of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Industry

CPC
Y02C20/30

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Parent Industries

YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y02Climate change prevention Y02CCAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSE GASES [GHG] Y02C20/00Capture or disposal of greenhouse gases [GHG] other than CO2

Current Industry

Y02C20/30of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Plasma abatement system utilizing water vapor and oxygen reagent
- Patent number 12,170,192
- Issue date Dec 17, 2024
- Applied Materials, Inc.
- Colin John Dickinson
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Methods to produce zeolites with the GME topology and compositions...
- Patent number 11,691,131
- Issue date Jul 4, 2023
- California Institute of Technology
- Michiel J. Dusselier
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
In situ apparatus and method for providing deuterium oxide or triti...
- Patent number 11,649,165
- Issue date May 16, 2023
- SUSTAINABLE INNOVATIONS, INC.
- Daryl Ludlow
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Zincoaluminosilicates with GME topologies and methods of making and...
- Patent number 11,583,838
- Issue date Feb 21, 2023
- California Institute of Technology
- Michiel J. Dusselier
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Stamps including a self-assembled block copolymer material, and rel...
- Patent number 11,560,009
- Issue date Jan 24, 2023
- Micron Technology, Inc.
- Dan B. Millward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method and apparatus for deposition cleaning in a pumping line
- Patent number 11,367,598
- Issue date Jun 21, 2022
- MKS Instruments, Inc.
- Gordon Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma abatement of compounds containing heavy atoms
- Patent number 11,185,815
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Abatement and strip process chamber in a dual loadlock configuration
- Patent number 11,177,136
- Issue date Nov 16, 2021
- APPLIED MATERIALS, INC.
- Jared Ahmad Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Zincoaluminosilicates with CHA topologies and methods of making and...
- Patent number 11,167,276
- Issue date Nov 9, 2021
- California Institute of Technology
- Michiel J. Dusselier
- C10 - PETROLEUM, GAS OR COKE INDUSTRIES TECHNICAL GASES CONTAINING CARBON MON...
Information Patent Grant
Abatement and strip process chamber in a dual load lock configuration
- Patent number 11,171,008
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Jared Ahmad Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Zeolites with the GME topology and methods of using the same
- Patent number 11,167,275
- Issue date Nov 9, 2021
- California Institute of Technology
- Michiel J. Dusselier
- C10 - PETROLEUM, GAS OR COKE INDUSTRIES TECHNICAL GASES CONTAINING CARBON MON...
Information Patent Grant
Apparatus for exhaust cooling
- Patent number 11,114,285
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Michael S. Cox
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for treating sulfur hexafluoride using radiation and apparat...
- Patent number 11,058,984
- Issue date Jul 13, 2021
- Korea Atomic Energy Research Institute
- In-Ha Jung
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method and apparatus for deposition cleaning in a pumping line
- Patent number 11,024,489
- Issue date Jun 1, 2021
- MKS Instruments, Inc.
- Gordon Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process for purifying (hydro)fluoropropenes contaminated with halog...
- Patent number 11,007,471
- Issue date May 18, 2021
- MEXICHEM FLUOR S.A. DE C.V.
- Andrew Sharratt
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Vacuum evacuation system
- Patent number 10,978,315
- Issue date Apr 13, 2021
- Ebara Corporation
- Atsushi Shiokawa
- G05 - CONTROLLING REGULATING
Information Patent Grant
Plasma foreline thermal reactor system
- Patent number 10,920,315
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Colin John Dickinson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming a self-assembled block copolymer material
- Patent number 10,828,924
- Issue date Nov 10, 2020
- Micron Technology, Inc.
- Dan B. Millward
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Ethylene disposal apparatus and ethylene disposal method using same
- Patent number 10,716,312
- Issue date Jul 21, 2020
- Korea Basic Science Institute
- Young Sun Mok
- A23 - FOODS OR FOODSTUFFS THEIR TREATMENT, NOT COVERED BY OTHER CLASSES
Information Patent Grant
Abatement system
- Patent number 10,702,824
- Issue date Jul 7, 2020
- Edwards Limited
- Gary Peter Knight
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma abatement technology utilizing water vapor and oxygen reagent
- Patent number 10,685,818
- Issue date Jun 16, 2020
- Applied Materials, Inc.
- Colin John Dickinson
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Vacuum pump with abatement function
- Patent number 10,641,272
- Issue date May 5, 2020
- Ebara Corporation
- Koichi Iwasaki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum pump with abatement function
- Patent number 10,641,256
- Issue date May 5, 2020
- Ebara Corporation
- Hiroki Furuta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for evacuating a corrosive effluent gas stream from a pro...
- Patent number 10,625,205
- Issue date Apr 21, 2020
- Edwards Limited
- Christopher Mark Bailey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma abatement solids avoidance by use of oxygen plasma cleaning...
- Patent number 10,625,312
- Issue date Apr 21, 2020
- Applied Materials, Inc.
- Colin John Dickinson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Abatement device
- Patent number 10,618,004
- Issue date Apr 14, 2020
- Edwards Japan Limited
- Toshiki Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Hydrochloric acid purification process and plant
- Patent number 10,576,417
- Issue date Mar 3, 2020
- Arkema France
- Marianne Launay
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Enhancement of claus tail gas treatment by sulfur dioxide-selective...
- Patent number 10,508,033
- Issue date Dec 17, 2019
- Saudi Arabian Oil Company
- Jean-Pierre R. Ballaguet
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Process for purifying (hydro) fluoropropenes contaminated with halo...
- Patent number 10,456,730
- Issue date Oct 29, 2019
- MEXICHEM FLUOR S.A. DE C.V.
- Andrew Sharratt
- F25 - REFRIGERATION OR COOLING COMBINED HEATING AND REFRIGERATION SYSTEMS HEA...
Information Patent Grant
Abatement and strip process chamber in a dual loadlock configuration
- Patent number 10,453,694
- Issue date Oct 22, 2019
- Applied Materials, Inc.
- Jared Ahmad Lee
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...

Patents Applicationslast 30 patents

Information Patent Application
FLUORORESIN MEMBRANE MATERIAL AND PRODUCTION PROCESS THEREFOR
- Publication number 20230249128
- Publication date Aug 10, 2023
- TAIYO KOGYO CORPORATION
- Kazuhiro Abe
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
ZINCOALUMINOSILICATES WITH GME TOPOLOGIES AND METHODS OF MAKING AND...
- Publication number 20210346874
- Publication date Nov 11, 2021
- California Institute of Technology
- MICHIEL J. DUSSELIER
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Application
Method and Apparatus for Deposition Cleaning in a Pumping Line
- Publication number 20210082672
- Publication date Mar 18, 2021
- MKS Instruments, Inc.
- Gordon Hill
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS TO PRODUCE ZEOLITES WITH THE GME TOPOLOGY AND COMPOSITIONS...
- Publication number 20210069682
- Publication date Mar 11, 2021
- California Institute of Technology
- MICHIEL J. DUSSELIER
- C01 - INORGANIC CHEMISTRY
Information Patent Application
PLASMA ABATEMENT TECHNOLOGY UTILIZING WATER VAPOR AND OXYGEN REAGENT
- Publication number 20200357615
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- Colin John DICKINSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN SITU APPARATUS AND METHOD FOR PROVIDING DEUTERIUM OXIDE OR TRITI...
- Publication number 20200346927
- Publication date Nov 5, 2020
- Skyre, Inc.
- Daryl Ludlow
- C01 - INORGANIC CHEMISTRY
Information Patent Application
Method and Apparatus for Deposition Cleaning in a Pumping Line
- Publication number 20200075298
- Publication date Mar 5, 2020
- MKS Instruments, Inc.
- Gordon Hill
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Application
PROCESS FOR PURIFYING (HYDRO)FLUOROPROPENES CONTAMINATED WITH HALOG...
- Publication number 20200038800
- Publication date Feb 6, 2020
- MEXICHEM FLUOR S.A. DE C.V.
- Andrew Sharratt
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION
- Publication number 20200027742
- Publication date Jan 23, 2020
- Applied Materials, Inc.
- Jared Ahmad Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA FORELINE THERMAL REACTOR SYSTEM
- Publication number 20190226083
- Publication date Jul 25, 2019
- Applied Materials, Inc.
- Colin John DICKINSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chamber Cleaning and Semiconductor Etching Gases
- Publication number 20190027375
- Publication date Jan 24, 2019
- THE CHEMOURS COMPANY FC, LLC
- Sheng Peng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Chamber Cleaning and Semiconductor Etching Gases
- Publication number 20180366339
- Publication date Dec 20, 2018
- THE CHEMOURS COMPANY FC, LLC
- Sheng Peng
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS CONTAINING CHLOROFLUOROOLEFINS OR FLUOROOLEFINS
- Publication number 20180346781
- Publication date Dec 6, 2018
- HONEYWELL INTERNATIONAL INC.
- Robert C. Johnson
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information Patent Application
PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS
- Publication number 20180318758
- Publication date Nov 8, 2018
- Applied Materials, Inc.
- Michael S. COX
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STAMPS INCLUDING A SELF-ASSEMBLED BLOCK COPOLYMER MATERIAL, AND REL...
- Publication number 20180281499
- Publication date Oct 4, 2018
- Micron Technology, Inc.
- Dan B. Millward
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD
- Publication number 20180233333
- Publication date Aug 16, 2018
- MKS Instruments, Inc.
- Xing Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSES FOR PREPARING ZINCOALUMINOSILICATES WITH AEI, CHA, AND GM...
- Publication number 20180154342
- Publication date Jun 7, 2018
- California Institute of Technology
- MICHIEL J. DUSSELIER
- C01 - INORGANIC CHEMISTRY
Information Patent Application
METHODS TO PRODUCE ZEOLITES WITH THE GME TOPOLOGY AND COMPOSITIONS...
- Publication number 20180126364
- Publication date May 10, 2018
- California Institute of Technology
- MICHIEL J. DUSSELIER
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
CATALYST FOR DECOMPOSITION OF PERFLUORINATED COMPOUND CONTAINING HA...
- Publication number 20140329667
- Publication date Nov 6, 2014
- ECOPRO CO., LTD.
- Won Choon Choi
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
VACUUM PUMP WITH ABATEMENT FUNCTION
- Publication number 20140290919
- Publication date Oct 2, 2014
- Kohtaro KAWAMURA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS PUMPING AND TREATMENT DEVICE
- Publication number 20140294609
- Publication date Oct 2, 2014
- Julien Palisson
- F04 - POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC...
Information Patent Application
COMPOSITIONS CONTAINING CHLORFLUOROOLEFINS OR FLUOROOLEFINS
- Publication number 20140284510
- Publication date Sep 25, 2014
- Robert C. Johnson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS SLEEVE FOR FORELINE PLASMA ABATEMENT SYSTEM
- Publication number 20140262033
- Publication date Sep 18, 2014
- Applied Materials, Inc.
- ANDREW HERBERT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Toroidal plasma Abatement Apparatus and Method
- Publication number 20140262746
- Publication date Sep 18, 2014
- MKS Instruments, Inc.
- Xing Chen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
AZEOTROPE-LIKE COMPOSITIONS COMPRISING 1-CHLORO-3,3,3-TRIFLUOROPROPENE
- Publication number 20140206589
- Publication date Jul 24, 2014
- Kane D. Cook
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
USE OF A KMGF3 COMPOUND FOR TRAPPING METALS IN THE FORM OF FLUORIDE...
- Publication number 20140112846
- Publication date Apr 24, 2014
- COMURHEX Societe pour la Conversion de I'Uranium en Metal et Hexafluorure
- Bertrand Morel
- C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
Information Patent Application
APPARATUS FOR TREATING A GAS STREAM
- Publication number 20140079617
- Publication date Mar 20, 2014
- EDWARDS LIMITED
- Robert Bruce Grant
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
IN-SITU GENERATION OF THE MOLECULAR ETCHER CARBONYL FLUORIDE OR ANY...
- Publication number 20140060571
- Publication date Mar 6, 2014
- Matheson Tri-Gas, Inc.
- Glenn Mitchell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS TO ENHANCE MIXING OF DRY SORBENTS AND FLUE GAS FOR AIR POLL...
- Publication number 20140030178
- Publication date Jan 30, 2014
- ADA-ES, INC.
- Cameron E. Martin
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD FOR CONTROLLING ACIDIC COMPOUNDS PRODUCED FOR OXY-COMBUSTION...
- Publication number 20140000311
- Publication date Jan 2, 2014
- Dennis K. McDonald
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL

of perfluorocarbons [PFC], hydrofluorocarbons [HFC] or sulfur hexafluoride [SF6]

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Plasma abatement system utilizing water vapor and oxygen reagent

Methods to produce zeolites with the GME topology and compositions...

In situ apparatus and method for providing deuterium oxide or triti...

Zincoaluminosilicates with GME topologies and methods of making and...

Stamps including a self-assembled block copolymer material, and rel...

Method and apparatus for deposition cleaning in a pumping line

Plasma abatement of compounds containing heavy atoms

Abatement and strip process chamber in a dual loadlock configuration

Zincoaluminosilicates with CHA topologies and methods of making and...

Abatement and strip process chamber in a dual load lock configuration

Zeolites with the GME topology and methods of using the same

Apparatus for exhaust cooling

Method for treating sulfur hexafluoride using radiation and apparat...

Method and apparatus for deposition cleaning in a pumping line

Process for purifying (hydro)fluoropropenes contaminated with halog...

Vacuum evacuation system

Plasma foreline thermal reactor system

Methods of forming a self-assembled block copolymer material

Ethylene disposal apparatus and ethylene disposal method using same

Abatement system

Plasma abatement technology utilizing water vapor and oxygen reagent

Vacuum pump with abatement function

Vacuum pump with abatement function

Apparatus for evacuating a corrosive effluent gas stream from a pro...

Plasma abatement solids avoidance by use of oxygen plasma cleaning...

Abatement device

Hydrochloric acid purification process and plant

Enhancement of claus tail gas treatment by sulfur dioxide-selective...

Process for purifying (hydro) fluoropropenes contaminated with halo...

Abatement and strip process chamber in a dual loadlock configuration

Patents Applicationslast 30 patents

FLUORORESIN MEMBRANE MATERIAL AND PRODUCTION PROCESS THEREFOR

ZINCOALUMINOSILICATES WITH GME TOPOLOGIES AND METHODS OF MAKING AND...

Method and Apparatus for Deposition Cleaning in a Pumping Line

METHODS TO PRODUCE ZEOLITES WITH THE GME TOPOLOGY AND COMPOSITIONS...

PLASMA ABATEMENT TECHNOLOGY UTILIZING WATER VAPOR AND OXYGEN REAGENT

IN SITU APPARATUS AND METHOD FOR PROVIDING DEUTERIUM OXIDE OR TRITI...

Method and Apparatus for Deposition Cleaning in a Pumping Line

PROCESS FOR PURIFYING (HYDRO)FLUOROPROPENES CONTAMINATED WITH HALOG...

ABATEMENT AND STRIP PROCESS CHAMBER IN A DUAL LOADLOCK CONFIGURATION

PLASMA FORELINE THERMAL REACTOR SYSTEM

Chamber Cleaning and Semiconductor Etching Gases

Chamber Cleaning and Semiconductor Etching Gases

COMPOSITIONS CONTAINING CHLOROFLUOROOLEFINS OR FLUOROOLEFINS

PLASMA ABATEMENT OF COMPOUNDS CONTAINING HEAVY ATOMS

STAMPS INCLUDING A SELF-ASSEMBLED BLOCK COPOLYMER MATERIAL, AND REL...

TOROIDAL PLASMA ABATEMENT APPARATUS AND METHOD

PROCESSES FOR PREPARING ZINCOALUMINOSILICATES WITH AEI, CHA, AND GM...

METHODS TO PRODUCE ZEOLITES WITH THE GME TOPOLOGY AND COMPOSITIONS...

CATALYST FOR DECOMPOSITION OF PERFLUORINATED COMPOUND CONTAINING HA...

VACUUM PUMP WITH ABATEMENT FUNCTION

GAS PUMPING AND TREATMENT DEVICE

COMPOSITIONS CONTAINING CHLORFLUOROOLEFINS OR FLUOROOLEFINS

GAS SLEEVE FOR FORELINE PLASMA ABATEMENT SYSTEM

Toroidal plasma Abatement Apparatus and Method

AZEOTROPE-LIKE COMPOSITIONS COMPRISING 1-CHLORO-3,3,3-TRIFLUOROPROPENE

USE OF A KMGF3 COMPOUND FOR TRAPPING METALS IN THE FORM OF FLUORIDE...

APPARATUS FOR TREATING A GAS STREAM

IN-SITU GENERATION OF THE MOLECULAR ETCHER CARBONYL FLUORIDE OR ANY...

PROCESS TO ENHANCE MIXING OF DRY SORBENTS AND FLUE GAS FOR AIR POLL...

METHOD FOR CONTROLLING ACIDIC COMPOUNDS PRODUCED FOR OXY-COMBUSTION...