Optical means

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H01J2237/2482

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2482Optical means

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Systems and methods of profiling charged-particle beams
- Patent number 12,165,836
- Issue date Dec 10, 2024
- ASML Netherlands B.V.
- Maikel Robert Goosen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self-differential confocal tilt sensor for measuring level variatio...
- Patent number 12,142,456
- Issue date Nov 12, 2024
- ASML Netherlands B.V.
- Jinmei Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for projecting an array of multiple charged pa...
- Patent number 12,123,841
- Issue date Oct 22, 2024
- DELMIC IP B.V.
- Andries Pieter Johan Effting
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning charged-particle-beam microscopy with energy-dispersive x-...
- Patent number 12,094,684
- Issue date Sep 17, 2024
- Mochii, Inc.
- Christopher Su-Yan Own
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stationary intraoral tomosynthesis imaging systems, methods, and co...
- Patent number 12,016,716
- Issue date Jun 25, 2024
- Surround Medical Systems, Inc.
- Jianping Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Use of optical polarization states to control a ponderomotive phase...
- Patent number 11,990,313
- Issue date May 21, 2024
- The Regents of the University of California
- Jeremy J. Axelrod
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,749,494
- Issue date Sep 5, 2023
- HITACHI HIGH-TECH CORPORATION
- Takafumi Miwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device defect detection method using a charged particle beam
- Patent number 11,631,568
- Issue date Apr 18, 2023
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical height detection system
- Patent number 11,521,826
- Issue date Dec 6, 2022
- ASML Netherlands B.V.
- Jian Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 11,398,366
- Issue date Jul 26, 2022
- HITACHI HIGH-TECH CORPORATION
- Takafumi Miwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,355,308
- Issue date Jun 7, 2022
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope
- Patent number 11,251,011
- Issue date Feb 15, 2022
- HITACHI HIGH-TECH CORPORATION
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple working distance height sensor using multiple wavelengths
- Patent number 11,170,971
- Issue date Nov 9, 2021
- KLA Corporation
- Donald Pettibone
- G01 - MEASURING TESTING
Information Patent Grant
Laser-based phase plate image contrast manipulation
- Patent number 11,101,101
- Issue date Aug 24, 2021
- FEI Company
- Bart Buijsse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope
- Patent number 11,087,947
- Issue date Aug 10, 2021
- HITACHI HIGH-TECH CORPORATION
- Takashi Ohshima
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stationary intraoral tomosynthesis imaging systems, methods, and co...
- Patent number 11,051,771
- Issue date Jul 6, 2021
- Jianping Lu
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Mirror device, mirror drive method, light irradiation device, and i...
- Patent number 10,962,768
- Issue date Mar 30, 2021
- Hamamatsu Photonics K.K.
- Akira Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam device, observation method, and diffraction grating
- Patent number 10,948,426
- Issue date Mar 16, 2021
- Riken
- Ken Harada
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for calibrating optical path degradation usefu...
- Patent number 10,892,147
- Issue date Jan 12, 2021
- Applied Materials, Inc.
- Sairaju Tallavarjula
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for forming an optical fiber array
- Patent number RE48287
- Issue date Oct 27, 2020
- ASML Netherlands B.V.
- Guido De Boer
Information Patent Grant
Defect observation device
- Patent number 10,770,260
- Issue date Sep 8, 2020
- Hitachi High-Technologies Corporation
- Yuko Otani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
OES device, plasma processing apparatus including the same and meth...
- Patent number 10,770,273
- Issue date Sep 8, 2020
- Samsung Electronics Co., Ltd.
- In-Joong Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mirror device, mirror drive method, light irradiation device, and i...
- Patent number 10,761,318
- Issue date Sep 1, 2020
- Hamamatsu Photonics K.K.
- Akira Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Embedded features for interlocks using additive manufacturing
- Patent number 10,672,634
- Issue date Jun 2, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Craig R. Chaney
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Phase contrast transmission electron microscope device
- Patent number 10,658,155
- Issue date May 19, 2020
- Inter-University Research Institute Corporation National Institutes of Natura...
- Yukinori Nagatani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam microscope
- Patent number 10,615,000
- Issue date Apr 7, 2020
- Carl Zeiss Microscopy GmbH
- Luyang Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Stage device and charged particle beam device
- Patent number 10,600,614
- Issue date Mar 24, 2020
- Hitachi High-Technologies Corporation
- Motohiro Takahashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of adjusting the primary side of an X-ray diffractometer
- Patent number 10,598,615
- Issue date Mar 24, 2020
- Andreas Kleine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Imaging beam positioning apparatus and method of use thereof
- Patent number 10,561,860
- Issue date Feb 18, 2020
- Jennifer Hertzoff
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Mobile and free-form x-ray imaging systems and methods
- Patent number 10,539,708
- Issue date Jan 21, 2020
- The University of North Carolina at Chapel Hill
- Otto Z. Zhou
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR
- Publication number 20240395499
- Publication date Nov 28, 2024
- RINKEN
- Takahiro SHIMOJIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF OPTICAL POLARIZATION STATES TO CONTROL A PONDEROMOTIVE PHASE...
- Publication number 20240282549
- Publication date Aug 22, 2024
- The Regents of the University of California
- Jeremy J. Axelrod
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD
- Publication number 20240071716
- Publication date Feb 29, 2024
- ASML NETHERLANDS B.V.
- Marco Jan-Jaco WIELAND
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED-LOOP CONTROL OF PLASMA SOURCE VIA FEEDBACK FROM LASER ABSORP...
- Publication number 20230411129
- Publication date Dec 21, 2023
- Applied Materials, Inc.
- Abdullah Zafar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTU...
- Publication number 20230335374
- Publication date Oct 19, 2023
- ASML NETHERLANDS B.V.
- Benoit Herve GAURY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LEVELING SENSOR IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION
- Publication number 20230096657
- Publication date Mar 30, 2023
- ASML NETHERLANDS B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Blended energy ion implantation
- Publication number 20230038392
- Publication date Feb 9, 2023
- Axcelis Technologies, Inc.
- James S. DeLuca
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR PROJECTING AN ARRAY OF MULTIPLE CHARGED PA...
- Publication number 20230038465
- Publication date Feb 9, 2023
- DELMIC IP B.V.
- Andries Pieter Johan EFFTING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS OF PROFILING CHARGED-PARTICLE BEAMS
- Publication number 20220392741
- Publication date Dec 8, 2022
- ASML NETHERLANDS B.V.
- Maikel Robert GOOSEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...
- Publication number 20220328283
- Publication date Oct 13, 2022
- ASML NETHERLANDS B.V.
- Jinmei YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
USE OF OPTICAL POLARIZATION STATES TO CONTROL A PONDEROMOTIVE PHASE...
- Publication number 20220319803
- Publication date Oct 6, 2022
- The Regents of the University of California
- Jeremy J. Axelrod
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20220102108
- Publication date Mar 31, 2022
- HITACHI HIGH-TECH CORPORATION
- Takafumi Miwa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE
- Publication number 20210066028
- Publication date Mar 4, 2021
- HITACHI HIGH-TECH CORPORATION
- Yasuhiro Shirasaki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20210043412
- Publication date Feb 11, 2021
- HITACHI HIGH-TECH CORPORATION
- Takafumi Miwa
- G01 - MEASURING TESTING
Information Patent Application
LASER-BASED PHASE PLATE IMAGE CONTRAST MANIPULATION
- Publication number 20200365366
- Publication date Nov 19, 2020
- FEI Company
- Bart Buijsse
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MIRROR DEVICE, MIRROR DRIVE METHOD, LIGHT IRRADIATION DEVICE, AND I...
- Publication number 20200319452
- Publication date Oct 8, 2020
- HAMAMATSU PHOTONICS K. K.
- Akira TAKAHASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE
- Publication number 20200303152
- Publication date Sep 24, 2020
- Hitachi High-Technologies Corporation
- Takashi OHSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL HEIGHT DETECTION SYSTEM
- Publication number 20200279715
- Publication date Sep 3, 2020
- ASML NETHERLANDS B.V.
- Jian ZHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM MICROSCOPE
- Publication number 20190304742
- Publication date Oct 3, 2019
- CARL ZEISS MICROSCOPY GMBH
- Luyang Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD OF PRODUCING DIAMOND AND PERFORMING REAL TIME...
- Publication number 20190284716
- Publication date Sep 19, 2019
- Devi Shanker Misra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OES DEVICE, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METH...
- Publication number 20190252164
- Publication date Aug 15, 2019
- Samsung Electronics Co., Ltd.
- In-Joong KIM
- G01 - MEASURING TESTING
Information Patent Application
DEFECT OBSERVATION DEVICE
- Publication number 20190237296
- Publication date Aug 1, 2019
- Hitachi High-Technologies Corporation
- Yuko OTANI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
PARTICLE BEAM DEVICE, OBSERVATION METHOD, AND DIFFRACTION GRATING
- Publication number 20190196070
- Publication date Jun 27, 2019
- Riken
- Ken HARADA
- G02 - OPTICS
Information Patent Application
A Method for Determining the Changing Location of the Point of Inci...
- Publication number 20180308660
- Publication date Oct 25, 2018
- ALD Vacuum Technologies GmbH
- Georg REITER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL-CAVITY BASED PONDEROMOTIVE PHASE PLATE FOR TRANSMISSION ELE...
- Publication number 20180286631
- Publication date Oct 4, 2018
- The Regents of the University of California
- Jeremy J. Axelrod
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR CALIBRATION OF OPTICAL SIGNALS IN SEMICONDUCT...
- Publication number 20180136118
- Publication date May 17, 2018
- Verity Instruments, Inc.
- Andrew Weeks Kueny
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR CALIBRATING OPTICAL PATH DEGRADATION USEFU...
- Publication number 20180130647
- Publication date May 10, 2018
- Applied Materials, Inc.
- Sairaju Tallavarjula
- G01 - MEASURING TESTING
Information Patent Application
MICROWAVE SUPPLY APPARATUS, PLASMA PROCESSING APPARATUS, AND PLASMA...
- Publication number 20170365446
- Publication date Dec 21, 2017
- TOKYO ELECTRON LIMITED
- Hitoshi ITOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Apparatus and Method of Producing Diamond and Performing Real Time...
- Publication number 20160333497
- Publication date Nov 17, 2016
- Devi Shanker Misra
- C30 - CRYSTAL GROWTH
Information Patent Application
INTEGRATED OPTICAL AND CHARGED PARTICLE INSPECTION APPARATUS
- Publication number 20150262784
- Publication date Sep 17, 2015
- DELMIC B.V.
- Jacob Pieter Hoogenboom
- H01 - BASIC ELECTRIC ELEMENTS

Optical means

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Systems and methods of profiling charged-particle beams

Self-differential confocal tilt sensor for measuring level variatio...

Apparatus and method for projecting an array of multiple charged pa...

Scanning charged-particle-beam microscopy with energy-dispersive x-...

Stationary intraoral tomosynthesis imaging systems, methods, and co...

Use of optical polarization states to control a ponderomotive phase...

Charged particle beam apparatus

Device defect detection method using a charged particle beam

Optical height detection system

Charged particle beam apparatus

Charged particle beam device

Electron microscope

Multiple working distance height sensor using multiple wavelengths

Laser-based phase plate image contrast manipulation

Electron microscope

Stationary intraoral tomosynthesis imaging systems, methods, and co...

Mirror device, mirror drive method, light irradiation device, and i...

Particle beam device, observation method, and diffraction grating

Method and apparatus for calibrating optical path degradation usefu...

Method for forming an optical fiber array

Defect observation device

OES device, plasma processing apparatus including the same and meth...

Mirror device, mirror drive method, light irradiation device, and i...

Embedded features for interlocks using additive manufacturing

Phase contrast transmission electron microscope device

Electron beam microscope

Stage device and charged particle beam device

Method of adjusting the primary side of an X-ray diffractometer

Imaging beam positioning apparatus and method of use thereof

Mobile and free-form x-ray imaging systems and methods

Patents Applicationslast 30 patents

FIVE-DIMENSIONAL ELECTRON MICROSCOPE AND ANALYSIS METHOD THEREFOR

USE OF OPTICAL POLARIZATION STATES TO CONTROL A PONDEROMOTIVE PHASE...

CHARGED PARTICLE ASSESSMENT SYSTEM AND METHOD

CLOSED-LOOP CONTROL OF PLASMA SOURCE VIA FEEDBACK FROM LASER ABSORP...

SYSTEMS AND METHODS FOR PULSED VOLTAGE CONTRAST DETECTION AND CAPTU...

LEVELING SENSOR IN MULTIPLE CHARGED-PARTICLE BEAM INSPECTION

Blended energy ion implantation

APPARATUS AND METHOD FOR PROJECTING AN ARRAY OF MULTIPLE CHARGED PA...

SYSTEMS AND METHODS OF PROFILING CHARGED-PARTICLE BEAMS

SELF-DIFFERENTIAL CONFOCAL TILT SENSOR FOR MEASURING LEVEL VARIATIO...

USE OF OPTICAL POLARIZATION STATES TO CONTROL A PONDEROMOTIVE PHASE...

CHARGED PARTICLE BEAM APPARATUS

CHARGED PARTICLE BEAM DEVICE

CHARGED PARTICLE BEAM APPARATUS

LASER-BASED PHASE PLATE IMAGE CONTRAST MANIPULATION

MIRROR DEVICE, MIRROR DRIVE METHOD, LIGHT IRRADIATION DEVICE, AND I...

ELECTRON MICROSCOPE

OPTICAL HEIGHT DETECTION SYSTEM

ELECTRON BEAM MICROSCOPE

APPARATUS AND METHOD OF PRODUCING DIAMOND AND PERFORMING REAL TIME...

OES DEVICE, PLASMA PROCESSING APPARATUS INCLUDING THE SAME AND METH...

DEFECT OBSERVATION DEVICE

PARTICLE BEAM DEVICE, OBSERVATION METHOD, AND DIFFRACTION GRATING

A Method for Determining the Changing Location of the Point of Inci...

OPTICAL-CAVITY BASED PONDEROMOTIVE PHASE PLATE FOR TRANSMISSION ELE...

SYSTEM AND METHOD FOR CALIBRATION OF OPTICAL SIGNALS IN SEMICONDUCT...

METHOD AND APPARATUS FOR CALIBRATING OPTICAL PATH DEGRADATION USEFU...

MICROWAVE SUPPLY APPARATUS, PLASMA PROCESSING APPARATUS, AND PLASMA...

Apparatus and Method of Producing Diamond and Performing Real Time...

INTEGRATED OPTICAL AND CHARGED PARTICLE INSPECTION APPARATUS