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Processing objects on a micro-scale
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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
Current Industry
H01J2237/317
Processing objects on a micro-scale
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Patents Grants
last 30 patents
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Patent Grant
Multi-charged particle beam writing apparatus, and multi-charged pa...
Patent number
12,087,543
Issue date
Sep 10, 2024
NuFlare Technology, Inc.
Hiroshi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Energy filter element for ion implantation systems for the use in t...
Patent number
12,080,510
Issue date
Sep 3, 2024
MI2-FACTORY GMBH
Florian Krippendorf
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of manufacturing photo masks
Patent number
12,038,693
Issue date
Jul 16, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Chien-Cheng Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Analyzing a sidewall of hole milled in a sample to determine thickn...
Patent number
12,033,831
Issue date
Jul 9, 2024
Applied Materials Israel Ltd.
Ilya Blayvas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems, devices, and methods for aligning a particle beam and perf...
Patent number
12,020,897
Issue date
Jun 25, 2024
PDF Solutions, Inc.
Indranil De
G01 - MEASURING TESTING
Information
Patent Grant
Method for cross-section sample preparation
Patent number
12,007,344
Issue date
Jun 11, 2024
Fibics Incorporated
Michael William Phaneuf
G01 - MEASURING TESTING
Information
Patent Grant
Method and system for cross-sectioning a sample with a preset thick...
Patent number
RE50001
Issue date
Jun 4, 2024
FIBICS INCORPORATED
Michael William Phaneuf
Information
Patent Grant
Adjustable support for arc chamber of ion source
Patent number
12,002,647
Issue date
Jun 4, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Po-Tang Tseng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip
Patent number
11,996,210
Issue date
May 28, 2024
UChicago Argonne, LLC
Jin Wang
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Ion propulsion device
Patent number
11,993,402
Issue date
May 28, 2024
Centre National de la Recherche Scientifique
Jacques Gierak
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam apparatus, defect repair method, lithographic exposur...
Patent number
11,996,267
Issue date
May 28, 2024
ASML Netherlands B.V.
Ruben Cornelis Maas
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Plasma micronozzle adapter
Patent number
11,993,011
Issue date
May 28, 2024
National Technology & Engineering Solutions of Sandia, LLC
Eric Langlois
B81 - MICRO-STRUCTURAL TECHNOLOGY
Information
Patent Grant
Linear accelerator coil including multiple fluid channels
Patent number
11,985,756
Issue date
May 14, 2024
Applied Materials, Inc.
Robert B. Vopat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and structures for semiconductor device testing
Patent number
11,982,709
Issue date
May 14, 2024
Yangtze Memory Technologies Co., Ltd.
Lin Qi
G01 - MEASURING TESTING
Information
Patent Grant
Analysis device, analysis method, and storage medium
Patent number
11,977,009
Issue date
May 7, 2024
Honda Motor Co., Ltd.
Atsushi Sakurai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for performing sample lift-out for highly react...
Patent number
11,972,923
Issue date
Apr 30, 2024
FEI Company
Christopher Thompson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam grid layout
Patent number
RE49952
Issue date
Apr 30, 2024
ASML Netherlands B.V.
Vincent Sylvester Kuiper
Information
Patent Grant
Multiple electron-beam image acquisition apparatus and multiple ele...
Patent number
11,961,703
Issue date
Apr 16, 2024
NuFlare Technology, Inc.
Chosaku Noda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam writing apparatus, charged particle beam writ...
Patent number
11,961,708
Issue date
Apr 16, 2024
NuFlare Technology, Inc.
Haruyuki Nomura
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Transmission charged particle microscope with an electron energy lo...
Patent number
11,955,310
Issue date
Apr 9, 2024
FEI Company
Peter Christiaan Tiemeijer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and device for preparing a microscopic sample from a volume...
Patent number
11,935,723
Issue date
Mar 19, 2024
Carl Zeiss Microscopy GmbH
Fabian Perez Willard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for metal contamination control in an ion impl...
Patent number
11,923,169
Issue date
Mar 5, 2024
Axcelis Technologies, Inc.
Causon Ko-Chuan Jen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Microscopy imaging method for 3D tomography with predictive drift t...
Patent number
11,923,168
Issue date
Mar 5, 2024
FIBICS INCORPORATED
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Ion beam implantation method and semiconductor device
Patent number
11,908,694
Issue date
Feb 20, 2024
Infineon Technologies AG
Moriz Jelinek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Massive overlay metrology sampling with multiple measurement columns
Patent number
11,899,375
Issue date
Feb 13, 2024
KLA Corporation
Jonathan Madsen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Proximity effect correction in electron beam lithography
Patent number
11,899,373
Issue date
Feb 13, 2024
Taiwan Semiconductor Manufacturing Company, Ltd
Wen Lo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of preparing and analyzing thin films
Patent number
11,894,216
Issue date
Feb 6, 2024
Yangtze Memory Technologies Co., Ltd.
Jing Liu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Textured surfaces for breast implants
Patent number
11,890,179
Issue date
Feb 6, 2024
Establishment Labs S.A.
Ardeshir Bayat
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Reduced charging by low negative voltage in FIB systems
Patent number
11,887,810
Issue date
Jan 30, 2024
Applied Materials Israel Ltd.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and systems useful for producing aluminum ions
Patent number
11,881,376
Issue date
Jan 23, 2024
Entegris, Inc.
Ying Tang
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT
Publication number
20240310722
Publication date
Sep 19, 2024
Carl Zeiss SMT GMBH
Michael Budach
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Optimizing Image Distortion in a Multi Beam Charged Particle Proces...
Publication number
20240304413
Publication date
Sep 12, 2024
IMS Nanofabrication GmbH
Christoph Spengler
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERF...
Publication number
20240304414
Publication date
Sep 12, 2024
PDF Solutions, Inc.
Indranil DE
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON...
Publication number
20240282547
Publication date
Aug 22, 2024
NuFlare Technology, Inc.
Koichi ISHII
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...
Publication number
20240281952
Publication date
Aug 22, 2024
Carl Zeiss SMT GMBH
Thomas Korb
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE
Publication number
20240282543
Publication date
Aug 22, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Po-Tang Tseng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Device For Interfacing A Sample Transfer Device To An Analytic Or S...
Publication number
20240274399
Publication date
Aug 15, 2024
Ferrovac AG
Urs MAIER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...
Publication number
20240266142
Publication date
Aug 8, 2024
FEI Company
Christopher THOMPSON
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...
Publication number
20240258067
Publication date
Aug 1, 2024
FEI Company
Peter Christiaan TIEMEIJER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUPPORT STRUCTURE OF INVERTED LAMELLA FOR TALL ROI
Publication number
20240249910
Publication date
Jul 25, 2024
FEI Company
Jaroslav Stárek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
FILLING EMPTY STRUCTURES BY DEPOSITION UNDER SEM - BALANCING PARAME...
Publication number
20240249909
Publication date
Jul 25, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
Publication number
20240242922
Publication date
Jul 18, 2024
NuFlare Technology, Inc.
Hirofumi MORITA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A Method for the Simulation of an Energy-Filtered Ion Implantation...
Publication number
20240232470
Publication date
Jul 11, 2024
mi2-factory GmbH
Florian KRIPPENDORF
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND DEVICE FOR PREPARING A MICROSCOPIC SAMPLE FROM A VOLUME...
Publication number
20240234086
Publication date
Jul 11, 2024
CARL ZEISS MICROSCOPY GMBH
Fabian Perez Willard
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
Publication number
20240234085
Publication date
Jul 11, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM LITHOGRAPHY AND NANOENGINEERING
Publication number
20240222073
Publication date
Jul 4, 2024
Intel Corporation
Shida Tan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
IN-LINE DEPTH MEASUREMENTS BY AFM
Publication number
20240212976
Publication date
Jun 27, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM CURRENT MEASUREMENT DEVICE AND ION BEAM IMPLANTATION SYSTEM
Publication number
20240194444
Publication date
Jun 13, 2024
INFINEON TECHNOLOGIES AG
Moriz Jelinek
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRIT...
Publication number
20240186100
Publication date
Jun 6, 2024
NuFlare Technology, Inc.
Shuji YOSHINO
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MICROSCOPY IMAGING METHOD AND SYSTEM
Publication number
20240177966
Publication date
May 30, 2024
Fibics Incorporated
Michael William Phaneuf
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR MICROMACHINING A BIOLOGICAL SAMPLE FOR CREATING A LAMELL...
Publication number
20240177967
Publication date
May 30, 2024
FEI Company
Matej Dolník
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CALCULATE WAFERS THICKNESS OUT OF WAFER MAPPING PROCESS
Publication number
20240178022
Publication date
May 30, 2024
APPLIED MATERIALS ISRAEL LTD.
Ofer Dudovitch
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device and Sample Analysis Method
Publication number
20240170250
Publication date
May 23, 2024
Hitachi High-Tech Corporation
Masayoshi YOSHIOKA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF SAMPLE PREPARATON AND ANALYSIS
Publication number
20240162001
Publication date
May 16, 2024
FEI Company
Michal Valík
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM IMPLANTATION METHOD AND SEMICONDUCTOR DEVICE
Publication number
20240145247
Publication date
May 2, 2024
INFINEON TECHNOLOGIES AG
Moriz JELINEK
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND SYSTEMS USEFUL FOR PRODUCING ALUMINUM IONS
Publication number
20240136145
Publication date
Apr 25, 2024
Entegris, Inc.
Ying TANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
Publication number
20240136150
Publication date
Apr 25, 2024
APPLIED MATERIALS ISRAEL LTD.
Yehuda Zur
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A Method for the Simulation of an Energy-Filtered Ion Implantation...
Publication number
20240135066
Publication date
Apr 25, 2024
mi2-factory GmbH
Florian KRIPPENDORF
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD FOR PREPARING A MICROSCOPIC SAMPLE FOR FIB/SEM TOMOGRAPHY
Publication number
20240120175
Publication date
Apr 11, 2024
CARL ZEISS MICROSCOPY GMBH
Lorenz Lechner
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HELICAL VOLTAGE STANDOFF
Publication number
20240112883
Publication date
Apr 4, 2024
Applied Materials, Inc.
Diana C. Gronski
H01 - BASIC ELECTRIC ELEMENTS