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H01J2237/0203

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/0203Protection arrangements

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method for producing lamella, analysis system and method for analyz...
- Patent number 12,176,180
- Issue date Dec 24, 2024
- HITACHI HIGH-TECH CORPORATION
- Atsushi Sawada
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photoplasma etching apparatus having improved plasma-resistant and...
- Patent number 11,827,975
- Issue date Nov 28, 2023
- KOMICO LTD.
- Hyunchul Ko
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Collision avoidance for particle beam instruments
- Patent number 11,798,774
- Issue date Oct 24, 2023
- Oxford Instruments Nanotechnology Tools Limited
- Stuart Andrew Swan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for treating substrate
- Patent number 11,676,804
- Issue date Jun 13, 2023
- Semes Co., Ltd.
- Daehyun Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled/electrically biased wafer surround
- Patent number 11,664,193
- Issue date May 30, 2023
- Applied Materials, Inc.
- Kevin R. Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Drawing apparatus and drawing method
- Patent number 11,556,114
- Issue date Jan 17, 2023
- NuFlare Technology, Inc.
- Hikaru Yamamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin pellicle material for protection of solid-state electron detec...
- Patent number 11,443,916
- Issue date Sep 13, 2022
- KLA Corporation
- William G. Schultz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microscopy
- Patent number 11,404,243
- Issue date Aug 2, 2022
- Mochii, Inc.
- Christopher Su-Yan Own
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electron microscopic specimen, and methods for preparing and perfor...
- Patent number 11,227,742
- Issue date Jan 18, 2022
- National Tsing Hua University
- Chien-Chun Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment apparatus and driving method thereof
- Patent number 11,164,728
- Issue date Nov 2, 2021
- Plasma Ion Assist Co., Ltd.
- Yasuo Suzuki
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Collision avoidance for particle beam instruments
- Patent number 11,139,137
- Issue date Oct 5, 2021
- Oxford Instruments Nanotechnology Tools Limited
- Stuart Andrew Swan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microscopy
- Patent number 10,847,343
- Issue date Nov 24, 2020
- Mochii, Inc.
- Christopher Su-Yan Own
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multi-layer plasma erosion protection for chamber components
- Patent number 10,755,900
- Issue date Aug 25, 2020
- Applied Materials, Inc.
- Toan Tran
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Component of a plasma processing apparatus having a protective in s...
- Patent number 10,497,544
- Issue date Dec 3, 2019
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for plasma ignition
- Patent number 10,475,622
- Issue date Nov 12, 2019
- Advanced Energy Industries, Inc.
- Josh Pankratz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Probe landing detection
- Patent number 10,373,799
- Issue date Aug 6, 2019
- FEI Company
- Yoav Neuman
- G01 - MEASURING TESTING
Information Patent Grant
Charged-particle beam microscope with an evaporator
- Patent number 9,899,186
- Issue date Feb 20, 2018
- Mochii, Inc.
- Christopher Su-Yan Own
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Projection exposure apparatus for microlithography comprising an op...
- Patent number 9,759,550
- Issue date Sep 12, 2017
- Carl Zeiss SMT GmbH
- Alexander Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for microlithography comprising an op...
- Patent number 9,714,822
- Issue date Jul 25, 2017
- Carl Zeiss SMT GmbH
- Alexander Wolf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Electrostatic lens structure
- Patent number RE46452
- Issue date Jun 27, 2017
- Mapper Lithography IP B.V.
- Stijn Willem Herman Karel Steenbrink
Information Patent Grant
Arc chamber with multiple cathodes for an ion source
- Patent number 9,620,326
- Issue date Apr 11, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chin-Tsung Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Bipolar wafer charge monitor system and ion implantation system com...
- Patent number 9,558,914
- Issue date Jan 31, 2017
- Axcelis Technologies, Inc.
- Marvin Farley
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Component of a plasma processing apparatus having a protective in s...
- Patent number 9,449,797
- Issue date Sep 20, 2016
- Lam Research Corporation
- Harmeet Singh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impurity-doped layer formation apparatus and electrostatic chuck pr...
- Patent number 9,312,163
- Issue date Apr 12, 2016
- Sumitomo Heavy Industries, Ltd.
- Masaru Tanaka
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Apparatus with sidewall protection for features
- Patent number 9,171,703
- Issue date Oct 27, 2015
- Seagate Technology LLC
- Shuaigang Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Three-dimensional copper nanostructure and fabrication method thereof
- Patent number 9,139,914
- Issue date Sep 22, 2015
- Ajou University Industry-Academic Cooperation Foundation
- Chang-Koo Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for producing an RFID transponder by etching
- Patent number 9,135,476
- Issue date Sep 15, 2015
- Smartrac IP B.V.
- Juhani Virtanen
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Reducing particle implantation
- Patent number 8,907,277
- Issue date Dec 9, 2014
- Carl Zeiss Microscopy, LLC
- Rainer Knippelmeyer
- G01 - MEASURING TESTING
Information Patent Grant
Current limiter for high voltage power supply used with ion implant...
- Patent number 8,766,209
- Issue date Jul 1, 2014
- Varian Semiconductor Equipment Associates, Inc.
- Klaus Becker
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
RF-driven ion source with a back-streaming electron dump
- Patent number 8,729,806
- Issue date May 20, 2014
- The Regents of the University of California
- Joe Kwan
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
GAS DISTRIBUTION RING FOR PROCESS CHAMBER
- Publication number 20240379330
- Publication date Nov 14, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Hsiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ROBOT, APPARATUS INCLUDING ROBOT, AND METHOD FOR MANUFACTURING SEMI...
- Publication number 20240243001
- Publication date Jul 18, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chia-Yun CHENG
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
PLASMA SUBSTRATE TREATMENT APPARATUS
- Publication number 20240234101
- Publication date Jul 11, 2024
- INNOVATION FOR CREATIVE DEVICES CO., LTD.
- Buil JEON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Gun, Electron Beam Applying Device, and Irradiation Positi...
- Publication number 20240222062
- Publication date Jul 4, 2024
- Photo electron Soul, Inc.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SURFACE PREPARATION
- Publication number 20240021402
- Publication date Jan 18, 2024
- University College Dublin, National University of Ireland
- Denis Dowling
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS DISTRIBUTION RING FOR PROCESS CHAMBER
- Publication number 20230420222
- Publication date Dec 28, 2023
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Hsiang Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SINTERED BODY
- Publication number 20230391676
- Publication date Dec 7, 2023
- NIPPON YTTRIUM CO., LTD.
- Kento MATSUKURA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD
- Publication number 20230343551
- Publication date Oct 26, 2023
- ASM IP HOLDING B.V.
- Shinya Yamada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING GAS, PLASMA PROCESSING METHOD, AND PLASMA PROCESS...
- Publication number 20230230810
- Publication date Jul 20, 2023
- SPP TECHNOLOGIES CO., LTD.
- Kazuyuki SUEDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CORE INSERTION TYPE SPIRAL TUBE AND MAKING METHOD FOR THE SAME
- Publication number 20230073639
- Publication date Mar 9, 2023
- SMT CORPORATION
- Hyun Seok CHOI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FOCUS RING PLACEMENT TABLE
- Publication number 20220399190
- Publication date Dec 15, 2022
- NGK Insulators, Ltd.
- Seiya INOUE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for Producing Lamella, Analysis System and Method for Analyz...
- Publication number 20220367144
- Publication date Nov 17, 2022
- Hitachi High-Tech Corporation
- Atsushi SAWADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Temperature Controlled/Electrically Biased Wafer Surround
- Publication number 20220246397
- Publication date Aug 4, 2022
- Applied Materials, Inc.
- Kevin R. Anglin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLLISION AVOIDANCE FOR PARTICLE BEAM INSTRUMENTS
- Publication number 20210375577
- Publication date Dec 2, 2021
- OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
- Stuart Andrew Swan
- G01 - MEASURING TESTING
Information Patent Application
Thin Pellicle Material for Protection of Solid-State Electron Detec...
- Publication number 20210327676
- Publication date Oct 21, 2021
- KLA Corporation
- William G. Schultz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COLLISION AVOIDANCE FOR PARTICLE BEAM INSTRUMENTS
- Publication number 20200168429
- Publication date May 28, 2020
- OXFORD INSTRUMENTS NANOTECHNOLOGY TOOLS LIMITED
- Stuart Andrew Swan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA TREATMENT APPARATUS AND DRIVING METHOD THEREOF
- Publication number 20200098548
- Publication date Mar 26, 2020
- Plasma Ion Assist Co.,Ltd.
- Yasuo SUZUKI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR PLASMA IGNITION
- Publication number 20190096633
- Publication date Mar 28, 2019
- Advanced Energy Industries, Inc.
- Josh Pankratz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PVD TOOL TO DEPOSIT HIGHLY REACTIVE MATERIALS
- Publication number 20180269045
- Publication date Sep 20, 2018
- International Business Machines Corporation
- Stephen L. Brown
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PVD TOOL TO DEPOSIT HIGHLY REACTIVE MATERIALS
- Publication number 20180269044
- Publication date Sep 20, 2018
- International Business Machines Corporation
- Stephen L. Brown
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR VACUUM SPUTTER DEPOSITION AND METHOD THEREFOR
- Publication number 20180211823
- Publication date Jul 26, 2018
- Applied Materials, Inc.
- Daniel SEVERIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT UNIT, SUBSTRATE TREATING APPARATUS INCLUDING THE...
- Publication number 20180102238
- Publication date Apr 12, 2018
- SEMES CO., LTD.
- Jamyung GU
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
PROBE LANDING DETECTION
- Publication number 20180061612
- Publication date Mar 1, 2018
- FEI Company
- Yoav Neuman
- G01 - MEASURING TESTING
Information Patent Application
ELECTROSTATIC LENS STRUCTURE
- Publication number 20170309438
- Publication date Oct 26, 2017
- MAPPER LITHOGRAPHY IP BV
- Stijn Willem Herman Karel STEENBRINK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMPONENT OF A PLASMA PROCESSING APPARATUS HAVING A PROTECTIVE IN S...
- Publication number 20160365228
- Publication date Dec 15, 2016
- Lam Research Corporation
- Harmeet Singh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS RING FOR PLASMA SYSTEM AND METHOD OF MANUFACTURING THE SAME
- Publication number 20160148788
- Publication date May 26, 2016
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Wen-Pao TSAI
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
Plasma Processing Devices Having a Surface Protection Layer
- Publication number 20160079040
- Publication date Mar 17, 2016
- Samsung Electronics Co., Ltd.
- MyoungSoo Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER COMPONENT WITH FLUORINATED THIN FILM COATING
- Publication number 20150311043
- Publication date Oct 29, 2015
- Applied Materials, Inc.
- Jennifer Y. Sun
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY COMPRISING AN OP...
- Publication number 20150198437
- Publication date Jul 16, 2015
- Carl Zeiss SMT GMBH
- Alexander Wolf
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS WITH SIDEWALL PROTECTION FOR FEATURES
- Publication number 20150179414
- Publication date Jun 25, 2015
- SEAGATE TECHNOLOGY LLC
- Shuaigang Xiao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Protection arrangements

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method for producing lamella, analysis system and method for analyz...

Photoplasma etching apparatus having improved plasma-resistant and...

Collision avoidance for particle beam instruments

Apparatus and method for treating substrate

Temperature controlled/electrically biased wafer surround

Drawing apparatus and drawing method

Thin pellicle material for protection of solid-state electron detec...

Microscopy

Electron microscopic specimen, and methods for preparing and perfor...

Plasma treatment apparatus and driving method thereof

Collision avoidance for particle beam instruments

Microscopy

Multi-layer plasma erosion protection for chamber components

Component of a plasma processing apparatus having a protective in s...

System and method for plasma ignition

Probe landing detection

Charged-particle beam microscope with an evaporator

Projection exposure apparatus for microlithography comprising an op...

Projection exposure apparatus for microlithography comprising an op...

Electrostatic lens structure

Arc chamber with multiple cathodes for an ion source

Bipolar wafer charge monitor system and ion implantation system com...

Component of a plasma processing apparatus having a protective in s...

Impurity-doped layer formation apparatus and electrostatic chuck pr...

Apparatus with sidewall protection for features

Three-dimensional copper nanostructure and fabrication method thereof

Method for producing an RFID transponder by etching

Reducing particle implantation

Current limiter for high voltage power supply used with ion implant...

RF-driven ion source with a back-streaming electron dump

Patents Applicationslast 30 patents

GAS DISTRIBUTION RING FOR PROCESS CHAMBER

ROBOT, APPARATUS INCLUDING ROBOT, AND METHOD FOR MANUFACTURING SEMI...

PLASMA SUBSTRATE TREATMENT APPARATUS

Electron Gun, Electron Beam Applying Device, and Irradiation Positi...

SURFACE PREPARATION

GAS DISTRIBUTION RING FOR PROCESS CHAMBER

SINTERED BODY

SUBSTRATE PROCESSING METHOD

PLASMA PROCESSING GAS, PLASMA PROCESSING METHOD, AND PLASMA PROCESS...

CORE INSERTION TYPE SPIRAL TUBE AND MAKING METHOD FOR THE SAME

FOCUS RING PLACEMENT TABLE

Method for Producing Lamella, Analysis System and Method for Analyz...

Temperature Controlled/Electrically Biased Wafer Surround

COLLISION AVOIDANCE FOR PARTICLE BEAM INSTRUMENTS

Thin Pellicle Material for Protection of Solid-State Electron Detec...

COLLISION AVOIDANCE FOR PARTICLE BEAM INSTRUMENTS

PLASMA TREATMENT APPARATUS AND DRIVING METHOD THEREOF

SYSTEM AND METHOD FOR PLASMA IGNITION

PVD TOOL TO DEPOSIT HIGHLY REACTIVE MATERIALS

PVD TOOL TO DEPOSIT HIGHLY REACTIVE MATERIALS

APPARATUS FOR VACUUM SPUTTER DEPOSITION AND METHOD THEREFOR

SUBSTRATE SUPPORT UNIT, SUBSTRATE TREATING APPARATUS INCLUDING THE...

PROBE LANDING DETECTION

ELECTROSTATIC LENS STRUCTURE

COMPONENT OF A PLASMA PROCESSING APPARATUS HAVING A PROTECTIVE IN S...

GAS RING FOR PLASMA SYSTEM AND METHOD OF MANUFACTURING THE SAME

Plasma Processing Devices Having a Surface Protection Layer

CHAMBER COMPONENT WITH FLUORINATED THIN FILM COATING

PROJECTION EXPOSURE APPARATUS FOR MICROLITHOGRAPHY COMPRISING AN OP...

APPARATUS WITH SIDEWALL PROTECTION FOR FEATURES