Claims
- 1. A process for the production of silicon nitride by the reaction of silicon and nitrogen, said process comprising the step of:
- reacting silicon powder having a particle size of less than 45 microns and a silicon content of at least 95% with nitrogen while said silicon is continuously rotated at a temperature of from 1000.degree. C. to 1800.degree. C. and at a pressure of from 1.01 to 1.8 bar to produce silicon nitride having a nitrogen content of from 1 to 39.5% by weight and a ratio of .alpha.:.beta.-phase of 1:9 to 9:1.
- 2. A process according to claim 1, wherein the reaction is carried out up to a nitrogen content of from 5 to 25% by weight.
- 3. A process according to claim 1, wherein the reaction is carried out in a rotating tube.
- 4. A process according to claim 1, wherein a silicon powder is used with a grain size of less than 20 microns.
- 5. A process according to claim 1, wherein a silicon powder is used with a silicon content greater than 97.5%.
- 6. A process according to claim 1 wherein said step of reacting silicon powder With nitrogen is continued for a period of from 2 to 60 minutes.
- 7. The process of claim 1, wherein said step of reacting silicon powder with nitrogen is further characterized in that said step is allowed to continue only up to the production of a partly nitrided product having a nitrogen content of from 5 to 25% by weight and after said step of reacting silicon powder with nitrogen said process further includes the step of reacting the partly nitrided product at a temperature of 1100.degree. C. to 1600.degree. C. with nitrogen gas.
- 8. The process of claim 7 wherein the step of reacting said partly nitrided product is further characterized in that said partly nitrided product is reacted with a mixture of nitrogen and an inert gas, wherein the concentration of said nitrogen and said inert gas in said mixture change as said step of reacting said partly nitrided product continues to completion.
- 9. The process according to claim 8 wherein said step of reacting the partly nitrided product is carried out in a chamber furnace in a stationary bed.
- 10. The process of claim 8 wherein said step of reacting said partly nitrided product is further characterized in that said inert gas in said mixture is argon.
- 11. The process of claim 8 wherein the step of reacting the partly nitrided product is further characterized in that the proportion of nitrogen in said mixture is adjusted to 30 to 70% by volume and increased to 100% by volume of nitrogen as said step of reacting the partly nitrided product continues to completion.
- 12. The process of claim 1 wherein the step of reacting silicon powder with nitrogen is carried out up to a nitrogen content of from 5 to 25% by weight.
- 13. Silicon nitride produced according to the process of claim 1.
- 14. Silicon nitride produced according to the process of claim 7.
- 15. Silicon nitride produced according to the process of claim 7.
Priority Claims (1)
Number |
Date |
Country |
Kind |
3841311 |
Dec 1988 |
DEX |
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CROSS-REFERENCE TO RELATED APPLICATION
This application is a continuation-in-part of U.S. application Ser. No. 445,001 filed on Dec. 4, 1989 abandoned.
Foreign Referenced Citations (3)
Number |
Date |
Country |
0252597 |
Dec 1987 |
DEX |
3151603 |
Jun 1988 |
JPX |
3170203 |
Jul 1988 |
JPX |
Continuation in Parts (1)
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Number |
Date |
Country |
Parent |
445001 |
Dec 1989 |
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