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Optical devices within, or forming part of, the tube
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Electric elements
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DEVICES USING STIMULATED EMISSION
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Lasers
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H01S3/034
Optical devices within, or forming part of, the tube
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Patents Grants
last 30 patents
Information
Patent Grant
Light emitting sealed body and light source device
Patent number
12,191,623
Issue date
Jan 7, 2025
Hamamatsu Photonics K.K.
Akio Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line narrowing gas laser device and electronic device manufacturing...
Patent number
12,155,168
Issue date
Nov 26, 2024
Gigaphoton Inc.
Yusuke Saito
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser radiation system
Patent number
12,072,507
Issue date
Aug 27, 2024
Gigaphoton Inc.
Osamu Wakabayashi
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Solid-state lasers and assembly method therefor
Patent number
12,027,810
Issue date
Jul 2, 2024
MENHIR PHOTONICS AG
Benjamin Rudin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Folded slab laser
Patent number
11,942,753
Issue date
Mar 26, 2024
Kern Technologies, LLC.
Paul E Jackson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modeling thermal effects for a laser system
Patent number
11,860,365
Issue date
Jan 2, 2024
Microsoft Technology Licensing, LLC
Harini Chimalapati
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Light emitting sealed body and light source device
Patent number
11,862,922
Issue date
Jan 2, 2024
ENERGETIQ TECHNOLOGY, INC.
Akio Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gaseous laser systems with edge-defining element and related techni...
Patent number
11,855,406
Issue date
Dec 26, 2023
XEMED LLC
F. William Hersman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical element for a deep ultraviolet light source
Patent number
11,784,452
Issue date
Oct 10, 2023
Cymer, LLC
Saptaparna Das
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser system, learning device, and inference device
Patent number
11,734,810
Issue date
Aug 22, 2023
Mitsubishi Electric Corporation
Takuya Kawashima
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Laser chamber apparatus, gas laser apparatus, and method for manufa...
Patent number
11,588,291
Issue date
Feb 21, 2023
Gigaphoton Inc.
Takuya Ishii
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Thin film brewster coupling device
Patent number
11,476,630
Issue date
Oct 18, 2022
Robert Neil Campbell
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Window for laser protection
Patent number
11,476,641
Issue date
Oct 18, 2022
MAC THIN FILMS, INC.
David McLean
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Line narrowing module, gas laser apparatus, and electronic device m...
Patent number
11,411,364
Issue date
Aug 9, 2022
Gigaphoton Inc.
Miwa Igarashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Gas laser device
Patent number
11,367,988
Issue date
Jun 21, 2022
Mitsubishi Electric Corporation
Tatsuya Yamamoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Light emitting unit and light source device
Patent number
11,367,989
Issue date
Jun 21, 2022
Hamamatsu Photonics K.K.
Akio Suzuki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser chamber, method for manufacturing seal member, and method for...
Patent number
11,349,272
Issue date
May 31, 2022
Gigaphoton Inc.
Masaharu Miki
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser device
Patent number
11,329,443
Issue date
May 10, 2022
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., LTD.
Shinya Domoto
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser device
Patent number
11,264,771
Issue date
Mar 1, 2022
Mitsubishi Electric Corporation
Tomohiro Kyoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser apparatus and method for manufacturing optical element
Patent number
11,264,773
Issue date
Mar 1, 2022
Gigaphoton Inc.
Daisuke Tei
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser system and extreme ultraviolet light generation system
Patent number
11,228,156
Issue date
Jan 18, 2022
Gigaphoton Inc.
Yoshifumi Ueno
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Protection mechanism for light source
Patent number
11,211,772
Issue date
Dec 28, 2021
STMicroelectronics (Grenoble 2) SAS
Romain Coffy
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Excimer laser with uniform beam
Patent number
11,183,808
Issue date
Nov 23, 2021
Coherent Lasersystems GmbH & Co. KG
Igor Bragin
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Arrangement of expanding optical flows for efficient laser extraction
Patent number
11,165,216
Issue date
Nov 2, 2021
INNOVEN ENERGY LLC
Robert O. Hunter
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Laser oscillator unit and laser machining device
Patent number
11,146,034
Issue date
Oct 12, 2021
PANASONIC INDUSTRIAL DEVICES SUNZ CO., LTD.
Taku Otani
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Light source apparatus
Patent number
11,128,097
Issue date
Sep 21, 2021
Samsung Electronics Co., Ltd.
Akihiro Komatsu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Laser crystallization device
Patent number
11,087,980
Issue date
Aug 10, 2021
Samsung Display Co., Ltd.
Byung Soo So
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Laser device and internal combustion engine
Patent number
11,075,497
Issue date
Jul 27, 2021
Ricoh Company, Ltd.
Kentaroh Hagita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Capacitor cooling structure and laser apparatus
Patent number
11,050,210
Issue date
Jun 29, 2021
Gigaphoton Inc.
Hisakazu Katsuumi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Laser apparatus and extreme ultraviolet light generation system
Patent number
10,868,403
Issue date
Dec 15, 2020
Gigaphoton Inc.
Yasufumi Kawasuji
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
CHAMBER OF GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING...
Publication number
20240405497
Publication date
Dec 5, 2024
Gigaphoton Inc.
Yoichi SASAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOLID-STATE LASERS AND ASSEMBLY METHOD THEREFOR
Publication number
20240305057
Publication date
Sep 12, 2024
MENHIR PHOTONICS AG
Benjamin RUDIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Dustproof structure for laser output window of laser, and laser
Publication number
20240235144
Publication date
Jul 11, 2024
Beijing Rslaser Opto-Electronics Technology Co., Ltd.
Jinsong WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20240146011
Publication date
May 2, 2024
Gigaphoton Inc.
Koji ASHIKAWA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODELING THERMAL EFFECTS FOR A LASER SYSTEM
Publication number
20240134201
Publication date
Apr 25, 2024
Microsoft Technology Licensing, LLC
Harini CHIMALAPATI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20240136787
Publication date
Apr 25, 2024
Gigaphoton Inc.
Yousuke FUJIMAKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT EMITTING SEALED BODY AND LIGHT SOURCE DEVICE
Publication number
20240097394
Publication date
Mar 21, 2024
HAMAMATSU PHOTONICS K. K.
Akio SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS LASER AND WASTE HEAT RECOVERY SYSTEM
Publication number
20230378712
Publication date
Nov 23, 2023
Sumitomo Electric Industries, Ltd.
Takafumi OHTSUKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GASEOUS LASER SYSTEMS WITH EDGE-DEFINING ELEMENT AND RELATED TECHNI...
Publication number
20230318251
Publication date
Oct 5, 2023
Xemed LLC
F. William Hersman
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR CONTROLLING A CENTER WAVELENGTH
Publication number
20230223734
Publication date
Jul 13, 2023
CYMER, LLC
Kuo-Tai Teng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LINE NARROWING GAS LASER DEVICE AND ELECTRONIC DEVICE MANUFACTURING...
Publication number
20230187892
Publication date
Jun 15, 2023
Gigaphoton Inc.
Yusuke SAITO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CONDUIT SYSTEM, RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND METHO...
Publication number
20230163551
Publication date
May 25, 2023
CYMER, LLC
Edward Siqi Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS LASER APPARATUS AND ELECTRONIC DEVICE MANUFACTURING METHOD
Publication number
20230108886
Publication date
Apr 6, 2023
Gigaphoton Inc.
Daisuke TEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
UNDERCUT ELECTRODES FOR A GAS DISCHARGE LASER CHAMBER
Publication number
20230016894
Publication date
Jan 19, 2023
CYMER, LLC
Edward Siqi Luo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METROLOGY FOR IMPROVING DUV LASER ALIGNMENT
Publication number
20230009554
Publication date
Jan 12, 2023
CYMER, LLC
Zhong Quan Zhao
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DIRECTED GAS PURGE TO REDUCE DUSTING OF EXCIMER DISCHARGE CHAMBER W...
Publication number
20230006409
Publication date
Jan 5, 2023
CYMER, LLC
John Theodore Melchior
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MODELING THERMAL EFFECTS FOR A LASER SYSTEM
Publication number
20220317447
Publication date
Oct 6, 2022
Microsoft Technology Licensing, LLC
Harini CHIMALAPATI
G02 - OPTICS
Information
Patent Application
CAPPED BLOCKING COATING FOR LASER OPTICS
Publication number
20220311200
Publication date
Sep 29, 2022
Corning Incorporated
Gerald Philip Cox
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SOLID-STATE LASERS AND ASSEMBLY METHOD THEREFOR
Publication number
20220278495
Publication date
Sep 1, 2022
MENHIR PHOTONICS AG
Benjamin RUDIN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT EMITTING UNIT AND LIGHT SOURCE DEVICE
Publication number
20220200226
Publication date
Jun 23, 2022
HAMAMATSU PHOTONICS K. K.
Akio SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT EMITTING SEALED BODY AND LIGHT SOURCE DEVICE
Publication number
20220200225
Publication date
Jun 23, 2022
HAMAMATSU PHOTONICS K. K.
Akio SUZUKI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL ELEMENT FOR A DEEP ULTRAVIOLET LIGHT SOURCE
Publication number
20220102929
Publication date
Mar 31, 2022
CYMER, LLC
Saptaparna Das
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS LASER DEVICE
Publication number
20220094129
Publication date
Mar 24, 2022
Mitsubishi Electric Corporation
Tatsuya YAMAMOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER DEVICE
Publication number
20220045471
Publication date
Feb 10, 2022
Mitsubishi Electric Corporation
Tomohiro KYOTO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
GAS LASER APPARATUS, LASER BEAM EMITTING METHOD OF GAS LASER APPARA...
Publication number
20210336403
Publication date
Oct 28, 2021
Gigaphoton Inc.
Daisuke TEI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LASER SYSTEM
Publication number
20210336402
Publication date
Oct 28, 2021
Analog Devices International Unlimited Company
Jonathan Ephraim David Hurwitz
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METROLOGY FOR A BODY OF A GAS DISCHARGE STAGE
Publication number
20210194202
Publication date
Jun 24, 2021
CYMER, LLC
Andrei Dorobantu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ENHANCED WAVEGUIDE SURFACE IN GAS LASERS
Publication number
20210057864
Publication date
Feb 25, 2021
IRADION LASER, INC.
Alan Kujawski
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIGHT SOURCE APPARATUS
Publication number
20210036477
Publication date
Feb 4, 2021
Samsung Electronics Co., Ltd.
Akihiro Komatsu
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
LASER OSCILLATOR UNIT AND LASER MACHINING DEVICE
Publication number
20210006028
Publication date
Jan 7, 2021
PANASONIC INDUSTRIAL DEVICES SUNX CO., LTD.
Taku OTANI
H01 - BASIC ELECTRIC ELEMENTS