Production of exposure radiation

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Industry

CPC
H01J2237/31716

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/31716Production of exposure radiation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Continuous writing of pattern
- Patent number 9,960,013
- Issue date May 1, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Ming Chang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithography apparatus and method of manufacturing article
- Patent number 9,257,921
- Issue date Feb 9, 2016
- Canon Kabushiki Kaisha
- Yoshinori Makita
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER

Patents Applicationslast 30 patents

Information Patent Application
Continuous Writing of Pattern
- Publication number 20170200584
- Publication date Jul 13, 2017
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Shih-Ming Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTIPLE CHARGED PARTICLE BEAM LITHOGRAPHY APPARATUS AND MULTIPLE C...
- Publication number 20160155610
- Publication date Jun 2, 2016
- NuFlare Technology, Inc.
- Ryoh KAWANA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHY APPARATUS AND METHOD OF MANUFACTURING ARTICLE
- Publication number 20150357944
- Publication date Dec 10, 2015
- Canon Kabushiki Kaisha
- Yoshinori Makita
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER