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H01L21/02082

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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/02082product to be cleaned

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Methods for stripping and cleaning semiconductor structures
- Patent number 11,798,802
- Issue date Oct 24, 2023
- GlobalWafers Co., Ltd.
- Qingmin Liu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Multi-wafer deposition tool for reducing residual deposition on tra...
- Patent number 11,749,554
- Issue date Sep 5, 2023
- SanDisk Technologies LLC
- Makoto Tsutsue
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Composition for removing polymer
- Patent number 11,739,048
- Issue date Aug 29, 2023
- Dongwoo Fine-Chem Co., Ltd.
- Soon-Hong Pang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for cleaning substrate and cleaning device
- Patent number 11,651,953
- Issue date May 16, 2023
- Kioxia Corporation
- Minako Inukai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and substrate processing method
- Patent number 11,569,086
- Issue date Jan 31, 2023
- Tokyo Electron Limited
- Kazuki Kosai
- B08 - CLEANING
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,511,321
- Issue date Nov 29, 2022
- Semes Co., Ltd.
- Young Jin Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pellicle adhesive residue removal system and methods
- Patent number 11,467,508
- Issue date Oct 11, 2022
- Applied Materials, Inc.
- Banqiu Wu
- B08 - CLEANING
Information Patent Grant
System and method of cleaning mesa sidewalls of a template
- Patent number 11,373,861
- Issue date Jun 28, 2022
- Canon Kabushiki Kaisha
- Edward Brian Fletcher
- B08 - CLEANING
Information Patent Grant
Cleaning apparatus and cleaning method of substrate processing appa...
- Patent number 11,295,965
- Issue date Apr 5, 2022
- Tokyo Electron Limited
- Kohei Yamada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for removing organic cured film on substrate, and acidic cle...
- Patent number 11,222,781
- Issue date Jan 11, 2022
- Tokyo Ohka Kogyo Co., Ltd.
- Isao Hirano
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
PERC solar cell capable of improving photoelectric conversion effic...
- Patent number 11,024,753
- Issue date Jun 1, 2021
- Guangdong Aiko Solar Energy Technology Co., Ltd.
- Chun-Wen Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Determination method and substrate processing equipment
- Patent number 10,985,038
- Issue date Apr 20, 2021
- SCREEN Holdings Co., Ltd.
- Hideji Naohara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drying high aspect ratio features
- Patent number 10,971,354
- Issue date Apr 6, 2021
- Applied Materials, Inc.
- Eric J. Bergman
- B08 - CLEANING
Information Patent Grant
Method for cleaning lanthanum gallium silicate wafer
- Patent number 10,964,529
- Issue date Mar 30, 2021
- Institute of Microelectronics, Chinese Academy of Sciences
- Dongmei Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing semiconductor device by etching and washing
- Patent number 10,607,834
- Issue date Mar 31, 2020
- Joled Inc
- Motohiro Toyota
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sealing composition and method of manufacturing semiconductor device
- Patent number 10,580,639
- Issue date Mar 3, 2020
- Mitsui Chemicals, Inc.
- Yasuhisa Kayaba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing device which performs processing on substrate
- Patent number 10,573,523
- Issue date Feb 25, 2020
- SCREEN Holdings Co., Ltd.
- Noriyuki Kikumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for processing a semiconductor region and an electronic device
- Patent number 10,276,362
- Issue date Apr 30, 2019
- Infineon Technologies AG
- Evelyn Napetschnig
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of growing high quality, thick SiC epitaxial films by elimin...
- Patent number 10,260,166
- Issue date Apr 16, 2019
- University of South Carolina
- Tangali S. Sudarshan
- C30 - CRYSTAL GROWTH
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 10,121,648
- Issue date Nov 6, 2018
- SCREEN Holdings Co., Ltd.
- Masahiro Kimura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of growing high quality, thick SiC epitaxial films by elimin...
- Patent number 9,885,124
- Issue date Feb 6, 2018
- University of South Carolina
- Tangali S. Sudarshan
- C30 - CRYSTAL GROWTH
Information Patent Grant
Method of cleaning substrate processing apparatus
- Patent number 9,802,227
- Issue date Oct 31, 2017
- SCREEN Holdings Co., Ltd.
- Naoyuki Osada
- B08 - CLEANING
Information Patent Grant
UV cleaning device of glass substrate
- Patent number 9,786,699
- Issue date Oct 10, 2017
- Shenzhen China Star Optoelectronics Technology Co., Ltd.
- Jiangbo Yao
- B08 - CLEANING
Information Patent Grant
Liquid chemical for forming protecting film
- Patent number 9,748,092
- Issue date Aug 29, 2017
- Central Glass Company, Limited
- Soichi Kumon
- B08 - CLEANING
Information Patent Grant
Method of collapse-free drying of high aspect ratio structures
- Patent number 9,666,427
- Issue date May 30, 2017
- Lam Research Corporation
- Stephen M. Sirard
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pretreatment method for reduction and/or elimination of basal plane...
- Patent number 9,644,288
- Issue date May 9, 2017
- University of South Carolina
- Tangali S. Sudarshan
- C30 - CRYSTAL GROWTH
Information Patent Grant
Pretreatment method for reduction and/or elimination of basal plane...
- Patent number 9,644,287
- Issue date May 9, 2017
- University of South Carolina
- Tangali S. Sudarshan
- C30 - CRYSTAL GROWTH
Information Patent Grant
Systems and methods for drying high aspect ratio structures without...
- Patent number 9,466,511
- Issue date Oct 11, 2016
- Lam Research Corporation
- Ratchana Limary
- F26 - DRYING
Information Patent Grant
Cleaning composition and cleaning method using the same
- Patent number 9,165,760
- Issue date Oct 20, 2015
- UWIZ Technology Co., Ltd.
- Yu-Chi Fu
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Pretreatment method for reduction and/or elimination of basal plane...
- Patent number 8,900,979
- Issue date Dec 2, 2014
- University of South Carolina
- Tangali S. Sudarshan
- C30 - CRYSTAL GROWTH

Patents Applicationslast 30 patents

Information Patent Application
Ramped Spin-Dry on Semiconductor Wafer
- Publication number 20240404843
- Publication date Dec 5, 2024
- TEXAS INSTRUMENTS INCORPORATED
- Christopher Volk
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Composition for Removing Polymer
- Publication number 20230339843
- Publication date Oct 26, 2023
- DONGWOO FINE-CHEM CO., LTD.
- Soon-Hong Pang
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE
- Publication number 20230260780
- Publication date Aug 17, 2023
- KIOXIA Corporation
- Minako INUKAI
- B08 - CLEANING
Information Patent Application
METHODS FOR STRIPPING AND CLEANING SEMICONDUCTOR STRUCTURES
- Publication number 20230260779
- Publication date Aug 17, 2023
- GLOBALWAFERS CO., LTD.
- Qingmin Liu
- B08 - CLEANING
Information Patent Application
CARRIER BOAT FOR DIE PACKAGE FLUX CLEANING
- Publication number 20230101770
- Publication date Mar 30, 2023
- ADVANCED MICRO DEVICES, INC.
- SUMING HU
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Cleaning sheet, manufacturing method of semiconductor device and ma...
- Publication number 20220250285
- Publication date Aug 11, 2022
- TOHOKU BUTSURYU Co., Ltd.
- Kenji MAEYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-WAFER DEPOSITION TOOL FOR REDUCING RESIDUAL DEPOSITION ON TRA...
- Publication number 20220139758
- Publication date May 5, 2022
- SANDISK TECHNOLOGIES LLC
- Makoto TSUTSUE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Composition for Removing Polymer
- Publication number 20210300860
- Publication date Sep 30, 2021
- DONGWOO FINE-CHEM CO., LTD.
- Soon-Hong Pang
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
CLEANING DEVICE
- Publication number 20210166956
- Publication date Jun 3, 2021
- CREATIVE TECHNOLOGY CORPORATION
- Yoshiaki TATSUMI
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD
- Publication number 20210134590
- Publication date May 6, 2021
- TOKYO ELECTRON LIMITED
- Kazuki KOSAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CLEANING METAL CONTACTS
- Publication number 20210066064
- Publication date Mar 4, 2021
- Applied Materials, Inc.
- He REN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and Method of Cleaning Mesa Sidewalls of a Template
- Publication number 20210005446
- Publication date Jan 7, 2021
- Canon Kabushiki Kaisha
- Edward Brian Fletcher
- B08 - CLEANING
Information Patent Application
METHOD FOR CLEANING QUARTZ EPITAXIAL CHAMBERS
- Publication number 20200385861
- Publication date Dec 10, 2020
- ASM IP HOLDING B.V.
- Gregory Deye
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE
- Publication number 20200321212
- Publication date Oct 8, 2020
- Toshiba Memory Corporation
- Minako INUKAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200130025
- Publication date Apr 30, 2020
- SEMES CO., LTD.
- Young Jin KIM
- B08 - CLEANING
Information Patent Application
LAMINAR FLOW DEVICE
- Publication number 20200118810
- Publication date Apr 16, 2020
- NATIONAL TAIPEI UNIVERSITY OF TECHNOLOGY
- SHIH-CHENG HU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PELLICLE ADHESIVE RESIDUE REMOVAL SYSTEM AND METHODS
- Publication number 20200033740
- Publication date Jan 30, 2020
- Applied Materials, Inc.
- Banqiu WU
- B08 - CLEANING
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20190333758
- Publication date Oct 31, 2019
- JOLED INC.
- Motohiro TOYOTA
- B08 - CLEANING
Information Patent Application
METHOD FOR REMOVING ORGANIC CURED FILM ON SUBSTRATE, AND ACIDIC CLE...
- Publication number 20190198314
- Publication date Jun 27, 2019
- Tokyo Ohka Kogyo Co., Ltd.
- Isao HIRANO
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
DETERMINATION METHOD AND SUBSTRATE PROCESSING EQUIPMENT
- Publication number 20190172732
- Publication date Jun 6, 2019
- SCREEN Holdings Co., Ltd.
- Hideji NAOHARA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING APPARATUS AND CLEANING METHOD OF SUBSTRATE PROCESSING APPA...
- Publication number 20190148182
- Publication date May 16, 2019
- TOKYO ELECTRON LIMITED
- Kohei YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR PLASMA-LESS DE-HALOGENATION
- Publication number 20190051540
- Publication date Feb 14, 2019
- LAM RESEARCH CORPORATION
- Ji Zhu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE WHICH PERFORMS PROCESSING ON SUBSTRATE
- Publication number 20180090332
- Publication date Mar 29, 2018
- SCREEN Holdings Co., Ltd.
- Noriyuki KIKUMOTO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Growing High Quality, Thick SiC Epitaxial Films by Elimin...
- Publication number 20180044816
- Publication date Feb 15, 2018
- University of South Carolina
- Tangali S. Sudarshan
- C30 - CRYSTAL GROWTH
Information Patent Application
DRYING HIGH ASPECT RATIO FEATURES
- Publication number 20180019119
- Publication date Jan 18, 2018
- Applied Materials Inc,
- Eric J. Bergman
- B08 - CLEANING
Information Patent Application
METHOD FOR PROCESSING A SEMICONDUCTOR REGION AND AN ELECTRONIC DEVICE
- Publication number 20170316934
- Publication date Nov 2, 2017
- INFINEON TECHNOLOGIES AG
- Evelyn NAPETSCHNIG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEALING COMPOSITION AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20170162382
- Publication date Jun 8, 2017
- Mitsui Chemicals, Inc.
- Yasuhisa KAYABA
- C09 - DYES PAINTS POLISHES NATURAL RESINS ADHESIVES MISCELLANEOUS COMPOSITION...
Information Patent Application
Method for Cleaning Hermetic Semiconductor Packages
- Publication number 20170032958
- Publication date Feb 2, 2017
- Infineon Technologies Americas Corp.
- Derek Richardson
- B08 - CLEANING
Information Patent Application
METHOD FOR CLEANING LANTHANUM GALLIUM SILICATE WAFER
- Publication number 20170018424
- Publication date Jan 19, 2017
- Institute of Microelectronics, Chinese Academy of
- Dongmei Li
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
UV CLEANING DEVICE OF GLASS SUBSTRATE
- Publication number 20160365371
- Publication date Dec 15, 2016
- Shenzhen China Star Optoelectronics Technology Co. LTD.
- Jiangbo Yao
- B08 - CLEANING

product to be cleaned

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Methods for stripping and cleaning semiconductor structures

Multi-wafer deposition tool for reducing residual deposition on tra...

Composition for removing polymer

Method for cleaning substrate and cleaning device

Substrate processing apparatus and substrate processing method

Substrate processing method and substrate processing apparatus

Pellicle adhesive residue removal system and methods

System and method of cleaning mesa sidewalls of a template

Cleaning apparatus and cleaning method of substrate processing appa...

Method for removing organic cured film on substrate, and acidic cle...

PERC solar cell capable of improving photoelectric conversion effic...

Determination method and substrate processing equipment

Drying high aspect ratio features

Method for cleaning lanthanum gallium silicate wafer

Method of manufacturing semiconductor device by etching and washing

Sealing composition and method of manufacturing semiconductor device

Substrate processing device which performs processing on substrate

Method for processing a semiconductor region and an electronic device

Method of growing high quality, thick SiC epitaxial films by elimin...

Substrate processing method and substrate processing apparatus

Method of growing high quality, thick SiC epitaxial films by elimin...

Method of cleaning substrate processing apparatus

UV cleaning device of glass substrate

Liquid chemical for forming protecting film

Method of collapse-free drying of high aspect ratio structures

Pretreatment method for reduction and/or elimination of basal plane...

Pretreatment method for reduction and/or elimination of basal plane...

Systems and methods for drying high aspect ratio structures without...

Cleaning composition and cleaning method using the same

Pretreatment method for reduction and/or elimination of basal plane...

Patents Applicationslast 30 patents

Ramped Spin-Dry on Semiconductor Wafer

Composition for Removing Polymer

METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE

METHODS FOR STRIPPING AND CLEANING SEMICONDUCTOR STRUCTURES

CARRIER BOAT FOR DIE PACKAGE FLUX CLEANING

Cleaning sheet, manufacturing method of semiconductor device and ma...

MULTI-WAFER DEPOSITION TOOL FOR REDUCING RESIDUAL DEPOSITION ON TRA...

Composition for Removing Polymer

CLEANING DEVICE

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD

METHODS AND APPARATUS FOR CLEANING METAL CONTACTS

System and Method of Cleaning Mesa Sidewalls of a Template

METHOD FOR CLEANING QUARTZ EPITAXIAL CHAMBERS

METHOD FOR CLEANING SUBSTRATE AND CLEANING DEVICE

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

LAMINAR FLOW DEVICE

PELLICLE ADHESIVE RESIDUE REMOVAL SYSTEM AND METHODS

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

METHOD FOR REMOVING ORGANIC CURED FILM ON SUBSTRATE, AND ACIDIC CLE...

DETERMINATION METHOD AND SUBSTRATE PROCESSING EQUIPMENT

CLEANING APPARATUS AND CLEANING METHOD OF SUBSTRATE PROCESSING APPA...

SYSTEMS AND METHODS FOR PLASMA-LESS DE-HALOGENATION

SUBSTRATE PROCESSING DEVICE WHICH PERFORMS PROCESSING ON SUBSTRATE

Method of Growing High Quality, Thick SiC Epitaxial Films by Elimin...

DRYING HIGH ASPECT RATIO FEATURES

METHOD FOR PROCESSING A SEMICONDUCTOR REGION AND AN ELECTRONIC DEVICE

SEALING COMPOSITION AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

Method for Cleaning Hermetic Semiconductor Packages

METHOD FOR CLEANING LANTHANUM GALLIUM SILICATE WAFER

UV CLEANING DEVICE OF GLASS SUBSTRATE