Photocopying

Industry

US Classification
355

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Current Industry

355Photocopying

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Liquid recovery apparatus, exposure apparatus, exposure method, and...
- Patent number 9,041,901
- Issue date May 26, 2015
- Nikon Corporation
- Hideaki Hara
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement, in particular in a projection exposure apparat...
- Patent number 9,041,905
- Issue date May 26, 2015
- Carl Zeiss SMT GmbH
- Dirk Heinrich Ehm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion exposure apparatus and method that detects liquid adhered...
- Patent number 9,041,906
- Issue date May 26, 2015
- Nikon Corporation
- Hiroaki Takaiwa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi facet mirror of a microlithographic projection exposure appar...
- Patent number 9,041,910
- Issue date May 26, 2015
- Carl Zeiss SMT GmbH
- Thorsten Rassel
- G02 - OPTICS
Information Patent Grant
Exposure apparatus, exposure method, and device manufacturing method
- Patent number 9,041,902
- Issue date May 26, 2015
- Nikon Corporation
- Junichi Chonan
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and exposure method
- Patent number 9,041,909
- Issue date May 26, 2015
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Minghung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Spectral purity filters for use in a lithographic apparatus
- Patent number 9,041,912
- Issue date May 26, 2015
- ASML Netherlands B.V.
- Wouter Anthon Soer
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,041,911
- Issue date May 26, 2015
- ASML Netherlands B.V.
- Johannes Onvlee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Drawing device and drawing method
- Patent number 9,041,907
- Issue date May 26, 2015
- SCREEN Holdings Co., Ltd.
- Yoshiyuki Nakazawa
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for operating a projection exposure apparatus with correctio...
- Patent number 9,041,908
- Issue date May 26, 2015
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method with bearing...
- Patent number 9,041,913
- Issue date May 26, 2015
- ASML Netherlands B.V.
- Johannes Petrus Martinus Bernardus Vermeulen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High heat load optics with a liquid metal interface for use in an e...
- Patent number 9,041,900
- Issue date May 26, 2015
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Grant
Mask inspection with fourier filtering and image compare
- Patent number 9,041,903
- Issue date May 26, 2015
- ASML Holding N.V.
- Michael L. Nelson
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
High heat load optics with a liquid metal interface for use in an e...
- Patent number 9,041,904
- Issue date May 26, 2015
- Nikon Corporation
- Alton H. Phillips
- G02 - OPTICS
Information Patent Grant
Lithographic apparatus and in-line cleaning apparatus
- Patent number 9,036,128
- Issue date May 19, 2015
- ASML Netherlands B.V.
- Roelof Frederik De Graaf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Device and method for transmission image sensing
- Patent number 9,036,130
- Issue date May 19, 2015
- ASML Netherlands B.V.
- Bearrach Moest
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Clamping device, assembly and lithographic projection apparatus
- Patent number 9,036,132
- Issue date May 19, 2015
- ASML Netherlands B.V.
- Robertus Wilhelmus Veltman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic fabrication of general periodic structures by exposing...
- Patent number 9,036,133
- Issue date May 19, 2015
- Eulitha AG
- Harun H. Solak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 9,036,127
- Issue date May 19, 2015
- ASML Netherlands B.V.
- Clemens Johannes Gerardus Van den Dungen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure method, system and objective
- Patent number 9,036,129
- Issue date May 19, 2015
- Carl Zeiss SMT GmbH
- Dirk Juergens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus and device fabrication method
- Patent number 9,036,131
- Issue date May 19, 2015
- Canon Kabushiki Kaisha
- Noritoshi Sakamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Drawing apparatus, and method of manufacturing article
- Patent number 9,035,248
- Issue date May 19, 2015
- Canon Kabushiki Kaisha
- Naosuke Nishimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical imaging arrangement with vibration decoupled support units
- Patent number 9,030,647
- Issue date May 12, 2015
- Carl Zeiss SMT GmbH
- Yim-Bun Patrick Kwan
- G02 - OPTICS
Information Patent Grant
Exposure apparatus and photomask used therein
- Patent number 9,030,646
- Issue date May 12, 2015
- V Technology Co., Ltd.
- Michinobu Mizumura
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for semiconductor lithography includi...
- Patent number 9,030,644
- Issue date May 12, 2015
- Carl Zeiss SMT GmbH
- Benjamin Sigel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Target positioning device, method for driving a target positioning...
- Patent number 9,030,649
- Issue date May 12, 2015
- Mapper Lithography IP B.V.
- Jerry Johannes Martinus Peijster
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Illumination optical system, exposure apparatus, and exposure method
- Patent number 9,030,645
- Issue date May 12, 2015
- Nikon Corporation
- Masayuki Shiraishi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dual wafer stage exchanging system for lithographic device
- Patent number 9,030,648
- Issue date May 12, 2015
- Tsinghua University
- Yu Zhu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Exposure apparatus adjusting method, exposure apparatus, and device...
- Patent number 9,025,126
- Issue date May 5, 2015
- Nikon Corporation
- Yosuke Shirata
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for purifying resin for photolithography
- Patent number 9,023,982
- Issue date May 5, 2015
- Maruzen Petrochemical Co., LTD
- Tomo Oikawa
- C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...

Patents Applicationslast 30 patents

Information Patent Application
SYSTEM AND METHOD FOR HOLOGRAPHY-BASED FABRICATION
- Publication number 20150147685
- Publication date May 28, 2015
- Wasatch Photonics, Inc.
- Gerald L. Heidt
- B82 - NANO-TECHNOLOGY
Information Patent Application
VACUUM CHAMBER WITH BASE PLATE
- Publication number 20150144789
- Publication date May 28, 2015
- MAPPER LITHOGRAPHY IP BV
- Jerry Johannes Martinus Peijster
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR CONTROLLING A TEMPERATURE OF A REACTION ASSEMBLY
- Publication number 20150146176
- Publication date May 28, 2015
- NIKON CORPORATION
- Michel Pharand
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR FABRICATING NANOANTENNA ARRAY, NANOANTENNA ARRAY CHIP AN...
- Publication number 20150146180
- Publication date May 28, 2015
- Korea Institute of Science and Technology
- Kyeong Seok LEE
- G02 - OPTICS
Information Patent Application
RADIATION SOURCE
- Publication number 20150146182
- Publication date May 28, 2015
- ASML NETHERLANDS B.V.
- Jan Bernard Plechelmus Van Schoot
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR HOLOGRAPHY-BASED FABRICATION
- Publication number 20150147684
- Publication date May 28, 2015
- Wasatch Photonics, Inc.
- Gerald L. Heidt
- B82 - NANO-TECHNOLOGY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20150146184
- Publication date May 28, 2015
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithography Mask Repairing Process
- Publication number 20150146186
- Publication date May 28, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Hsing Lu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUBSTRATE CARRYING DEVICE
- Publication number 20150146187
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Toshiaki TOYOMAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate Tuning System and Method Using Optical Projection
- Publication number 20150146178
- Publication date May 28, 2015
- TOKYO ELECTRON LIMITED
- Anton J. deVilliers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Low energy electron beam lithography
- Publication number 20150146179
- Publication date May 28, 2015
- Takao Utsumi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Metrology Method and Apparatus, Lithographic System, Device Manufac...
- Publication number 20150145151
- Publication date May 28, 2015
- ASML NETHERLANDS B.V.
- Maurits Van Der Schaar
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS OF PHOTOLITHOGRAPHY PROCESS TO LIQUID DISPLAY PANEL AND M...
- Publication number 20150146181
- Publication date May 28, 2015
- SHENZHEN CHINA STAR OPTOELECTRONICS TECHNOLOGY CO., LTD.
- Hsiao-hsien Chen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...
- Publication number 20150146183
- Publication date May 28, 2015
- Carl Zeiss SMT GMBH
- Markus Deguenther
- G02 - OPTICS
Information Patent Application
CATADIOPTRIC IMAGING SYSTEMS FOR DIGITAL SCANNER
- Publication number 20150146185
- Publication date May 28, 2015
- Nikon Corporation
- David M. Williamson
- G02 - OPTICS
Information Patent Application
METHOD TO DETERMINE THE USEFULNESS OF ALIGNMENT MARKS TO CORRECT OV...
- Publication number 20150146188
- Publication date May 28, 2015
- ASML NETHERLANDS B.V.
- Irina Lyulina
- G01 - MEASURING TESTING
Information Patent Application
EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150146177
- Publication date May 28, 2015
- Canon Kabushiki Kaisha
- Yoichi Matsuoka
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Holding Device for an Optical Element in an Objective
- Publication number 20150138520
- Publication date May 21, 2015
- ASML NETHERLANDS B.V.
- Bernhard Gellrich
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Method and Apparatus, Substrate, Lithographic System and...
- Publication number 20150138523
- Publication date May 21, 2015
- ASML Netherland B.V.
- Martin Jacobus Johan Jak
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Extreme Ultraviolet Lithography Process and Mask
- Publication number 20150138524
- Publication date May 21, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chih-Tsung Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
INSTANT FILM PRINTER INCORPORATING OPTICAL COLLIMATION LAYER
- Publication number 20150138526
- Publication date May 21, 2015
- Pacific Opal LLC
- Ismail Degani
- B41 - PRINTING LINING MACHINES TYPEWRITERS STAMPS
Information Patent Application
LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT
- Publication number 20150138521
- Publication date May 21, 2015
- Carl Zeiss SMT GMBH
- Guido SOYEZ
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ROLLER MOLD MANUFACTURING APPARATUS AND METHOD
- Publication number 20150138522
- Publication date May 21, 2015
- Asahi Kasei Kabushiki Kaisha
- Naoto Ito
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MISALIGNMENT/ALIGNMENT COMPENSATION METHOD, SEMICONDUCTOR LITHOGRAP...
- Publication number 20150140693
- Publication date May 21, 2015
- Lien-Sheng CHUNG
- G01 - MEASURING TESTING
Information Patent Application
Contamination Trap for a Lithographic Apparatus
- Publication number 20150138519
- Publication date May 21, 2015
- ASML NETHERLANDS B.V.
- Carlo Cornelis Maria Luijten
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
OBJECT EXCHANGE METHOD, EXPOSURE METHOD, CARRIER SYSTEM, EXPOSURE A...
- Publication number 20150138525
- Publication date May 21, 2015
- Nikon Corporation
- Yuichi SHIBAZAKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASK PATTERN GENERATION METHOD AND OPTICAL IMAGE CALCULATION METHOD
- Publication number 20150131066
- Publication date May 14, 2015
- Canon Kabushiki Kaisha
- Kenji Yamazoe
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150131067
- Publication date May 14, 2015
- ASML NETHERLANDS B.V.
- Johannes Jacobus Matheus Baselmans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LASER DEVICE, AND EXPOSURE DEVICE AND INSPECTION DEVICE PROVIDED WI...
- Publication number 20150131068
- Publication date May 14, 2015
- Nikon Corporation
- Yasutoshi Takada
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
ORIGINAL HOLDING APPARATUS, EXPOSURE APPARATUS, METHOD OF MANUFACTU...
- Publication number 20150131073
- Publication date May 14, 2015
- Canon Kabushiki Kaisha
- Yuuhei MATSUMURA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Photocopying

Industry

Current Industry

Patents Grantslast 30 patents

Liquid recovery apparatus, exposure apparatus, exposure method, and...

Optical arrangement, in particular in a projection exposure apparat...

Immersion exposure apparatus and method that detects liquid adhered...

Multi facet mirror of a microlithographic projection exposure appar...

Exposure apparatus, exposure method, and device manufacturing method

Exposure apparatus and exposure method

Spectral purity filters for use in a lithographic apparatus

Lithographic apparatus and device manufacturing method

Drawing device and drawing method

Method for operating a projection exposure apparatus with correctio...

Lithographic apparatus and device manufacturing method with bearing...

High heat load optics with a liquid metal interface for use in an e...

Mask inspection with fourier filtering and image compare

High heat load optics with a liquid metal interface for use in an e...

Lithographic apparatus and in-line cleaning apparatus

Device and method for transmission image sensing

Clamping device, assembly and lithographic projection apparatus

Lithographic fabrication of general periodic structures by exposing...

Lithographic apparatus

Projection exposure method, system and objective

Exposure apparatus and device fabrication method

Drawing apparatus, and method of manufacturing article

Optical imaging arrangement with vibration decoupled support units

Exposure apparatus and photomask used therein

Projection exposure apparatus for semiconductor lithography includi...

Target positioning device, method for driving a target positioning...

Illumination optical system, exposure apparatus, and exposure method

Dual wafer stage exchanging system for lithographic device

Exposure apparatus adjusting method, exposure apparatus, and device...

Method for purifying resin for photolithography

Patents Applicationslast 30 patents

SYSTEM AND METHOD FOR HOLOGRAPHY-BASED FABRICATION

VACUUM CHAMBER WITH BASE PLATE

SYSTEM AND METHOD FOR CONTROLLING A TEMPERATURE OF A REACTION ASSEMBLY

METHOD FOR FABRICATING NANOANTENNA ARRAY, NANOANTENNA ARRAY CHIP AN...

RADIATION SOURCE

SYSTEM AND METHOD FOR HOLOGRAPHY-BASED FABRICATION

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

Lithography Mask Repairing Process

SUBSTRATE CARRYING DEVICE

Substrate Tuning System and Method Using Optical Projection

Low energy electron beam lithography

Metrology Method and Apparatus, Lithographic System, Device Manufac...

APPARATUS OF PHOTOLITHOGRAPHY PROCESS TO LIQUID DISPLAY PANEL AND M...

ILLUMINATION SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPA...

CATADIOPTRIC IMAGING SYSTEMS FOR DIGITAL SCANNER

METHOD TO DETERMINE THE USEFULNESS OF ALIGNMENT MARKS TO CORRECT OV...

EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD

Holding Device for an Optical Element in an Objective

Metrology Method and Apparatus, Substrate, Lithographic System and...

Extreme Ultraviolet Lithography Process and Mask

INSTANT FILM PRINTER INCORPORATING OPTICAL COLLIMATION LAYER

LENS MODULE COMPRISING AT LEAST ONE EXCHANGEABLE OPTICAL ELEMENT

ROLLER MOLD MANUFACTURING APPARATUS AND METHOD

MISALIGNMENT/ALIGNMENT COMPENSATION METHOD, SEMICONDUCTOR LITHOGRAP...

Contamination Trap for a Lithographic Apparatus

OBJECT EXCHANGE METHOD, EXPOSURE METHOD, CARRIER SYSTEM, EXPOSURE A...

MASK PATTERN GENERATION METHOD AND OPTICAL IMAGE CALCULATION METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LASER DEVICE, AND EXPOSURE DEVICE AND INSPECTION DEVICE PROVIDED WI...

ORIGINAL HOLDING APPARATUS, EXPOSURE APPARATUS, METHOD OF MANUFACTU...