only involving lasers

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CPC
H01L21/02098

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/02098only involving lasers

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Substrate processing system and substrate processing method
- Patent number 12,255,063
- Issue date Mar 18, 2025
- Tokyo Electron Limited
- Hayato Tanoue
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for treating substrate
- Patent number 11,972,939
- Issue date Apr 30, 2024
- Semes Co., Ltd.
- Ohyeol Kwon
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and system for treating substrate
- Patent number 11,869,763
- Issue date Jan 9, 2024
- Semes Co., Ltd.
- Jun Keon Ahn
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Subnanometer-level light-based substrate cleaning mechanism
- Patent number 11,830,726
- Issue date Nov 28, 2023
- Planar Semiconductor Corporation Pte. Ltd.
- Rubinder S. Randhawa
- B08 - CLEANING
Information Patent Grant
Dry cleaning apparatus and dry cleaning method
- Patent number 11,742,221
- Issue date Aug 29, 2023
- Samsung Electronics Co., Ltd.
- Seung-Min Shin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method of fabricating a display apparatus
- Patent number 11,569,087
- Issue date Jan 31, 2023
- Samsung Display Co., Ltd.
- Horyun Chung
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Dual side de-bonding in component carriers using photoablation
- Patent number 11,462,432
- Issue date Oct 4, 2022
- Intel Corporation
- Frank Truong
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Method of manufacturing a silicon carbide device and wafer composit...
- Patent number 11,373,863
- Issue date Jun 28, 2022
- Infineon Technologies AG
- Roland Rupp
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Dry cleaning apparatus and dry cleaning method
- Patent number 11,087,996
- Issue date Aug 10, 2021
- Samsung Electronics Co., Ltd.
- Seung-Min Shin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Subnanometer-level light-based substrate cleaning mechanism
- Patent number 11,069,521
- Issue date Jul 20, 2021
- Planar Semiconductor, Inc.
- Rubinder S. Randhawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for removing dielectric material
- Patent number 10,672,603
- Issue date Jun 2, 2020
- Infineon Technologies AG
- Gregory Anderson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Semiconductor package with electromagnetic interference shielding
- Patent number 10,461,007
- Issue date Oct 29, 2019
- Intel Corporation
- Rajendra C. Dias
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
De-bonding and cleaning process and system
- Patent number 9,895,871
- Issue date Feb 20, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Ching Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
De-bonding and cleaning process and system
- Patent number 9,662,872
- Issue date May 30, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ying-Ching Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer processing method
- Patent number 9,620,355
- Issue date Apr 11, 2017
- Disco Corporation
- Senichi Ryo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Application of millisecond heating source for surface treatment
- Patent number 8,148,272
- Issue date Apr 3, 2012
- Semiconductor Manufacturing International (Shanghai) Corporation
- David Gao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of clearing electrical contact pads in thin film sealed OLED...
- Patent number 7,745,340
- Issue date Jun 29, 2010
- Emagin Corporation
- Amalkumar P. Ghosh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for local vectorial particle cleaning
- Patent number 6,566,169
- Issue date May 20, 2003
- Oramir Semiconductor Equipment Ltd.
- Yoram Uziel
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING METHOD AND PROCESSING SYSTEM
- Publication number 20240404852
- Publication date Dec 5, 2024
- TOKYO ELECTRON LIMITED
- Yohei YAMASHITA
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS FOR CLEANING A SEMICONDUCTOR FABRICATION CHAMBER
- Publication number 20240379345
- Publication date Nov 14, 2024
- Samsung Electronics Co., Ltd.
- Jeongmin Hwang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
NO-LEAD INTEGRATED CIRCUIT HAVING AN ABLATED MOLD COMPOUND AND EXTR...
- Publication number 20240105557
- Publication date Mar 28, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Laura May Antoinette Clemente
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT REMOVAL DEVICE, DEFECT REMOVAL METHOD, PATTERN FORMING METHO...
- Publication number 20230395366
- Publication date Dec 7, 2023
- FUJIFILM CORPORATION
- Akihiko OHTSU
- G01 - MEASURING TESTING
Information Patent Application
DRY CLEANING APPARATUS AND DRY CLEANING METHOD
- Publication number 20210343552
- Publication date Nov 4, 2021
- Samsung Electronics Co., Ltd.
- Seung-Min SHIN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBNANOMETER-LEVEL LIGHT-BASED SUBSTRATE CLEANING MECHANISM
- Publication number 20210313173
- Publication date Oct 7, 2021
- Planar Semiconductor Corporation Pte. Ltd.
- Rubinder S. Randhawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD
- Publication number 20210296119
- Publication date Sep 23, 2021
- TOKYO ELECTRON LIMITED
- Hayato TANOUE
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
WAFER TREATMENT APPARATUS AND METHOD FOR TREATING WAFER
- Publication number 20210013031
- Publication date Jan 14, 2021
- Shin-Etsu Handotai Co., Ltd.
- Kensaku IGARASHI
- B08 - CLEANING
Information Patent Application
METHODS OF USING LASER ENERGY TO REMOVE PARTICLES FROM A SURFACE
- Publication number 20210001429
- Publication date Jan 7, 2021
- Entegris, Inc.
- Troy SCOGGINS
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD AND APPARATUS FOR TREATING SUBSTRATE
- Publication number 20200395210
- Publication date Dec 17, 2020
- SEMES CO., LTD.
- Ohyeol KWON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Manufacturing a Silicon Carbide Device and Wafer Composit...
- Publication number 20200357637
- Publication date Nov 12, 2020
- Roland Rupp
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE TREATING METHOD, SUBSTRATE TREATING APPARATUS, AND SUBSTR...
- Publication number 20200350156
- Publication date Nov 5, 2020
- SEMES CO., LTD.
- Jun Keon AHN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBNANOMETER-LEVEL LIGHT-BASED SUBSTRATE CLEANING MECHANISM
- Publication number 20200219722
- Publication date Jul 9, 2020
- Planar Semiconductor, Inc.
- Rubinder S. RANDHAWA
- B08 - CLEANING
Information Patent Application
DRY CLEANING APPARATUS AND DRY CLEANING METHOD
- Publication number 20200083063
- Publication date Mar 12, 2020
- Samsung Electronics Co., Ltd.
- Seung-Min SHIN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
DUAL SIDE DE-BONDING IN COMPONENT CARRIERS USING PHOTOABLATION
- Publication number 20190287841
- Publication date Sep 19, 2019
- Intel Corporation
- Frank Truong
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
SEMICONDUCTOR PACKAGE WITH ELECTROMAGNETIC INTERFERENCE SHIELDING
- Publication number 20180323128
- Publication date Nov 8, 2018
- Intel Corporation
- Rajendra C. Dias
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRODE MANUFACTURING METHOD FOR IMPROVING BATTERY CAPACITY AND E...
- Publication number 20170309475
- Publication date Oct 26, 2017
- LG CHEM, LTD.
- Tae-Su KIM
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR REMOVING DIELECTRIC MATERIAL
- Publication number 20170117139
- Publication date Apr 27, 2017
- INFINEON TECHNOLOGIES AG
- Gregory Anderson
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
System and Method for Sub-micron Level Cleaning of Surfaces
- Publication number 20120247504
- Publication date Oct 4, 2012
- Waleed Nasr
- B08 - CLEANING
Information Patent Application
APPLICATION OF MILLISECOND HEATING SOURCE FOR SURFACE TREATMENT
- Publication number 20110053349
- Publication date Mar 3, 2011
- Semiconductor Manufacturing International (Shanghai) Corporation
- David GAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of clearing electrical contact pads in thin film sealed OLED...
- Publication number 20060051951
- Publication date Mar 9, 2006
- Amalkumar P. Ghosh
- H01 - BASIC ELECTRIC ELEMENTS

only involving lasers

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Substrate processing system and substrate processing method

Method and apparatus for treating substrate

Apparatus and system for treating substrate

Subnanometer-level light-based substrate cleaning mechanism

Dry cleaning apparatus and dry cleaning method

Method of fabricating a display apparatus

Dual side de-bonding in component carriers using photoablation

Method of manufacturing a silicon carbide device and wafer composit...

Dry cleaning apparatus and dry cleaning method

Subnanometer-level light-based substrate cleaning mechanism

System and method for removing dielectric material

Semiconductor package with electromagnetic interference shielding

De-bonding and cleaning process and system

De-bonding and cleaning process and system

Wafer processing method

Application of millisecond heating source for surface treatment

Method of clearing electrical contact pads in thin film sealed OLED...

Method and apparatus for local vectorial particle cleaning

Patents Applicationslast 30 patents

PROCESSING METHOD AND PROCESSING SYSTEM

APPARATUS FOR CLEANING A SEMICONDUCTOR FABRICATION CHAMBER

NO-LEAD INTEGRATED CIRCUIT HAVING AN ABLATED MOLD COMPOUND AND EXTR...

DEFECT REMOVAL DEVICE, DEFECT REMOVAL METHOD, PATTERN FORMING METHO...

DRY CLEANING APPARATUS AND DRY CLEANING METHOD

SUBNANOMETER-LEVEL LIGHT-BASED SUBSTRATE CLEANING MECHANISM

SUBSTRATE PROCESSING SYSTEM AND SUBSTRATE PROCESSING METHOD

WAFER TREATMENT APPARATUS AND METHOD FOR TREATING WAFER

METHODS OF USING LASER ENERGY TO REMOVE PARTICLES FROM A SURFACE

METHOD AND APPARATUS FOR TREATING SUBSTRATE

Method of Manufacturing a Silicon Carbide Device and Wafer Composit...

SUBSTRATE TREATING METHOD, SUBSTRATE TREATING APPARATUS, AND SUBSTR...

SUBNANOMETER-LEVEL LIGHT-BASED SUBSTRATE CLEANING MECHANISM

DRY CLEANING APPARATUS AND DRY CLEANING METHOD

DUAL SIDE DE-BONDING IN COMPONENT CARRIERS USING PHOTOABLATION

SEMICONDUCTOR PACKAGE WITH ELECTROMAGNETIC INTERFERENCE SHIELDING

ELECTRODE MANUFACTURING METHOD FOR IMPROVING BATTERY CAPACITY AND E...

SYSTEM AND METHOD FOR REMOVING DIELECTRIC MATERIAL

System and Method for Sub-micron Level Cleaning of Surfaces

APPLICATION OF MILLISECOND HEATING SOURCE FOR SURFACE TREATMENT

Method of clearing electrical contact pads in thin film sealed OLED...