Pulsed operation

Industry

CPC
H01J37/3467

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/3467Pulsed operation

Industries

Patents Grantslast 30 patents

Information Patent Grant
Corrosion resistant and low embrittlement aluminum alloy coatings o...
- Patent number 12,134,817
- Issue date Nov 5, 2024
- The Boeing Company
- Stephen P. Gaydos
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
TiCN having reduced growth defects by means of HiPIMS
- Patent number 12,110,580
- Issue date Oct 8, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual reverse pulse sputtering system
- Patent number 12,112,931
- Issue date Oct 8, 2024
- Advanced Energy Industries, Inc.
- Doug Pelleymounter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for coating a substrate with tantalum nitride
- Patent number 12,084,755
- Issue date Sep 10, 2024
- SAFRAN
- Marjorie Christine Cavarroc
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Connection of high-performance pulse discharge plasma generator, es...
- Patent number 12,051,578
- Issue date Jul 30, 2024
- Slovenka Technicka Univerzita V. Bratilasve
- Roman Sykora
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System for coupling RF power into LINACs and bellows coating by mag...
- Patent number 12,009,192
- Issue date Jun 11, 2024
- Starfire Industries LLC
- Thomas J. Houlahan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,961,722
- Issue date Apr 16, 2024
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
High power pulse systems for surface processing
- Patent number 11,955,324
- Issue date Apr 9, 2024
- Jefferson Science Associates, LLC
- Hui Tian
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electromagnet pulsing effect on PVD step coverage
- Patent number 11,952,655
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Kevin Kashefi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for particle removal from wafers through plasma modification...
- Patent number 11,932,934
- Issue date Mar 19, 2024
- Applied Materials, Inc.
- Halbert Chong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and a method of controlling thickness variation in a mate...
- Patent number 11,913,109
- Issue date Feb 27, 2024
- SPTS Technologies Limited
- Tony Wilby
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate with antireflection coating and method for producing same
- Patent number 11,906,700
- Issue date Feb 20, 2024
- Schott AG
- Christian Henn
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for depositing a material
- Patent number 11,875,980
- Issue date Jan 16, 2024
- Stephen R Burgess
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 11,821,068
- Issue date Nov 21, 2023
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering a layer on a substrate using a high-energy density plasm...
- Patent number 11,823,859
- Issue date Nov 21, 2023
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
DC magnetron sputtering
- Patent number 11,718,908
- Issue date Aug 8, 2023
- SPTS Technologies Limited
- Scott Haymore
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atmospheric cold plasma jet coating and surface treatment
- Patent number 11,560,627
- Issue date Jan 24, 2023
- Starfire Industries LLC
- Brian Edward Jurczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
TiCN having reduced growth defects by means of HiPIMS
- Patent number 11,542,587
- Issue date Jan 3, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFAFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for controlling stress variation in a material...
- Patent number 11,521,840
- Issue date Dec 6, 2022
- SPTS Technologies Limited
- Anthony Wilby
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
In-situ plasma cleaning of process chamber components
- Patent number 11,495,434
- Issue date Nov 8, 2022
- Varian Semiconductor Equipment Associates, Inc.
- Kevin Anglin
- B08 - CLEANING
Information Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
- Patent number 11,482,404
- Issue date Oct 25, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for particle removal from wafers through plasma modification...
- Patent number 11,473,189
- Issue date Oct 18, 2022
- Applied Materials, Inc.
- Halbert Chong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and methods for depositing durable optical coatings
- Patent number 11,466,362
- Issue date Oct 11, 2022
- UNIVERSITY OF THE WEST OF SCOTLAND
- Desmond Gibson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Reactive sputtering with HIPIMS
- Patent number 11,380,530
- Issue date Jul 5, 2022
- EVATEC AG
- Juergen Weichart
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced low temperature-high density plasma-chemical...
- Patent number 11,306,391
- Issue date Apr 19, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Magnetically enhanced high density plasma-chemical vapor deposition...
- Patent number 11,286,555
- Issue date Mar 29, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of controlling ion energy distribution using a pulse generator
- Patent number 11,284,500
- Issue date Mar 22, 2022
- APPLIED MATERIALS, INC.
- Leonid Dorf
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrically and magnetically enhanced ionized physical vapor depos...
- Patent number 11,255,012
- Issue date Feb 22, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nanosecond pulser bias compensation
- Patent number 11,222,767
- Issue date Jan 11, 2022
- Eagle Harbor Technologies, Inc.
- Timothy Ziemba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Arc suppression and pulsing in high power impulse magnetron sputter...
- Patent number 11,211,234
- Issue date Dec 28, 2021
- EVATEC AG
- Stanislav Kadlec
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
COATED CUTTING TOOL WITH AN ALTERNATING LAYER COMPOSITION
- Publication number 20240024957
- Publication date Jan 25, 2024
- WALTER AG
- Veit SCHIER
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
Apparatus and a Method of Controlling Thickness Variation in a Mate...
- Publication number 20240014018
- Publication date Jan 11, 2024
- SPTS TECHNOLOGIES LIMITED
- Tony WILBY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMATION APPARATUS AND FILM FORMATION METHOD
- Publication number 20230366077
- Publication date Nov 16, 2023
- SHIBAURA MECHATRONICS CORPORATION
- Shigeki MATSUNAKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPULSE POWER SUPPLY FOR COMPACT SYSTEM FOR COUPLING RADIO FREQUENC...
- Publication number 20230360898
- Publication date Nov 9, 2023
- Starfire Industries LLC
- Robert A. Stubbers
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...
- Publication number 20230257866
- Publication date Aug 17, 2023
- Carl Zeiss SMT GMBH
- Anastasia GONCHAR
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
TICN Having Reduced Growth Defects by Means of HIPIMS
- Publication number 20230135238
- Publication date May 4, 2023
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Denis Kurapov
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20230130106
- Publication date Apr 27, 2023
- Sireesh ADIMADHYAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONNECTION OF HIGH-PERFORMANCE PULSE DISCHARGE PLASMA GENERATOR, ES...
- Publication number 20230124940
- Publication date Apr 20, 2023
- Slovenka Technicka Univerzita V. Bratilasve
- Roman Sykora
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCED RIPPLE IN SWITCH MODE POWER SUPPLY WITH SNUBBER
- Publication number 20230104780
- Publication date Apr 6, 2023
- Advanced Energy Industries, Inc.
- Mike Armstrong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Method and Apparatus for Controlling Stress Variation in a Material...
- Publication number 20230094699
- Publication date Mar 30, 2023
- SPTS Technologies Ltd.
- Anthony WILBY
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PARTICLE REMOVAL FROM WAFERS THROUGH PLASMA MODIFICATION...
- Publication number 20230002885
- Publication date Jan 5, 2023
- Applied Materials, Inc.
- Halbert Chong
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...
- Publication number 20230005724
- Publication date Jan 5, 2023
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR COATING A SUBSTRATE WITH TANTALUM NITRIDE
- Publication number 20220349042
- Publication date Nov 3, 2022
- SAFRAN
- Marjorie Christine CAVARROC
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-LAYER COATING
- Publication number 20220307123
- Publication date Sep 29, 2022
- CemeCon AG
- Werner Kölker
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH POWER PULSE SYSTEMS FOR SURFACE PROCESSING
- Publication number 20220199381
- Publication date Jun 23, 2022
- Jefferson Science Associates, LLC
- HUI TIAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20220195585
- Publication date Jun 23, 2022
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20220042168
- Publication date Feb 10, 2022
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPUTTERING DEVICE AND SPUTTERING METHOD
- Publication number 20220005680
- Publication date Jan 6, 2022
- Panasonic Intellectual Property Management Co., Ltd.
- DAISUKE SUETSUGU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PULSED POWER MODULE WITH PULSE AND ION FLUX CONTROL FOR MAGNETRON S...
- Publication number 20210343513
- Publication date Nov 4, 2021
- Starfire Industries LLC
- David N. Ruzic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SYSTEM FOR COUPLING RF POWER INTO LINACS AND BELLOWS COATING BY MAG...
- Publication number 20210327694
- Publication date Oct 21, 2021
- Starfire Industries LLC
- Thomas J. Houlahan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20210317569
- Publication date Oct 14, 2021
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dual Reverse Pulse Sputtering System
- Publication number 20210287888
- Publication date Sep 16, 2021
- Advanced Energy Industries, Inc.
- Doug Pelleymounter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE WITH ANTIREFLECTION COATING AND METHOD FOR PRODUCING SAME
- Publication number 20210271001
- Publication date Sep 2, 2021
- SCHOTT AG
- CHRISTIAN HENN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DC Magnetron Sputtering
- Publication number 20210246545
- Publication date Aug 12, 2021
- SPTS TECHNOLOGIES LIMITED
- SCOTT HAYMORE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPROVEMENTS IN AND RELATING TO COATING PROCESSES
- Publication number 20210134571
- Publication date May 6, 2021
- GENCOA LTD
- Victor BELLIDO-GONZALEZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and Apparatus for Depositing a Material
- Publication number 20210123130
- Publication date Apr 29, 2021
- SPTS TECHNOLOGIES LIMITED
- STEPHEN R. BURGESS
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20210115552
- Publication date Apr 22, 2021
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...
- Publication number 20210115553
- Publication date Apr 22, 2021
- IonQuest Corp.
- Bassam Hanna Abraham
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RATE ENHANCED PULSED DC SPUTTERING SYSTEM
- Publication number 20210111010
- Publication date Apr 15, 2021
- Advanced Energy Industries, Inc.
- Doug Pelleymounter
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Magnetically Enhanced Low Temperature-High Density Plasma-Chemical...
- Publication number 20210102284
- Publication date Apr 8, 2021
- IonQuest Corp.
- Bassam Hanna ABRAHAM
- H01 - BASIC ELECTRIC ELEMENTS

Pulsed operation

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Corrosion resistant and low embrittlement aluminum alloy coatings o...

TiCN having reduced growth defects by means of HiPIMS

Dual reverse pulse sputtering system

Method for coating a substrate with tantalum nitride

Connection of high-performance pulse discharge plasma generator, es...

System for coupling RF power into LINACs and bellows coating by mag...

Method and apparatus for controlling stress variation in a material...

High power pulse systems for surface processing

Electromagnet pulsing effect on PVD step coverage

Method for particle removal from wafers through plasma modification...

Apparatus and a method of controlling thickness variation in a mate...

Substrate with antireflection coating and method for producing same

Method and apparatus for depositing a material

Magnetically enhanced high density plasma-chemical vapor deposition...

Sputtering a layer on a substrate using a high-energy density plasm...

DC magnetron sputtering

Atmospheric cold plasma jet coating and surface treatment

TiCN having reduced growth defects by means of HiPIMS

Method and apparatus for controlling stress variation in a material...

In-situ plasma cleaning of process chamber components

Electrically and magnetically enhanced ionized physical vapor depos...

Method for particle removal from wafers through plasma modification...

Apparatus and methods for depositing durable optical coatings

Reactive sputtering with HIPIMS

Magnetically enhanced low temperature-high density plasma-chemical...

Magnetically enhanced high density plasma-chemical vapor deposition...

Method of controlling ion energy distribution using a pulse generator

Electrically and magnetically enhanced ionized physical vapor depos...

Nanosecond pulser bias compensation

Arc suppression and pulsing in high power impulse magnetron sputter...

Patents Applicationslast 30 patents

COATED CUTTING TOOL WITH AN ALTERNATING LAYER COMPOSITION

Apparatus and a Method of Controlling Thickness Variation in a Mate...

FILM FORMATION APPARATUS AND FILM FORMATION METHOD

IMPULSE POWER SUPPLY FOR COMPACT SYSTEM FOR COUPLING RADIO FREQUENC...

METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...

TICN Having Reduced Growth Defects by Means of HIPIMS

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

CONNECTION OF HIGH-PERFORMANCE PULSE DISCHARGE PLASMA GENERATOR, ES...

REDUCED RIPPLE IN SWITCH MODE POWER SUPPLY WITH SNUBBER

Method and Apparatus for Controlling Stress Variation in a Material...

METHOD FOR PARTICLE REMOVAL FROM WAFERS THROUGH PLASMA MODIFICATION...

Electrically and Magnetically Enhanced Ionized Physical Vapor Depos...

METHOD FOR COATING A SUBSTRATE WITH TANTALUM NITRIDE

MULTI-LAYER COATING

HIGH POWER PULSE SYSTEMS FOR SURFACE PROCESSING

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

SPUTTERING DEVICE AND SPUTTERING METHOD

PULSED POWER MODULE WITH PULSE AND ION FLUX CONTROL FOR MAGNETRON S...

SYSTEM FOR COUPLING RF POWER INTO LINACS AND BELLOWS COATING BY MAG...

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

Dual Reverse Pulse Sputtering System

SUBSTRATE WITH ANTIREFLECTION COATING AND METHOD FOR PRODUCING SAME

DC Magnetron Sputtering

IMPROVEMENTS IN AND RELATING TO COATING PROCESSES

Method and Apparatus for Depositing a Material

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

Magnetically Enhanced High Density Plasma-Chemical Vapor Deposition...

RATE ENHANCED PULSED DC SPUTTERING SYSTEM

Magnetically Enhanced Low Temperature-High Density Plasma-Chemical...