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ELECTRICITY
H01
Electric elements
H01L
SEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
H01L21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/67265
of substrates stored in a container, a magazine, a carrier, a boat or the like
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last 30 patents
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Patent Grant
Apparatus and method for inspecting wafer carriers
Patent number
11,929,271
Issue date
Mar 12, 2024
Taiwan Semiconductor Manufacturing Co., Ltd.
Cheng-Kang Hu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for detecting a wafer in a cassette
Patent number
11,923,223
Issue date
Mar 5, 2024
Disco Corporation
Yoshinobu Saito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Tool auto-teach method and apparatus
Patent number
11,908,721
Issue date
Feb 20, 2024
BROOKS AUTOMATION US, LLC
Jairo T. Moura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Robot system, and slip determination method
Patent number
11,862,507
Issue date
Jan 2, 2024
Kawasaki Jukogyo Kabushiki Kaisha
Masaya Yoshida
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
System for a semiconductor fabrication facility and method for oper...
Patent number
11,854,846
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Company Ltd.
Fu-Hsien Li
B66 - HOISTING LIFTING HAULING
Information
Patent Grant
Method of operating transport system
Patent number
11,854,844
Issue date
Dec 26, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Chi-Yuan Chu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Preparation method for bifacial perc solar cell
Patent number
11,848,395
Issue date
Dec 19, 2023
GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY CO., LTD.
Jiebin Fang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of storing workpiece using workpiece storage system
Patent number
11,848,221
Issue date
Dec 19, 2023
Taiwan Semiconductor Manufacturing Co., Ltd
Tzu-Chi Chiu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Stacking apparatus and stacking method
Patent number
11,823,935
Issue date
Nov 21, 2023
Nikon Corporation
Hajime Mitsuishi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate processing apparatus and monitoring method
Patent number
11,765,879
Issue date
Sep 19, 2023
Tokyo Electron Limited
Junnosuke Taguchi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate treating apparatus
Patent number
11,756,813
Issue date
Sep 12, 2023
Semes Co., Ltd.
Yong Seok Jang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Container, container partition plate, substrate processing system,...
Patent number
11,735,448
Issue date
Aug 22, 2023
Tokyo Electron Limited
Toshiaki Toyomaki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatuses for executing a direct transfer of a semiconductor devi...
Patent number
11,728,195
Issue date
Aug 15, 2023
Rohinni, Inc.
Andrew Huska
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Front surface and back surface orientation detection of transparent...
Patent number
11,728,191
Issue date
Aug 15, 2023
Applied Materials, Inc.
Michelle Alejandra Wong
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrostatic capacitance sensor
Patent number
11,688,617
Issue date
Jun 27, 2023
Rorze Corporation
Yoshiki Fukuzaki
G01 - MEASURING TESTING
Information
Patent Grant
Process apparatus with on-the-fly substrate centering
Patent number
11,664,259
Issue date
May 30, 2023
BROOKS AUTOMATION US, LLC
Leigh F. Sharrock
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for PUF generation using variations in transistor threshold...
Patent number
11,664,258
Issue date
May 30, 2023
Taiwan Semiconductor Manufacturing Co., Ltd.
Shih-Lien Linus Lu
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Sensor-based correction of robot-held object
Patent number
11,626,305
Issue date
Apr 11, 2023
Applied Materials, Inc.
Nicholas Michael Kopec
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Orientation chamber of substrate processing system with purging fun...
Patent number
11,581,181
Issue date
Feb 14, 2023
Taiwan Semiconductor Manufacturing Company, Ltd
Wei-Hua Houng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Enhanced automatic wafer centering system and techniques for same
Patent number
11,581,214
Issue date
Feb 14, 2023
Lam Research Corporation
Peter S. Thaulad
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems for direct transfer of semiconductor device die
Patent number
11,562,990
Issue date
Jan 24, 2023
Rohinni, Inc.
Andrew Huska
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing semiconductor device, substrate processing...
Patent number
11,553,565
Issue date
Jan 10, 2023
Kokusai Electric Corporation
Yukitomo Hirochi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for transferring wafers
Patent number
11,551,958
Issue date
Jan 10, 2023
Taiwan Semiconductor Manufacturing Company Limited
Chung-Hsung Yang
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
11,538,700
Issue date
Dec 27, 2022
Tokyo Electron Limited
Go Ayabe
B08 - CLEANING
Information
Patent Grant
Load lock device having optical measuring device for acquiring dist...
Patent number
11,521,883
Issue date
Dec 6, 2022
NANYA TECHNOLOGY CORPORATION
Chia-Fu Chen
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate conveying robot and operation method therefor
Patent number
11,518,038
Issue date
Dec 6, 2022
Kawasaki Jukogyo Kabushiki Kaisha
Junichi Sugahara
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Grant
Direct transfer of semiconductor devices from a substrate
Patent number
11,515,293
Issue date
Nov 29, 2022
Rohinni, LLC
Andrew Huska
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Substrate storing container
Patent number
11,501,990
Issue date
Nov 15, 2022
Miraial Co., Ltd.
Chiaki Matsutori
E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES
Information
Patent Grant
Method for transfer of semiconductor devices onto glass substrates
Patent number
11,488,940
Issue date
Nov 1, 2022
Rohinni, Inc.
Andrew Huska
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Bonding apparatus, bonding system, bonding method, and recording me...
Patent number
11,488,929
Issue date
Nov 1, 2022
Tokyo Electron Limited
Takashi Nakamitsu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
WAFER POSITION DETECTION DEVICE
Publication number
20240145279
Publication date
May 2, 2024
HANGZHOU SIZONE ELECTRONIC TECHNOLOGY INC.
Xiaoyu XU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT-EMITTING ELEMENT TRANSFER SYSTEM
Publication number
20240136208
Publication date
Apr 25, 2024
SAMSUNG DISPLAY CO., LTD.
Jeong Won HAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAPPING DEVICE AND SUBSTRATE ACCOMMODATION STATE DETERMINATION METHOD
Publication number
20240137628
Publication date
Apr 25, 2024
SINFONIA TECHNOLOGY CO., LTD.
Keigo Sato
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
LOAD PORT MODULE AND DRIVING METHOD THEREOF
Publication number
20240128104
Publication date
Apr 18, 2024
Samsung Electronics Co., Ltd.
Sang Lyong Shin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE HANDLING APPARATUS AND METHOD OF HANDLING SUBSTRATE
Publication number
20240120227
Publication date
Apr 11, 2024
KAWASAKI JUKOGYO KABUSHIKI KAISHA
Haruhiko TAN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Load Port and Wafer Inspection Method Using the Same
Publication number
20240120222
Publication date
Apr 11, 2024
Sheng Chuan Technology Co., Ltd.
Tsung-Che Yu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER SHIFT DETECTION
Publication number
20240105480
Publication date
Mar 28, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY
Ming-Sze Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR PUF GENERATION USING VARIATIONS IN TRANSISTOR THRESHOLD...
Publication number
20240079257
Publication date
Mar 7, 2024
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Shih-Lien Linus Lu
B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information
Patent Application
Apparatuses for executing a direct transfer of a semiconductor devi...
Publication number
20240038564
Publication date
Feb 1, 2024
Rohinni, LLC
Andrew Huska
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING APPARATUS C...
Publication number
20230411189
Publication date
Dec 21, 2023
SCREEN Holdings Co., Ltd.
Tetsuya SHIBATA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRONIC COMPONENT TRANSFER BY LEVITATION
Publication number
20230402302
Publication date
Dec 14, 2023
NEXPERIA B.V.
Joep Stokkermans
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PROCESS APPARATUS WITH ON-THE-FLY SUBSTRATE CENTERING
Publication number
20230386879
Publication date
Nov 30, 2023
BROOKS AUTOMATION US, LLC
Leigh F. SHARROCK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device Transfer Method, Device Transfer Machine, Target Object Tran...
Publication number
20230343625
Publication date
Oct 26, 2023
Shin-Etsu Chemical Co., Ltd.
Hiroshi Yamaoka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSOR-BASED CORRECTION OF ROBOT-HELD OBJECT
Publication number
20230307273
Publication date
Sep 28, 2023
Nicholas Michael Kopec
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
CONTAINER, CONTAINER PARTITION PLATE, SUBSTRATE PROCESSING SYSTEM,...
Publication number
20230290660
Publication date
Sep 14, 2023
TOKYO ELECTRON LIMITED
Toshiaki TOYOMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR RECOGNIZING WAFER IDENTIFICATION NUMBER WITH AUTOMATICAL...
Publication number
20230260810
Publication date
Aug 17, 2023
National Tsing Hua University
Wei-Chang YEH
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
TRANSFER CONVEYOR SYSTEM FOR SEMICONDUCTOR INSPECTING APPARATUS USI...
Publication number
20230230866
Publication date
Jul 20, 2023
ZEUS TECH CO., LTD.
Hong Youn KIM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR BONDING SEMICONDUCTOR SUBSTRATE
Publication number
20230215837
Publication date
Jul 6, 2023
Taiwan Semiconductor Manufacturing Company, Ltd.
Ying-Jui Huang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TOOL AUTO-TEACH METHOD AND APPARATUS
Publication number
20230215752
Publication date
Jul 6, 2023
BROOKS AUTOMATION US, LLC
Jairo T. Moura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DETECTION SYSTEM, DETECTION METHOD, AND STORAGE MEDIUM
Publication number
20230187247
Publication date
Jun 15, 2023
TOKYO ELECTRON LIMITED
Junnosuke MAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS FOR TRANSFERRING SUBSTRATE AND METHOD FOR TRANSFERRING SU...
Publication number
20230170239
Publication date
Jun 1, 2023
TOKYO ELECTRON LIMITED
Takehiro SHINDO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS
Publication number
20230143307
Publication date
May 11, 2023
BROOKS AUTOMATION US, LLC
Jairo T. Moura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
WAFER DETECTING APPARATUS AND WAFER DELIVERY APPARATUS
Publication number
20230147310
Publication date
May 11, 2023
Disco Corporation
Yoshinobu SAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE TRANSFER APPARATUS AND SUBSTRATE TRANSFER METHOD
Publication number
20230143372
Publication date
May 11, 2023
TOKYO ELECTRON LIMITED
Wataru MATSUMOTO
B08 - CLEANING
Information
Patent Application
METHOD OF DETECTING DEVIATION AMOUNT OF SUBSTRATE TRANSPORT POSITIO...
Publication number
20230078310
Publication date
Mar 16, 2023
TOKYO ELECTRON LIMITED
Joji TAKAYOSHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MAPPING OF A REPLACEMENT PARTS STORAGE CONTAINER
Publication number
20230058606
Publication date
Feb 23, 2023
Applied Materials, Inc.
Nicholas Michael Bergantz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LOAD PORT
Publication number
20230039017
Publication date
Feb 9, 2023
SINFONIA TECHNOLOGY CO., LTD.
Tatsuru Ogawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BONDING APPARATUS, BONDING SYSTEM, BONDING METHOD, AND RECORDING ME...
Publication number
20230026661
Publication date
Jan 26, 2023
TOKYO ELECTRON LIMITED
Takashi Nakamitsu
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
SYSTEMS AND METHODS OF PLACING SUBSTRATES IN SEMICONDUCTOR MANUFACT...
Publication number
20230016016
Publication date
Jan 19, 2023
EUGENUS, INC.
Alex Finkelman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PRE-JIG WAFER CARRIER DISC INSTALLATION/UNINSTALLATION DEVICE AND M...
Publication number
20230016132
Publication date
Jan 19, 2023
KINGTEK ELECTRONICS TECHNOLOGY CORP.
MAO-YEN SUNG
H01 - BASIC ELECTRIC ELEMENTS