Processing objects on a micro-scale

Industry

CPC
H01J2237/317

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/317Processing objects on a micro-scale

Industries

Patents Grantslast 30 patents

Information Patent Grant
Ion beam device
- Patent number 12,148,593
- Issue date Nov 19, 2024
- HITACHI HIGH-TECH CORPORATION
- Shinichi Matsubara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas phase sample preparation for cryo-electron microscopy
- Patent number 12,130,217
- Issue date Oct 29, 2024
- Wisconsin Alumni Research Foundation
- Joshua Coon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for pre-aligning samples for more efficient pro...
- Patent number 12,106,931
- Issue date Oct 1, 2024
- FEI Company
- Michal Hrouzek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modulation of rolling k vectors of angled gratings
- Patent number 12,106,935
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Joseph C. Olson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanned angled etching apparatus and techniques providing separate...
- Patent number 12,106,936
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Peter F. Kurunczi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and methods for beam processing of substrates
- Patent number 12,105,423
- Issue date Oct 1, 2024
- Tokyo Electron Limited
- Mirko Vukovic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method, apparatus and computer program for analyzing and/or process...
- Patent number 12,105,415
- Issue date Oct 1, 2024
- Carl Zeiss SMT GmbH
- Oliver Jäckel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam lithography with dynamic fin overlay correction
- Patent number 12,099,304
- Issue date Sep 24, 2024
- International Business Machines Corporation
- Simon Dawes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-charged particle beam writing apparatus, and multi-charged pa...
- Patent number 12,087,543
- Issue date Sep 10, 2024
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Energy filter element for ion implantation systems for the use in t...
- Patent number 12,080,510
- Issue date Sep 3, 2024
- MI2-FACTORY GMBH
- Florian Krippendorf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing photo masks
- Patent number 12,038,693
- Issue date Jul 16, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Chien-Cheng Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Analyzing a sidewall of hole milled in a sample to determine thickn...
- Patent number 12,033,831
- Issue date Jul 9, 2024
- Applied Materials Israel Ltd.
- Ilya Blayvas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, devices, and methods for aligning a particle beam and perf...
- Patent number 12,020,897
- Issue date Jun 25, 2024
- PDF Solutions, Inc.
- Indranil De
- G01 - MEASURING TESTING
Information Patent Grant
Method for cross-section sample preparation
- Patent number 12,007,344
- Issue date Jun 11, 2024
- Fibics Incorporated
- Michael William Phaneuf
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for cross-sectioning a sample with a preset thick...
- Patent number RE50001
- Issue date Jun 4, 2024
- FIBICS INCORPORATED
- Michael William Phaneuf
Information Patent Grant
Adjustable support for arc chamber of ion source
- Patent number 12,002,647
- Issue date Jun 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Po-Tang Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip
- Patent number 11,996,210
- Issue date May 28, 2024
- UChicago Argonne, LLC
- Jin Wang
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Ion propulsion device
- Patent number 11,993,402
- Issue date May 28, 2024
- Centre National de la Recherche Scientifique
- Jacques Gierak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam apparatus, defect repair method, lithographic exposur...
- Patent number 11,996,267
- Issue date May 28, 2024
- ASML Netherlands B.V.
- Ruben Cornelis Maas
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma micronozzle adapter
- Patent number 11,993,011
- Issue date May 28, 2024
- National Technology & Engineering Solutions of Sandia, LLC
- Eric Langlois
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Linear accelerator coil including multiple fluid channels
- Patent number 11,985,756
- Issue date May 14, 2024
- Applied Materials, Inc.
- Robert B. Vopat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and structures for semiconductor device testing
- Patent number 11,982,709
- Issue date May 14, 2024
- Yangtze Memory Technologies Co., Ltd.
- Lin Qi
- G01 - MEASURING TESTING
Information Patent Grant
Analysis device, analysis method, and storage medium
- Patent number 11,977,009
- Issue date May 7, 2024
- Honda Motor Co., Ltd.
- Atsushi Sakurai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for performing sample lift-out for highly react...
- Patent number 11,972,923
- Issue date Apr 30, 2024
- FEI Company
- Christopher Thompson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam grid layout
- Patent number RE49952
- Issue date Apr 30, 2024
- ASML Netherlands B.V.
- Vincent Sylvester Kuiper
Information Patent Grant
Multiple electron-beam image acquisition apparatus and multiple ele...
- Patent number 11,961,703
- Issue date Apr 16, 2024
- NuFlare Technology, Inc.
- Chosaku Noda
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam writing apparatus, charged particle beam writ...
- Patent number 11,961,708
- Issue date Apr 16, 2024
- NuFlare Technology, Inc.
- Haruyuki Nomura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission charged particle microscope with an electron energy lo...
- Patent number 11,955,310
- Issue date Apr 9, 2024
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for preparing a microscopic sample from a volume...
- Patent number 11,935,723
- Issue date Mar 19, 2024
- Carl Zeiss Microscopy GmbH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for metal contamination control in an ion impl...
- Patent number 11,923,169
- Issue date Mar 5, 2024
- Axcelis Technologies, Inc.
- Causon Ko-Chuan Jen
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ENTROPY BASED IMAGE PROCESSING FOR FOCUSED ION BEAM DELAYER – EDGE...
- Publication number 20240379327
- Publication date Nov 14, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yuval Tsedek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM SYSTEM
- Publication number 20240371598
- Publication date Nov 7, 2024
- V TECHNOLOGY CO., LTD.
- Michinobu MIZUMURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MARK POSITION MEASUREMENT APPARATUS, CHARGED PARTICLE BEAM WRITING...
- Publication number 20240363307
- Publication date Oct 31, 2024
- NuFlare Technology, Inc.
- Hiroshi SATO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUSED ION BEAM DEVICE
- Publication number 20240355574
- Publication date Oct 24, 2024
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Koji NAGAHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES VIA BACKSIDE TH...
- Publication number 20240347312
- Publication date Oct 17, 2024
- CARL ZEISS MICROSCOPY GMBH
- Heiko Stegmann
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
METHOD OF MANUFACTURING PHOTO MASKS
- Publication number 20240337951
- Publication date Oct 10, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chien-Cheng CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS
- Publication number 20240339289
- Publication date Oct 10, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Adar Sonn-Segev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ION BEAM IRRADIATION METHOD AND ION BEAM IRRADIATION APPARATUS
- Publication number 20240331973
- Publication date Oct 3, 2024
- NISSIN ION EQUIPMENT CO., LTD.
- Yuya UCHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION...
- Publication number 20240331969
- Publication date Oct 3, 2024
- FEI Company
- Chad Rue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Actively Cooled Gas Line For Ion Source
- Publication number 20240331972
- Publication date Oct 3, 2024
- Applied Materials, Inc.
- Adam M. McLaughlin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated Circuit with FIB-Ready Structures
- Publication number 20240321548
- Publication date Sep 26, 2024
- Nuvoton Technology Corporation
- Yuval Kirschner
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT
- Publication number 20240310722
- Publication date Sep 19, 2024
- Carl Zeiss SMT GMBH
- Michael Budach
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optimizing Image Distortion in a Multi Beam Charged Particle Proces...
- Publication number 20240304413
- Publication date Sep 12, 2024
- IMS Nanofabrication GmbH
- Christoph Spengler
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERF...
- Publication number 20240304414
- Publication date Sep 12, 2024
- PDF Solutions, Inc.
- Indranil DE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON...
- Publication number 20240282547
- Publication date Aug 22, 2024
- NuFlare Technology, Inc.
- Koichi ISHII
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...
- Publication number 20240281952
- Publication date Aug 22, 2024
- Carl Zeiss SMT GMBH
- Thomas Korb
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE
- Publication number 20240282543
- Publication date Aug 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Tang Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Device For Interfacing A Sample Transfer Device To An Analytic Or S...
- Publication number 20240274399
- Publication date Aug 15, 2024
- Ferrovac AG
- Urs MAIER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...
- Publication number 20240266142
- Publication date Aug 8, 2024
- FEI Company
- Christopher THOMPSON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...
- Publication number 20240258067
- Publication date Aug 1, 2024
- FEI Company
- Peter Christiaan TIEMEIJER
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT STRUCTURE OF INVERTED LAMELLA FOR TALL ROI
- Publication number 20240249910
- Publication date Jul 25, 2024
- FEI Company
- Jaroslav Stárek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILLING EMPTY STRUCTURES BY DEPOSITION UNDER SEM - BALANCING PARAME...
- Publication number 20240249909
- Publication date Jul 25, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS
- Publication number 20240242922
- Publication date Jul 18, 2024
- NuFlare Technology, Inc.
- Hirofumi MORITA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
A Method for the Simulation of an Energy-Filtered Ion Implantation...
- Publication number 20240232470
- Publication date Jul 11, 2024
- mi2-factory GmbH
- Florian KRIPPENDORF
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICE FOR PREPARING A MICROSCOPIC SAMPLE FROM A VOLUME...
- Publication number 20240234086
- Publication date Jul 11, 2024
- CARL ZEISS MICROSCOPY GMBH
- Fabian Perez Willard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...
- Publication number 20240234085
- Publication date Jul 11, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM LITHOGRAPHY AND NANOENGINEERING
- Publication number 20240222073
- Publication date Jul 4, 2024
- Intel Corporation
- Shida Tan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-LINE DEPTH MEASUREMENTS BY AFM
- Publication number 20240212976
- Publication date Jun 27, 2024
- APPLIED MATERIALS ISRAEL LTD.
- Yehuda Zur
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM CURRENT MEASUREMENT DEVICE AND ION BEAM IMPLANTATION SYSTEM
- Publication number 20240194444
- Publication date Jun 13, 2024
- INFINEON TECHNOLOGIES AG
- Moriz Jelinek
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRIT...
- Publication number 20240186100
- Publication date Jun 6, 2024
- NuFlare Technology, Inc.
- Shuji YOSHINO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Processing objects on a micro-scale

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Ion beam device

Gas phase sample preparation for cryo-electron microscopy

Systems and methods for pre-aligning samples for more efficient pro...

Modulation of rolling k vectors of angled gratings

Scanned angled etching apparatus and techniques providing separate...

Apparatus and methods for beam processing of substrates

Method, apparatus and computer program for analyzing and/or process...

Electron beam lithography with dynamic fin overlay correction

Multi-charged particle beam writing apparatus, and multi-charged pa...

Energy filter element for ion implantation systems for the use in t...

Method of manufacturing photo masks

Analyzing a sidewall of hole milled in a sample to determine thickn...

Systems, devices, and methods for aligning a particle beam and perf...

Method for cross-section sample preparation

Method and system for cross-sectioning a sample with a preset thick...

Adjustable support for arc chamber of ion source

Temperature-tuned ultrafast X-ray shutter using optics-on-a-chip

Ion propulsion device

Particle beam apparatus, defect repair method, lithographic exposur...

Plasma micronozzle adapter

Linear accelerator coil including multiple fluid channels

Methods and structures for semiconductor device testing

Analysis device, analysis method, and storage medium

Systems and methods for performing sample lift-out for highly react...

Beam grid layout

Multiple electron-beam image acquisition apparatus and multiple ele...

Charged particle beam writing apparatus, charged particle beam writ...

Transmission charged particle microscope with an electron energy lo...

Method and device for preparing a microscopic sample from a volume...

Apparatus and method for metal contamination control in an ion impl...

Patents Applicationslast 30 patents

ENTROPY BASED IMAGE PROCESSING FOR FOCUSED ION BEAM DELAYER – EDGE...

FOCUSED ION BEAM SYSTEM

MARK POSITION MEASUREMENT APPARATUS, CHARGED PARTICLE BEAM WRITING...

FOCUSED ION BEAM DEVICE

DEVICE AND METHOD FOR PREPARING MICROSCOPIC SAMPLES VIA BACKSIDE TH...

METHOD OF MANUFACTURING PHOTO MASKS

FLOW FOR HIGH RESOLUTION STEREOSCOPIC MEASUREMENTS

ION BEAM IRRADIATION METHOD AND ION BEAM IRRADIATION APPARATUS

CRENELLATED SAMPLE HOLDER AND SPUTTER TARGET FOR SAMPLE PREPARATION...

Actively Cooled Gas Line For Ion Source

Integrated Circuit with FIB-Ready Structures

METHODS AND APPARATUSES FOR PROCESSING A LITHOGRAPHIC OBJECT

Optimizing Image Distortion in a Multi Beam Charged Particle Proces...

SYSTEMS, DEVICES, AND METHODS FOR ALIGNING A PARTICLE BEAM AND PERF...

MULTI-ELECTRON BEAM IMAGE ACQUISITION APPARATUS AND MULTI-ELECTRON...

3D VOLUME INSPECTION METHOD AND METHOD OF CONFIGURING OF A 3D VOLUM...

ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE

Device For Interfacing A Sample Transfer Device To An Analytic Or S...

SYSTEMS AND METHODS FOR PERFORMING SAMPLE LIFT-OUT FOR HIGHLY REACT...

TRANSMISSION CHARGED PARTICLE MICROSCOPE WITH AN ELECTRON ENERGY LO...

SUPPORT STRUCTURE OF INVERTED LAMELLA FOR TALL ROI

FILLING EMPTY STRUCTURES BY DEPOSITION UNDER SEM - BALANCING PARAME...

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS

A Method for the Simulation of an Energy-Filtered Ion Implantation...

METHOD AND DEVICE FOR PREPARING A MICROSCOPIC SAMPLE FROM A VOLUME...

METHOD FOR CREATING A SMOOTH DIAGONAL SURFACE USING A FOCUSED ION B...

ION BEAM LITHOGRAPHY AND NANOENGINEERING

IN-LINE DEPTH MEASUREMENTS BY AFM

ION BEAM CURRENT MEASUREMENT DEVICE AND ION BEAM IMPLANTATION SYSTEM

BLANKING APERTURE ARRAY SYSTEM AND MULTI CHARGED PARTICLE BEAM WRIT...