provided with an expansion cup

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Patents Grantslast 30 patents

Information Patent Grant
Ion source having replaceable and sputterable solid source material
- Patent number 6,768,121
- Issue date Jul 27, 2004
- Axcelis Technologies, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion source having replaceable and sputterable solid source material
- Patent number 6,583,544
- Issue date Jun 24, 2003
- Axcelis Technologies, Inc.
- Thomas N. Horsky
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3702416
- Patent number 3,702,416
- Issue date Nov 7, 1972
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3631283
- Patent number 3,631,283
- Issue date Dec 28, 1971
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3340425
- Patent number 3,340,425
- Issue date Sep 5, 1967
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3287598
- Patent number 3,287,598
- Issue date Nov 22, 1966
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3238414
- Patent number 3,238,414
- Issue date Mar 1, 1966
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3137801
- Patent number 3,137,801
- Issue date Jun 16, 1964
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
3121816
- Patent number 3,121,816
- Issue date Feb 18, 1964
- H01 - BASIC ELECTRIC ELEMENTS