of micro-electro-mechanical resonators

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HELECTRICITY H03Electronic circuits H03HIMPEDANCE NETWORKS H03H9/00Networks comprising electromechanical or electro-acoustic devices Electromechanical resonators

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H03H9/2405of micro-electro-mechanical resonators

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Patents Grantslast 30 patents

Information Patent Grant
Resonator electrode shields
- Patent number 12,212,304
- Issue date Jan 28, 2025
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Method for manufacturing a piezoelectric resonator
- Patent number 12,160,215
- Issue date Dec 3, 2024
- Robert Bosch GmbH
- Friedjof Heuck
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 12,081,192
- Issue date Sep 3, 2024
- Stathera IP Holdings, Inc.
- Vamsy P. Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 12,071,342
- Issue date Aug 27, 2024
- Stathera IP Holding, Inc.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Piezoelectric MEMS resonators based on porous silicon technologies
- Patent number 12,034,431
- Issue date Jul 9, 2024
- Xiang Zheng Tu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
MEMS resonator with beam segments having predefined angular offset...
- Patent number 11,897,757
- Issue date Feb 13, 2024
- SiTime Corporation
- Renata M. Berger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Multi-die integrated circuit package
- Patent number 11,807,518
- Issue date Nov 7, 2023
- SiTime Corporation
- Renata M. Berger
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator electrode shields
- Patent number 11,799,449
- Issue date Oct 24, 2023
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Sensor interface including resonator and differential amplifier
- Patent number 11,770,658
- Issue date Sep 26, 2023
- Samsung Electronics Co., Ltd.
- Hyunwook Kang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 11,764,751
- Issue date Sep 19, 2023
- SiTime Corporation
- Paul M. Hagelin
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Three dimensional microstructures with selectively removed regions...
- Patent number 11,703,331
- Issue date Jul 18, 2023
- The Regents of the University of Michigan
- Khalil Najafi
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 11,664,781
- Issue date May 30, 2023
- STATHERA IP HOLDINGS INC.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Transversely-excited film bulk acoustic resonator comprising small...
- Patent number 11,632,096
- Issue date Apr 18, 2023
- Murata Manufacturing Co., Ltd.
- Neal Fenzi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Piezoelectric MEMS resonators based on porous silicon technologies
- Patent number 11,601,111
- Issue date Mar 7, 2023
- Xiang Zheng Tu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Nonlinear acoustic medium
- Patent number 11,581,871
- Issue date Feb 14, 2023
- FemtoDx, Inc.
- Pritiraj Mohanty
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator electrode shields
- Patent number 11,545,959
- Issue date Jan 3, 2023
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Methods and devices for microelectromechanical resonators
- Patent number 11,479,460
- Issue date Oct 25, 2022
- STATHERA IP HOLDINGS INC.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Temperature stable MEMS resonator
- Patent number 11,469,734
- Issue date Oct 11, 2022
- SiTime Corporation
- Paul M. Hagelin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonator electrode shields
- Patent number 11,444,600
- Issue date Sep 13, 2022
- SiTime Corporation
- David Raymond Pedersen
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonance device and method for manufacturing resonance device
- Patent number 11,411,546
- Issue date Aug 9, 2022
- Murata Manufacturing Co., Ltd.
- Yuichi Goto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Resonator and resonance device
- Patent number 11,368,140
- Issue date Jun 21, 2022
- Murata Manufacturing Co., Ltd.
- Toshio Nishimura
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator and resonance device
- Patent number 11,329,624
- Issue date May 10, 2022
- Murata Manufacturing Co., Ltd.
- Yuichi Goto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
MEMS frequency-tuning springs
- Patent number 11,296,671
- Issue date Apr 5, 2022
- Murata Manufacturing Co., Ltd.
- Matti Liukku
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micro-electro-mechanical device with reduced temperature sensitivit...
- Patent number 11,277,112
- Issue date Mar 15, 2022
- STMicroelectronics S.r.l.
- Gabriele Gattere
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Transversely-excited film bulk acoustic resonator comprising small...
- Patent number 11,264,969
- Issue date Mar 1, 2022
- Resonant Inc.
- Neal Fenzi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Resonator and resonance device
- Patent number 11,251,776
- Issue date Feb 15, 2022
- Murata Manufacturing Co., Ltd.
- Toshio Nishimura
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Micromechanical device and related methods
- Patent number 11,239,825
- Issue date Feb 1, 2022
- FemtoDx, Inc.
- Pritiraj Mohanty
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Piezoelectric vibrator and piezoelectric vibration device
- Patent number 11,196,403
- Issue date Dec 7, 2021
- Murata Manufacturing Co., Ltd.
- Ryota Kawai
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Grant
Methods and devices for microelectromechanical pressure sensors
- Patent number 11,111,135
- Issue date Sep 7, 2021
- MY01 IP Holdings Inc.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Temperature stable mems resonator
- Patent number 11,082,024
- Issue date Aug 3, 2021
- SiTime Corporation
- Paul M. Hagelin
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SINGLE ANCHOR RESONATORS
- Publication number 20240186976
- Publication date Jun 6, 2024
- Panasonic Intellectual Property Management Co., Ltd.
- Amir RAHAFROOZ
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Three Dimensional Microstructures With Selectively Removed Regions...
- Publication number 20240019249
- Publication date Jan 18, 2024
- The Regents of the University of Michigan
- Khalil NAJAFI
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MEMS RESONATOR WITH TEMPERATURE COMPENSATION
- Publication number 20240007078
- Publication date Jan 4, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Udit RAWAT
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
- Publication number 20230308076
- Publication date Sep 28, 2023
- Stathera IP Holdings Inc.
- Vamsy P. Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Piezoelectric MEMS Resonators based on Porous Silicon Technologies
- Publication number 20230116933
- Publication date Apr 20, 2023
- Xiang Zheng Tu
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
BULK ACOUSTIC WAVE DEVICE PACKAGING WITH REDISTRIBUTION USING SILIC...
- Publication number 20230115592
- Publication date Apr 13, 2023
- Skyworks Solutions, Inc.
- Atsushi Takano
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
- Publication number 20230051438
- Publication date Feb 16, 2023
- Stathera IP Holdings Inc.
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR MANUFACTURING A PIEZOELECTRIC RESONATOR
- Publication number 20220231652
- Publication date Jul 21, 2022
- ROBERT BOSCH GmbH
- Friedjof Heuck
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR COMPRISING SMALL...
- Publication number 20220094329
- Publication date Mar 24, 2022
- Resonant inc.
- Neal Fenzi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONATOR AND RESONANCE DEVICE
- Publication number 20220094332
- Publication date Mar 24, 2022
- Murata Manufacturing Co., Ltd.
- Toshio Nishimura
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR COMPRISING SMALL...
- Publication number 20220045661
- Publication date Feb 10, 2022
- Resonant inc.
- Neal Fenzi
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONANCE DEVICE AND METHOD FOR MANUFACTURING RESONANCE DEVICE
- Publication number 20210384882
- Publication date Dec 9, 2021
- Murata Manufacturing Co., Ltd.
- Yuichi Goto
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
- Publication number 20200407218
- Publication date Dec 31, 2020
- The Royal Institution for the Advancement of Learning / McGill University
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICRO-ELECTRO-MECHANICAL DEVICE WITH REDUCED TEMPERATURE SENSITIVIT...
- Publication number 20200373904
- Publication date Nov 26, 2020
- STMicroelectronics S.r.l.
- Gabriele Gattere
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
SUSPENDED MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES
- Publication number 20200283291
- Publication date Sep 10, 2020
- Analog Devices International Unlimited Company
- Kotlanka Rama Krishna
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
INDUCTIVELY-COUPLED MEMS RESONATORS
- Publication number 20200212881
- Publication date Jul 2, 2020
- TEXAS INSTRUMENTS INCORPORATED
- Bichoy BAHR
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHODS FOR OPTICAL EXCITATION OF ACOUSTIC RESONANCE IN...
- Publication number 20200173779
- Publication date Jun 4, 2020
- HONEYWELL INTERNATIONAL INC.
- Eugene Freeman
- G01 - MEASURING TESTING
Information Patent Application
RADIATION-HARD PRECISION VOLTAGE REFERENCE
- Publication number 20200028509
- Publication date Jan 23, 2020
- The Charles Stark Draper Laboratory, Inc.
- Paul A. Ward
- G05 - CONTROLLING REGULATING
Information Patent Application
CHARACTERIZATION AND DRIVING METHOD BASED ON THE SECOND HARMONIC, W...
- Publication number 20190296711
- Publication date Sep 26, 2019
- Haluk KULAH
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS
- Publication number 20190225488
- Publication date Jul 25, 2019
- The Royal Institution for the Advancement of Learning / McGill University
- Vamsy Chodavarapu
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL RESONATOR
- Publication number 20190173450
- Publication date Jun 6, 2019
- Teknologian Tutkimuskeskus VTT Oy
- Antti JAAKKOLA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Low-Power Microelectromechanical SystemResonator Based Oscillator U...
- Publication number 20190109561
- Publication date Apr 11, 2019
- TEXAS INSTRUMENTS INCORPORATED
- Bichoy Bahr
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MICROMECHANICAL RESONATOR AND RESONATOR SYSTEM INCLUDING THE SAME
- Publication number 20190028084
- Publication date Jan 24, 2019
- Samsung Electronics Co., Ltd.
- Yongseop YOON
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
ANGULAR RATE SENSOR WITH IN-PHASE MOTION SUPPRESSION STRUCTURE
- Publication number 20190017823
- Publication date Jan 17, 2019
- NXP USA, INC.
- Peng Shao
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR RESONATOR AMPLITUDE CONTROL
- Publication number 20180226938
- Publication date Aug 9, 2018
- Murata Manufacturing Co., Ltd.
- Heikki KUISMA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONATOR AND RESONANCE DEVICE
- Publication number 20180191329
- Publication date Jul 5, 2018
- Murata Manufacturing Co., Ltd.
- Toshio Nishimura
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
RESONATOR AND RESONANCE DEVICE
- Publication number 20180191330
- Publication date Jul 5, 2018
- Murata Manufacturing Co., Ltd.
- Toshio Nishimura
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MEMS RESONATOR WITH SUPPRESSED SPURIOUS MODES
- Publication number 20180175825
- Publication date Jun 21, 2018
- Murata Manufacturing Co., Ltd.
- VILLE KAAJAKARI
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
Microelectromechanical Resonant Circulator
- Publication number 20180138889
- Publication date May 17, 2018
- Northeastern University
- Matteo RINALDI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VIBRATION TRANSDUCER
- Publication number 20180138887
- Publication date May 17, 2018
- YOKOGAWA ELECTRIC CORPORATION
- Takeshi MISHIMA
- B81 - MICRO-STRUCTURAL TECHNOLOGY

of micro-electro-mechanical resonators

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Resonator electrode shields

Method for manufacturing a piezoelectric resonator

Methods and devices for microelectromechanical resonators

Methods and devices for microelectromechanical resonators

Piezoelectric MEMS resonators based on porous silicon technologies

MEMS resonator with beam segments having predefined angular offset...

Multi-die integrated circuit package

Resonator electrode shields

Sensor interface including resonator and differential amplifier

Temperature stable MEMS resonator

Three dimensional microstructures with selectively removed regions...

Methods and devices for microelectromechanical resonators

Transversely-excited film bulk acoustic resonator comprising small...

Piezoelectric MEMS resonators based on porous silicon technologies

Nonlinear acoustic medium

Resonator electrode shields

Methods and devices for microelectromechanical resonators

Temperature stable MEMS resonator

Resonator electrode shields

Resonance device and method for manufacturing resonance device

Resonator and resonance device

Resonator and resonance device

MEMS frequency-tuning springs

Micro-electro-mechanical device with reduced temperature sensitivit...

Transversely-excited film bulk acoustic resonator comprising small...

Resonator and resonance device

Micromechanical device and related methods

Piezoelectric vibrator and piezoelectric vibration device

Methods and devices for microelectromechanical pressure sensors

Temperature stable mems resonator

Patents Applicationslast 30 patents

SINGLE ANCHOR RESONATORS

Three Dimensional Microstructures With Selectively Removed Regions...

MEMS RESONATOR WITH TEMPERATURE COMPENSATION

METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS

Piezoelectric MEMS Resonators based on Porous Silicon Technologies

BULK ACOUSTIC WAVE DEVICE PACKAGING WITH REDISTRIBUTION USING SILIC...

METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS

METHOD FOR MANUFACTURING A PIEZOELECTRIC RESONATOR

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR COMPRISING SMALL...

RESONATOR AND RESONANCE DEVICE

TRANSVERSELY-EXCITED FILM BULK ACOUSTIC RESONATOR COMPRISING SMALL...

RESONANCE DEVICE AND METHOD FOR MANUFACTURING RESONANCE DEVICE

METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS

MICRO-ELECTRO-MECHANICAL DEVICE WITH REDUCED TEMPERATURE SENSITIVIT...

SUSPENDED MICROELECTROMECHANICAL SYSTEM (MEMS) DEVICES

INDUCTIVELY-COUPLED MEMS RESONATORS

SYSTEM AND METHODS FOR OPTICAL EXCITATION OF ACOUSTIC RESONANCE IN...

RADIATION-HARD PRECISION VOLTAGE REFERENCE

CHARACTERIZATION AND DRIVING METHOD BASED ON THE SECOND HARMONIC, W...

METHODS AND DEVICES FOR MICROELECTROMECHANICAL RESONATORS

MICROMECHANICAL RESONATOR

Low-Power Microelectromechanical SystemResonator Based Oscillator U...

MICROMECHANICAL RESONATOR AND RESONATOR SYSTEM INCLUDING THE SAME

ANGULAR RATE SENSOR WITH IN-PHASE MOTION SUPPRESSION STRUCTURE

SYSTEM AND METHOD FOR RESONATOR AMPLITUDE CONTROL

RESONATOR AND RESONANCE DEVICE

RESONATOR AND RESONANCE DEVICE

MEMS RESONATOR WITH SUPPRESSED SPURIOUS MODES

Microelectromechanical Resonant Circulator

VIBRATION TRANSDUCER