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H01J2237/3137
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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/3137
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Patents Grants
last 30 patents
Information
Patent Grant
Method and device for the surface treatment of substrates
Patent number
11,901,172
Issue date
Feb 13, 2024
EV Group E. Thallner GmbH
Nasser Razek
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and device for the surface treatment of substrates
Patent number
10,867,783
Issue date
Dec 15, 2020
EV Group E. Thallner GmbH
Nasser Razek
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Charged-particle microscope with in situ deposition functionality
Patent number
10,475,629
Issue date
Nov 12, 2019
FEI Company
John Mitchels
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and device for the surface treatment of substrates
Patent number
9,960,030
Issue date
May 1, 2018
EV Group E. Thallner GmbH
Nasser Razek
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Multi-component deposition
Patent number
8,864,956
Issue date
Oct 21, 2014
United Technologies Corporation
Igor V. Belousov
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Vacuum device where power supply mechanism is mounted and power sup...
Patent number
7,806,985
Issue date
Oct 5, 2010
Showa Shinku Co., Ltd.
Masayuki Takimoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma and electron beam etching device and method
Patent number
7,569,484
Issue date
Aug 4, 2009
Micron Technology, Inc.
Neal R. Rueger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process and apparatus for plasma activated depositions in a vacuum
Patent number
7,014,889
Issue date
Mar 21, 2006
University of Virginia Patent Foundation
James F. Groves
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method and apparatus for ionization film formation
Patent number
6,812,164
Issue date
Nov 2, 2004
Canon Kabushiki Kaisha
Hirohito Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus and method for coating substrates
Patent number
6,616,818
Issue date
Sep 9, 2003
RTC Systems Ltd.
Desmond Gibson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Plasma treatment for producing electron emitters
Patent number
6,319,367
Issue date
Nov 20, 2001
E. I. DuPont de Nemours & Co.
Don Mayo Coates
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process of making a thin film
Patent number
6,090,457
Issue date
Jul 18, 2000
Sanyo Vaccum Industries Co. Ltd.
Akihiro Kitabatake
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for forming a thin film and apparatus for the same
Patent number
6,083,365
Issue date
Jul 4, 2000
Sanyo Vacuum Industries Co. Ltd.
Akihiro Kitabatake
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vacuum coating apparatus with a crucible in the vacuum chamber to h...
Patent number
5,888,305
Issue date
Mar 30, 1999
Balzers Und Leybold Deutsch
Joachim Szczyrbowski
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process and device for coating a substrate surface with vaporized i...
Patent number
5,885,357
Issue date
Mar 23, 1999
Alusuisse Technology & Management Ltd.
Wolfgang Lohwasser
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Process and device for coating a substrate surface with vaporized i...
Patent number
5,804,258
Issue date
Sep 8, 1998
Alusuisse Technology & Management Ltd.
Wolfgang Lohwasser
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for anisotropic etching conductive film
Patent number
5,719,068
Issue date
Feb 17, 1998
Semiconductor Energy Laboratory Co., Ltd.
Hideomi Suzawa
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for coating substrates
Patent number
5,656,141
Issue date
Aug 12, 1997
Leybold Aktiengesellschaft
Hans-Georg Betz
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Apparatus for plasma-assisted high rate electron beam vaporization
Patent number
5,635,087
Issue date
Jun 3, 1997
Fraunhofer-Gesellschaft zur Foerderung der Angewandten Forschung E.V.
Siegfried Schiller
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ETCHING APPARATUS
Publication number
20230162996
Publication date
May 25, 2023
Applied Materials, Inc.
Yang YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND DEVICE FOR THE SURFACE TREATMENT OF SUBSTRATES
Publication number
20210125821
Publication date
Apr 29, 2021
EV GROUP E. THALLNER GMBH
Nasser RAZEK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ETCHING APPARATUS
Publication number
20190393053
Publication date
Dec 26, 2019
Applied Materials, Inc.
Yang YANG
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND DEVICE FOR THE SURFACE TREATMENT OF SUBSTRATES
Publication number
20180204717
Publication date
Jul 19, 2018
EV GROUP E. THALLNER GMBH
Nasser RAZEK
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Deposition Apparatus and Methods
Publication number
20120196051
Publication date
Aug 2, 2012
United Technologies Corporation
Anatoly Kuzmichev
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multi-Component Deposition
Publication number
20100155224
Publication date
Jun 24, 2010
United Technologies Corporation
Igor V. Belousov
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
PLASMA AND ELECTRON BEAM ETCHING DEVICE AND METHOD
Publication number
20090288603
Publication date
Nov 26, 2009
Neal R. Rueger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
DIAMOND ELECTRON SOURCE AND METHOD FOR MANUFACTURING THE SAME
Publication number
20090160307
Publication date
Jun 25, 2009
Akihiko Ueda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Plasma and electron beam etching device and method
Publication number
20080038933
Publication date
Feb 14, 2008
Micron Technology, Inc.
Neal R. Rueger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Vacuum Device Where Power Supply Mechanism Is Mounted And Power Sup...
Publication number
20070215047
Publication date
Sep 20, 2007
Showa Shink Co., Ltd.
Masayuki Takimoto
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for dispersion strengthened bond coats for the...
Publication number
20050287296
Publication date
Dec 29, 2005
Haydn N. G. Wadley
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Multi-component deposition
Publication number
20050205415
Publication date
Sep 22, 2005
Igor V. Belousov
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Discharge apparatus, plasma processing method and solar cell
Publication number
20050067934
Publication date
Mar 31, 2005
Ishikawajima-Harima Heavy Industries Co., Ltd.
Masashi Ueda
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Application
Method and apparatus for ionization film formation
Publication number
20050029090
Publication date
Feb 10, 2005
Canon Kabushiki Kaisha
Hirohito Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Process and apparatus for plasma activated depositions in a vacuum
Publication number
20040118347
Publication date
Jun 24, 2004
James F. Groves
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Method and apparatus for ionization film formation
Publication number
20030143868
Publication date
Jul 31, 2003
Hirohito Yamaguchi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Apparatus and method for coating substrates
Publication number
20020153247
Publication date
Oct 24, 2002
RTC Systems Ltd.
Desmond Gibson
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...