Photolithographic processes

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H01L21/0274

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Current Industry

H01L21/0274Photolithographic processes

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Chemical liquid, rinsing solution, and resist pattern forming method
- Patent number 12,366,805
- Issue date Jul 22, 2025
- FUJIFILM Corporation
- Tetsuya Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composition containing a heterocyclic compound having a dicyanostyr...
- Patent number 12,366,804
- Issue date Jul 22, 2025
- NISSAN CHEMICAL CORPORATION
- Takafumi Endo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Manufacturing method of semiconductor structure and semiconductor s...
- Patent number 12,369,296
- Issue date Jul 22, 2025
- CHANGXIN MEMORY TECHNOLOGIES, INC.
- Jun Xia
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dynamic generation of layout adaptive packaging
- Patent number 12,360,467
- Issue date Jul 15, 2025
- Applied Materials, Inc.
- Uwe Hollerbach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for fabricating a chip package
- Patent number 12,362,178
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Jie Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for coating photo resist over a substrate
- Patent number 12,362,179
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Tung-Hung Feng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor devices
- Patent number 12,362,177
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Po-Han Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor devices
- Patent number 12,362,180
- Issue date Jul 15, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chin-Ta Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a semiconductor device
- Patent number 12,347,681
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Using cumulative heat amount data to qualify hot plate used for pos...
- Patent number 12,347,682
- Issue date Jul 1, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chia-Cheng Chao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Backside metal patterning die singulation system and related methods
- Patent number 12,341,069
- Issue date Jun 24, 2025
- SEMICONDUCTOR COMPONENTS INDUSTRIES, LLC
- Michael J. Seddon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of patterning underlying structure
- Patent number 12,341,007
- Issue date Jun 24, 2025
- Powerchip Semiconductor Manufacturing Corporation
- Yun-An Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Heat treatment device and treatment method
- Patent number 12,341,008
- Issue date Jun 24, 2025
- Tokyo Electron Limited
- Yohei Sano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photomask and method for manufacturing photomask and semiconductor...
- Patent number 12,340,163
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Company Ltd.
- Chin-Min Huang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Photomask including fiducial mark and method of making a photomask
- Patent number 12,339,582
- Issue date Jun 24, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsin-Chang Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern fidelity enhancement
- Patent number 12,334,342
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd
- Yu-Tien Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metal oxide resists for EUV patterning and methods for developing t...
- Patent number 12,332,568
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Hamed Hajibabaeinajafabadi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 12,334,390
- Issue date Jun 17, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Hsin-Yi Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for patterning a substrate using photolithography
- Patent number 12,334,391
- Issue date Jun 17, 2025
- Tokyo Electron Limited
- Katie Lutker-Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composition for forming silicon-containing resist underlayer film,...
- Patent number 12,332,567
- Issue date Jun 17, 2025
- Shin-Etsu Chemical Co., Ltd.
- Keisuke Niida
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Grant
Pattern forming method, combined processing apparatus, and recordin...
- Patent number 12,326,660
- Issue date Jun 10, 2025
- Kioxia Corporation
- Noriko Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet-dry bilayer resist dual tone exposure
- Patent number 12,327,726
- Issue date Jun 10, 2025
- Tokyo Electron Limited
- Anton J. deVilliers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for fabricating unique chips using a charged part...
- Patent number 12,322,569
- Issue date Jun 3, 2025
- ASML Netherlands B.V.
- Marcel Nicolaas Jacobus van Kervinck
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of fabricating Fin-type field-effect transistor device havin...
- Patent number 12,324,224
- Issue date Jun 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chun-Hung Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etchant composition, and method for manufacturing metal pattern and...
- Patent number 12,312,695
- Issue date May 27, 2025
- Samsung Display Co., Ltd.
- Bong-Kyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Storage container storing treatment liquid for manufacturing semico...
- Patent number 12,313,976
- Issue date May 27, 2025
- FUJIFILM Corporation
- Tetsuya Kamimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor photoresist composition and method of forming pattern...
- Patent number 12,306,534
- Issue date May 20, 2025
- Samsung SDI Co., Ltd.
- Seung Han
- C07 - ORGANIC CHEMISTRY
Information Patent Grant
Coating and development equipment
- Patent number 12,306,537
- Issue date May 20, 2025
- KINGSEMI CO., LTD.
- Xudong Hong
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual critical dimension patterning
- Patent number 12,308,233
- Issue date May 20, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd
- Kuo-Chang Kau
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing integrated circuit device
- Patent number 12,300,490
- Issue date May 13, 2025
- Samsung Electronics Co., Ltd.
- Sookyung Kim
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PHOTOMASK DESIGN METHOD, SEMICONDUCTOR MANUFACTURING PROCESS, AND S...
- Publication number 20250237942
- Publication date Jul 24, 2025
- United Microelectronics Corp.
- Chia-Chen Sun
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LOW WARPAGE HIGH DENSITY TRENCH CAPACITOR
- Publication number 20250240981
- Publication date Jul 24, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Jyun-Ying LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST COMPOSITIONS AND METHODS OF MANUFACTURING INTEGRATED CI...
- Publication number 20250231481
- Publication date Jul 17, 2025
- Samsung Electronics Co., Ltd.
- Yonghoon Moon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPOSITION FOR REMOVING EDGE BEAD FROM METAL CONTAINING RESISTS, D...
- Publication number 20250230355
- Publication date Jul 17, 2025
- Samsung SDI Co., Ltd.
- Taeho KIM
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
METHOD OF FORMING PATTERNS AND PHOTORESIST FILM
- Publication number 20250224669
- Publication date Jul 10, 2025
- Samsung SDI Co., Ltd.
- Changsoo WOO
- C07 - ORGANIC CHEMISTRY
Information Patent Application
METHOD FOR CLEANING AN APPARATUS FOR A TIN COMPOUND AND THE CLEANED...
- Publication number 20250222492
- Publication date Jul 10, 2025
- MITSUBISHI CHEMICAL CORPORATION
- Koki ISHII
- B08 - CLEANING
Information Patent Application
HYBRID SUBSTRATE WITH EMBEDDED COMPONENT
- Publication number 20250226302
- Publication date Jul 10, 2025
- QUALCOMM Incorporated
- Yeoil PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING
- Publication number 20250226177
- Publication date Jul 10, 2025
- TOKYO ELECTRON LIMITED
- Kazuhide HASEBE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SEMICONDUCTOR DEVICE STRUCTURES AND METHODS OF FORMING THE SAME
- Publication number 20250226219
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Kuan-Da HUANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIFFRACTION-BASED OVERLAY MARK DESIGN
- Publication number 20250226333
- Publication date Jul 10, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Ting-Wei TANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PACKAGE SUITABLE FOR HIGH VOLTAGE APPLICATIONS AND ME...
- Publication number 20250226353
- Publication date Jul 10, 2025
- INFINEON TECHNOLOGIES AG
- Chin Yong Neo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MASKING PROCESS USING SWITCHABLE POLYMER
- Publication number 20250216782
- Publication date Jul 3, 2025
- TOKYO ELECTRON LIMITED
- Phillip D. Hustad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MATERIALS AND METHODS FOR FORMING PATTERNED MASK ON SUBSTRATE
- Publication number 20250216790
- Publication date Jul 3, 2025
- TOKYO ELECTON LIMITED
- Phillip D. Hustad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DIE AND METHODS OF FORMATION
- Publication number 20250218793
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufactacturing Company, Ltd.
- I-Chun WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD
- Publication number 20250218802
- Publication date Jul 3, 2025
- TOKYO ELECTRON LIMITED
- Keiichi YAHATA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WIDTH ADJUSTMENT OF EUV RADIATION BEAM
- Publication number 20250216789
- Publication date Jul 3, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chi YANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ANTI-SPACER MASKING PROCESS USING RESIST LAYER WITH SOLUBILITY SHIF...
- Publication number 20250216763
- Publication date Jul 3, 2025
- TOKYO ELECTRON LIMITED
- Phillip D. Hustad
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESIST TOPCOAT COMPOSITIONS, AND METHODS OF FORMING PATTERNS USING...
- Publication number 20250216785
- Publication date Jul 3, 2025
- Samsung SDI Co., Ltd.
- Kyoungjin HA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM
- Publication number 20250210328
- Publication date Jun 26, 2025
- TOKYO ELECTRON LIMITED
- Sho KUMAKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE WITH HELMET STRUCTURE BETWEEN TWO SEMICONDUCTO...
- Publication number 20250212505
- Publication date Jun 26, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Kuo-Cheng CHING
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT HAVING AT LEAST ONE FEATURE FORMED BY APPLYING AT LEAST T...
- Publication number 20250210365
- Publication date Jun 26, 2025
- Quantinuum LLC
- Adam Jay OLLANIK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE
- Publication number 20250199408
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yu-Tse LAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROMAGNETIC WAVE ASSISTED AREA SELECTIVE DEPOSITION
- Publication number 20250201552
- Publication date Jun 19, 2025
- International Business Machines Corporation
- Krystelle Lionti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES
- Publication number 20250201576
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ru-Gun LIU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PACKAGE AND WIRING SUBSTRATE INCLUDED IN THE SAME, AN...
- Publication number 20250201642
- Publication date Jun 19, 2025
- Samsung Electronics Co., Ltd.
- Donggyu Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST COMPOSITIONS AND METHODS OF MANUFACTURING INTEGRATED CI...
- Publication number 20250199399
- Publication date Jun 19, 2025
- Samsung Electronics Co., Ltd.
- Ji Young Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RINSE MATERIAL COMPOSITION FOR PATTERNING PROCESS USING LITHOGRAPHY...
- Publication number 20250197782
- Publication date Jun 19, 2025
- Samsung Electronics Co., Ltd.
- Chawon Koh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF USING WAFER STAGE
- Publication number 20250199415
- Publication date Jun 19, 2025
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Yung-Yao LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING STRUCTURE HAVING ELECTRODE AND ANODIZED PART
- Publication number 20250191924
- Publication date Jun 12, 2025
- MIKRO MESA TECHNOLOGY CO., LTD.
- Li-Yi CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTOSENSITIVE SURFACE TREATING AGENT, PATTERN FORMATION SUBSTRATE,...
- Publication number 20250189894
- Publication date Jun 12, 2025
- Nikon Corporation
- Yusuke KAWAKAMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Photolithographic processes

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Chemical liquid, rinsing solution, and resist pattern forming method

Composition containing a heterocyclic compound having a dicyanostyr...

Manufacturing method of semiconductor structure and semiconductor s...

Dynamic generation of layout adaptive packaging

Method for fabricating a chip package

Method and apparatus for coating photo resist over a substrate

Method of manufacturing semiconductor devices

Method of manufacturing semiconductor devices

Method of forming a semiconductor device

Using cumulative heat amount data to qualify hot plate used for pos...

Backside metal patterning die singulation system and related methods

Method of patterning underlying structure

Heat treatment device and treatment method

Photomask and method for manufacturing photomask and semiconductor...

Photomask including fiducial mark and method of making a photomask

Pattern fidelity enhancement

Metal oxide resists for EUV patterning and methods for developing t...

Semiconductor device

Method for patterning a substrate using photolithography

Composition for forming silicon-containing resist underlayer film,...

Pattern forming method, combined processing apparatus, and recordin...

Wet-dry bilayer resist dual tone exposure

Method and system for fabricating unique chips using a charged part...

Method of fabricating Fin-type field-effect transistor device havin...

Etchant composition, and method for manufacturing metal pattern and...

Storage container storing treatment liquid for manufacturing semico...

Semiconductor photoresist composition and method of forming pattern...

Coating and development equipment

Dual critical dimension patterning

Method of manufacturing integrated circuit device

Patents Applicationslast 30 patents

PHOTOMASK DESIGN METHOD, SEMICONDUCTOR MANUFACTURING PROCESS, AND S...

LOW WARPAGE HIGH DENSITY TRENCH CAPACITOR

PHOTORESIST COMPOSITIONS AND METHODS OF MANUFACTURING INTEGRATED CI...

COMPOSITION FOR REMOVING EDGE BEAD FROM METAL CONTAINING RESISTS, D...

METHOD OF FORMING PATTERNS AND PHOTORESIST FILM

METHOD FOR CLEANING AN APPARATUS FOR A TIN COMPOUND AND THE CLEANED...

HYBRID SUBSTRATE WITH EMBEDDED COMPONENT

FILM DEPOSITION APPARATUS FOR FINE PATTERN FORMING

SEMICONDUCTOR DEVICE STRUCTURES AND METHODS OF FORMING THE SAME

DIFFRACTION-BASED OVERLAY MARK DESIGN

SEMICONDUCTOR PACKAGE SUITABLE FOR HIGH VOLTAGE APPLICATIONS AND ME...

MASKING PROCESS USING SWITCHABLE POLYMER

MATERIALS AND METHODS FOR FORMING PATTERNED MASK ON SUBSTRATE

SEMICONDUCTOR DIE AND METHODS OF FORMATION

SUBSTRATE TREATMENT SYSTEM AND SUBSTRATE TREATMENT METHOD

WIDTH ADJUSTMENT OF EUV RADIATION BEAM

ANTI-SPACER MASKING PROCESS USING RESIST LAYER WITH SOLUBILITY SHIF...

RESIST TOPCOAT COMPOSITIONS, AND METHODS OF FORMING PATTERNS USING...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING SYSTEM

SEMICONDUCTOR DEVICE WITH HELMET STRUCTURE BETWEEN TWO SEMICONDUCTO...

COMPONENT HAVING AT LEAST ONE FEATURE FORMED BY APPLYING AT LEAST T...

METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

ELECTROMAGNETIC WAVE ASSISTED AREA SELECTIVE DEPOSITION

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICES

SEMICONDUCTOR PACKAGE AND WIRING SUBSTRATE INCLUDED IN THE SAME, AN...

PHOTORESIST COMPOSITIONS AND METHODS OF MANUFACTURING INTEGRATED CI...

RINSE MATERIAL COMPOSITION FOR PATTERNING PROCESS USING LITHOGRAPHY...

METHOD OF USING WAFER STAGE

METHOD OF MANUFACTURING STRUCTURE HAVING ELECTRODE AND ANODIZED PART

PHOTOSENSITIVE SURFACE TREATING AGENT, PATTERN FORMATION SUBSTRATE,...