Planar magnetron sputtering

Industry

CPC
H01J37/3408

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3408Planar magnetron sputtering

Industries

Patents Grantslast 30 patents

Information Patent Grant
Sputtering apparatus for coating of 3D-objects
- Patent number 12,272,525
- Issue date Apr 8, 2025
- EVATEC AG
- Stephan Voser
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor processing apparatus and magnetron mechanism
- Patent number 12,249,496
- Issue date Mar 11, 2025
- BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD.
- Yujie Yang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum system and method to deposit a compound layer
- Patent number 12,209,302
- Issue date Jan 28, 2025
- EVATEC AG
- Kai Wenz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Permeance magnetic assembly
- Patent number 12,198,910
- Issue date Jan 14, 2025
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Jen Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,961,722
- Issue date Apr 16, 2024
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Apparatus and methods for depositing variable interference filters
- Patent number 11,891,686
- Issue date Feb 6, 2024
- Shigeng Song
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing a material
- Patent number 11,875,980
- Issue date Jan 16, 2024
- Stephen R Burgess
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Permeance magnetic assembly
- Patent number 11,854,776
- Issue date Dec 26, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Jen Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of and apparatus for magnetron sputtering
- Patent number 11,848,179
- Issue date Dec 19, 2023
- EVATEC AG
- Hartmut Rohrmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tilted magnetron in a PVD sputtering deposition chamber
- Patent number 11,784,032
- Issue date Oct 10, 2023
- Applied Materials, Inc.
- Lizhong Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,761,078
- Issue date Sep 19, 2023
- Applied Materials, Inc.
- Mengxue Wu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Deposition system with a multi-cathode
- Patent number 11,668,003
- Issue date Jun 6, 2023
- Applied Materials, Inc.
- Vibhu Jindal
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Depositing apparatus
- Patent number 11,646,180
- Issue date May 9, 2023
- Samsung Display Co., Ltd.
- Kwanyong Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnet module and sputtering apparatus including the same
- Patent number 11,646,140
- Issue date May 9, 2023
- Samsung Display Co., Ltd.
- Nayoung Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition system with multi-cathode and method of manufacture thereof
- Patent number 11,600,476
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrochromic devices
- Patent number 11,592,722
- Issue date Feb 28, 2023
- View, Inc.
- Zhongchun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cathode unit and film forming apparatus
- Patent number 11,581,171
- Issue date Feb 14, 2023
- Tokyo Electron Limited
- Masato Shinada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming system and method for forming film on substrate
- Patent number 11,542,592
- Issue date Jan 3, 2023
- Tokyo Electron Limited
- Masato Shinada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,521,840
- Issue date Dec 6, 2022
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Permeance magnetic assembly
- Patent number 11,488,814
- Issue date Nov 1, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Tsung-Jen Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods of and apparatus for magnetron sputtering
- Patent number 11,476,099
- Issue date Oct 18, 2022
- EVATEC AG
- Hartmut Rohrmann
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for depositing durable optical coatings
- Patent number 11,466,362
- Issue date Oct 11, 2022
- UNIVERSITY OF THE WEST OF SCOTLAND
- Desmond Gibson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering device
- Patent number 11,414,747
- Issue date Aug 16, 2022
- Tokyo Electron Limited
- Junichi Takei
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering with HIPIMS
- Patent number 11,380,530
- Issue date Jul 5, 2022
- EVATEC AG
- Juergen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Piezoelectric bulk layers with tilted c-axis orientation and method...
- Patent number 11,381,212
- Issue date Jul 5, 2022
- Qorvo US, Inc.
- Derya Deniz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Tubular target
- Patent number 11,367,599
- Issue date Jun 21, 2022
- Plansee SE
- Andre Dronhofer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for processing, coating or curing a substrate
- Patent number 11,359,280
- Issue date Jun 14, 2022
- CAMVAC LIMITED
- Alexander John Topping
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-radius magnetron for physical vapor deposition (PVD) and meth...
- Patent number 11,295,938
- Issue date Apr 5, 2022
- Applied Materials, Inc.
- Jiao Song
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Providing voice call support in a network
- Patent number 11,283,932
- Issue date Mar 22, 2022
- Nokia Solutions and Networks Oy
- Devaki Chandramouli
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sputtering apparatus
- Patent number 11,251,020
- Issue date Feb 15, 2022
- Nissin Electric Co., Ltd.
- Shigeaki Kishida
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
PERMEANCE MAGNETIC ASSEMBLY
- Publication number 20250112032
- Publication date Apr 3, 2025
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Jen YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RF SPUTTERING OF MULTIPLE ELECTRODES WITH OPTIMIZED PLAMSA COUPLING...
- Publication number 20250054728
- Publication date Feb 13, 2025
- SPUTTERING COMPONENTS, INC.
- Ken Nauman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL VAPOR DEPOSITION SOURCE AND CHAMBER ASSEMBLY
- Publication number 20240282558
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Sathiyamurthi GOVINDASAMY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING APPARATUS FOR COATING OF 3D-OBJECTS
- Publication number 20240136156
- Publication date Apr 25, 2024
- Evatec AG
- Stephan VOSER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PERMEANCE MAGNETIC ASSEMBLY
- Publication number 20240087861
- Publication date Mar 14, 2024
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Jen YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING APPARATUS
- Publication number 20240063003
- Publication date Feb 22, 2024
- Canon ANELVA Corporation
- Susumu KARINO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR PROCESSING APPARATUS AND MAGNETRON MECHANISM
- Publication number 20230170196
- Publication date Jun 1, 2023
- Beijing NAURA Microelectronics Equipment Co., Ltd.
- Yujie YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROCHROMIC DEVICES
- Publication number 20230144179
- Publication date May 11, 2023
- VIEW, INC.
- Zhongchun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Controlling Stress Variation in a Material...
- Publication number 20230094699
- Publication date Mar 30, 2023
- SPTS Technologies Ltd.
- Anthony WILBY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHODS OF AND APPARATUS FOR MAGNETRON SPUTTERING
- Publication number 20230014186
- Publication date Jan 19, 2023
- Evatec AG
- Hartmut Rohrmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20220380883
- Publication date Dec 1, 2022
- Mengxue WU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PERMEANCE MAGNETIC ASSEMBLY
- Publication number 20220367160
- Publication date Nov 17, 2022
- Taiwan Semiconductor Manufacturing Co., LTD
- Tsung-Jen YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PIEZOELECTRIC BULK LAYERS WITH TILTED C-AXIS ORIENTATION AND METHOD...
- Publication number 20220271726
- Publication date Aug 25, 2022
- Qorvo US, Inc.
- Derya Deniz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MAGNET MODULE AND SPUTTERING APPARATUS INCLUDING THE SAME
- Publication number 20220148779
- Publication date May 12, 2022
- SAMSUNG DISPLAY CO., LTD.
- NAYOUNG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Deposition System With Multi-Cathode And Method Of Manufacture Thereof
- Publication number 20220037136
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Anantha K. Subramani
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-RADIUS MAGNETRON FOR PHYSICAL VAPOR DEPOSITION (PVD) AND METH...
- Publication number 20210407778
- Publication date Dec 30, 2021
- Applied Materials, Inc.
- Jiao SONG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TILTED MAGNETRON IN A PVD SPUTTERING DEPOSITION CHAMBER
- Publication number 20210351024
- Publication date Nov 11, 2021
- Applied Materials, Inc.
- Lizhong SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CATHODE UNIT AND FILM FORMING APPARATUS
- Publication number 20210257198
- Publication date Aug 19, 2021
- TOKYO ELECTRON LIMITED
- Masato SHINADA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnet Unit for Magnetron Sputtering Apparatus
- Publication number 20210249241
- Publication date Aug 12, 2021
- Ulvac, Inc.
- Yoshinori Fujii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPUTTERING APPARATUS
- Publication number 20210151292
- Publication date May 20, 2021
- NISSIN ELECTRIC CO., LTD.
- Shigeaki KISHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPROVEMENTS IN AND RELATING TO COATING PROCESSES
- Publication number 20210134571
- Publication date May 6, 2021
- GENCOA LTD
- Victor BELLIDO-GONZALEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Depositing a Material
- Publication number 20210123130
- Publication date Apr 29, 2021
- SPTS TECHNOLOGIES LIMITED
- STEPHEN R. BURGESS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REFERENCE ELECTRODE ASSEMBLIES INCLUDING THIN, POROUS CURRENT COLLE...
- Publication number 20210091369
- Publication date Mar 25, 2021
- GM GLOBAL TECHNOLOGY OPERATIONS LLC
- Gayatri V. DADHEECH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS OF AND APPARATUS FOR MAGNETRON SPUTTERING
- Publication number 20210050193
- Publication date Feb 18, 2021
- Evatec AG
- Hartmut Rohrmann
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEPOSITING APPARATUS
- Publication number 20210020417
- Publication date Jan 21, 2021
- SAMSUNG DISPLAY CO., LTD.
- Kwanyong LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REACTIVE SPUTTERING WITH HIPIMS
- Publication number 20200388474
- Publication date Dec 10, 2020
- Evatec AG
- Juergen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMI...
- Publication number 20200357616
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- Adolph Miller ALLEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTERCHANGEABLE MAGNET PACK
- Publication number 20200234934
- Publication date Jul 23, 2020
- SEAGATE TECHNOLOGY LLC
- Toon Hai FOO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHODS FOR DEPOSITING DURABLE OPTICAL COATINGS
- Publication number 20200190659
- Publication date Jun 18, 2020
- UNIVERSITY OF THE WEST OF SCOTLAND
- Desmond GIBSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROCHROMIC DEVICES
- Publication number 20200174335
- Publication date Jun 4, 2020
- VIEW, INC.
- Zhongchun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Planar magnetron sputtering

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Sputtering apparatus for coating of 3D-objects

Semiconductor processing apparatus and magnetron mechanism

Vacuum system and method to deposit a compound layer

Permeance magnetic assembly

Method and apparatus for controlling stress variation in a material...

Apparatus and methods for depositing variable interference filters

Method and apparatus for depositing a material

Permeance magnetic assembly

Methods of and apparatus for magnetron sputtering

Tilted magnetron in a PVD sputtering deposition chamber

Methods and apparatus for processing a substrate

Deposition system with a multi-cathode

Depositing apparatus

Magnet module and sputtering apparatus including the same

Deposition system with multi-cathode and method of manufacture thereof

Electrochromic devices

Cathode unit and film forming apparatus

Film forming system and method for forming film on substrate

Method and apparatus for controlling stress variation in a material...

Permeance magnetic assembly

Methods of and apparatus for magnetron sputtering

Apparatus and methods for depositing durable optical coatings

Sputtering device

Reactive sputtering with HIPIMS

Piezoelectric bulk layers with tilted c-axis orientation and method...

Tubular target

Apparatus and method for processing, coating or curing a substrate

Multi-radius magnetron for physical vapor deposition (PVD) and meth...

Providing voice call support in a network

Sputtering apparatus

Patents Applicationslast 30 patents

PERMEANCE MAGNETIC ASSEMBLY

RF SPUTTERING OF MULTIPLE ELECTRODES WITH OPTIMIZED PLAMSA COUPLING...

PHYSICAL VAPOR DEPOSITION SOURCE AND CHAMBER ASSEMBLY

SPUTTERING APPARATUS FOR COATING OF 3D-OBJECTS

PERMEANCE MAGNETIC ASSEMBLY

SPUTTERING APPARATUS

SEMICONDUCTOR PROCESSING APPARATUS AND MAGNETRON MECHANISM

ELECTROCHROMIC DEVICES

Method and Apparatus for Controlling Stress Variation in a Material...

METHODS OF AND APPARATUS FOR MAGNETRON SPUTTERING

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

PERMEANCE MAGNETIC ASSEMBLY

PIEZOELECTRIC BULK LAYERS WITH TILTED C-AXIS ORIENTATION AND METHOD...

MAGNET MODULE AND SPUTTERING APPARATUS INCLUDING THE SAME

Deposition System With Multi-Cathode And Method Of Manufacture Thereof

MULTI-RADIUS MAGNETRON FOR PHYSICAL VAPOR DEPOSITION (PVD) AND METH...

TILTED MAGNETRON IN A PVD SPUTTERING DEPOSITION CHAMBER

CATHODE UNIT AND FILM FORMING APPARATUS

Magnet Unit for Magnetron Sputtering Apparatus

SPUTTERING APPARATUS

IMPROVEMENTS IN AND RELATING TO COATING PROCESSES

Method and Apparatus for Depositing a Material

REFERENCE ELECTRODE ASSEMBLIES INCLUDING THIN, POROUS CURRENT COLLE...

METHODS OF AND APPARATUS FOR MAGNETRON SPUTTERING

DEPOSITING APPARATUS

REACTIVE SPUTTERING WITH HIPIMS

HIGH PRESSURE RF-DC SPUTTERING AND METHODS TO IMPROVE FILM UNIFORMI...

INTERCHANGEABLE MAGNET PACK

APPARATUS AND METHODS FOR DEPOSITING DURABLE OPTICAL COATINGS

ELECTROCHROMIC DEVICES