masakazu Fukumitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A MICROMECHANICAL LAYER STRUCTURE
- Publication number 20210167745
- Publication date Jun 3, 2021
- ROBERT BOSCH GmbH
- Stefan Majoni
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONATOR DEVICE
- Publication number 20210159873
- Publication date May 27, 2021
- QUALCOMM Incorporated
- Je-Hsiung LAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ELECTROMECHANICAL COUPLING STRENGTH HOLLOW DISK RESONATORS
- Publication number 20210159868
- Publication date May 27, 2021
- The Regents of the University of California
- Clark T.-C. Nguyen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE AND MANUFACTURING METHOD OF RESONANCE DEVICE
- Publication number 20210152148
- Publication date May 20, 2021
- Murata Manufacturing Co., Ltd.
- Kentarou Dehara
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
COMMUNICATION MODULE
- Publication number 20210126623
- Publication date Apr 29, 2021
- Samsung Electro-Mechanics Co., Ltd.
- Chan Yong JEONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
- Publication number 20200407218
- Publication date Dec 31, 2020
- The Royal Institution for the Advancement of Learning / McGill University
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTROMECHANICALLY DAMPED RESONATOR DEVICES AND METHODS
- Publication number 20200358420
- Publication date Nov 12, 2020
- ALEXANDRE ROBICHAUD
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION
- Publication number 20200309527
- Publication date Oct 1, 2020
- The Regents of the University of California
- Andrei M. SHKEL
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
RESONANCE DEVICE AND METHOD FOR PRODUCING RESONANCE DEVICE
- Publication number 20200295732
- Publication date Sep 17, 2020
- Murata Manufacturing Co., Ltd.
- Masakazu Fukumitsu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
CLOCK GLITCH MITIGATION APPARATUS AND METHOD
- Publication number 20200285267
- Publication date Sep 10, 2020
- Intel Corporation
- Mohamed A. Abdelmoneum
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
DEVICE PACKAGING USING A RECYCLABLE CARRIER SUBSTRATE
- Publication number 20200243369
- Publication date Jul 30, 2020
- SKYWORKS SOLUTIONS, INC.
- Jiro Yota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESONANCE DEVICE
- Publication number 20200244222
- Publication date Jul 30, 2020
- Murata Manufacturing Co., Ltd.
- Keiichi Umeda
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ELECTRONIC PACKAGE INCLUDING CAVITY FORMED BY REMOVAL OF SACRIFICIA...
- Publication number 20200153407
- Publication date May 14, 2020
- SKYWORKS FILTER SOLUTIONS JAPAN CO., LTD.
- Atsushi Takano
- B81 - MICRO-STRUCTURAL TECHNOLOGY

of micro-electro-mechanical resonators or networks

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

MEMS resonator with colocated temperature sensor

Methods and devices for microelectromechanical resonators

Methods and devices for microelectromechanical resonators

Vibrator device and method for manufacturing vibrator device

Enhanced electronic sensors

Piezoelectric MEMS resonators based on porous silicon technologies

Intraluminal ultrasound imaging device comprising a substrate separ...

Resonance device and manufacturing method of resonance device

Resonator electrode shields

MEMS resonator with co-located temperature sensor

Temperature stable MEMS resonator

Resonance device and method for producing resonance device

Fused quartz dual shell resonator and method of fabrication

Three dimensional microstructures with selectively removed regions...

Methods and devices for microelectromechanical resonators

Piezoelectric MEMS resonators based on porous silicon technologies

Guided wave devices with selectively loaded piezoelectric layers

Resonator electrode shields

Electronic package including cavity formed by removal of sacrificia...

Methods and devices for microelectromechanical resonators

Temperature stable MEMS resonator

Clock glitch mitigation apparatus and method

Resonator electrode shields

Method for manufacturing a micromechanical layer structure

Resonator device

Electromechanically damped resonator devices and methods

Communication module

Component with a thin-layer covering and method for its production

Frequency compensated oscillator design for process tolerances

Methods and devices for microelectromechanical pressure sensors

Patents Applicationslast 30 patents

ION IRRADIATION OF MICROELECTROMECHANICAL RESONATORS

MEMS RESONATOR AND MEMS RESONATOR PROCESSING METHOD

RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME

FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION

Non-Lid-Bonded MEMS Resonator With Phosphorus Dopant

Three Dimensional Microstructures With Selectively Removed Regions...

METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS

MEMS RESONATOR AND MANUFACTURING METHOD

RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD

RESONANCE DEVICE, COLLECTIVE SUBSTRATE, AND RESONANCE DEVICE MANUFA...

Piezoelectric MEMS Resonators based on Porous Silicon Technologies

BULK ACOUSTIC WAVE DEVICE PACKAGING WITH REDISTRIBUTION USING SILIC...

METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS

METHOD OF MANUFACTURING COLLECTIVE SUBSTRATE AND COLLECTIVE SUBSTRATE

RESONANCE DEVICE AND METHOD FOR MANUFACTURING SAME

Vibrator Device And Method For Manufacturing Vibrator Device

RESONANCE DEVICE AND RESONANCE DEVICE MANUFACTURING METHOD

METHOD FOR MANUFACTURING A MICROMECHANICAL LAYER STRUCTURE

RESONATOR DEVICE

HIGH ELECTROMECHANICAL COUPLING STRENGTH HOLLOW DISK RESONATORS

RESONANCE DEVICE AND MANUFACTURING METHOD OF RESONANCE DEVICE

COMMUNICATION MODULE

METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS

ELECTROMECHANICALLY DAMPED RESONATOR DEVICES AND METHODS

FUSED QUARTZ DUAL SHELL RESONATOR AND METHOD OF FABRICATION

RESONANCE DEVICE AND METHOD FOR PRODUCING RESONANCE DEVICE

CLOCK GLITCH MITIGATION APPARATUS AND METHOD

DEVICE PACKAGING USING A RECYCLABLE CARRIER SUBSTRATE

RESONANCE DEVICE

ELECTRONIC PACKAGE INCLUDING CAVITY FORMED BY REMOVAL OF SACRIFICIA...