TREA

Preparation by direct nitridation of silicon

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Industry

  • CPC
  • C01B21/0682
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Parent Industries

CCHEMISTRY METALLURGY C01Inorganic chemistry C01BNON-METALLIC ELEMENTS COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C C01B21/00Nitrogen Compounds thereof

Current Industry

C01B21/0682Preparation by direct nitridation of silicon
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