Oxynitrides

Industry

CPC
C23C16/308

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/308Oxynitrides

Industries

Patents Grantslast 30 patents

Information Patent Grant
Silicon oxynitride based encapsulation layer for magnetic tunnel ju...
- Patent number 12,185,641
- Issue date Dec 31, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Vignesh Sundar
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thermal atomic layer deposition of silicon-containing films
- Patent number 12,157,945
- Issue date Dec 3, 2024
- Lam Research Corporation
- Awnish Gupta
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for depositing blocking layers on metal surfaces
- Patent number 12,131,900
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High density plasma enhanced process chamber
- Patent number 12,080,516
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Zheng John Ye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Forming mesas on an electrostatic chuck
- Patent number 12,074,052
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Wendell Glenn Boyd
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for processing a substrate
- Patent number 12,074,009
- Issue date Aug 27, 2024
- Tokyo Electron Limited
- Yuki Iijima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface-coated cutting tool
- Patent number 12,064,817
- Issue date Aug 20, 2024
- Mitsubishi Materials Corporation
- Eiji Nakamura
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Cleaning method, method of manufacturing semiconductor device, and...
- Patent number 12,065,736
- Issue date Aug 20, 2024
- Kokusai Electric Corporation
- Naoya Miyashita
- B08 - CLEANING
Information Patent Grant
Insert and cutting tool including the same
- Patent number 12,048,966
- Issue date Jul 30, 2024
- Kyocera Corporation
- Kou Ri
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus for processing a substrate
- Patent number 12,020,904
- Issue date Jun 25, 2024
- Tokyo Electron Limited
- Yuki Iijima
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Low-κ ALD gap-fill methods and material
- Patent number 12,020,923
- Issue date Jun 25, 2024
- Lam Research Corporation
- Joseph R. Abel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Surface coated cutting tool having hard coating layer exhibiting ex...
- Patent number 11,998,992
- Issue date Jun 4, 2024
- Mitsubishi Materials Corporation
- Takuya Ishigaki
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Atomic layer deposition of metal films
- Patent number 11,970,776
- Issue date Apr 30, 2024
- Lam Research Corporation
- Joshua Collins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition of low-k films
- Patent number 11,970,777
- Issue date Apr 30, 2024
- Applied Materials, Inc.
- Shuaidi Zhang
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Substrate processing method
- Patent number 11,895,779
- Issue date Feb 6, 2024
- Sumitomo Precision Products Co., Ltd.
- Yasuyuki Hirata
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, method of manufacturing semiconduct...
- Patent number 11,885,016
- Issue date Jan 30, 2024
- Kokusai Electric Corporation
- Kazuhiro Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Homoleptic lanthanide deposition precursors
- Patent number 11,866,824
- Issue date Jan 9, 2024
- Applied Materials, Inc.
- Thomas Knisley
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Preparation method for bifacial perc solar cell
- Patent number 11,848,395
- Issue date Dec 19, 2023
- GUANGDONG AIKO SOLAR ENERGY TECHNOLOGY CO., LTD.
- Jiebin Fang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Process for preparing a coated glass substrate
- Patent number 11,845,690
- Issue date Dec 19, 2023
- Pilkington Group Limited
- Deborah Raisbeck
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Doped or undoped silicon carbide deposition and remote hydrogen pla...
- Patent number 11,848,199
- Issue date Dec 19, 2023
- Lam Research Corporation
- Guangbi Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, method of processing...
- Patent number 11,823,886
- Issue date Nov 21, 2023
- Kokusai Electric Corporation
- Kazuhiro Harada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Si-containing film forming precursors and methods of using the same
- Patent number 11,820,654
- Issue date Nov 21, 2023
- L'AIR LIQUIDE, SOCIETE ANONYME POUR L'ETUDE ET L'EXPLOITATION DES PROCEDES GE...
- Jean-Marc Girard
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cleaning method, method of manufacturing semiconductor device, and...
- Patent number 11,788,188
- Issue date Oct 17, 2023
- Kokusai Electric Corporation
- Naoya Miyashita
- B08 - CLEANING
Information Patent Grant
Processing apparatus and processing method
- Patent number 11,781,219
- Issue date Oct 10, 2023
- Tokyo Electron Limited
- Kazuo Yabe
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of processing substrate, substrate processing apparatus, rec...
- Patent number 11,753,716
- Issue date Sep 12, 2023
- Kokusai Electric Corporation
- Hiroki Hatta
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composition for depositing silicon-containing thin film containing...
- Patent number 11,749,522
- Issue date Sep 5, 2023
- DNF Co., Ltd.
- Sung Gi Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition and methods using same for carbon doped silicon contain...
- Patent number 11,742,200
- Issue date Aug 29, 2023
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of manufacturing semiconductor device, substrate processing...
- Patent number 11,735,412
- Issue date Aug 22, 2023
- Kokusai Electric Corporation
- Atsushi Sano
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for forming metal silicon oxide and metal silicon oxynitride...
- Patent number 11,725,280
- Issue date Aug 15, 2023
- ASM IP Holding B.V.
- Takashi Yoshida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Si-containing film forming precursors and methods of using the same
- Patent number 11,699,584
- Issue date Jul 11, 2023
- L'Air Liquide, Société Anonyme pour l'Edute ed l'Exploitation des Procédés Ge...
- Jean-Marc Girard
- C01 - INORGANIC CHEMISTRY

Patents Applicationslast 30 patents

Information Patent Application
Amorphous Silicon Oxide, Amorphous Silicon Oxynitride, and Amorphou...
- Publication number 20250018093
- Publication date Jan 16, 2025
- THE TEXAS A&M UNIVERSITY SYSTEM
- Venu Varanasi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...
- Publication number 20250003071
- Publication date Jan 2, 2025
- Kokusai Electric Corporation
- Takeo HANASHIMA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ULTRATHIN SILICON OXYNITRIDE INTERFACE MATERIAL, TUNNEL OXIDE PASSI...
- Publication number 20250006850
- Publication date Jan 2, 2025
- Teranergy Technology Co., Ltd.
- Jichun YE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEED SUBSTRATE FOR EPITAXIAL GROWTH AND METHOD FOR PRODUCING SAME,...
- Publication number 20240417882
- Publication date Dec 19, 2024
- Shin-Etsu Chemical Co., Ltd.
- Yoshihiro KUBOTA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FORMING MESAS ON AN ELECTROSTATIC CHUCK
- Publication number 20240420986
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Wendell Glenn BOYD
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ALUMINUM OXYNITRIDE COATINGS WITH ENHANCED CRYSTALLINITY
- Publication number 20240367237
- Publication date Nov 7, 2024
- Kennametal Inc.
- Zhenyu LIU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LOW-K ALD GAP-FILL METHODS AND MATERIAL
- Publication number 20240347337
- Publication date Oct 17, 2024
- LAM RESEARCH CORPORATION
- Joseph R. Abel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...
- Publication number 20240304438
- Publication date Sep 12, 2024
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE,...
- Publication number 20240297209
- Publication date Sep 5, 2024
- TOKYO ELECTRON LIMITED
- Susumu YAMAUCHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FORMING THIN FILM AND APPARATUS FOR PROCESSING SUBSTRATE...
- Publication number 20240290586
- Publication date Aug 29, 2024
- WONIK IPS CO., LTD.
- Jae Hun LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20240282571
- Publication date Aug 22, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wan-Lin Tsai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITION OF METAL FILMS
- Publication number 20240271281
- Publication date Aug 15, 2024
- LAM RESEARCH CORPORATION
- Joshua COLLINS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED CUTTING TOOL
- Publication number 20240238875
- Publication date Jul 18, 2024
- AB SANDVIK COROMANT
- Linus VON FIEANDT
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CUTTING TOOL
- Publication number 20240227028
- Publication date Jul 11, 2024
- AB SANDVIK COROMANT
- Linus VON FIEANDT
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CUTTING TOOL
- Publication number 20240216997
- Publication date Jul 4, 2024
- SUMITOMO ELECTRIC HARDMETAL CORP.
- Susumu OKUNO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
CUTTING TOOL
- Publication number 20240216998
- Publication date Jul 4, 2024
- SUMITOMO ELECTRIC HARDMETAL CORP.
- Susumu OKUNO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
COATED CUTTING TOOL
- Publication number 20240217001
- Publication date Jul 4, 2024
- AB SANDVIK COROMANT
- Linus VON FIEANDT
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Deposition Of Vanadium-Containing Films
- Publication number 20240191355
- Publication date Jun 13, 2024
- VERSUM MATERIALS US, LLC
- SERGEI V. IVANOV
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING SYSTEM
- Publication number 20240191351
- Publication date Jun 13, 2024
- ASM IP HOLDING B.V.
- Dieter Pierreux
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SELECTIVE DEPOSITION OF MATERIAL COMPRISING SILICON AND NITROGEN
- Publication number 20240162036
- Publication date May 16, 2024
- ASM IP HOLDING B.V.
- Viraj Madhiwala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CUTTING TOOL
- Publication number 20240139825
- Publication date May 2, 2024
- Sumitomo Electric Industries, Ltd.
- Satoshi ONO
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SEED SUBSTRATE FOR EPITAXIAL GROWTH USE AND METHOD FOR MANUFACTURIN...
- Publication number 20240141552
- Publication date May 2, 2024
- Shin-Etsu Chemical Co., Ltd.
- Yoshihiro KUBOTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITIONS AND METHODS USING SAME FOR FILMS COMPRISING SILICON AN...
- Publication number 20240093360
- Publication date Mar 21, 2024
- VERSUM MATERIALS US, LLC
- HARIPIN CHANDRA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...
- Publication number 20240063015
- Publication date Feb 22, 2024
- LAM RESEARCH CORPORATION
- Guangbi Yuan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIELECTRIC COMPOSITION, CAPACITIVE ELEMENT, VISIBLE-LIGHT PHOTOCATA...
- Publication number 20240011152
- Publication date Jan 11, 2024
- TDK Corporation
- Kumiko YAMAZAKI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...
- Publication number 20240014032
- Publication date Jan 11, 2024
- Kokusai Electric Corporation
- Kazuhiro HARADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR PROCESSING SUBSTRATE
- Publication number 20230411203
- Publication date Dec 21, 2023
- EUGENE TECHNOLOGY CO., LTD.
- Ryong HWANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...
- Publication number 20230407472
- Publication date Dec 21, 2023
- Kokusai Electric Corporation
- Hiroki HATTA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20230402256
- Publication date Dec 14, 2023
- TOKYO ELECTRON LIMITED
- Takashi CHIBA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...
- Publication number 20230377874
- Publication date Nov 23, 2023
- VERSUM MATERIALS US, LLC
- Haripin Chandra
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Oxynitrides

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Silicon oxynitride based encapsulation layer for magnetic tunnel ju...

Thermal atomic layer deposition of silicon-containing films

Methods for depositing blocking layers on metal surfaces

High density plasma enhanced process chamber

Forming mesas on an electrostatic chuck

Apparatus for processing a substrate

Surface-coated cutting tool

Cleaning method, method of manufacturing semiconductor device, and...

Insert and cutting tool including the same

Apparatus for processing a substrate

Low-κ ALD gap-fill methods and material

Surface coated cutting tool having hard coating layer exhibiting ex...

Atomic layer deposition of metal films

Deposition of low-k films

Substrate processing method

Method of processing substrate, method of manufacturing semiconduct...

Homoleptic lanthanide deposition precursors

Preparation method for bifacial perc solar cell

Process for preparing a coated glass substrate

Doped or undoped silicon carbide deposition and remote hydrogen pla...

Method of manufacturing semiconductor device, method of processing...

Si-containing film forming precursors and methods of using the same

Cleaning method, method of manufacturing semiconductor device, and...

Processing apparatus and processing method

Method of processing substrate, substrate processing apparatus, rec...

Composition for depositing silicon-containing thin film containing...

Composition and methods using same for carbon doped silicon contain...

Method of manufacturing semiconductor device, substrate processing...

Method for forming metal silicon oxide and metal silicon oxynitride...

Si-containing film forming precursors and methods of using the same

Patents Applicationslast 30 patents

Amorphous Silicon Oxide, Amorphous Silicon Oxynitride, and Amorphou...

METHOD OF PROCESSING SUBSTRATE, METHOD OF MANUFACTURING SEMICONDUCT...

ULTRATHIN SILICON OXYNITRIDE INTERFACE MATERIAL, TUNNEL OXIDE PASSI...

SEED SUBSTRATE FOR EPITAXIAL GROWTH AND METHOD FOR PRODUCING SAME,...

FORMING MESAS ON AN ELECTROSTATIC CHUCK

ALUMINUM OXYNITRIDE COATINGS WITH ENHANCED CRYSTALLINITY

LOW-K ALD GAP-FILL METHODS AND MATERIAL

COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...

FILM FORMING METHOD, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE,...

METHOD FOR FORMING THIN FILM AND APPARATUS FOR PROCESSING SUBSTRATE...

METHOD FOR MANUFACTURING A SEMICONDUCTOR DEVICE

DEPOSITION OF METAL FILMS

COATED CUTTING TOOL

CUTTING TOOL

CUTTING TOOL

CUTTING TOOL

COATED CUTTING TOOL

Deposition Of Vanadium-Containing Films

SUBSTRATE PROCESSING SYSTEM

SELECTIVE DEPOSITION OF MATERIAL COMPRISING SILICON AND NITROGEN

CUTTING TOOL

SEED SUBSTRATE FOR EPITAXIAL GROWTH USE AND METHOD FOR MANUFACTURIN...

COMPOSITIONS AND METHODS USING SAME FOR FILMS COMPRISING SILICON AN...

DOPED OR UNDOPED SILICON CARBIDE DEPOSITION AND REMOTE HYDROGEN PLA...

DIELECTRIC COMPOSITION, CAPACITIVE ELEMENT, VISIBLE-LIGHT PHOTOCATA...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, METHOD OF PROCESSING...

APPARATUS FOR PROCESSING SUBSTRATE

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, SUBSTRATE PROCESSING...

PLASMA PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

COMPOSITION AND METHODS USING SAME FOR CARBON DOPED SILICON CONTAIN...