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H01J37/3464
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H
ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge
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H01J37/3464
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Patents Grants
last 30 patents
Information
Patent Grant
Magnet system, sputtering device and method
Patent number
12,165,857
Issue date
Dec 10, 2024
VON ARDENNE Asset GmbH & Co. KG
Klaus Schneider
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Mass airflow sensor and hydrocarbon trap combination
Patent number
12,140,111
Issue date
Nov 12, 2024
K & N Engineering, Inc.
Kevin McClelland
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Film forming method, film forming apparatus, and program
Patent number
12,094,700
Issue date
Sep 17, 2024
Tokyo Electron Limited
Toshiharu Hirata
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Semiconductor processing tool and methods of operation
Patent number
12,087,563
Issue date
Sep 10, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Yen-Liang Lin
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Substrate processing method and apparatus
Patent number
12,027,353
Issue date
Jul 2, 2024
Tokyo Electron Limited
Shota Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sputtering system with a plurality of cathode assemblies
Patent number
11,932,932
Issue date
Mar 19, 2024
Alluxa, Inc.
Michael A. Scobey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ion beam deposition target life enhancement
Patent number
11,901,167
Issue date
Feb 13, 2024
Plasma-Therm NES LLC
Sarpangala Hariharakeshava Hegde
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Coating device for curved substrate and coating method containing t...
Patent number
11,881,386
Issue date
Jan 23, 2024
Innolux Corporation
Ching-Feng Kuo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
Patent number
11,821,068
Issue date
Nov 21, 2023
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering a layer on a substrate using a high-energy density plasm...
Patent number
11,823,859
Issue date
Nov 21, 2023
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for deposition of metal nitrides
Patent number
11,739,418
Issue date
Aug 29, 2023
Applied Materials, Inc.
Mingwei Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and a device for automatically determining adjustment values...
Patent number
11,739,417
Issue date
Aug 29, 2023
Saint-Gobain Glass France
Yohan Faucillon
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering method
Patent number
11,710,624
Issue date
Jul 25, 2023
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
Bingliang Guo
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Coating control using forward parameter correction and adapted reve...
Patent number
11,692,263
Issue date
Jul 4, 2023
Viavi Solutions Inc.
Zhao Yuan
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering apparatus including gas distribution system
Patent number
11,674,213
Issue date
Jun 13, 2023
Cardinal CG Company
Klaus Hartig
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of coating a substrate and coating apparatus for coating a s...
Patent number
11,624,110
Issue date
Apr 11, 2023
Applied Materials, Inc.
Hyun Chan Park
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reactive sputter deposition of dielectric films
Patent number
11,584,982
Issue date
Feb 21, 2023
Viavi Solutions Inc.
Georg J. Ockenfuss
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Sputtering apparatus including gas distribution system
Patent number
11,501,959
Issue date
Nov 15, 2022
Cardinal CG Company
Klaus Hartig
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Sputtering system with a plurality of cathode assemblies
Patent number
11,479,847
Issue date
Oct 25, 2022
Alluxa, Inc.
Michael A. Scobey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Adding a cap-layer to improve magnetic recording media
Patent number
11,348,613
Issue date
May 31, 2022
Seagate Technology LLC
Paul M. Jones
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
Patent number
11,306,391
Issue date
Apr 19, 2022
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
Patent number
11,286,555
Issue date
Mar 29, 2022
IonQuest Corp.
Bassam Hanna Abraham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
Patent number
11,255,012
Issue date
Feb 22, 2022
IonQuest Corp.
Bassam Hanna Abraham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods for reducing material overhang in a feature of a substrate
Patent number
11,162,170
Issue date
Nov 2, 2021
Applied Materials, Inc.
Alan A. Ritchie
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method of coating a substrate and coating apparatus for coating a s...
Patent number
11,118,261
Issue date
Sep 14, 2021
Applied Materials, Inc.
Hyun Chan Park
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for co-sputtering multiple targets
Patent number
11,101,117
Issue date
Aug 24, 2021
Applied Materials, Inc.
Anantha K. Subramani
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Reactive sputter deposition of dielectric films
Patent number
10,920,310
Issue date
Feb 16, 2021
VIAVI Solutions Inc.
Georg J. Ockenfuss
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
Patent number
10,913,998
Issue date
Feb 9, 2021
IonQuestCorp.
Roman Chistyakov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
Patent number
10,900,118
Issue date
Jan 26, 2021
IonQuest Corp.
Bassam Hanna Abraham
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Techniques, system and apparatus for selective deposition of a laye...
Patent number
10,879,055
Issue date
Dec 29, 2020
Varian Semiconductor Equipment Associates, Inc.
Christopher Hatem
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240347327
Publication date
Oct 17, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yen-Liang LIN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Power Compensation in PVD Chambers
Publication number
20240213007
Publication date
Jun 27, 2024
Junjie PAN
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method of Operating a PVD Apparatus
Publication number
20240177997
Publication date
May 30, 2024
SPTS TECHNOLOGIES LIMITED
Scott Haymore
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SEMICONDUCTOR PROCESSING TOOL AND METHODS OF OPERATION
Publication number
20240096609
Publication date
Mar 21, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Yen-Liang LIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Method and Apparatus for Deposition of Mental Nitrides
Publication number
20240003000
Publication date
Jan 4, 2024
Applied Materials, Inc.
Mingwei Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ION BEAM DEPOSITION TARGET LIFE ENHANCEMENT
Publication number
20230335383
Publication date
Oct 19, 2023
Plasma-Therm NES LLC
Sarpangala Hariharakeshava Hegde
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REACTIVE SPUTTER DEPOSITION OF DIELECTRIC FILMS
Publication number
20230203636
Publication date
Jun 29, 2023
VIAVI SOLUTIONS INC.
Georg J. OCKENFUSS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Sputtering System with a Plurality of Cathode Assemblies
Publication number
20230133160
Publication date
May 4, 2023
Alluxa, Inc.
Michael A. Scobey
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MASS AIRFLOW SENSOR AND HYDROCARBON TRAP COMBINATION
Publication number
20230110960
Publication date
Apr 13, 2023
K&N Engineering, Inc.
Kevin McClelland
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
OPTICAL FILM, SPUTTERING TARGET, AND METHOD OF PRODUCING OPTICAL FILM
Publication number
20220316049
Publication date
Oct 6, 2022
Sumitomo Metal Mining Co., Ltd.
Hideharu OKAMI
G02 - OPTICS
Information
Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
Publication number
20220195585
Publication date
Jun 23, 2022
IonQuest Corp.
Bassam Hanna ABRAHAM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
FILM FORMING METHOD, FILM FORMING APPARATUS, AND PROGRAM
Publication number
20220074044
Publication date
Mar 10, 2022
TOKYO ELECTRON LIMITED
Toshiharu HIRATA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
COATING DEVICE FOR CURVED SUBSTRATE AND COATING METHOD CONTAINING T...
Publication number
20220059328
Publication date
Feb 24, 2022
InnoLux Corporation
Ching-Feng KUO
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
Publication number
20220042168
Publication date
Feb 10, 2022
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF COATING A SUBSTRATE AND COATING APPARATUS FOR COATING A S...
Publication number
20210355578
Publication date
Nov 18, 2021
Applied Materials, Inc.
Hyun Chan PARK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
Publication number
20210317569
Publication date
Oct 14, 2021
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
SPUTTERING APPARATUS INCLUDING GAS DISTRIBUTION SYSTEM
Publication number
20210217586
Publication date
Jul 15, 2021
Cardinal CG Company
Klaus Hartig
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
REACTIVE SPUTTER DEPOSITION OF DIELECTRIC FILMS
Publication number
20210156019
Publication date
May 27, 2021
VIAVI Solutions Inc.
Georg J. OCKENFUSS
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
Publication number
20210115552
Publication date
Apr 22, 2021
IonQuest Corp.
Bassam Hanna ABRAHAM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
Publication number
20210115553
Publication date
Apr 22, 2021
IonQuest Corp.
Bassam Hanna Abraham
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Magnetically Enhanced Low Temperature-High Density Plasma-Chemical...
Publication number
20210102284
Publication date
Apr 8, 2021
IonQuest Corp.
Bassam Hanna ABRAHAM
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A METHOD AND A DEVICE FOR AUTOMATICALLY DETERMINING ADJUSTMENT VALU...
Publication number
20200392617
Publication date
Dec 17, 2020
SAINT-GOBAIN GLASS FRANCE
Yohan FAUCILLON
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND APPARATUS FOR DEPOSITION OF METAL NITRIDES
Publication number
20200299830
Publication date
Sep 24, 2020
Applied Materials, Inc.
Mingwei Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DUAL POWER FEED ROTARY SPUTTERING CATHODE
Publication number
20200266038
Publication date
Aug 20, 2020
Buhler AG
Daniel Theodore Crowley
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ADDING A CAP-LAYER TO IMPROVE MAGNETIC RECORDING MEDIA
Publication number
20200219534
Publication date
Jul 9, 2020
SEAGATE TECHNOLOGY LLC
Paul M. JONES
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
TECHNIQUES, SYSTEM AND APPRATUS FOR SELECTIVE DEPOSITION OF A LAYER...
Publication number
20200027707
Publication date
Jan 23, 2020
Varian Semiconductor Equipment Associates, Inc.
CHRISTOPHER HATEM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD FOR PREPARING HALFTONE PHASE SHIFT MASK BLANK, HALFTONE PHAS...
Publication number
20200026180
Publication date
Jan 23, 2020
Shin-Etsu Chemical Co., Ltd.
Yukio INAZUKI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHODS AND APPARATUS FOR CO-SPUTTERING MULTIPLE TARGETS
Publication number
20200013597
Publication date
Jan 9, 2020
Applied Materials, Inc.
Anantha K. SUBRAMANI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DEVICE FOR PRODUCING SEMICO NDUCTOR BUMP METAL LAYER
Publication number
20190378812
Publication date
Dec 12, 2019
Yu-Hung Huang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...
Publication number
20190271070
Publication date
Sep 5, 2019
IonQuest Corp.
Bassam Hanna ABRAHAM
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...