on a silicon body

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CPC
H01L21/31612

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/31612on a silicon body

Industries

Patents Grantslast 30 patents

Information Patent Grant
Durable, heat-resistant multi-layer coatings and coated articles
- Patent number 9,972,583
- Issue date May 15, 2018
- SPTS Technologies Limited
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Vapor deposition of metal oxides, silicates and phosphates, and sil...
- Patent number 9,905,414
- Issue date Feb 27, 2018
- President and Fellows of Harvard College
- Roy Gerald Gordon
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Method of growing oxide thin films
- Patent number 9,514,956
- Issue date Dec 6, 2016
- ASM International N.V.
- Eva Tois
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vaporizing unit, film forming apparatus, film forming method, compu...
- Patent number 9,343,295
- Issue date May 17, 2016
- Tokyo Electron Limited
- Ikuo Sawada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 9,269,566
- Issue date Feb 23, 2016
- Hitachi Kokusai Electric Inc.
- Naonori Akae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Nonvolatile semiconductor memory device and manufacturing method th...
- Patent number 9,231,070
- Issue date Jan 5, 2016
- Semiconductor Energy Laboratory Co., Ltd.
- Tetsuya Kakehata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for forming zirconium and/or hafnium-containing...
- Patent number 9,184,061
- Issue date Nov 10, 2015
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing methods, and methods for forming silicon d...
- Patent number 9,111,879
- Issue date Aug 18, 2015
- Micron Technology, Inc.
- Shyam Surthi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 9,011,601
- Issue date Apr 21, 2015
- Hitachi Kokusai Electric Inc.
- Naonori Akae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of forming oxides, methods of forming semiconductor constru...
- Patent number 8,962,446
- Issue date Feb 24, 2015
- Micron Technology, Inc.
- Robert J. Hanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal processing system for curing dielectric films
- Patent number 8,956,457
- Issue date Feb 17, 2015
- Tokyo Electron Limited
- Eric M. Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing semiconductor device and substrate process...
- Patent number 8,895,455
- Issue date Nov 25, 2014
- Hitachi Kokusai Electric Inc.
- Naonori Akae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charge reservoir structure
- Patent number 8,802,539
- Issue date Aug 12, 2014
- Soitec
- Frederic Allibert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming the gate insulator of a MOS transistor
- Patent number 8,802,575
- Issue date Aug 12, 2014
- STMicroelectronics (Crolles 2) SAS
- Olivier Gourhant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Oxygen-rich layers underlying BPSG
- Patent number 8,759,952
- Issue date Jun 24, 2014
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shiu-Ko JangJian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for incorporating nitrogen in oxide films
- Patent number 8,658,522
- Issue date Feb 25, 2014
- Applied Materials, Inc.
- Tatsuya Sato
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of forming silicon oxide containing films
- Patent number 8,613,976
- Issue date Dec 24, 2013
- L'Air Liquide, SociétéAnonyme pour l'Etude et l'Exploitation des Procédés Geo...
- Christian Dussarrat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing semiconductor device and substrate process...
- Patent number 8,609,551
- Issue date Dec 17, 2013
- Hitachi Kokusai Electric Inc.
- Naonori Akae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating a semiconductor device
- Patent number 8,598,044
- Issue date Dec 3, 2013
- Renesas Electronics Corporation
- Tatsuya Usami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pitch reduction using oxide spacer
- Patent number 8,592,318
- Issue date Nov 26, 2013
- Lam Research Corporation
- Jisoo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
CVD flowable gap fill
- Patent number 8,580,697
- Issue date Nov 12, 2013
- Novellus Systems, Inc.
- Chi-I Lang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor devices and methods of forming the same
- Patent number 8,569,821
- Issue date Oct 29, 2013
- Samsung Electronics Co., Ltd.
- Sangjin Hyun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Durable, heat-resistant multi-layer coatings and coated articles
- Patent number 8,501,277
- Issue date Aug 6, 2013
- Applied Microstructures, Inc.
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Film forming method of silicon oxide film, silicon oxide film, semi...
- Patent number 8,486,792
- Issue date Jul 16, 2013
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate comprising a plurality of integrated circuitry die, and a...
- Patent number 8,461,685
- Issue date Jun 11, 2013
- Micron Technology, Inc.
- Tongbi Jiang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for wet etching while forming interconnect trench in insulat...
- Patent number 8,449,787
- Issue date May 28, 2013
- Fujitsu Limited
- Tadahiro Imada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to minimize wet etch undercuts and provide pore sealing of e...
- Patent number 8,445,075
- Issue date May 21, 2013
- Applied Materials, Inc.
- Huiwen Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for growing plasma atomic layer
- Patent number 8,440,268
- Issue date May 14, 2013
- Mitsui Engineering & Shipbuilding Co., Ltd.
- Keisuki Washio
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
First inter-layer dielectric stack for non-volatile memory
- Patent number 8,435,898
- Issue date May 7, 2013
- FREESCALE SEMICONDUCTOR, INC.
- Olubunmi O. Adetutu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetic random access memory
- Patent number 8,421,137
- Issue date Apr 16, 2013
- QUALCOMM Incorporated
- Xia Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20140318451
- Publication date Oct 30, 2014
- HITACHI KOKUSAI ELECTRIC INC.
- Naonori Akae
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPORIZING UNIT, FILM FORMING APPARATUS, FILM FORMING METHOD, COMPU...
- Publication number 20140256157
- Publication date Sep 11, 2014
- TOKYO ELECTRON LIMITED
- Ikuo SAWADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...
- Publication number 20140065840
- Publication date Mar 6, 2014
- Hitachi Kokusai Electric Inc.
- Naonori Akae
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOISTURE BARRIER COATINGS
- Publication number 20130320509
- Publication date Dec 5, 2013
- APPLIED MICROSTRUCTURES, INC.
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
DURABLE, HEAT-RESISTANT MULTI-LAYER COATINGS AND COATED ARTICLES
- Publication number 20130320510
- Publication date Dec 5, 2013
- APPLIED MICROSTRUCTURES, INC.
- Boris Kobrin
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
APPARATUS FOR WET ETCHING WHILE FORMING INTERCONNECT TRENCH IN INSU...
- Publication number 20130233489
- Publication date Sep 12, 2013
- FUJITSU LIMITED
- Tadahiro IMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR INCORPORATING NITROGEN IN OXIDE FILMS
- Publication number 20130149468
- Publication date Jun 13, 2013
- Applied Materials, Inc.
- Tatsuya Sato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...
- Publication number 20130122328
- Publication date May 16, 2013
- President and Fellows of Harvard College
- Roy Gerald GORDON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...
- Publication number 20130059451
- Publication date Mar 7, 2013
- HITACHI KOKUSAI ELECTRIC, INC.
- Naonori AKAE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF FORMING SILICON OXIDE CONTAINING FILMS
- Publication number 20120276292
- Publication date Nov 1, 2012
- L'Air Liquide, Societe Anonyme pour I'Etude et I'Exploitation des procedes Ge...
- Christian DUSSARRAT
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING THE GATE INSULATOR OF A MOS TRANSISTOR
- Publication number 20120270410
- Publication date Oct 25, 2012
- Olivier Gourhant
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...
- Publication number 20120178267
- Publication date Jul 12, 2012
- Advanced Technology Materials, Inc.
- Ziyun Wang
- C30 - CRYSTAL GROWTH
Information Patent Application
SILICON DIOXIDE FILM AND PROCESS FOR PRODUCTION THEREOF, COMPUTER-R...
- Publication number 20120126376
- Publication date May 24, 2012
- TOKYO ELECTRON LIMITED
- Minoru Honda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Oxygen-Rich Layers Underlying BPSG
- Publication number 20120119303
- Publication date May 17, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shiu-Ko JangJian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL CAPACITOR AND METHOD OF MAKING THE SAME
- Publication number 20120115301
- Publication date May 10, 2012
- Chin-Sheng Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METAL CAPACITOR AND METHOD OF MAKING THE SAME
- Publication number 20120098094
- Publication date Apr 26, 2012
- Chin-Sheng Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Printable Semiconductor Structures and Related Methods of Making an...
- Publication number 20120083099
- Publication date Apr 5, 2012
- THE BOARD OF TRUSTEES OF THE UNIVERSITY OF ILLINOIS
- Ralph G. NUZZO
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Systems and Methods for Forming Metal Oxide Layers
- Publication number 20120067283
- Publication date Mar 22, 2012
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND A METHOD FOR MANUFACTUR...
- Publication number 20120061769
- Publication date Mar 15, 2012
- Renesas Electronics Corporation
- MASAO SUGIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PITCH REDUCTION USING OXIDE SPACER
- Publication number 20120052683
- Publication date Mar 1, 2012
- LAM RESEARCH CORPORATION
- Jisoo Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...
- Publication number 20120028478
- Publication date Feb 2, 2012
- President and Fellows of Harvard College
- Roy G. Gordon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Systems and Methods for Forming Metal Oxide Layers
- Publication number 20120021587
- Publication date Jan 26, 2012
- Micron Technology, Inc.
- Brian A. Vaartstra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Silicon Dioxide Deposition Methods Using at Least Ozone and TEOS as...
- Publication number 20120015526
- Publication date Jan 19, 2012
- Micron Technology, Inc.
- John Smythe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME
- Publication number 20120012942
- Publication date Jan 19, 2012
- Sangjin HYUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING SILICON OXIDE FILM AND METHOD FOR MANUFACTURING...
- Publication number 20120003842
- Publication date Jan 5, 2012
- Tokyo Electron Limited
- Hirokazu Ueda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
- Publication number 20110287621
- Publication date Nov 24, 2011
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Kosei NODA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Processing Methods, And Methods For Forming Silicon D...
- Publication number 20110263135
- Publication date Oct 27, 2011
- Micron Technology, Inc.
- Shyam Surthi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILMS
- Publication number 20110256718
- Publication date Oct 20, 2011
- ASM INTERNATIONAL N.V.
- Suvi P. Haukka
- C30 - CRYSTAL GROWTH
Information Patent Application
NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD TH...
- Publication number 20110227139
- Publication date Sep 22, 2011
- Semiconductor Energy Laboratory Co., Ltd.
- Tetsuya KAKEHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR FORMING A DOUBLE EMBOSSING STRUCTURE
- Publication number 20110215469
- Publication date Sep 8, 2011
- MEGICA Corporation
- HSIN-JUNG LO
- H01 - BASIC ELECTRIC ELEMENTS

on a silicon body

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Durable, heat-resistant multi-layer coatings and coated articles

Vapor deposition of metal oxides, silicates and phosphates, and sil...

Method of growing oxide thin films

Vaporizing unit, film forming apparatus, film forming method, compu...

Substrate processing apparatus

Nonvolatile semiconductor memory device and manufacturing method th...

Systems and methods for forming zirconium and/or hafnium-containing...

Semiconductor processing methods, and methods for forming silicon d...

Substrate processing apparatus

Methods of forming oxides, methods of forming semiconductor constru...

Thermal processing system for curing dielectric films

Method for manufacturing semiconductor device and substrate process...

Charge reservoir structure

Method for forming the gate insulator of a MOS transistor

Oxygen-rich layers underlying BPSG

Methods and apparatus for incorporating nitrogen in oxide films

Method of forming silicon oxide containing films

Method for manufacturing semiconductor device and substrate process...

Method of fabricating a semiconductor device

Pitch reduction using oxide spacer

CVD flowable gap fill

Semiconductor devices and methods of forming the same

Durable, heat-resistant multi-layer coatings and coated articles

Film forming method of silicon oxide film, silicon oxide film, semi...

Substrate comprising a plurality of integrated circuitry die, and a...

Method for wet etching while forming interconnect trench in insulat...

Method to minimize wet etch undercuts and provide pore sealing of e...

Method and apparatus for growing plasma atomic layer

First inter-layer dielectric stack for non-volatile memory

Magnetic random access memory

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS

VAPORIZING UNIT, FILM FORMING APPARATUS, FILM FORMING METHOD, COMPU...

METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESS...

MOISTURE BARRIER COATINGS

DURABLE, HEAT-RESISTANT MULTI-LAYER COATINGS AND COATED ARTICLES

APPARATUS FOR WET ETCHING WHILE FORMING INTERCONNECT TRENCH IN INSU...

METHODS AND APPARATUS FOR INCORPORATING NITROGEN IN OXIDE FILMS

VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE AND SUBSTRATE PROCESSI...

METHOD OF FORMING SILICON OXIDE CONTAINING FILMS

METHOD FOR FORMING THE GATE INSULATOR OF A MOS TRANSISTOR

COMPOSITION AND METHOD FOR LOW TEMPERATURE DEPOSITION OF SILICON-CO...

SILICON DIOXIDE FILM AND PROCESS FOR PRODUCTION THEREOF, COMPUTER-R...

Oxygen-Rich Layers Underlying BPSG

METAL CAPACITOR AND METHOD OF MAKING THE SAME

METAL CAPACITOR AND METHOD OF MAKING THE SAME

Printable Semiconductor Structures and Related Methods of Making an...

Systems and Methods for Forming Metal Oxide Layers

SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND A METHOD FOR MANUFACTUR...

PITCH REDUCTION USING OXIDE SPACER

VAPOR DEPOSITION OF METAL OXIDES, SILICATES AND PHOSPHATES, AND SIL...

Systems and Methods for Forming Metal Oxide Layers

Silicon Dioxide Deposition Methods Using at Least Ozone and TEOS as...

SEMICONDUCTOR DEVICES AND METHODS OF FORMING THE SAME

METHOD FOR FORMING SILICON OXIDE FILM AND METHOD FOR MANUFACTURING...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME

Semiconductor Processing Methods, And Methods For Forming Silicon D...

THIN FILMS

NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD TH...

METHOD FOR FORMING A DOUBLE EMBOSSING STRUCTURE