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Polymer of unsaturated acid or ester
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CPC
Y10S430/111
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GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10
USPC classification
Y10S
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
Y10S430/00
Radiation imagery chemistry: process, composition, or product thereof
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Y10S430/111
Polymer of unsaturated acid or ester
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Patents Grants
last 30 patents
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Patent Grant
Polymers and photoresist compositions
Patent number
9,983,477
Issue date
May 29, 2018
Rohm and Haas Electronic Materials LLC
James W. Thackeray
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Fluorine-containing compounds and their polymers useful for anti-re...
Patent number
9,650,451
Issue date
May 16, 2017
Central Glass Company, Limited
Shinichi Sumida
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Grant
Sulfonium salt-containing polymer, resist composition, patterning p...
Patent number
9,233,919
Issue date
Jan 12, 2016
Shin-Etsu Chemical Co., Ltd.
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Negative-type photoresist composition for thick film and use thereof
Patent number
9,170,491
Issue date
Oct 27, 2015
Everlight Chemical Industrial Corporation
Yi Jing Chen
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Fluorinated monomer, polymer, resist composition, and patterning pr...
Patent number
9,115,074
Issue date
Aug 25, 2015
Shin-Etsu Chemical Co., Ltd.
Masayoshi Sagehashi
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Positive photosensitive composition and method of forming pattern u...
Patent number
9,052,594
Issue date
Jun 9, 2015
FUJIFILM Corporation
Hyou Takahashi
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Compound and method of producing the same, acid generator, resist c...
Patent number
9,040,220
Issue date
May 26, 2015
Tokyo Ohka Kogyo Co., Ltd.
Hideo Hada
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Compound and method of producing the same, acid generator, resist c...
Patent number
9,034,556
Issue date
May 19, 2015
Tokyo Ohka Kogyo Co., Ltd.
Hideo Hada
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Resist composition, method of forming resist pattern, polymeric com...
Patent number
9,023,581
Issue date
May 5, 2015
Tokyo Ohka Kogyo Co., Ltd.
Akiya Kawaue
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Patterning process and resist composition
Patent number
9,017,931
Issue date
Apr 28, 2015
Shin-Etsu Chemical Co., Ltd.
Koji Hasegawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Monomer, polymer, chemically amplified positive resist composition,...
Patent number
9,017,918
Issue date
Apr 28, 2015
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Resist composition, method of forming resist pattern, novel compoun...
Patent number
9,012,129
Issue date
Apr 21, 2015
Tokyo Ohka Kogyo Co., Ltd.
Hideo Hada
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Positive resist composition and pattern forming method using the same
Patent number
9,012,123
Issue date
Apr 21, 2015
FUJIFILM Corporation
Kei Yamamoto
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Pattern forming method, chemical amplification resist composition a...
Patent number
8,999,621
Issue date
Apr 7, 2015
FUJIFILM Corporation
Yuichiro Enomoto
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Fluorine-containing sulfonic acid salts, photo-acid generator and r...
Patent number
8,993,212
Issue date
Mar 31, 2015
Central Glass Company, Limited
Ryozo Takihana
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Positive resist composition and method of forming resist pattern
Patent number
8,980,524
Issue date
Mar 17, 2015
Tokyo Ohka Kogyo Co., Ltd.
Tomoyuki Hirano
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
(Meth)acrylate derivative, polymer and photoresist composition havi...
Patent number
8,969,483
Issue date
Mar 3, 2015
NEC Corporation
Katsumi Maeda
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Positive resist composition and pattern-forming method
Patent number
8,945,810
Issue date
Feb 3, 2015
FUJIFILM Corporation
Fumiyuki Nishiyama
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Photoacid generators
Patent number
8,932,797
Issue date
Jan 13, 2015
Dow Global Technologies LLC
James W. Thackeray
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Positive photosensitive composition and pattern forming method usin...
Patent number
8,932,794
Issue date
Jan 13, 2015
FUJIFILM Corporation
Toshiaki Fukuhara
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Radiation-sensitive resin composition
Patent number
8,921,027
Issue date
Dec 30, 2014
JSR Corporation
Ryuichi Serizawa
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Resist composition and method for producing resist pattern
Patent number
8,921,029
Issue date
Dec 30, 2014
Sumitomo Chemical Company, Limited
Koji Ichikawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Radiation-sensitive resin composition
Patent number
8,916,333
Issue date
Dec 23, 2014
JSR Corporation
Hiroshi Tomioka
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Resist composition, method of forming resist pattern, polymeric com...
Patent number
8,911,928
Issue date
Dec 16, 2014
Tokyo Ohka Kogyo Co., Ltd.
Tomoyuki Hirano
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Polymer, chemically amplified resist composition, and patterning pr...
Patent number
8,900,793
Issue date
Dec 2, 2014
Shin-Etsu Chemical Co., Ltd.
Masayoshi Sagehashi
C08 - ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-...
Information
Patent Grant
Salt, photoresist composition, and method for producing photoresist...
Patent number
8,889,333
Issue date
Nov 18, 2014
Sumitomo Chemical Company, Limited
Koji Ichikawa
C07 - ORGANIC CHEMISTRY
Information
Patent Grant
Chemically amplified negative resist composition and patterning pro...
Patent number
8,859,181
Issue date
Oct 14, 2014
Shin-Etsu Chemical Co., Ltd.
Keiichi Masunaga
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Photoresist materials and photolithography processes
Patent number
8,848,163
Issue date
Sep 30, 2014
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsien-Cheng Wang
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Actinic ray-sensitive or radiation-sensitive resin composition, and...
Patent number
8,846,293
Issue date
Sep 30, 2014
FUJIFILM Corporation
Yusuke Iizuka
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Photoresist composition
Patent number
8,846,294
Issue date
Sep 30, 2014
Sumitomo Chemical Company, Limited
Koji Ichikawa
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Patents Applications
last 30 patents
Information
Patent Application
SULFONIUM SALT-CONTAINING POLYMER, RESIST COMPOSITION, PATTERNING P...
Publication number
20140296561
Publication date
Oct 2, 2014
Youichi Ohsawa
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Fluorine-Containing Compounds and Their Polymers Useful for Anti-Re...
Publication number
20140171584
Publication date
Jun 19, 2014
Central Glass Company, Limited
Shinichi Sumida
C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information
Patent Application
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, NOVEL COMPOUN...
Publication number
20140120472
Publication date
May 1, 2014
Tokyo Ohka Kogyo Co., Ltd.
Hideo Hada
C07 - ORGANIC CHEMISTRY
Information
Patent Application
FLUORINATED MONOMER, POLYMER, RESIST COMPOSITION, AND PATTERNING PR...
Publication number
20140114080
Publication date
Apr 24, 2014
Shin-Etsu Chemical Co., Ltd.
Masayoshi SAGEHASHI
C07 - ORGANIC CHEMISTRY
Information
Patent Application
NEGATIVE RESIST COMPOSITION AND PATTERNING PROCESS
Publication number
20140051025
Publication date
Feb 20, 2014
Shin-Etsu Chemical Co., Ltd.
Akinobu TANAKA
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
PATTERNING PROCESS AND RESIST COMPOSITION
Publication number
20140051026
Publication date
Feb 20, 2014
Shin-Etsu Chemical Co., Ltd.
Koji Hasegawa
C07 - ORGANIC CHEMISTRY
Information
Patent Application
Fluorine-Containing Sulfonic Acid Salts, Photo-Acid Generator And R...
Publication number
20130209938
Publication date
Aug 15, 2013
CENTRAL GLASS COMPANY, LTD
Ryozo Takihana
C07 - ORGANIC CHEMISTRY
Information
Patent Application
(METH)ACRYLATE DERIVATIVE, POLYMER AND PHOTORESIST COMPOSITION HAVI...
Publication number
20130122419
Publication date
May 16, 2013
NEC Corporation
Katsumi Maeda
C07 - ORGANIC CHEMISTRY
Information
Patent Application
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, POLYMERIC COM...
Publication number
20130089819
Publication date
Apr 11, 2013
Tokyo Ohka Kogyo Co., Ltd.
Akiya Kawaue
C07 - ORGANIC CHEMISTRY
Information
Patent Application
POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS
Publication number
20130084528
Publication date
Apr 4, 2013
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
POSITIVE RESIST COMPOSITION AND PATTTERNING PROCESS
Publication number
20130029269
Publication date
Jan 31, 2013
Shin-Etsu Chemical Co., Ltd.
Jun Hatakeyama
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
Publication number
20130022917
Publication date
Jan 24, 2013
Sumitomo Chemical Company, Limited
Koji ICHIKAWA
C07 - ORGANIC CHEMISTRY
Information
Patent Application
RADIATION-SENSITIVE RESIN COMPOSITION
Publication number
20130022926
Publication date
Jan 24, 2013
JSR Corporation
Hiroshi Tomioka
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
MONOMERS, POLYMERS, PHOTORESIST COMPOSITIONS AND METHODS OF FORMING...
Publication number
20130011783
Publication date
Jan 10, 2013
DOW GLOBAL TECHNOLOGIES LLC
Matthias S. Ober
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
POSITIVE RESIST COMPOSITION AND METHOD OF FORMING RESIST PATTERN
Publication number
20120329969
Publication date
Dec 27, 2012
Tasuku Matsumiya
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
SULFONIUM SALT, POLYMER, CHEMICALLY AMPLIFIED RESIST COMPOSITION US...
Publication number
20120308920
Publication date
Dec 6, 2012
Shin-Etsu Chemical Co., Ltd.
Daisuke DOMON
C07 - ORGANIC CHEMISTRY
Information
Patent Application
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, POLYMERIC COM...
Publication number
20120308928
Publication date
Dec 6, 2012
Tokyo Ohka Kogyo Co., Ltd.
Tomoyuki Hirano
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
POLYMER, CHEMICALLY AMPLIFIED RESIST COMPOSITION, AND PATTERNING PR...
Publication number
20120308932
Publication date
Dec 6, 2012
Shin-Etsu Chemical Co., Ltd.
Masayoshi SAGEHASHI
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Application
RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN, NOVEL COMPOUN...
Publication number
20120264061
Publication date
Oct 18, 2012
Tokyo Ohka Kogyo Co., Ltd.
Hideo Hada
C07 - ORGANIC CHEMISTRY
Information
Patent Application
SALT, PHOTORESIST COMPOSITION, AND METHOD FOR PRODUCING PHOTORESIST...
Publication number
20120264060
Publication date
Oct 18, 2012
Sumitomo Chemical Company, Limited
Koji ICHIKAWA
C07 - ORGANIC CHEMISTRY
Information
Patent Application
NOVEL TARC MATERIAL FOR IMMERSION WATERMARK REDUCTION
Publication number
20120258400
Publication date
Oct 11, 2012
Taiwan Semiconductor Manufacturing Company, Ltd.
Ching-Yu Chang
G02 - OPTICS
Information
Patent Application
ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, AND...
Publication number
20120251948
Publication date
Oct 4, 2012
FUJIFILM CORPORATION
Yusuke IIZUKA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PHOTORESIST COMPOSITION
Publication number
20120251946
Publication date
Oct 4, 2012
Sumitomo Chemical Company, Limited
Koji ICHIKAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION AND METHOD OF...
Publication number
20120231393
Publication date
Sep 13, 2012
FUJIFILM CORPORATION
Kana FUJII
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION FOR IMMERSION EXPOSURE AND METHOD OF FORMING RES...
Publication number
20120225383
Publication date
Sep 6, 2012
Tokyo Ohka Kogyo Co., Ltd.
Makiko Irie
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
Publication number
20120219898
Publication date
Aug 30, 2012
Sumitomo Chemical Company, Limited
Koji ICHIKAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
Publication number
20120219906
Publication date
Aug 30, 2012
Sumitomo Chemical Company, Limited
Koji ICHIKAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
Publication number
20120219908
Publication date
Aug 30, 2012
Sumitomo Chemical Company, Limited
Koji ICHIKAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
Publication number
20120219909
Publication date
Aug 30, 2012
Sumitomo Chemical Company, Limited
Koji ICHIKAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
RESIST COMPOSITION AND METHOD FOR PRODUCING RESIST PATTERN
Publication number
20120219912
Publication date
Aug 30, 2012
Sumitomo Chemical Company, Limited
Koji ICHIKAWA
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY