Radiation resist

Industry

CPC
Y10S438/948

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Parent Industries

YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10USPC classification Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS Y10S438/00Semiconductor device manufacturing: process

Current Industry

Y10S438/948Radiation resist

Industries

Patents Grantslast 30 patents

Information Patent Grant
Land grid array package capable of decreasing a height difference b...
- Patent number 9,041,181
- Issue date May 26, 2015
- Samsung Electronics Co., Ltd.
- Hee-chul Lee
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method of forming fine patterns of semiconductor device
- Patent number 8,999,840
- Issue date Apr 7, 2015
- Samsung Electronics Co., Ltd.
- Cha-won Koh
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Methods for optical proximity correction in the design and fabricat...
- Patent number 8,975,195
- Issue date Mar 10, 2015
- GLOBALFOUNDRIES, INC.
- Todd Lukanc
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Compositions for use in semiconductor devices
- Patent number 8,951,433
- Issue date Feb 10, 2015
- Micron Technology, Inc.
- Donald L. Yates
- B08 - CLEANING
Information Patent Grant
Double patterning with inline critical dimension slimming
- Patent number 8,940,475
- Issue date Jan 27, 2015
- Tokyo Electron Limited
- Shannon W. Dunn
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Sidewall image transfer pitch doubling and inline critical dimensio...
- Patent number 8,764,999
- Issue date Jul 1, 2014
- Tokyo Electron Limited
- Shannon W. Dunn
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Compositions for use in semiconductor devices
- Patent number 8,632,692
- Issue date Jan 21, 2014
- Micron Technology, Inc.
- Donald L. Yates
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for photoresist pattern removal
- Patent number 8,222,149
- Issue date Jul 17, 2012
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Yu Chang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Multi-exposure lithography employing differentially sensitive photo...
- Patent number 8,158,014
- Issue date Apr 17, 2012
- International Business Machines Corporation
- Wu-Song Huang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Compositions for dissolution of low-k dielectric films, and methods...
- Patent number 8,142,673
- Issue date Mar 27, 2012
- Micron Technology, Inc.
- Donald L Yates
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Pattern formation method
- Patent number 8,080,364
- Issue date Dec 20, 2011
- Panasonic Corporation
- Masayuki Endo
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Photoresist composition and method of manufacturing a display subst...
- Patent number 7,981,706
- Issue date Jul 19, 2011
- Samsung Electronics Co., Ltd.
- Jeong-Min Park
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Method for forming a mask pattern for ion-implantation
- Patent number 7,767,592
- Issue date Aug 3, 2010
- Hynix Semiconductor Inc.
- Kyu Sung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating complementary metal-oxide semiconductor (CMOS...
- Patent number 7,696,033
- Issue date Apr 13, 2010
- Samsung Mobile Display Co., Ltd.
- Eui-Hoon Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern formation method
- Patent number 7,524,772
- Issue date Apr 28, 2009
- Panasonic Corporation
- Masayuki Endo
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Compositions for dissolution of low-k dielectric films, and methods...
- Patent number 7,521,373
- Issue date Apr 21, 2009
- Micron Technology, Inc.
- Donald L Yates
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Ion implantation with multiple concentration levels
- Patent number 7,495,347
- Issue date Feb 24, 2009
- Xerox Corporation
- Alan D. Raisanen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Compositions for dissolution of low-k dielectric film, and methods...
- Patent number 7,432,214
- Issue date Oct 7, 2008
- Micron Technology, Inc.
- Donald L Yates
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Compositions for dissolution of low-k dielectric films, and methods...
- Patent number 7,399,424
- Issue date Jul 15, 2008
- Micron Technology, Inc.
- Donald L Yates
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Compositions for dissolution of low-k dielectric films, and methods...
- Patent number 7,312,159
- Issue date Dec 25, 2007
- Micron Technology, Inc.
- Donald L Yates
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Grant
Gas assisted method for applying resist stripper and gas-resist str...
- Patent number 7,276,449
- Issue date Oct 2, 2007
- Micron Technology, Inc.
- Terry L. Gilton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for manufacturing semiconductor devices using a v...
- Patent number 7,238,624
- Issue date Jul 3, 2007
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jen-Chieh Shih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of fabricating semiconductor device
- Patent number 7,232,723
- Issue date Jun 19, 2007
- Oki Electric Industry Co., Ltd.
- Koki Muto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Gas-assist systems for applying and moving ozonated resist stripper...
- Patent number 7,189,305
- Issue date Mar 13, 2007
- Micron Technology, Inc.
- Terry L. Gilton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film transistor for liquid crystal display and method of manuf...
- Patent number 7,176,494
- Issue date Feb 13, 2007
- Samsung Electronics Co., Ltd.
- Dong-Gyu Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a reflective electrode and a liquid crystal displ...
- Patent number 7,122,831
- Issue date Oct 17, 2006
- TPO Displays Corp.
- Naoki Sumi
- G02 - OPTICS
Information Patent Grant
Method of fabricating semiconductor device
- Patent number 7,105,407
- Issue date Sep 12, 2006
- Oki Electric Industry Co., Ltd.
- Koki Muto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of manufacturing a semiconductor device with outline of clea...
- Patent number 7,083,994
- Issue date Aug 1, 2006
- Eblana Photonics Limited
- James O'Gorman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Laser separated die with tapered sidewalls for improved light extra...
- Patent number 7,078,319
- Issue date Jul 18, 2006
- GelCore LLC
- Ivan Eliashevich
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Monolithic three-dimensional structures
- Patent number 7,012,291
- Issue date Mar 14, 2006
- BinOptics Corporation
- Alex Behfar
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
METHODS FOR OPTICAL PROXIMITY CORRECTION IN THE DESIGN AND FABRICAT...
- Publication number 20140220786
- Publication date Aug 7, 2014
- GLOBALFOUNDRIES, Inc.
- Todd Lukanc
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
COMPOSITIONS FOR USE IN SEMICONDUCTOR DEVICES
- Publication number 20140103251
- Publication date Apr 17, 2014
- Micron Technology, Inc.
- Donald L. Yates
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTI-EXPOSURE LITHOGRAPHY EMPLOYING DIFFERENTIALLY SENSITIVE PHOTO...
- Publication number 20120156450
- Publication date Jun 21, 2012
- International Business Machines Corporation
- Wu-Song Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SIDEWALL IMAGE TRANSFER PITCH DOUBLING AND INLINE CRITICAL DIMENSIO...
- Publication number 20120128935
- Publication date May 24, 2012
- TOKYO ELECTRON LIMITED
- Shannon W. DUNN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DOUBLE PATTERNING WITH INLINE CRITICAL DIMENSION SLIMMING
- Publication number 20120128942
- Publication date May 24, 2012
- TOKYO ELECTRON LIMITED
- Shannon W. DUNN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LAND GRID ARRAY PACKAGE CAPABLE OF DECREASING A HEIGHT DIFFERENCE B...
- Publication number 20110198744
- Publication date Aug 18, 2011
- Hee-chul Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING A DISPLAY SUBST...
- Publication number 20110097835
- Publication date Apr 28, 2011
- Samsung Electronics Co., Ltd.
- Jeong-Min PARK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR PHOTORESIST PATTERN REMOVAL
- Publication number 20100075478
- Publication date Mar 25, 2010
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Ching-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-EXPOSURE LITHOGRAPHY EMPLOYING DIFFERENTIALLY SENSITIVE PHOTO...
- Publication number 20090311491
- Publication date Dec 17, 2009
- International Business Machines Corporation
- Wu-Song Huang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERN FORMATION METHOD
- Publication number 20090186484
- Publication date Jul 23, 2009
- PANASONIC CORPORATION
- Masayuki Endo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Compositions for Dissolution of Low-K Dielectric Films, and Methods...
- Publication number 20090001314
- Publication date Jan 1, 2009
- Donald L. Yates
- B08 - CLEANING
Information Patent Application
Compositions for Dissolution of Low-K Dielectric Films, and Methods...
- Publication number 20080283796
- Publication date Nov 20, 2008
- Donald L. Yates
- B08 - CLEANING
Information Patent Application
Method of fabricating complementary metal-oxide semiconductor (CMOS...
- Publication number 20080044958
- Publication date Feb 21, 2008
- Eui-Hoon Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and methods for gas assisted resist removal
- Publication number 20070158302
- Publication date Jul 12, 2007
- Terry L. Gilton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR FORMING A MASK PATTERN FOR ION-IMPLANTATION
- Publication number 20070152305
- Publication date Jul 5, 2007
- Hynix Semiconductor, Inc.
- Kyu Sung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of fabricating semiconductor device
- Publication number 20060263982
- Publication date Nov 23, 2006
- Koki Muto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
System and method for manufacturing semiconductor devices using a v...
- Publication number 20060199388
- Publication date Sep 7, 2006
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Jen-Chieh Shih
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Pattern formation method
- Publication number 20060040215
- Publication date Feb 23, 2006
- Matsushita Electric Industrial Co., Ltd.
- Masayuki Endo
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Ion implantation with multiple concentration levels
- Publication number 20050245056
- Publication date Nov 3, 2005
- Xerox Corporation.
- Alan D. Raisanen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Mask for manufacturing semiconductor device and method of manufactu...
- Publication number 20050164128
- Publication date Jul 28, 2005
- Yoshihiko Okamoto
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Gas assisted method for applying resist stripper and gas-resist str...
- Publication number 20050118831
- Publication date Jun 2, 2005
- Terry L. Gilton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method of manufacturing a semiconductor device
- Publication number 20050032264
- Publication date Feb 10, 2005
- James O'Gorman
- G02 - OPTICS
Information Patent Application
Method of forming a reflective electrode and a liquid crystal displ...
- Publication number 20050029517
- Publication date Feb 10, 2005
- Naoki Sumi
- G02 - OPTICS
Information Patent Application
Method for forming a conductive layer
- Publication number 20040253815
- Publication date Dec 16, 2004
- Industrial Technology Research Institute
- Yu-Chang Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Compositions for dissolution of low-k dielectric films, and methods...
- Publication number 20040253832
- Publication date Dec 16, 2004
- Micron Technology, Inc.
- Donald L. Yates
- B08 - CLEANING
Information Patent Application
Compositions for dissolution of low-k dielectric films, and methods...
- Publication number 20040250835
- Publication date Dec 16, 2004
- Micron Technology, Inc.
- Donald L. Yates
- B08 - CLEANING
Information Patent Application
Compositions for dissolution of low-k dielectric film, and methods...
- Publication number 20040248424
- Publication date Dec 9, 2004
- Micron Technology, Inc.
- Donald L. Yates
- B08 - CLEANING
Information Patent Application
Compositions for dissolution of low-k dielectric films, and methods...
- Publication number 20040242016
- Publication date Dec 2, 2004
- Micron Technology, Inc.
- Donald L. Yates
- B08 - CLEANING
Information Patent Application
Thin film transistor for liquid crystal display and method of manuf...
- Publication number 20040227864
- Publication date Nov 18, 2004
- Dong-Gyu Kim
- G02 - OPTICS
Information Patent Application
Method of fabricating semiconductor device
- Publication number 20040229467
- Publication date Nov 18, 2004
- Koki Muto
- H01 - BASIC ELECTRIC ELEMENTS

Radiation resist

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Land grid array package capable of decreasing a height difference b...

Method of forming fine patterns of semiconductor device

Methods for optical proximity correction in the design and fabricat...

Compositions for use in semiconductor devices

Double patterning with inline critical dimension slimming

Sidewall image transfer pitch doubling and inline critical dimensio...

Compositions for use in semiconductor devices

Method for photoresist pattern removal

Multi-exposure lithography employing differentially sensitive photo...

Compositions for dissolution of low-k dielectric films, and methods...

Pattern formation method

Photoresist composition and method of manufacturing a display subst...

Method for forming a mask pattern for ion-implantation

Method of fabricating complementary metal-oxide semiconductor (CMOS...

Pattern formation method

Compositions for dissolution of low-k dielectric films, and methods...

Ion implantation with multiple concentration levels

Compositions for dissolution of low-k dielectric film, and methods...

Compositions for dissolution of low-k dielectric films, and methods...

Compositions for dissolution of low-k dielectric films, and methods...

Gas assisted method for applying resist stripper and gas-resist str...

System and method for manufacturing semiconductor devices using a v...

Method of fabricating semiconductor device

Gas-assist systems for applying and moving ozonated resist stripper...

Thin film transistor for liquid crystal display and method of manuf...

Method of forming a reflective electrode and a liquid crystal displ...

Method of fabricating semiconductor device

Method of manufacturing a semiconductor device with outline of clea...

Laser separated die with tapered sidewalls for improved light extra...

Monolithic three-dimensional structures

Patents Applicationslast 30 patents

METHODS FOR OPTICAL PROXIMITY CORRECTION IN THE DESIGN AND FABRICAT...

COMPOSITIONS FOR USE IN SEMICONDUCTOR DEVICES

MULTI-EXPOSURE LITHOGRAPHY EMPLOYING DIFFERENTIALLY SENSITIVE PHOTO...

SIDEWALL IMAGE TRANSFER PITCH DOUBLING AND INLINE CRITICAL DIMENSIO...

DOUBLE PATTERNING WITH INLINE CRITICAL DIMENSION SLIMMING

LAND GRID ARRAY PACKAGE CAPABLE OF DECREASING A HEIGHT DIFFERENCE B...

PHOTORESIST COMPOSITION AND METHOD OF MANUFACTURING A DISPLAY SUBST...

METHOD FOR PHOTORESIST PATTERN REMOVAL

MULTI-EXPOSURE LITHOGRAPHY EMPLOYING DIFFERENTIALLY SENSITIVE PHOTO...

PATTERN FORMATION METHOD

Compositions for Dissolution of Low-K Dielectric Films, and Methods...

Compositions for Dissolution of Low-K Dielectric Films, and Methods...

Method of fabricating complementary metal-oxide semiconductor (CMOS...

Systems and methods for gas assisted resist removal

METHOD FOR FORMING A MASK PATTERN FOR ION-IMPLANTATION

Method of fabricating semiconductor device

System and method for manufacturing semiconductor devices using a v...

Pattern formation method

Ion implantation with multiple concentration levels

Mask for manufacturing semiconductor device and method of manufactu...

Gas assisted method for applying resist stripper and gas-resist str...

Method of manufacturing a semiconductor device

Method of forming a reflective electrode and a liquid crystal displ...

Method for forming a conductive layer

Compositions for dissolution of low-k dielectric films, and methods...

Compositions for dissolution of low-k dielectric films, and methods...

Compositions for dissolution of low-k dielectric film, and methods...

Compositions for dissolution of low-k dielectric films, and methods...

Thin film transistor for liquid crystal display and method of manuf...

Method of fabricating semiconductor device