off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry

Industry

CPC
G02B17/0657

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Parent Industries

GPHYSICS G02Optics G02BOPTICAL ELEMENTS, SYSTEMS, OR APPARATUS G02B17/00Systems with reflecting surfaces, with or without refracting elements

Current Industry

G02B17/0657off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
- Patent number 12,105,428
- Issue date Oct 1, 2024
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging apparatus and manufacturing method of imaging apparatus
- Patent number 11,953,665
- Issue date Apr 9, 2024
- Canon Kabushiki Kaisha
- Naoto Fuse
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Optical pulse stretcher, laser device, and electronic device manufa...
- Patent number 11,837,839
- Issue date Dec 5, 2023
- Gigaphoton Inc.
- Hirotaka Miyamoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
- Patent number 11,467,501
- Issue date Oct 11, 2022
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Small form factor 4-mirror based imaging systems
- Patent number 11,320,637
- Issue date May 3, 2022
- Youngwan Choi
- G02 - OPTICS
Information Patent Grant
Reflective image-forming optical system, exposure apparatus, and de...
- Patent number 10,976,669
- Issue date Apr 13, 2021
- Nikon Corporation
- Yoshio Kawabe
- G02 - OPTICS
Information Patent Grant
Image offsetting apparatuses, systems, and methods
- Patent number 10,877,373
- Issue date Dec 29, 2020
- John L. Baker
- G02 - OPTICS
Information Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
- Patent number 10,866,522
- Issue date Dec 15, 2020
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Reflective image-forming optical system, exposure apparatus, and de...
- Patent number 10,599,042
- Issue date Mar 24, 2020
- Nikon Corporation
- Yoshio Kawabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Off-axis reflective afocal optical relay
- Patent number 10,527,830
- Issue date Jan 7, 2020
- KLA-Tencor Corporation
- Andrew V. Hill
- G02 - OPTICS
Information Patent Grant
Magnifying imaging optical unit and EUV mask inspection system with...
- Patent number 10,408,765
- Issue date Sep 10, 2019
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G01 - MEASURING TESTING
Information Patent Grant
All-reflective solar coronagraph sensor and thermal control subsystem
- Patent number 10,345,562
- Issue date Jul 9, 2019
- Raytheon Company
- Lacy G. Cook
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Imaging optical unit for imaging an object field into an image fiel...
- Patent number 10,254,653
- Issue date Apr 9, 2019
- Carl Zeiss SMT GmbH
- Hans-Juergen Rostalski
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
- Patent number 10,228,623
- Issue date Mar 12, 2019
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Grant
Light source apparatus, illumination device, exposure apparatus, an...
- Patent number 10,216,092
- Issue date Feb 26, 2019
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Five-mirror afocal wide field of view optical system
- Patent number 10,054,774
- Issue date Aug 21, 2018
- Raytheon Company
- Lacy G. Cook
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus
- Patent number 10,031,422
- Issue date Jul 24, 2018
- ASML Netherlands B.V.
- Andrey Nikipelov
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflective image-forming optical system, exposure apparatus, and de...
- Patent number 10,025,195
- Issue date Jul 17, 2018
- Nikon Corporation
- Yoshio Kawabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Compact wide field-of-view optical imaging method capable of electr...
- Patent number 9,986,162
- Issue date May 29, 2018
- The United States of America, as represented by the Secretary of the Army
- Bruce M. Pixton
- G02 - OPTICS
Information Patent Grant
Dual field of view annular folded optics with switchable mirrored s...
- Patent number 9,826,153
- Issue date Nov 21, 2017
- The United States of America, as represented by the Secretary of the Army
- Bruce M. Pixton
- G02 - OPTICS
Information Patent Grant
Light source apparatus, illumination device, exposure apparatus, an...
- Patent number 9,772,560
- Issue date Sep 26, 2017
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Mirror arrangement for an EUV projection exposure apparatus, method...
- Patent number 9,709,770
- Issue date Jul 18, 2017
- Carl Zeiss SMT GmbH
- Boris Bittner
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Imaging optics and projection exposure installation for microlithog...
- Patent number 9,639,004
- Issue date May 2, 2017
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Aero-wave instrument for the measurement of the optical wave-front...
- Patent number 9,606,214
- Issue date Mar 28, 2017
- The Boeing Company
- Bryan Lee Kelchner
- G02 - OPTICS
Information Patent Grant
Image-forming optical system, exposure apparatus, and device produc...
- Patent number 9,557,548
- Issue date Jan 31, 2017
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Reflective image-forming optical system, exposure apparatus, and de...
- Patent number 9,541,842
- Issue date Jan 10, 2017
- Nikon Corporation
- Yoshio Kawabe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging optics, microlithography projection exposure apparatus havi...
- Patent number 9,535,337
- Issue date Jan 3, 2017
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement and microlithographic projection exposure appar...
- Patent number 9,436,101
- Issue date Sep 6, 2016
- Carl Zeiss SMT GmbH
- Armin Schoeppach
- G02 - OPTICS
Information Patent Grant
Method of extreme ultraviolet lithography projection objective
- Patent number 9,323,158
- Issue date Apr 26, 2016
- National Institute of Metrology
- Yanqiu Li
- G02 - OPTICS
Information Patent Grant
Catoptric objectives and systems using catoptric objectives
- Patent number 9,304,407
- Issue date Apr 5, 2016
- Carl Zeiss SMT GmbH
- Hans-Juergen Mann
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
- Publication number 20250013156
- Publication date Jan 9, 2025
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
REFLECTIVE PUPIL RELAY OPTICS FOR MEMS SCANNING SYSTEM
- Publication number 20230296868
- Publication date Sep 21, 2023
- STMicroelectronics International N.V.
- Nenad NESTOROVIC
- G01 - MEASURING TESTING
Information Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
- Publication number 20230024028
- Publication date Jan 26, 2023
- Nikon Corporation
- Hideki Komatsuda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SMALL FORM FACTOR 4-MIRROR BASED IMAGING SYSTEMS
- Publication number 20220404599
- Publication date Dec 22, 2022
- Youngwan Choi
- G02 - OPTICS
Information Patent Application
OPTICAL PULSE STRETCHER, LASER DEVICE, AND ELECTRONIC DEVICE MANUFA...
- Publication number 20220131328
- Publication date Apr 28, 2022
- Gigaphoton Inc.
- Hirotaka MIYAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
- Publication number 20210200100
- Publication date Jul 1, 2021
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Application
SMALL FORM FACTOR 4-MIRROR BASED IMAGING SYSTEMS
- Publication number 20210041678
- Publication date Feb 11, 2021
- Youngwan Choi
- G02 - OPTICS
Information Patent Application
IMAGING APPARATUS AND MANUFACTURING METHOD OF IMAGING APPARATUS
- Publication number 20210026120
- Publication date Jan 28, 2021
- Canon Kabushiki Kaisha
- Naoto Fuse
- B60 - VEHICLES IN GENERAL
Information Patent Application
REFLECTIVE IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DE...
- Publication number 20200174375
- Publication date Jun 4, 2020
- Nikon Corporation
- Yoshio KAWABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Image Offsetting Apparatuses, Systems, and Methods
- Publication number 20200081342
- Publication date Mar 12, 2020
- John L. Baker
- G02 - OPTICS
Information Patent Application
IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...
- Publication number 20190302621
- Publication date Oct 3, 2019
- Nikon Corporation
- Hideki Komatsuda
- G02 - OPTICS
Information Patent Application
HIGH NA (NUMERICAL APERTURE) RECTANGULAR FIELD EUV CATOPTRIC PROJEC...
- Publication number 20190113723
- Publication date Apr 18, 2019
- Nikon Corporation
- David M. Williamson
- G02 - OPTICS
Information Patent Application
REFLECTIVE IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DE...
- Publication number 20180299781
- Publication date Oct 18, 2018
- Nikon Corporation
- Yoshio KAWABE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY
- Publication number 20180164474
- Publication date Jun 14, 2018
- Carl Zeiss SMT GMBH
- Daniel Kraehmer
- G02 - OPTICS
Information Patent Application
Off-Axis Reflective Afocal Optical Relay
- Publication number 20180045932
- Publication date Feb 15, 2018
- KLA-Tencor Corporation
- Andrew V. Hill
- G02 - OPTICS
Information Patent Application
Compact Wide Field-of-View Optical Imaging Method Capable of Electr...
- Publication number 20180041702
- Publication date Feb 8, 2018
- UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE ARMY
- Bruce M. Pixton
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR USING PATTERNING DEVICE TOPOGRAPHY INDUCED...
- Publication number 20170269480
- Publication date Sep 21, 2017
- ASML NETHERLANDS B.V.
- Jozef Maria Finders
- G02 - OPTICS
Information Patent Application
Dual Field of View Annular Folded Optics with Switchable Mirrored S...
- Publication number 20170180643
- Publication date Jun 22, 2017
- UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF THE ARMY
- Bruce M. Pixton
- G02 - OPTICS
Information Patent Application
OPTICAL MEASURING DEVICE AND DEVICE HAVING OPTICAL SYSTEM
- Publication number 20160252451
- Publication date Sep 1, 2016
- NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY
- Etsuo Kawate
- G02 - OPTICS
Information Patent Application
LIGHT SOURCE APPARATUS, ILLUMINATION DEVICE, EXPOSURE APPARATUS, AN...
- Publication number 20160041472
- Publication date Feb 11, 2016
- Canon Kabushiki Kaisha
- Haruna Kawashima
- G02 - OPTICS
Information Patent Application
IMAGING OPTICS, MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS HAVI...
- Publication number 20150219999
- Publication date Aug 6, 2015
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
DESIGN METHOD OF EXTREME ULTRAVIOLET LITHOGRAPHY PROJECTION OBJECTIVE
- Publication number 20140368805
- Publication date Dec 18, 2014
- Yanqiu Li
- G02 - OPTICS
Information Patent Application
COMPACT INTERNAL FIELD OF VIEW SWITCH AND PUPIL RELAY
- Publication number 20140253999
- Publication date Sep 11, 2014
- Raytheon Company
- Ronald G. Hegg
- G02 - OPTICS
Information Patent Application
HIGH NA (NUMERICAL APERTURE) RECTANGULAR FIELD EUV CATOPTRIC PROJEC...
- Publication number 20140218704
- Publication date Aug 7, 2014
- Nikon Corporation
- David M. Williamson
- G02 - OPTICS
Information Patent Application
CATOPTRIC OBJECTIVES AND SYSTEMS USING CATOPTRIC OBJECTIVES
- Publication number 20140098355
- Publication date Apr 10, 2014
- Carl Zeiss SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
MAGNIFYING IMAGING OPTICAL UNIT AND METROLOGY SYSTEM COMPRISING SUC...
- Publication number 20130250428
- Publication date Sep 26, 2013
- Hans-Juergen Mann
- G02 - OPTICS
Information Patent Application
VALVE FOR THE SUBSTANTIALLY GAS-TIGHT INTERRUPTION OF A FLOW PATH
- Publication number 20130114631
- Publication date May 9, 2013
- HIGH Q LASER GMBH
- Joachim Meier
- G02 - OPTICS
Information Patent Application
OPTICAL ARRANGEMENT FOR EUV LITHOGRAPHY AND METHOD FOR CONFIGURING...
- Publication number 20130107239
- Publication date May 2, 2013
- Carl Zeiss SMT GMBH
- Wilfried Clauss
- B82 - NANO-TECHNOLOGY
Information Patent Application
IMAGING OPTICAL SYSTEM
- Publication number 20130070227
- Publication date Mar 21, 2013
- Carl Zeiss SMT GMBH
- Ralf Mueller
- G02 - OPTICS
Information Patent Application
CATOPTRIC OBJECTIVES AND SYSTEMS USING CATOPTRIC OBJECTIVES
- Publication number 20130063710
- Publication date Mar 14, 2013
- CARL ZEISS SMT GMBH
- Hans-Juergen Mann
- G02 - OPTICS

off-axis or unobscured systems in which all of the mirrors share a common axis of rotational symmetry

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Image-forming optical system, exposure apparatus, and device produc...

Imaging apparatus and manufacturing method of imaging apparatus

Optical pulse stretcher, laser device, and electronic device manufa...

Image-forming optical system, exposure apparatus, and device produc...

Small form factor 4-mirror based imaging systems

Reflective image-forming optical system, exposure apparatus, and de...

Image offsetting apparatuses, systems, and methods

Image-forming optical system, exposure apparatus, and device produc...

Reflective image-forming optical system, exposure apparatus, and de...

Off-axis reflective afocal optical relay

Magnifying imaging optical unit and EUV mask inspection system with...

All-reflective solar coronagraph sensor and thermal control subsystem

Imaging optical unit for imaging an object field into an image fiel...

Image-forming optical system, exposure apparatus, and device produc...

Light source apparatus, illumination device, exposure apparatus, an...

Five-mirror afocal wide field of view optical system

Lithographic apparatus

Reflective image-forming optical system, exposure apparatus, and de...

Compact wide field-of-view optical imaging method capable of electr...

Dual field of view annular folded optics with switchable mirrored s...

Light source apparatus, illumination device, exposure apparatus, an...

Mirror arrangement for an EUV projection exposure apparatus, method...

Imaging optics and projection exposure installation for microlithog...

Aero-wave instrument for the measurement of the optical wave-front...

Image-forming optical system, exposure apparatus, and device produc...

Reflective image-forming optical system, exposure apparatus, and de...

Imaging optics, microlithography projection exposure apparatus havi...

Optical arrangement and microlithographic projection exposure appar...

Method of extreme ultraviolet lithography projection objective

Catoptric objectives and systems using catoptric objectives

Patents Applicationslast 30 patents

IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...

REFLECTIVE PUPIL RELAY OPTICS FOR MEMS SCANNING SYSTEM

IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...

SMALL FORM FACTOR 4-MIRROR BASED IMAGING SYSTEMS

OPTICAL PULSE STRETCHER, LASER DEVICE, AND ELECTRONIC DEVICE MANUFA...

IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...

SMALL FORM FACTOR 4-MIRROR BASED IMAGING SYSTEMS

IMAGING APPARATUS AND MANUFACTURING METHOD OF IMAGING APPARATUS

REFLECTIVE IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DE...

Image Offsetting Apparatuses, Systems, and Methods

IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DEVICE PRODUC...

HIGH NA (NUMERICAL APERTURE) RECTANGULAR FIELD EUV CATOPTRIC PROJEC...

REFLECTIVE IMAGE-FORMING OPTICAL SYSTEM, EXPOSURE APPARATUS, AND DE...

PROJECTION OBJECTIVE FOR MICROLITHOGRAPHY

Off-Axis Reflective Afocal Optical Relay

Compact Wide Field-of-View Optical Imaging Method Capable of Electr...

METHOD AND APPARATUS FOR USING PATTERNING DEVICE TOPOGRAPHY INDUCED...

Dual Field of View Annular Folded Optics with Switchable Mirrored S...

OPTICAL MEASURING DEVICE AND DEVICE HAVING OPTICAL SYSTEM

LIGHT SOURCE APPARATUS, ILLUMINATION DEVICE, EXPOSURE APPARATUS, AN...

IMAGING OPTICS, MICROLITHOGRAPHY PROJECTION EXPOSURE APPARATUS HAVI...

DESIGN METHOD OF EXTREME ULTRAVIOLET LITHOGRAPHY PROJECTION OBJECTIVE

COMPACT INTERNAL FIELD OF VIEW SWITCH AND PUPIL RELAY

HIGH NA (NUMERICAL APERTURE) RECTANGULAR FIELD EUV CATOPTRIC PROJEC...

CATOPTRIC OBJECTIVES AND SYSTEMS USING CATOPTRIC OBJECTIVES

MAGNIFYING IMAGING OPTICAL UNIT AND METROLOGY SYSTEM COMPRISING SUC...

VALVE FOR THE SUBSTANTIALLY GAS-TIGHT INTERRUPTION OF A FLOW PATH

OPTICAL ARRANGEMENT FOR EUV LITHOGRAPHY AND METHOD FOR CONFIGURING...

IMAGING OPTICAL SYSTEM

CATOPTRIC OBJECTIVES AND SYSTEMS USING CATOPTRIC OBJECTIVES