Plasma light sources

Industry

  • CPC
  • H01J2893/0063
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Patents Grantslast 30 patents

  • Information Patent Grant

    Plasma light engine

    • Patent number 12,176,201
    • Issue date Dec 24, 2024
    • Roland Gesche
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Laser-sustained plasma light source with reverse vortex flow

    • Patent number 11,776,804
    • Issue date Oct 3, 2023
    • KLA Corporation
    • Ilya Bezel
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Extreme ultraviolet light source apparatus and plasma position adju...

    • Patent number 11,631,579
    • Issue date Apr 18, 2023
    • USHIO DENKI KABUSHIKI KAISHA
    • Noritaka Ashizawa
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Laser-pumped plasma light source and method for light generation

    • Patent number 10,964,523
    • Issue date Mar 30, 2021
    • RnD-ISAN, Ltd
    • Robert Rafilevich Gayasov
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Laser driven sealed beam lamp with improved stability

    • Patent number 10,497,555
    • Issue date Dec 3, 2019
    • Excelitas Technologies Corp.
    • Rudi Blondia
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Laser driven sealed beam lamp with improved stability

    • Patent number 10,008,378
    • Issue date Jun 26, 2018
    • Excelitas Technologies Corp.
    • Rudi Blondia
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Method and arrangement for generating a jet of fluid, method and sy...

    • Patent number 9,642,233
    • Issue date May 2, 2017
    • Ecole Polytechnique
    • Soriba Franciszek (François) Sylla
    • A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
  • Information Patent Grant

    Method and apparatus for debris mitigation for an electrical discha...

    • Patent number 6,989,629
    • Issue date Jan 24, 2006
    • EUV LLC
    • Leonard E. Klebanoff
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    Method and apparatus for debris mitigation for an electrical discha...

    • Patent number 6,888,297
    • Issue date May 3, 2005
    • EUV LLC
    • Leonard E. Klebanoff
    • H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • Information Patent Grant

    3881132

    • Patent number 3,881,132
    • Issue date Apr 29, 1975
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    3855491

    • Patent number 3,855,491
    • Issue date Dec 17, 1974
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    3648092

    • Patent number 3,648,092
    • Issue date Mar 7, 1972
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    3609041

    • Patent number 3,609,041
    • Issue date Sep 28, 1971
    • G10 - MUSICAL INSTRUMENTS ACOUSTICS
  • Information Patent Grant

    3582252

    • Patent number 3,582,252
    • Issue date Jun 1, 1971
    • F21 - LIGHTING
  • Information Patent Grant

    3479555

    • Patent number 3,479,555
    • Issue date Nov 18, 1969
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    3475646

    • Patent number 3,475,646
    • Issue date Oct 28, 1969
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    3379997

    • Patent number 3,379,997
    • Issue date Apr 23, 1968
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    3358169

    • Patent number 3,358,169
    • Issue date Dec 12, 1967
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    3339109

    • Patent number 3,339,109
    • Issue date Aug 29, 1967
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    3255379

    • Patent number 3,255,379
    • Issue date Jun 7, 1966
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    3252046

    • Patent number 3,252,046
    • Issue date May 17, 1966
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    3244936

    • Patent number 3,244,936
    • Issue date Apr 5, 1966
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    3218514

    • Patent number 3,218,514
    • Issue date Nov 16, 1965
    • G01 - MEASURING TESTING
  • Information Patent Grant

    3180990

    • Patent number 3,180,990
    • Issue date Apr 27, 1965
    • G01 - MEASURING TESTING
  • Information Patent Grant

    3041936

    • Patent number 3,041,936
    • Issue date Jul 3, 1962
    • G02 - OPTICS
  • Information Patent Grant

    3039018

    • Patent number 3,039,018
    • Issue date Jun 12, 1962
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    3022444

    • Patent number 3,022,444
    • Issue date Feb 20, 1962
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    2974256

    • Patent number 2,974,256
    • Issue date Mar 7, 1961
    • G01 - MEASURING TESTING
  • Information Patent Grant

    2972698

    • Patent number 2,972,698
    • Issue date Feb 21, 1961
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    2911567

    • Patent number 2,911,567
    • Issue date Nov 3, 1959
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents