Position sensitive detectors

Industry

CPC
H01J2237/2446

This industry / category may be too specific. Please go to a parent level for more data

Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2446Position sensitive detectors

Industries

Please log in for detailed analytics

Patents Grantslast 30 patents

Information Patent Grant
Observation method by means of scanning transmission electron micro...
- Patent number 12,154,758
- Issue date Nov 26, 2024
- The University of Tokyo
- Naoya Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multi-beam particle beam microscope
- Patent number 12,094,683
- Issue date Sep 17, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion collector for use in plasma systems
- Patent number 11,996,276
- Issue date May 28, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field programmable detector array
- Patent number 11,942,304
- Issue date Mar 26, 2024
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for transferring a focus ring into processing app...
- Patent number 11,869,752
- Issue date Jan 9, 2024
- Tokyo Electron Limited
- Kippei Sugita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System using pixelated faraday sensor
- Patent number 11,810,754
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Eric D. Hermanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Auto-calibration to a station of a process module that spins a wafer
- Patent number 11,742,229
- Issue date Aug 29, 2023
- Lam Research Corporation
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for operating a multi-beam particle beam microscope
- Patent number 11,735,393
- Issue date Aug 22, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 11,721,521
- Issue date Aug 8, 2023
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithography system, sensor and measuring method
- Patent number RE49602
- Issue date Aug 8, 2023
- ASML Netherlands B.V.
- Pieter Kruit
Information Patent Grant
Method and apparatus for charged particle detection
- Patent number 11,715,619
- Issue date Aug 1, 2023
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,705,304
- Issue date Jul 18, 2023
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
X-ray detection apparatus and method
- Patent number 11,699,567
- Issue date Jul 11, 2023
- Jeol Ltd.
- Takanori Murano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam system and method for the particle-optical examinatio...
- Patent number 11,657,999
- Issue date May 23, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pixel shape and section shape selection for large active area high...
- Patent number 11,594,395
- Issue date Feb 28, 2023
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion collector for use in plasma systems
- Patent number 11,581,169
- Issue date Feb 14, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Detection of buried features by backscattered particles
- Patent number 11,443,915
- Issue date Sep 13, 2022
- ASML Netherlands B.V.
- Joe Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Radiation detector and radiation detection apparatus
- Patent number 11,444,213
- Issue date Sep 13, 2022
- Fondazione Bruno Kessler
- Antonino Picciotto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field programmable detector array
- Patent number 11,430,629
- Issue date Aug 30, 2022
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,398,368
- Issue date Jul 26, 2022
- ASML Netherlands B.V.
- Weiming Ren
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for measuring energy spectrum of backscattered...
- Patent number 11,322,332
- Issue date May 3, 2022
- TASMIT, INC.
- Makoto Kato
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for charged particle detection
- Patent number 11,295,930
- Issue date Apr 5, 2022
- ASML Netherlands B.V.
- Yongxin Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 11,282,675
- Issue date Mar 22, 2022
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Auto-calibration to a station of a process module that spins a wafer
- Patent number 11,239,100
- Issue date Feb 1, 2022
- Lam Research Corporation
- Jacob L. Hiester
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample inspection method and system
- Patent number 11,189,456
- Issue date Nov 30, 2021
- Universiteit Maastricht
- Paul Van Schayck
- G01 - MEASURING TESTING
Information Patent Grant
Electron beam detection element, electron microscope, and transmiss...
- Patent number 11,164,718
- Issue date Nov 2, 2021
- Canon Kabushiki Kaisha
- Yukihiro Kuroda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle scanners
- Patent number 11,152,190
- Issue date Oct 19, 2021
- Decision Sciences International Corporation
- Robert D. Penny
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for charged particle microscopy with improved ima...
- Patent number 11,120,969
- Issue date Sep 14, 2021
- KLA Corporation
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope objective lens system and method for s...
- Patent number 11,075,056
- Issue date Jul 27, 2021
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus of plural charged-particle beams
- Patent number 11,062,877
- Issue date Jul 13, 2021
- ASML Netherlands B.V.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
- Publication number 20240312759
- Publication date Sep 19, 2024
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION COLLECTOR FOR USE IN PLASMA SYSTEMS
- Publication number 20240290588
- Publication date Aug 29, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE IN A CONTRAST...
- Publication number 20240222069
- Publication date Jul 4, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY
- Publication number 20240096589
- Publication date Mar 21, 2024
- ASML NETHERLANDS B.V.
- Stoyan NIHTIANOV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRIT...
- Publication number 20240096590
- Publication date Mar 21, 2024
- NuFlare Technology, Inc.
- Yasutaka SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...
- Publication number 20240087838
- Publication date Mar 14, 2024
- Carl Zeiss MultiSEM GmbH
- Stefan Schubert
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC DETECTOR
- Publication number 20240047173
- Publication date Feb 8, 2024
- ASML NETHERLANDS B.V.
- Matthias OBERST
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
- Publication number 20230215686
- Publication date Jul 6, 2023
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION COLLECTOR FOR USE IN PLASMA SYSTEMS
- Publication number 20230197424
- Publication date Jun 22, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Otto Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM USING PIXELATED FARADAY SENSOR
- Publication number 20230187171
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Eric D. Hermanson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR ENERGY SELECTIVE DIRECT ELECTRON IMAGING
- Publication number 20230145436
- Publication date May 11, 2023
- DIRECT ELECTRON, LP
- Benjamin BAMMES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR MONITORING SEMICONDUCTOR PROCESSES
- Publication number 20230135167
- Publication date May 4, 2023
- Inficon Inc.
- Matan Lapidot
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBSERVATION METHOD BY MEANS OF SCANNING TRANSMISSION ELECTRON MICRO...
- Publication number 20230040811
- Publication date Feb 9, 2023
- THE UNIVERSITY OF TOKYO
- Naoya Shibata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, AND METHOD AND PROGRAM FOR CONTROLLING...
- Publication number 20230013805
- Publication date Jan 19, 2023
- TOKYO ELECTRON LIMITED
- Yusuke SAITOH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS
- Publication number 20230005706
- Publication date Jan 5, 2023
- ASML NETHERLANDS B.V.
- Albertus Victor Gerardus MANGNUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FIELD PROGRAMMABLE DETECTOR ARRAY
- Publication number 20220415608
- Publication date Dec 29, 2022
- ASML NETHERLANDS B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR CHARGED PARTICLE DETECTION
- Publication number 20220375716
- Publication date Nov 24, 2022
- ASML NETHERLANDS B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
- Publication number 20220319808
- Publication date Oct 6, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- B82 - NANO-TECHNOLOGY
Information Patent Application
X-Ray Detection Apparatus and Method
- Publication number 20220172923
- Publication date Jun 2, 2022
- JEOL Ltd.
- Takanori Murano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...
- Publication number 20210313137
- Publication date Oct 7, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE
- Publication number 20210210306
- Publication date Jul 8, 2021
- Carl Zeiss MultiSEM GmbH
- Dirk Zeidler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS
- Publication number 20210193433
- Publication date Jun 24, 2021
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK
- Publication number 20210193437
- Publication date Jun 24, 2021
- ASML NETHERLANDS B.V.
- Weiming REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSFER SYSTEM AND TRANSFER METHOD
- Publication number 20210183628
- Publication date Jun 17, 2021
- TOKYO ELECTRON LIMITED
- Kippei Sugita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
- Publication number 20210151291
- Publication date May 20, 2021
- ASML NETHERLANDS B.V.
- Weiming REN
- B82 - NANO-TECHNOLOGY
Information Patent Application
SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS SYSTEM AND METHOD FOR S...
- Publication number 20210110994
- Publication date Apr 15, 2021
- Focus-eBeam Technology (Beijing) Co., Ltd.
- Shuai Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR HIGH SPEED EELS SPECTRUM ACQUISITION
- Publication number 20210090856
- Publication date Mar 25, 2021
- GATAN, INC.
- Edward Michael JAMES
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIXEL SHAPE AND SECTION SHAPE SELECTION FOR LARGE ACTIVE AREA HIGH...
- Publication number 20210043416
- Publication date Feb 11, 2021
- ASML Netherlands B.V.
- Yongxin WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR MEASURING ENERGY SPECTRUM OF BACKSCATTERED...
- Publication number 20210012999
- Publication date Jan 14, 2021
- TASMIT, INC.
- Makoto KATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE INSPECTION METHOD AND SYSTEM
- Publication number 20200402761
- Publication date Dec 24, 2020
- Universiteit Maastricht
- Paul VAN SCHAYCK
- G01 - MEASURING TESTING

Position sensitive detectors

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Observation method by means of scanning transmission electron micro...

Method for operating a multi-beam particle beam microscope

Ion collector for use in plasma systems

Field programmable detector array

System and method for transferring a focus ring into processing app...

System using pixelated faraday sensor

Auto-calibration to a station of a process module that spins a wafer

Method for operating a multi-beam particle beam microscope

Multi-beam inspection apparatus with improved detection performance...

Lithography system, sensor and measuring method

Method and apparatus for charged particle detection

Apparatus of plural charged-particle beams

X-ray detection apparatus and method

Particle beam system and method for the particle-optical examinatio...

Pixel shape and section shape selection for large active area high...

Ion collector for use in plasma systems

Detection of buried features by backscattered particles

Radiation detector and radiation detection apparatus

Field programmable detector array

Apparatus of plural charged-particle beams

Apparatus and method for measuring energy spectrum of backscattered...

Method and apparatus for charged particle detection

Multi-beam inspection apparatus with improved detection performance...

Auto-calibration to a station of a process module that spins a wafer

Sample inspection method and system

Electron beam detection element, electron microscope, and transmiss...

Charged particle scanners

Method and system for charged particle microscopy with improved ima...

Scanning electron microscope objective lens system and method for s...

Apparatus of plural charged-particle beams

Patents Applicationslast 30 patents

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

ION COLLECTOR FOR USE IN PLASMA SYSTEMS

METHOD FOR OPERATING A MULTI-BEAM PARTICLE MICROSCOPE IN A CONTRAST...

SEMICONDUCTOR CHARGED PARTICLE DETECTOR FOR MICROSCOPY

CHARGED PARTICLE BEAM WRITING APPARATUS, CHARGED PARTICLE BEAM WRIT...

MULTI-BEAM MICROSCOPE AND METHOD FOR OPERATING A MULTI-BEAM MICROSC...

MONOLITHIC DETECTOR

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

ION COLLECTOR FOR USE IN PLASMA SYSTEMS

SYSTEM USING PIXELATED FARADAY SENSOR

METHOD AND APPARATUS FOR ENERGY SELECTIVE DIRECT ELECTRON IMAGING

SYSTEM AND METHOD FOR MONITORING SEMICONDUCTOR PROCESSES

OBSERVATION METHOD BY MEANS OF SCANNING TRANSMISSION ELECTRON MICRO...

PLASMA PROCESSING APPARATUS, AND METHOD AND PROGRAM FOR CONTROLLING...

CHARGED PARTICLE DEVICE, DETECTOR, AND METHODS

FIELD PROGRAMMABLE DETECTOR ARRAY

METHOD AND APPARATUS FOR CHARGED PARTICLE DETECTION

MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...

X-Ray Detection Apparatus and Method

PARTICLE BEAM SYSTEM AND METHOD FOR THE PARTICLE-OPTICAL EXAMINATIO...

METHOD FOR OPERATING A MULTI-BEAM PARTICLE BEAM MICROSCOPE

APPARATUS OF PLURAL CHARGED-PARTICLE BEAMS

MULTIPLE CHARGED-PARTICLE BEAM APPARATUS WITH LOW CROSSTALK

TRANSFER SYSTEM AND TRANSFER METHOD

MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...

SCANNING ELECTRON MICROSCOPE OBJECTIVE LENS SYSTEM AND METHOD FOR S...

METHOD FOR HIGH SPEED EELS SPECTRUM ACQUISITION

PIXEL SHAPE AND SECTION SHAPE SELECTION FOR LARGE ACTIVE AREA HIGH...

APPARATUS AND METHOD FOR MEASURING ENERGY SPECTRUM OF BACKSCATTERED...

SAMPLE INSPECTION METHOD AND SYSTEM