Ion beam tubes

Industry

CPC
H01J27/00

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS

Current Industry

Sub Industries

H01J27/02Ion sources Ion guns H01J27/022Details H01J27/024Extraction optics H01J27/026Cluster ion sources H01J27/028Negative ion sources H01J27/04using reflex discharge H01J27/06without applied magnetic field H01J27/08using arc discharge H01J27/10Duoplasmatrons H01J27/12provided with an expansion cup H01J27/14Other arc discharge ion sources using an applied magnetic field H01J27/143Hall-effect ion sources with closed electron drift H01J27/146End-Hall type ion sources, wherein the magnetic field confines the electrons in a central cylinder H01J27/16using high-frequency excitation H01J27/18with an applied axial magnetic field H01J27/20using particle beam bombardment H01J27/205with electrons H01J27/22Metal ion sources H01J27/24using photo-ionisation H01J27/26using surface ionisation

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Ion source for controlling decomposition buildup using chlorine co-gas
- Patent number 12,224,149
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Mateo Navarro Goldaraz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam source, substrate process apparatus including the same, an...
- Patent number 12,224,163
- Issue date Feb 11, 2025
- Samsung Electronics Co., Ltd.
- SeungWan Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ionization device and mass spectrometer
- Patent number 12,176,199
- Issue date Dec 24, 2024
- LEYBOLD GMBH
- Yessica Brachthaeuser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Molten liquid transport for tunable vaporization in ion sources
- Patent number 12,154,754
- Issue date Nov 26, 2024
- Applied Materials, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, devices, and methods for ion beam modulation
- Patent number 12,154,750
- Issue date Nov 26, 2024
- TAE TECHNOLOGIES, INC.
- Vladislav Vekselman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam source, surface processing apparatus and surf...
- Patent number 12,125,664
- Issue date Oct 22, 2024
- Oxford Instruments Nanotechnology Tools Limited
- David Pearson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam processing apparatus, electrode assembly, and method of cl...
- Patent number 12,119,203
- Issue date Oct 15, 2024
- Canon Anelva Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Grant
Cyclotron having continuously variable energy output
- Patent number 12,106,925
- Issue date Oct 1, 2024
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion generation device, ion generation method, and ion generation pr...
- Patent number 12,002,646
- Issue date Jun 4, 2024
- Kabushiki Kaisha Toshiba
- Takeshi Takeuchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Adjustable support for arc chamber of ion source
- Patent number 12,002,647
- Issue date Jun 4, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd
- Po-Tang Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion propulsion device
- Patent number 11,993,402
- Issue date May 28, 2024
- Centre National de la Recherche Scientifique
- Jacques Gierak
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Facial beautifying and care apparatus
- Patent number 11,964,149
- Issue date Apr 23, 2024
- BIBOTING INTERNATIONAL CO., LTD.
- Po-Chang Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Automatic adjustment method and automatic adjustment device of beam...
- Patent number 11,955,309
- Issue date Apr 9, 2024
- United Microelectronics Corp.
- Zheng-Yang Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for ionizing an analyte, and apparatus and met...
- Patent number 11,923,184
- Issue date Mar 5, 2024
- PLASMION GMBH
- Jan-Christoph Wolf
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems, devices, and methods for contaminant resistant insulative...
- Patent number 11,894,212
- Issue date Feb 6, 2024
- TAE TECHNOLOGIES, INC.
- Christopher J. Killer
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
System and method for power conversion
- Patent number 11,881,786
- Issue date Jan 23, 2024
- Accion Systems, Inc.
- Paul E. Fogel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Discharge device with minimal noise generation
- Patent number 11,855,418
- Issue date Dec 26, 2023
- SHARP KABUSHIKI KAISHA
- Satoshi Okano
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Crucible design for liquid metal in an ion source
- Patent number 11,854,760
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inner source assembly and associated components
- Patent number 11,848,186
- Issue date Dec 19, 2023
- Micromass UK Limited
- Alastair Booth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Deposition apparatus
- Patent number 11,821,067
- Issue date Nov 21, 2023
- Canon Anelva Corporation
- Masahiro Atsumi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 11,810,758
- Issue date Nov 7, 2023
- Tokyo Electron Limited
- Satoshi Itou
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Variable thickness ion source extraction plate
- Patent number 11,810,746
- Issue date Nov 7, 2023
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Field emission propulsion system and method for calibrating and ope...
- Patent number 11,801,949
- Issue date Oct 31, 2023
- MORPHEUS SPACE GmbH
- Daniel Bock
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron source
- Patent number 11,764,026
- Issue date Sep 19, 2023
- ISOTOPX LTD
- Damian Paul Tootell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for thermal assisted desorption ionization sys...
- Patent number 11,742,194
- Issue date Aug 29, 2023
- Jordan Krechmer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular microwave source with local lorentz force
- Patent number 11,721,532
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and device for operating a liquid metal-ion source or liquid...
- Patent number 11,705,299
- Issue date Jul 18, 2023
- Technische Universitát Dresden
- Martin Tajmar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Etching aluminum nitride or aluminum oxide to generate an aluminum...
- Patent number 11,699,563
- Issue date Jul 11, 2023
- Axcelis Technologies, Inc.
- Neil K. Colvin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power wafer cooling
- Patent number 11,670,483
- Issue date Jun 6, 2023
- Axcelis Technologies, Inc.
- Joseph Ferrara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Extended cathode and repeller life by active management of halogen...
- Patent number 11,664,183
- Issue date May 30, 2023
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20250014861
- Publication date Jan 9, 2025
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
SYSTEMS, DEVICES, AND METHODS FOR CONTAMINANT RESISTANT INSULATIVE...
- Publication number 20250006452
- Publication date Jan 2, 2025
- TAE TECHNOLOGIES, INC.
- Christopher J. Killer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE ASSEMBLY WITH MULTIPLE ELLIPTICAL FILAMENTS
- Publication number 20240363325
- Publication date Oct 31, 2024
- Inficon, Inc.
- Michael Vollero
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE
- Publication number 20240282543
- Publication date Aug 22, 2024
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Tang Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Ion Source For Controlling Decomposition Buildup Using Chlorine Co-Gas
- Publication number 20240249904
- Publication date Jul 25, 2024
- Applied Materials, Inc.
- Mateo Navarro Goldaraz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEPOSITION APPARATUS
- Publication number 20240052477
- Publication date Feb 15, 2024
- Canon ANELVA Corporation
- Masahiro ATSUMI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ISOTHERMAL ION SOURCE WITH AUXILIARY HEATERS
- Publication number 20240047165
- Publication date Feb 8, 2024
- SHINE Technologies, LLC
- Daniel Martin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTRACTION GRID
- Publication number 20240021399
- Publication date Jan 18, 2024
- BÜHLER ALZENAU GMBH
- Holger REUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR POWER CONVERSION
- Publication number 20230417228
- Publication date Dec 28, 2023
- Accion Systems, Inc.
- Paul E. Fogel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MOLTEN LIQUID TRANSPORT FOR TUNABLE VAPORIZATION IN ION SOURCES
- Publication number 20230402247
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- Craig R. Chaney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE FOR NEUTRON GENERATOR USABLE IN WELLBORE
- Publication number 20230380046
- Publication date Nov 23, 2023
- Halliburton Energy Services, Inc.
- Zilu Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LIQUID METAL ION SOURCE
- Publication number 20230369003
- Publication date Nov 16, 2023
- ENPULSION GmbH
- Ivanhoe VASILJEVICH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CARBON ION GENERATING DEVICE
- Publication number 20230360819
- Publication date Nov 9, 2023
- National Institutes for Quantum Science and Technology
- Kotaro KONDO
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
HALL-EFFECT THRUSTER
- Publication number 20230279845
- Publication date Sep 7, 2023
- ORBION SPACE TECHNOLOGY, INC.
- Jason D. Sommerville
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACCELERATOR AND PARTICLE THERAPY SYSTEM
- Publication number 20230282436
- Publication date Sep 7, 2023
- Hitachi, Ltd
- Chishin HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Long-LifeTime, Short Pulse, High Current Ion Source and Particle Ac...
- Publication number 20230260737
- Publication date Aug 17, 2023
- Mark Derzon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM EXTRACTION APPARATUS AND METHOD FOR CREATING AN ION BEAM
- Publication number 20230230793
- Publication date Jul 20, 2023
- Max-Planck-Gesellschaft zur Foerderung der Wissenschaften e.V.
- Christian HOPF
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
CYCLOTRON HAVING CONTINUOUSLY VARIABLE ENERGY OUTPUT
- Publication number 20230207247
- Publication date Jun 29, 2023
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Variable Thickness Ion Source Extraction Plate
- Publication number 20230080083
- Publication date Mar 16, 2023
- Applied Materials, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON SOURCE
- Publication number 20230028580
- Publication date Jan 26, 2023
- ISOTOPX LTD.
- Damian Paul TOOTELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Crucible Design For Liquid Metal In An Ion Source
- Publication number 20220406554
- Publication date Dec 22, 2022
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUTOMATIC ADJUSTMENT METHOD AND AUTOMATIC ADJUSTMENT DEVICE OF BEAM...
- Publication number 20220384139
- Publication date Dec 1, 2022
- United Microelectronics Corp.
- Zheng-Yang LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE WITH MULTIPLE BIAS ELECTRODES
- Publication number 20220367138
- Publication date Nov 17, 2022
- Axcelis Technologies, Inc.
- Wilhelm Platow
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Extended Cathode And Repeller Life By Active Management Of Halogen...
- Publication number 20220359147
- Publication date Nov 10, 2022
- Applied Materials, Inc.
- Graham Wright
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION PROPULSION DEVICE
- Publication number 20220348361
- Publication date Nov 3, 2022
- Centre National de la Recherche Scientifique
- Jacques GIERAK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE
- Publication number 20220336181
- Publication date Oct 20, 2022
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Po-Tang Tseng
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION SOURCE REPELLER
- Publication number 20220319796
- Publication date Oct 6, 2022
- Axcelis Technologies, Inc.
- Steven T. Drummond
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR POWER CONVERSION
- Publication number 20220271673
- Publication date Aug 25, 2022
- Accion Systems, Inc.
- Paul E. Fogel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...
- Publication number 20220262598
- Publication date Aug 18, 2022
- Canon ANELVA Corporation
- Yasushi Yasumatsu
- B08 - CLEANING
Information Patent Application
CHARGED PARTICLE BEAM SOURCE, SURFACE PROCESSING APPARATUS AND SURF...
- Publication number 20220216027
- Publication date Jul 7, 2022
- Oxford Instruments Nanotechnology Tools Limited
- David PEARSON
- H01 - BASIC ELECTRIC ELEMENTS

Ion beam tubes

Industry

Parent Industries

Current Industry

Sub Industries

Patents Grantslast 30 patents

Ion source for controlling decomposition buildup using chlorine co-gas

Ion beam source, substrate process apparatus including the same, an...

Ionization device and mass spectrometer

Molten liquid transport for tunable vaporization in ion sources

Systems, devices, and methods for ion beam modulation

Charged particle beam source, surface processing apparatus and surf...

Ion beam processing apparatus, electrode assembly, and method of cl...

Cyclotron having continuously variable energy output

Ion generation device, ion generation method, and ion generation pr...

Adjustable support for arc chamber of ion source

Ion propulsion device

Facial beautifying and care apparatus

Automatic adjustment method and automatic adjustment device of beam...

Apparatus and method for ionizing an analyte, and apparatus and met...

Systems, devices, and methods for contaminant resistant insulative...

System and method for power conversion

Discharge device with minimal noise generation

Crucible design for liquid metal in an ion source

Inner source assembly and associated components

Deposition apparatus

Plasma processing apparatus

Variable thickness ion source extraction plate

Field emission propulsion system and method for calibrating and ope...

Electron source

Apparatus and method for thermal assisted desorption ionization sys...

Modular microwave source with local lorentz force

Method and device for operating a liquid metal-ion source or liquid...

Etching aluminum nitride or aluminum oxide to generate an aluminum...

High power wafer cooling

Extended cathode and repeller life by active management of halogen...

Patents Applicationslast 30 patents

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

SYSTEMS, DEVICES, AND METHODS FOR CONTAMINANT RESISTANT INSULATIVE...

ION SOURCE ASSEMBLY WITH MULTIPLE ELLIPTICAL FILAMENTS

ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE

Ion Source For Controlling Decomposition Buildup Using Chlorine Co-Gas

DEPOSITION APPARATUS

ISOTHERMAL ION SOURCE WITH AUXILIARY HEATERS

EXTRACTION GRID

SYSTEM AND METHOD FOR POWER CONVERSION

MOLTEN LIQUID TRANSPORT FOR TUNABLE VAPORIZATION IN ION SOURCES

ION SOURCE FOR NEUTRON GENERATOR USABLE IN WELLBORE

LIQUID METAL ION SOURCE

CARBON ION GENERATING DEVICE

HALL-EFFECT THRUSTER

ACCELERATOR AND PARTICLE THERAPY SYSTEM

Long-LifeTime, Short Pulse, High Current Ion Source and Particle Ac...

ION BEAM EXTRACTION APPARATUS AND METHOD FOR CREATING AN ION BEAM

CYCLOTRON HAVING CONTINUOUSLY VARIABLE ENERGY OUTPUT

Variable Thickness Ion Source Extraction Plate

ELECTRON SOURCE

Crucible Design For Liquid Metal In An Ion Source

AUTOMATIC ADJUSTMENT METHOD AND AUTOMATIC ADJUSTMENT DEVICE OF BEAM...

ION SOURCE WITH MULTIPLE BIAS ELECTRODES

Extended Cathode And Repeller Life By Active Management Of Halogen...

ION PROPULSION DEVICE

ADJUSTABLE SUPPORT FOR ARC CHAMBER OF ION SOURCE

ION SOURCE REPELLER

SYSTEM AND METHOD FOR POWER CONVERSION

ION BEAM PROCESSING APPARATUS, ELECTRODE ASSEMBLY, AND METHOD OF CL...

CHARGED PARTICLE BEAM SOURCE, SURFACE PROCESSING APPARATUS AND SURF...