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Y10S134/90
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GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10
USPC classification
Y10S
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S134/00
Cleaning and liquid contact with solids
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Y10S134/90
Paint roller
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Patents Grants
last 30 patents
Information
Patent Grant
Apparatus and method for contamination identification
Patent number
11,311,917
Issue date
Apr 26, 2022
Bruker Nano, Inc.
Jeffrey E. LeClaire
B08 - CLEANING
Information
Patent Grant
Substrate processing method and substrate processing system
Patent number
11,069,548
Issue date
Jul 20, 2021
Tokyo Electron Limited
Toru Nishino
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Substrate processing method and substrate processing system
Patent number
10,403,525
Issue date
Sep 3, 2019
Tokyo Electron Limited
Toru Nishino
G05 - CONTROLLING REGULATING
Information
Patent Grant
Substrate processing method for drying a substrate by discharging g...
Patent number
10,134,610
Issue date
Nov 20, 2018
Screen Semiconductor Solutions Co., Ltd.
Tadashi Miyagi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and materials for making a monolithic porous pad cast onto...
Patent number
10,040,226
Issue date
Aug 7, 2018
Entegris, Inc.
Briant Enoch Benson
B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information
Patent Grant
Liquid processing aparatus
Patent number
9,953,852
Issue date
Apr 24, 2018
Tokyo Electron Limited
Jiro Higashijima
B08 - CLEANING
Information
Patent Grant
Supply apparatus and supply method for supplying fluid carbon dioxide
Patent number
9,887,079
Issue date
Feb 6, 2018
Organo Corporation
Hiroshi Sugawara
B08 - CLEANING
Information
Patent Grant
Method and apparatus for processing wafer-shaped articles
Patent number
9,887,122
Issue date
Feb 6, 2018
Lam Research AG
Hongbo Si
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lens holder method
Patent number
9,737,461
Issue date
Aug 22, 2017
Presbibio, LLC
Vladimir Feingold
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Wet treatment apparatus and substrate treatment apparatus provided...
Patent number
9,687,958
Issue date
Jun 27, 2017
Ebara Corporation
Hiroyuki Shinozaki
B24 - GRINDING POLISHING
Information
Patent Grant
Jet spray nozzle and method for cleaning photo masks and semiconduc...
Patent number
9,656,278
Issue date
May 23, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Kun-Lung Hsieh
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apparatus and method for indirect surface cleaning
Patent number
9,588,420
Issue date
Mar 7, 2017
Rave LLC
Jeffrey E. LeClaire
B08 - CLEANING
Information
Patent Grant
Substrate processing method
Patent number
9,477,162
Issue date
Oct 25, 2016
Screen Semiconductor Solutions Co., Ltd.
Koji Kaneyama
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate processing apparatus and substrate processing method
Patent number
9,431,276
Issue date
Aug 30, 2016
SCREEN Holdings Co., Ltd.
Katsuhiko Miya
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Apparatus and method for indirect surface cleaning
Patent number
9,285,674
Issue date
Mar 15, 2016
RAVE LLC
Jeffrey E. LeClaire
B08 - CLEANING
Information
Patent Grant
Workpiece surface treatment system
Patent number
9,242,281
Issue date
Jan 26, 2016
C. Uyemura & Co., Ltd.
Yutaka Sugiura
B08 - CLEANING
Information
Patent Grant
Method and apparatus for manufacturing ophthalmic lenses
Patent number
9,227,746
Issue date
Jan 5, 2016
Novartis AG
Roger Biel
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Liquid processing method
Patent number
9,224,624
Issue date
Dec 29, 2015
Tokyo Electron Limited
Takao Inada
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Liquid processing apparatus, liquid processing method, and computer...
Patent number
9,108,231
Issue date
Aug 18, 2015
Tokyo Electron Limited
Nobuhiro Ogata
B08 - CLEANING
Information
Patent Grant
Tools and methods for processing microelectronic workpieces using p...
Patent number
9,039,840
Issue date
May 26, 2015
Tel FSI, Inc.
Jeffrey M. Lauerhaas
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Substrate processing method
Patent number
9,032,977
Issue date
May 19, 2015
SCREEN Semiconductor Solutions Co., Ltd.
Tetsuya Hamada
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Cleaning device, cleaning method, and composition
Patent number
9,010,343
Issue date
Apr 21, 2015
Tokyo Ohka Kogyo Co., Ltd.
Atsushi Miyanari
B08 - CLEANING
Information
Patent Grant
Prevention of particle adders when contacting a liquid meniscus ove...
Patent number
8,997,684
Issue date
Apr 7, 2015
Lam Research Corporation
Enrico Magni
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Grant
Adjustable brush cleaning apparatus for semiconductor wafers and as...
Patent number
8,992,692
Issue date
Mar 31, 2015
STMicroelectronics, Inc.
John H. Zhang
A46 - BRUSHWARE
Information
Patent Grant
Apparatus and method for indirect surface cleaning
Patent number
8,986,460
Issue date
Mar 24, 2015
Rave, LLC
Jeffrey E. LeClaire
B08 - CLEANING
Information
Patent Grant
Hands-free paint roller cleaner
Patent number
8,973,592
Issue date
Mar 10, 2015
Donald Suydam
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Method of reducing contamination in CVD chamber
Patent number
8,974,602
Issue date
Mar 10, 2015
Shanghia Huali Microelectronics Corporation
Yadan Zhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Ultrasonic cleaning device
Patent number
8,960,208
Issue date
Feb 24, 2015
Kaijo Corporation
Kazunari Suzuki
B08 - CLEANING
Information
Patent Grant
Method and system of drying a microelectronic topography
Patent number
8,961,701
Issue date
Feb 24, 2015
Lam Research Corporation
Mark I. Wagner
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Method for cleaning photomask-related substrate, cleaning method, a...
Patent number
8,956,463
Issue date
Feb 17, 2015
Shin-Etsu Chemical Co., Ltd.
Tsuneo Numanami
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
APPARATUS AND METHOD FOR PROCESSING SUBSTRATE
Publication number
20230005768
Publication date
Jan 5, 2023
SEMES CO., LTD.
MYUNG A JEON
B08 - CLEANING
Information
Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
Publication number
20190362996
Publication date
Nov 28, 2019
TOKYO ELECTRON LIMITED
Toru NISHINO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LIQUID PROCESSING APPARATUS, LIQUID PROCESSING METHOD, AND COMPUTER...
Publication number
20140360540
Publication date
Dec 11, 2014
Nobuhiro Ogata
B08 - CLEANING
Information
Patent Application
LIQUID PROCESSING METHOD, LIQUID PROCESSING DEVICE, AND STORAGE MEDIUM
Publication number
20140338706
Publication date
Nov 20, 2014
TOKYO ELECTRON LIMITED
Jun Nonaka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Controls of Ambient Environment During Wafer Drying Using Proximity...
Publication number
20140332037
Publication date
Nov 13, 2014
LAM RESEARCH CORPORATION
Mikhail Korolik
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
JET SPRAY NOZZLE AND METHOD FOR CLEANING PHOTO MASKS AND SEMICONDUC...
Publication number
20140291416
Publication date
Oct 2, 2014
Taiwan Semiconductor Manufacturing Co., LTD
Kun-Lung HSIEH
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
Apparatus and Method For Indirect Surface Cleaning
Publication number
20140283873
Publication date
Sep 25, 2014
Jeffrey E. LeClaire
B08 - CLEANING
Information
Patent Application
Workpiece Surface Treatment System
Publication number
20140230858
Publication date
Aug 21, 2014
C. Uyemura & Co., Ltd.
Yutaka Sugiura
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information
Patent Application
METHOD AND SYSTEM FOR UNIFORMLY APPLYING A MULTI-PHASE CLEANING SOL...
Publication number
20140202503
Publication date
Jul 24, 2014
LAM RESEARCH CORPORATION
Jeffrey J. Farber
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
System and Method for Cleaning Semiconductor Fabrication Equipment...
Publication number
20140190937
Publication date
Jul 10, 2014
QUANTUM GLOBAL TECHNOLOGIES LLC
Samantha Tan
B44 - DECORATIVE ARTS
Information
Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
Publication number
20140174483
Publication date
Jun 26, 2014
Dainippon Screen Mfg. Co., Ltd.
Katsuhiko MIYA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND APPARATUS FOR CLEANING A SUBSTRATE USING NON-NEWTONIAN F...
Publication number
20140158167
Publication date
Jun 12, 2014
LAM RESEARCH CORPORATION
John M. de Larios
C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20140104586
Publication date
Apr 17, 2014
Koji KANEYAMA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE PROCESSING METHOD
Publication number
20140106281
Publication date
Apr 17, 2014
Tetsuya HAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus And Method For Indirect Surface Cleaning
Publication number
20140069457
Publication date
Mar 13, 2014
RAVE, LLC
Jeffrey E. LeClaire
B08 - CLEANING
Information
Patent Application
METHOD AND MATERIALS FOR MAKING A MONOLITHIC POROUS PAD CAST ONTO A...
Publication number
20140020712
Publication date
Jan 23, 2014
Entegris, Inc.
Briant Enoch Benson
A46 - BRUSHWARE
Information
Patent Application
Method and System for Uniformly Applying a Multi-Phase Cleaning Sol...
Publication number
20140014146
Publication date
Jan 16, 2014
LAM RESEARCH CORPORATION
Jeffrey J. Farber
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE CLEANING METHOD
Publication number
20130312790
Publication date
Nov 28, 2013
EBARA CORPORATION
Tomoatsu Ishibashi
B08 - CLEANING
Information
Patent Application
Method and System for Distributing Gas for A Bevel Edge Etcher
Publication number
20130276821
Publication date
Oct 24, 2013
Greg Sexton
B08 - CLEANING
Information
Patent Application
Apparatus And Method For Indirect Surface Cleaning
Publication number
20130276818
Publication date
Oct 24, 2013
Jeffrey E. LeClaire
B08 - CLEANING
Information
Patent Application
METHOD OF MANUFACTURING INTEGRATED CIRCUIT DEVICES
Publication number
20130233342
Publication date
Sep 12, 2013
Mario E. Bran
B06 - GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
Information
Patent Application
ULTRASONIC CLEANING DEVICE
Publication number
20130220390
Publication date
Aug 29, 2013
KAIJO CORPORATION
Kazunari SUZUKI
B08 - CLEANING
Information
Patent Application
TOOLS AND METHODS FOR PROCESSING MICROELECTRONIC WORKPIECES USING P...
Publication number
20130213485
Publication date
Aug 22, 2013
TEL FSI, Inc.
Jeffrey M. Lauerhaas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR THE RAPID THERMAL CONTROL OF A WORK PIECE...
Publication number
20130210235
Publication date
Aug 15, 2013
International Business Machines Corporation
John P. Simons
B08 - CLEANING
Information
Patent Application
ADJUSTABLE BRUSH CLEANING APPARATUS FOR SEMICONDUCTOR WAFERS AND AS...
Publication number
20130199563
Publication date
Aug 8, 2013
STMicroelectronics, Inc.,
John H. Zhang
A46 - BRUSHWARE
Information
Patent Application
Lens Holder Method
Publication number
20130180216
Publication date
Jul 18, 2013
Vladimir Feingold
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
ULTRASONIC CLEANING DEVICE
Publication number
20130125935
Publication date
May 23, 2013
KAIJO CORPORATION
Kazunari SUZUKI
B08 - CLEANING
Information
Patent Application
PREVENTION OF PARTICLE ADDERS WHEN CONTACTING A LIQUID MENISCUS OVE...
Publication number
20130084392
Publication date
Apr 4, 2013
Lam Research Corp.
Enrico Magni
B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information
Patent Application
WAFER SCRUBBER
Publication number
20130074878
Publication date
Mar 28, 2013
NANYA TECHNOLOGY CORPORATION
Jeng-Hsing Jang
B08 - CLEANING
Information
Patent Application
METHOD FOR REMOVING MATERIAL FROM SEMICONDUCTOR WAFER AND APPARATUS...
Publication number
20130061887
Publication date
Mar 14, 2013
Mikhail Korolik
H01 - BASIC ELECTRIC ELEMENTS