Operating strategies

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CPC
H01J37/3464

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3464Operating strategies

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 12,217,949
- Issue date Feb 4, 2025
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnet system, sputtering device and method
- Patent number 12,165,857
- Issue date Dec 10, 2024
- VON ARDENNE Asset GmbH & Co. KG
- Klaus Schneider
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Mass airflow sensor and hydrocarbon trap combination
- Patent number 12,140,111
- Issue date Nov 12, 2024
- K & N Engineering, Inc.
- Kevin McClelland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Film forming method, film forming apparatus, and program
- Patent number 12,094,700
- Issue date Sep 17, 2024
- Tokyo Electron Limited
- Toshiharu Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing tool and methods of operation
- Patent number 12,087,563
- Issue date Sep 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Yen-Liang Lin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing method and apparatus
- Patent number 12,027,353
- Issue date Jul 2, 2024
- Tokyo Electron Limited
- Shota Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering system with a plurality of cathode assemblies
- Patent number 11,932,932
- Issue date Mar 19, 2024
- Alluxa, Inc.
- Michael A. Scobey
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion beam deposition target life enhancement
- Patent number 11,901,167
- Issue date Feb 13, 2024
- Plasma-Therm NES LLC
- Sarpangala Hariharakeshava Hegde
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating device for curved substrate and coating method containing t...
- Patent number 11,881,386
- Issue date Jan 23, 2024
- Innolux Corporation
- Ching-Feng Kuo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 11,821,068
- Issue date Nov 21, 2023
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering a layer on a substrate using a high-energy density plasm...
- Patent number 11,823,859
- Issue date Nov 21, 2023
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for deposition of metal nitrides
- Patent number 11,739,418
- Issue date Aug 29, 2023
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and a device for automatically determining adjustment values...
- Patent number 11,739,417
- Issue date Aug 29, 2023
- Saint-Gobain Glass France
- Yohan Faucillon
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering method
- Patent number 11,710,624
- Issue date Jul 25, 2023
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Bingliang Guo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Coating control using forward parameter correction and adapted reve...
- Patent number 11,692,263
- Issue date Jul 4, 2023
- Viavi Solutions Inc.
- Zhao Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus including gas distribution system
- Patent number 11,674,213
- Issue date Jun 13, 2023
- Cardinal CG Company
- Klaus Hartig
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of coating a substrate and coating apparatus for coating a s...
- Patent number 11,624,110
- Issue date Apr 11, 2023
- Applied Materials, Inc.
- Hyun Chan Park
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputter deposition of dielectric films
- Patent number 11,584,982
- Issue date Feb 21, 2023
- Viavi Solutions Inc.
- Georg J. Ockenfuss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus including gas distribution system
- Patent number 11,501,959
- Issue date Nov 15, 2022
- Cardinal CG Company
- Klaus Hartig
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering system with a plurality of cathode assemblies
- Patent number 11,479,847
- Issue date Oct 25, 2022
- Alluxa, Inc.
- Michael A. Scobey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adding a cap-layer to improve magnetic recording media
- Patent number 11,348,613
- Issue date May 31, 2022
- Seagate Technology LLC
- Paul M. Jones
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
- Patent number 11,306,391
- Issue date Apr 19, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 11,286,555
- Issue date Mar 29, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
- Patent number 11,255,012
- Issue date Feb 22, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods for reducing material overhang in a feature of a substrate
- Patent number 11,162,170
- Issue date Nov 2, 2021
- Applied Materials, Inc.
- Alan A. Ritchie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of coating a substrate and coating apparatus for coating a s...
- Patent number 11,118,261
- Issue date Sep 14, 2021
- Applied Materials, Inc.
- Hyun Chan Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for co-sputtering multiple targets
- Patent number 11,101,117
- Issue date Aug 24, 2021
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputter deposition of dielectric films
- Patent number 10,920,310
- Issue date Feb 16, 2021
- VIAVI Solutions Inc.
- Georg J. Ockenfuss
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 10,913,998
- Issue date Feb 9, 2021
- IonQuestCorp.
- Roman Chistyakov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
- Patent number 10,900,118
- Issue date Jan 26, 2021
- IonQuest Corp.
- Bassam Hanna Abraham
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240347327
- Publication date Oct 17, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Liang LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Power Compensation in PVD Chambers
- Publication number 20240213007
- Publication date Jun 27, 2024
- Junjie PAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method of Operating a PVD Apparatus
- Publication number 20240177997
- Publication date May 30, 2024
- SPTS TECHNOLOGIES LIMITED
- Scott Haymore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
- Publication number 20240096609
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yen-Liang LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Deposition of Mental Nitrides
- Publication number 20240003000
- Publication date Jan 4, 2024
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ION BEAM DEPOSITION TARGET LIFE ENHANCEMENT
- Publication number 20230335383
- Publication date Oct 19, 2023
- Plasma-Therm NES LLC
- Sarpangala Hariharakeshava Hegde
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTIVE SPUTTER DEPOSITION OF DIELECTRIC FILMS
- Publication number 20230203636
- Publication date Jun 29, 2023
- VIAVI SOLUTIONS INC.
- Georg J. OCKENFUSS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Sputtering System with a Plurality of Cathode Assemblies
- Publication number 20230133160
- Publication date May 4, 2023
- Alluxa, Inc.
- Michael A. Scobey
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASS AIRFLOW SENSOR AND HYDROCARBON TRAP COMBINATION
- Publication number 20230110960
- Publication date Apr 13, 2023
- K&N Engineering, Inc.
- Kevin McClelland
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM
- Publication number 20220316049
- Publication date Oct 6, 2022
- Sumitomo Metal Mining Co., Ltd.
- Hideharu OKAMI
- G02 - OPTICS
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20220195585
- Publication date Jun 23, 2022
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, AND PROGRAM
- Publication number 20220074044
- Publication date Mar 10, 2022
- TOKYO ELECTRON LIMITED
- Toshiharu HIRATA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATING DEVICE FOR CURVED SUBSTRATE AND COATING METHOD CONTAINING T...
- Publication number 20220059328
- Publication date Feb 24, 2022
- InnoLux Corporation
- Ching-Feng KUO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20220042168
- Publication date Feb 10, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF COATING A SUBSTRATE AND COATING APPARATUS FOR COATING A S...
- Publication number 20210355578
- Publication date Nov 18, 2021
- Applied Materials, Inc.
- Hyun Chan PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20210317569
- Publication date Oct 14, 2021
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS INCLUDING GAS DISTRIBUTION SYSTEM
- Publication number 20210217586
- Publication date Jul 15, 2021
- Cardinal CG Company
- Klaus Hartig
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTIVE SPUTTER DEPOSITION OF DIELECTRIC FILMS
- Publication number 20210156019
- Publication date May 27, 2021
- VIAVI Solutions Inc.
- Georg J. OCKENFUSS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20210115552
- Publication date Apr 22, 2021
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20210115553
- Publication date Apr 22, 2021
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced Low Temperature-High Density Plasma-Chemical...
- Publication number 20210102284
- Publication date Apr 8, 2021
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A METHOD AND A DEVICE FOR AUTOMATICALLY DETERMINING ADJUSTMENT VALU...
- Publication number 20200392617
- Publication date Dec 17, 2020
- SAINT-GOBAIN GLASS FRANCE
- Yohan FAUCILLON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF METAL NITRIDES
- Publication number 20200299830
- Publication date Sep 24, 2020
- Applied Materials, Inc.
- Mingwei Zhu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL POWER FEED ROTARY SPUTTERING CATHODE
- Publication number 20200266038
- Publication date Aug 20, 2020
- Buhler AG
- Daniel Theodore Crowley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADDING A CAP-LAYER TO IMPROVE MAGNETIC RECORDING MEDIA
- Publication number 20200219534
- Publication date Jul 9, 2020
- SEAGATE TECHNOLOGY LLC
- Paul M. JONES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES, SYSTEM AND APPRATUS FOR SELECTIVE DEPOSITION OF A LAYER...
- Publication number 20200027707
- Publication date Jan 23, 2020
- Varian Semiconductor Equipment Associates, Inc.
- CHRISTOPHER HATEM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PREPARING HALFTONE PHASE SHIFT MASK BLANK, HALFTONE PHAS...
- Publication number 20200026180
- Publication date Jan 23, 2020
- Shin-Etsu Chemical Co., Ltd.
- Yukio INAZUKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CO-SPUTTERING MULTIPLE TARGETS
- Publication number 20200013597
- Publication date Jan 9, 2020
- Applied Materials, Inc.
- Anantha K. SUBRAMANI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE FOR PRODUCING SEMICO NDUCTOR BUMP METAL LAYER
- Publication number 20190378812
- Publication date Dec 12, 2019
- Yu-Hung Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...
- Publication number 20190271070
- Publication date Sep 5, 2019
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Operating strategies

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Magnetically enhanced high density plasma-chemical vapor deposition...

Magnet system, sputtering device and method

Mass airflow sensor and hydrocarbon trap combination

Film forming method, film forming apparatus, and program

Semiconductor processing tool and methods of operation

Substrate processing method and apparatus

Sputtering system with a plurality of cathode assemblies

Ion beam deposition target life enhancement

Coating device for curved substrate and coating method containing t...

Magnetically enhanced high density plasma-chemical vapor deposition...

Sputtering a layer on a substrate using a high-energy density plasm...

Method and apparatus for deposition of metal nitrides

Method and a device for automatically determining adjustment values...

Sputtering method

Coating control using forward parameter correction and adapted reve...

Sputtering apparatus including gas distribution system

Method of coating a substrate and coating apparatus for coating a s...

Reactive sputter deposition of dielectric films

Sputtering apparatus including gas distribution system

Sputtering system with a plurality of cathode assemblies

Adding a cap-layer to improve magnetic recording media

Magnetically enhanced low temperature-high density plasma-chemical...

Magnetically enhanced high density plasma-chemical vapor deposition...

Electrically and magnetically enhanced ionized physical vapor depos...

Methods for reducing material overhang in a feature of a substrate

Method of coating a substrate and coating apparatus for coating a s...

Methods and apparatus for co-sputtering multiple targets

Reactive sputter deposition of dielectric films

Magnetically enhanced high density plasma-chemical vapor deposition...

Magnetically enhanced low temperature-high density plasma-chemical...

Patents Applicationslast 30 patents

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

Power Compensation in PVD Chambers

Method of Operating a PVD Apparatus

SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION

Method and Apparatus for Deposition of Mental Nitrides

ION BEAM DEPOSITION TARGET LIFE ENHANCEMENT

REACTIVE SPUTTER DEPOSITION OF DIELECTRIC FILMS

Sputtering System with a Plurality of Cathode Assemblies

MASS AIRFLOW SENSOR AND HYDROCARBON TRAP COMBINATION

OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

FILM FORMING METHOD, FILM FORMING APPARATUS, AND PROGRAM

COATING DEVICE FOR CURVED SUBSTRATE AND COATING METHOD CONTAINING T...

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

METHOD OF COATING A SUBSTRATE AND COATING APPARATUS FOR COATING A S...

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

SPUTTERING APPARATUS INCLUDING GAS DISTRIBUTION SYSTEM

REACTIVE SPUTTER DEPOSITION OF DIELECTRIC FILMS

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

Magnetically Enhanced Low Temperature-High Density Plasma-Chemical...

A METHOD AND A DEVICE FOR AUTOMATICALLY DETERMINING ADJUSTMENT VALU...

METHOD AND APPARATUS FOR DEPOSITION OF METAL NITRIDES

DUAL POWER FEED ROTARY SPUTTERING CATHODE

ADDING A CAP-LAYER TO IMPROVE MAGNETIC RECORDING MEDIA

TECHNIQUES, SYSTEM AND APPRATUS FOR SELECTIVE DEPOSITION OF A LAYER...

METHOD FOR PREPARING HALFTONE PHASE SHIFT MASK BLANK, HALFTONE PHAS...

METHODS AND APPARATUS FOR CO-SPUTTERING MULTIPLE TARGETS

DEVICE FOR PRODUCING SEMICO NDUCTOR BUMP METAL LAYER

Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...