Photon detectors for X-rays, light

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CPC
H01J2237/2445

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2445Photon detectors for X-rays, light

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Measuring device and optical fiber strain measuring jig thereof
- Patent number 12,196,629
- Issue date Jan 14, 2025
- Tokyo Electron Limited
- Tong Wu
- G01 - MEASURING TESTING
Information Patent Grant
Stroboscopic illumination synchronized electron detection and imaging
- Patent number 12,165,835
- Issue date Dec 10, 2024
- FEI Company
- Bart Jozef Janssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multi-beam particle beam microscope
- Patent number 12,094,683
- Issue date Sep 17, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low open area and coupon endpoint detection
- Patent number 12,080,574
- Issue date Sep 3, 2024
- Applied Materials, Inc.
- Varoujan Chakarian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 12,074,076
- Issue date Aug 27, 2024
- HITACHI HIGH-TECH CORPORATION
- Soichiro Eto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Silicon photomultiplier imaging system and method for cooling the same
- Patent number 11,994,427
- Issue date May 28, 2024
- Temple University - of the Commonwealth System of Higher Education
- C. J. Martoff
- G01 - MEASURING TESTING
Information Patent Grant
Mass spectrometer detector and system and method using the same
- Patent number 11,823,883
- Issue date Nov 21, 2023
- NOVA MEASURING INSTRUMENTS, INC.
- Christopher F. Bevis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray calibration standard object
- Patent number 11,806,800
- Issue date Nov 7, 2023
- Arcam AB
- Johan Backlund
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Dual-mode silicon photomultiplier based LiDAR
- Patent number 11,796,646
- Issue date Oct 24, 2023
- Motional AD LLC
- Geng Fu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for targeted re-examination, inner layer defect a...
- Patent number 11,774,382
- Issue date Oct 3, 2023
- Eric Arno Vigen
- G01 - MEASURING TESTING
Information Patent Grant
Method for operating a multi-beam particle beam microscope
- Patent number 11,735,393
- Issue date Aug 22, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for transmission electron microscopy cathodoluminescence
- Patent number 11,688,581
- Issue date Jun 27, 2023
- Gatan, Inc.
- John Andrew Hunt
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam device for inspection of a specimen with a pl...
- Patent number 11,676,795
- Issue date Jun 13, 2023
- FEI Company
- Pavel Stejskal
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and a method for overlay monitoring
- Patent number 11,646,173
- Issue date May 9, 2023
- Applied Materials Israel Ltd.
- Itay Asulin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Time-gated detection, dual-layer SPAD-based electron detection
- Patent number 11,551,906
- Issue date Jan 10, 2023
- FEI Company
- Bart Jozef Janssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
SNR for x-ray detectors in SEM systems by using polarization filter
- Patent number 11,525,791
- Issue date Dec 13, 2022
- Applied Materials Israel Ltd.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 11,508,548
- Issue date Nov 22, 2022
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Sha Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray imaging in cross-section using un-cut lamella with background...
- Patent number 11,501,951
- Issue date Nov 15, 2022
- Applied Materials Israel Ltd.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual-mode silicon photomultiplier based LiDAR
- Patent number 11,428,791
- Issue date Aug 30, 2022
- Motional AD LLC
- Geng Fu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and operational method thereof
- Patent number 11,424,110
- Issue date Aug 23, 2022
- HITACHI HIGH-TECH CORPORATION
- Masahito Togami
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In situ angle measurement using channeling
- Patent number 11,387,073
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for spatially resolved optical metrology of an io...
- Patent number 11,380,517
- Issue date Jul 5, 2022
- Applied Materials, Inc.
- Gang Shu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 11,348,757
- Issue date May 31, 2022
- HITACHI HIGH-TECH CORPORATION
- Shuhei Yabu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Digital detector, apparatus of charged-particle beam such as electr...
- Patent number 11,328,898
- Issue date May 10, 2022
- BORRIES PTE. LTD.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle detection system
- Patent number 11,322,333
- Issue date May 3, 2022
- EL-MUL TECHNOLOGIES LTD.
- Dmitry Shur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope apparatus, inspection system using electron mic...
- Patent number 11,302,513
- Issue date Apr 12, 2022
- HITACHI HIGH-TECH CORPORATION
- Takahiro Nishihata
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
System and method for simultaneous phase contrast imaging and elect...
- Patent number 11,211,223
- Issue date Dec 28, 2021
- FEI Company
- Ivan Lazić
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Mass spectrometer detector and system and method using the same
- Patent number 11,183,377
- Issue date Nov 23, 2021
- NOVA MEASURING INSTRUMENTS, INC.
- Christopher F. Bevis
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle scanners
- Patent number 11,152,190
- Issue date Oct 19, 2021
- Decision Sciences International Corporation
- Robert D. Penny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope with composite detection system and sp...
- Patent number 11,145,487
- Issue date Oct 12, 2021
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Optical Apparatus and Charged Particle Beam Apparatus
- Publication number 20250046566
- Publication date Feb 6, 2025
- HITACHI HIGH-TECH CORPORATION
- Masao YAMAMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method for Determining Properties of a Substrate
- Publication number 20250012743
- Publication date Jan 9, 2025
- Eric Arno Vigen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW OPEN AREA AND COUPON ENDPOINT DETECTION
- Publication number 20240429077
- Publication date Dec 26, 2024
- Applied Materials, Inc.
- Varoujan Chakarian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW OPEN AREA AND COUPON ENDPOINT DETECTION
- Publication number 20240420975
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Varoujan Chakarian
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM MONITORING DEVICE AND ELECTRON BEAM IRRADIATION SYSTEM
- Publication number 20240420918
- Publication date Dec 19, 2024
- Hamamatsu Photonics K.K.
- Shinjiro MATSUI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
- Publication number 20240312759
- Publication date Sep 19, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE POSITION MONITORING DEVICES
- Publication number 20240274401
- Publication date Aug 15, 2024
- KLA Corporation
- James Richard Bella
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM AND METHOD FOR TARGETED RE-EXAMINATION, INNER LAYER DEFECT A...
- Publication number 20240159695
- Publication date May 16, 2024
- Eric Arno Vigen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON MICROSCOPE, DEVICE FOR MEASURING ELECTRON-PHOTON CORRELATI...
- Publication number 20240153736
- Publication date May 9, 2024
- Japan Science and Technology Agency
- Takumi SANNOMIYA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROCHIPS FOR USE IN ELECTRON MICROSCOPES AND RELATED METHODS
- Publication number 20240120172
- Publication date Apr 11, 2024
- Northwestern University
- Vinayak P. Dravid
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
PLASMA MONITORING SYSTEM, PLASMA MONITORING METHOD, AND MONITORING...
- Publication number 20240096608
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Satoru TERUUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope and Map Display Method for Absorption...
- Publication number 20240085357
- Publication date Mar 14, 2024
- JEOL Ltd.
- Hideyuki Takahashi
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ANALYSIS DEVICE, ANALYSIS METHOD, AND ANALYSIS PROGRAM
- Publication number 20240030013
- Publication date Jan 25, 2024
- Horiba Stec, Co., Ltd.
- Miyako HADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20240014002
- Publication date Jan 11, 2024
- HITACHI HIGH-TECH CORPORATION
- Takayasu IWATSUKA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...
- Publication number 20230411109
- Publication date Dec 21, 2023
- FEI Company
- Sean M. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
- Publication number 20230215686
- Publication date Jul 6, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE
- Publication number 20230136707
- Publication date May 4, 2023
- SEMES CO., LTD.
- Dong-Hun KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL-MODE SILICON PHOTOMULTIPLIER BASED LIDAR
- Publication number 20230121582
- Publication date Apr 20, 2023
- MOTIONAL AD LLC
- Geng Fu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM
- Publication number 20230109124
- Publication date Apr 6, 2023
- CARL ZEISS MICROSCOPY GMBH
- Gero Walter
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Blended energy ion implantation
- Publication number 20230038392
- Publication date Feb 9, 2023
- Axcelis Technologies, Inc.
- James S. DeLuca
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE, PARTICLE BEAM MICR...
- Publication number 20230011964
- Publication date Jan 12, 2023
- CARL ZEISS MICROSCOPY GMBH
- Martin Ross-Messemer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TIME-GATED DETECTION, DUAL-LAYER SPAD-BASED ELECTRON DETECTION
- Publication number 20230005705
- Publication date Jan 5, 2023
- FEI Company
- Bart Jozef Janssen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20220406667
- Publication date Dec 22, 2022
- Hitachi High-Tech Corporation
- Soichiro Eto
- G01 - MEASURING TESTING
Information Patent Application
DETECTION AND LOCATION OF ANOMALOUS PLASMA EVENTS IN FABRICATION CH...
- Publication number 20220406578
- Publication date Dec 22, 2022
- LAM RESEARCH CORPORATION
- Yukinori Sakiyama
- G01 - MEASURING TESTING
Information Patent Application
SNR FOR X-RAY DETECTORS IN SEM SYSTEMS BY USING POLARIZATION FILTER
- Publication number 20220397540
- Publication date Dec 15, 2022
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TOOL FOR TESTING AN ELECTRON-OPTICAL ASSEMBLY
- Publication number 20220392729
- Publication date Dec 8, 2022
- ASML NETHERLANDS B.V.
- Arjen Benjamin STORM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
X-RAY IMAGING IN CROSS-SECTION USING UN-CUT LAMELLA WITH BACKGROUND...
- Publication number 20220367146
- Publication date Nov 17, 2022
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR REVITALIZING PLASMA PROCESSING TOOLS
- Publication number 20220319814
- Publication date Oct 6, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chi-Hsing LIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MEASURING JIG AND MEASURING DEVICE
- Publication number 20220244115
- Publication date Aug 4, 2022
- TOKYO ELECTRON LIMITED
- Tong WU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR DETECTING ONE OR MORE SCANNING CHARGED PAR...
- Publication number 20220238297
- Publication date Jul 28, 2022
- DELMIC IP B.V.
- Lenard Maarten VOORTMAN
- H01 - BASIC ELECTRIC ELEMENTS

Photon detectors for X-rays, light

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Measuring device and optical fiber strain measuring jig thereof

Stroboscopic illumination synchronized electron detection and imaging

Method for operating a multi-beam particle beam microscope

Low open area and coupon endpoint detection

Plasma processing apparatus and plasma processing method

Silicon photomultiplier imaging system and method for cooling the same

Mass spectrometer detector and system and method using the same

X-ray calibration standard object

Dual-mode silicon photomultiplier based LiDAR

System and method for targeted re-examination, inner layer defect a...

Method for operating a multi-beam particle beam microscope

Apparatus for transmission electron microscopy cathodoluminescence

Charged particle beam device for inspection of a specimen with a pl...

Scanning electron microscope and a method for overlay monitoring

Time-gated detection, dual-layer SPAD-based electron detection

SNR for x-ray detectors in SEM systems by using polarization filter

Scanning electron microscope

X-ray imaging in cross-section using un-cut lamella with background...

Dual-mode silicon photomultiplier based LiDAR

Plasma processing apparatus and operational method thereof

In situ angle measurement using channeling

System and method for spatially resolved optical metrology of an io...

Charged particle beam device

Digital detector, apparatus of charged-particle beam such as electr...

Charged particle detection system

Electron microscope apparatus, inspection system using electron mic...

System and method for simultaneous phase contrast imaging and elect...

Mass spectrometer detector and system and method using the same

Charged particle scanners

Scanning electron microscope with composite detection system and sp...

Patents Applicationslast 30 patents

Optical Apparatus and Charged Particle Beam Apparatus

System and Method for Determining Properties of a Substrate

LOW OPEN AREA AND COUPON ENDPOINT DETECTION

LOW OPEN AREA AND COUPON ENDPOINT DETECTION

ELECTRON BEAM MONITORING DEVICE AND ELECTRON BEAM IRRADIATION SYSTEM

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

SUBSTRATE POSITION MONITORING DEVICES

SYSTEM AND METHOD FOR TARGETED RE-EXAMINATION, INNER LAYER DEFECT A...

ELECTRON MICROSCOPE, DEVICE FOR MEASURING ELECTRON-PHOTON CORRELATI...

MICROCHIPS FOR USE IN ELECTRON MICROSCOPES AND RELATED METHODS

PLASMA MONITORING SYSTEM, PLASMA MONITORING METHOD, AND MONITORING...

Scanning Electron Microscope and Map Display Method for Absorption...

ANALYSIS DEVICE, ANALYSIS METHOD, AND ANALYSIS PROGRAM

CHARGED PARTICLE BEAM APPARATUS

METHODS FOR DETERMINING THE VIRTUAL SOURCE LOCATION OF A LIQUID MET...

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

APPARATUS FOR TREATING SUBSTRATE AND METHOD FOR TREATING SUBSTRATE

DUAL-MODE SILICON PHOTOMULTIPLIER BASED LIDAR

PARTICLE BEAM SYSTEM

Blended energy ion implantation

METHOD FOR OPERATING A PARTICLE BEAM MICROSCOPE, PARTICLE BEAM MICR...

TIME-GATED DETECTION, DUAL-LAYER SPAD-BASED ELECTRON DETECTION

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

DETECTION AND LOCATION OF ANOMALOUS PLASMA EVENTS IN FABRICATION CH...

SNR FOR X-RAY DETECTORS IN SEM SYSTEMS BY USING POLARIZATION FILTER

TOOL FOR TESTING AN ELECTRON-OPTICAL ASSEMBLY

X-RAY IMAGING IN CROSS-SECTION USING UN-CUT LAMELLA WITH BACKGROUND...

METHOD AND APPARATUS FOR REVITALIZING PLASMA PROCESSING TOOLS

MEASURING JIG AND MEASURING DEVICE

APPARATUS AND METHOD FOR DETECTING ONE OR MORE SCANNING CHARGED PAR...