Particle bombardment induced emission

Industry

CPC
H01J2237/2857

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2857Particle bombardment induced emission

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Patents Grantslast 30 patents

Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 11,657,999
- Issue date May 23, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of imaging a 2D sample with a multi-beam particle microscope
- Patent number 11,521,827
- Issue date Dec 6, 2022
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of imaging a 3D sample with a multi-beam particle microscope
- Patent number 11,069,508
- Issue date Jul 20, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 11,049,686
- Issue date Jun 29, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 10,535,494
- Issue date Jan 14, 2020
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 10,163,603
- Issue date Dec 25, 2018
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inspection device
- Patent number 10,157,722
- Issue date Dec 18, 2018
- Ebara Corporation
- Masahiro Hatakeyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for simultaneous detection of secondary electrons...
- Patent number 9,494,516
- Issue date Nov 15, 2016
- FEI Company
- N. William Parker
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of detecting electrons, an electron-detector and an inspecti...
- Patent number 9,336,982
- Issue date May 10, 2016
- Carl Zeiss Microscopy GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample surface inspection apparatus and method
- Patent number 8,674,317
- Issue date Mar 18, 2014
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Inspection device
- Patent number 8,497,476
- Issue date Jul 30, 2013
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
System and method for localization of large numbers of fluorescent...
- Patent number 8,319,181
- Issue date Nov 27, 2012
- FEI Company
- N. William Parker
- G01 - MEASURING TESTING
Information Patent Grant
Sample surface inspection apparatus and method
- Patent number 8,076,654
- Issue date Dec 13, 2011
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Grant
Sample surface inspection apparatus and method
- Patent number 7,391,036
- Issue date Jun 24, 2008
- Ebara Corporation
- Masahiro Hatakeyama
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF IMAGING A 2D SAMPLE WITH A MULTI-BEAM PARTICLE MICROSCOPE
- Publication number 20210351001
- Publication date Nov 11, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20210313137
- Publication date Oct 7, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF IMAGING A 3D SAMPLE WITH A MULTI-BEAM PARTICLE MICROSCOPE
- Publication number 20200243300
- Publication date Jul 30, 2020
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20200098541
- Publication date Mar 26, 2020
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20190122852
- Publication date Apr 25, 2019
- CARL ZEISS MICROSCOPY GMBH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITE CHARGED PARTICLE BEAM APPARATUS
- Publication number 20160093464
- Publication date Mar 31, 2016
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Hiroyuki SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Simultaneous Detection of Secondary Electrons...
- Publication number 20150369737
- Publication date Dec 24, 2015
- FEI Company
- William Parker
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR SIMULTANEOUS DETECTION OF SECONDARY ELECTRONS...
- Publication number 20140131573
- Publication date May 15, 2014
- FEI Company
- N. William Parker
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE
- Publication number 20140014848
- Publication date Jan 16, 2014
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
INSPECTION DEVICE
- Publication number 20120235036
- Publication date Sep 20, 2012
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
System and Method for Localization of Large Numbers of Fluorescent...
- Publication number 20120193530
- Publication date Aug 2, 2012
- FEI Company
- N. William Parker
- G01 - MEASURING TESTING
Information Patent Application
SAMPLE SURFACE INSPECTION APPARATUS AND METHOD
- Publication number 20120049063
- Publication date Mar 1, 2012
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
Sample surface inspection apparatus and method
- Publication number 20080265159
- Publication date Oct 30, 2008
- EBARA CORPORATION
- Masahiro Hatakeyama
- G01 - MEASURING TESTING
Information Patent Application
Sample surface inspection apparatus and method
- Publication number 20050158653
- Publication date Jul 21, 2005
- Masahiro Hatakeyama
- G01 - MEASURING TESTING

Particle bombardment induced emission

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Particle beam system and method for the particle-optical examinatio...

Method of imaging a 2D sample with a multi-beam particle microscope

Method of imaging a 3D sample with a multi-beam particle microscope

Particle beam system and method for the particle-optical examinatio...

Particle beam system and method for the particle-optical examinatio...

Particle beam system and method for the particle-optical examinatio...

Inspection device

System and method for simultaneous detection of secondary electrons...

Method of detecting electrons, an electron-detector and an inspecti...

Sample surface inspection apparatus and method

Inspection device

System and method for localization of large numbers of fluorescent...

Sample surface inspection apparatus and method

Sample surface inspection apparatus and method

Patents Applicationslast 30 patents

METHOD OF IMAGING A 2D SAMPLE WITH A MULTI-BEAM PARTICLE MICROSCOPE

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

METHOD OF IMAGING A 3D SAMPLE WITH A MULTI-BEAM PARTICLE MICROSCOPE

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

COMPOSITE CHARGED PARTICLE BEAM APPARATUS

System and Method for Simultaneous Detection of Secondary Electrons...

SYSTEM AND METHOD FOR SIMULTANEOUS DETECTION OF SECONDARY ELECTRONS...

INSPECTION DEVICE

INSPECTION DEVICE

System and Method for Localization of Large Numbers of Fluorescent...

SAMPLE SURFACE INSPECTION APPARATUS AND METHOD

Sample surface inspection apparatus and method

Sample surface inspection apparatus and method