Reactive sputtering

Industry

CPC
C23C14/0036

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Parent Industries

CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material

Current Industry

C23C14/0036Reactive sputtering

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Device and method for producing layers with improved uniformity in...
- Patent number 12,258,661
- Issue date Mar 25, 2025
- Fraunhofer-Gesellschaft zur Forderung der Angewandten Forschung E.V.
- Michael Vergöhl
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods for in-situ chamber monitoring
- Patent number 12,252,779
- Issue date Mar 18, 2025
- Applied Materials, Inc.
- Xiangjin Xie
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for coating a substrate with a Co-PI modified BiVO4/WO3 hete...
- Patent number 12,247,281
- Issue date Mar 11, 2025
- King Fahd University of Petroleum & Minerals
- Amar Kamal Mohmeadkhair Salih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal foil with carrier
- Patent number 12,247,280
- Issue date Mar 11, 2025
- Mitsui Mining & Smelting Co., Ltd.
- Yukiko Kitabatake
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical filter and method for manufacturing same
- Patent number 12,248,161
- Issue date Mar 11, 2025
- Nippon Electric Glass Co., Ltd.
- Keiichi Sahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Multilayer film structure and method for producing same
- Patent number 12,247,297
- Issue date Mar 11, 2025
- Tosoh Corporation
- Yuya Tsuchida
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sanitary equipment part
- Patent number 12,221,690
- Issue date Feb 11, 2025
- Toto Ltd.
- Yuya Suzuki
- B32 - LAYERED PRODUCTS
Information Patent Grant
Method of deposition
- Patent number 12,207,556
- Issue date Jan 21, 2025
- SPTS Technologies Limited
- Adrian Thomas
- C01 - INORGANIC CHEMISTRY
Information Patent Grant
Electrolysis electrode and preparation method therefor, electrolysi...
- Patent number 12,180,095
- Issue date Dec 31, 2024
- WUXI LITTLE SWAN ELECTRIC CO., LTD.
- Qingbo Yang
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Stain-resistant cooking surface and cookware item or electrical hou...
- Patent number 12,161,257
- Issue date Dec 10, 2024
- Centre National de la Recherche Scientifique
- Philippe Pigeat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ultraviolet radiation and atomic oxygen barrier films and methods o...
- Patent number 12,157,941
- Issue date Dec 3, 2024
- 3M Innovative Properties Company
- Sean M. Sweetnam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for coating a substrate with tantalum nitride
- Patent number 12,084,755
- Issue date Sep 10, 2024
- SAFRAN
- Marjorie Christine Cavarroc
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Decorative member
- Patent number 12,075,898
- Issue date Sep 3, 2024
- LG Chem, Ltd.
- Yong Chan Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 12,065,725
- Issue date Aug 20, 2024
- Kioxia Corporation
- Yuta Konno
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Coated glass pane
- Patent number 12,060,751
- Issue date Aug 13, 2024
- Pilkington Group Limited
- Thomas Paul
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Decoration member and method for manufacturing same
- Patent number 12,053,073
- Issue date Aug 6, 2024
- LG Chem, Ltd.
- Pilsung Jo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical filter structure for arbitrary combination of RGB and IR wa...
- Patent number 12,046,686
- Issue date Jul 23, 2024
- Cheng-Hsing Tsou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Decoration member
- Patent number 12,013,555
- Issue date Jun 18, 2024
- LG Chem, Ltd.
- Yong Chan Kim
- B32 - LAYERED PRODUCTS
Information Patent Grant
Electrostatic jamming devices and methods of making such devices
- Patent number 11,984,823
- Issue date May 14, 2024
- 3M Innovative Properties Company
- Thomas R.. Corrigan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Jamming device with jamming sheets
- Patent number 11,979,098
- Issue date May 7, 2024
- 3M Innovative Properties Company
- Thomas R. Corrigan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical device and manufacturing method therefor
- Patent number 11,971,520
- Issue date Apr 30, 2024
- Canon Kabushiki Kaisha
- Hideo Akiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Decorative member and manufacturing method therefor
- Patent number 11,971,564
- Issue date Apr 30, 2024
- LG Chem, Ltd.
- Pilsung Jo
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Decoration member
- Patent number 11,940,636
- Issue date Mar 26, 2024
- LG Chem, Ltd.
- Yong Chan Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conductive structure, manufacturing method therefor, and electrode...
- Patent number 11,926,558
- Issue date Mar 12, 2024
- LG Chem Ltd.
- Ilha Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Oxidized surface layer on transition metal nitrides: active catalys...
- Patent number 11,929,512
- Issue date Mar 12, 2024
- The Board of Trustees of the Leland Stanford Junior University
- Melissa E. Kreider
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Decoration member
- Patent number 11,906,760
- Issue date Feb 20, 2024
- LG Chem, Ltd.
- Yong Chan Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Decoration member
- Patent number 11,889,910
- Issue date Feb 6, 2024
- LG Chem, Ltd.
- Yong Chan Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Piezoelectric bulk layers with tilted c-axis orientation and method...
- Patent number 11,885,007
- Issue date Jan 30, 2024
- Qorvo US, Inc.
- Derya Deniz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Alkali semi-metal films and method and apparatus for fabricating them
- Patent number 11,881,391
- Issue date Jan 23, 2024
- Radiation Monitoring Devices, Inc.
- Harish B. Bhandari
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Optical interference filter
- Patent number 11,867,935
- Issue date Jan 9, 2024
- Viavi Solutions Inc.
- Jinhui Yang
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
METHOD FOR FORMING A BISMUTH/TUNGSTEN OXIDE HETEROSTRUCTURE FILM
- Publication number 20250092503
- Publication date Mar 20, 2025
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Amar Kamal Mohmeadkhair SALIH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL/METAL OXIDE DECORATED POLYMER SUBSTRATE-BASED MULTIFUNCTIONAL...
- Publication number 20250066900
- Publication date Feb 27, 2025
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Mohammad Kamal HOSSAIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROLYSIS ELECTRODE AND PREPARATION METHOD THEREFOR, ELECTROLYSI...
- Publication number 20250066226
- Publication date Feb 27, 2025
- WUXI LITTLE SWAN ELECTRIC CO., LTD
- Qingbo YANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REACTIVE-ION DEPOSITION PROCESSES FOR DIELECTRIC MATERIAL FORMATION
- Publication number 20250046602
- Publication date Feb 6, 2025
- Applied Materials, Inc.
- Bhaskar Jyoti Bhuyan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FAR-INFRARED TRANSMITTING MEMBER AND METHOD OF MANUFACTURING FAR-IN...
- Publication number 20240425967
- Publication date Dec 26, 2024
- AGC Inc.
- Hidehisa INOUE
- B60 - VEHICLES IN GENERAL
Information Patent Application
FOLDABLE SUBSTRATES AND METHODS OF MAKING
- Publication number 20240417320
- Publication date Dec 19, 2024
- Corning Incorporated
- ROBERT ALAN BELLMAN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES
- Publication number 20240412954
- Publication date Dec 12, 2024
- Dinkesh HUDERI SOMANNA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COATED GLASS PANE
- Publication number 20240352789
- Publication date Oct 24, 2024
- PILKINGTON GROUP LIMITED
- THOMAS PAUL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESSING KIT SHIELD
- Publication number 20240352574
- Publication date Oct 24, 2024
- Applied Materials, Inc.
- Sundarapandian Ramaling Vijayalaskshmi REDDY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL OXIDE FILM, SEMICONDUCTOR DEVICE, AND METHOD FOR EVALUATING M...
- Publication number 20240321577
- Publication date Sep 26, 2024
- SEMICONDUCTOR ENERGY LABORATORY CO., LTD.
- Toshimitsu OBONAI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Heatable Windshield
- Publication number 20240302574
- Publication date Sep 12, 2024
- Vitro Flat Glass LLC
- Zhixun Ma
- B60 - VEHICLES IN GENERAL
Information Patent Application
Superalloy Target
- Publication number 20240287649
- Publication date Aug 29, 2024
- OERLIKON SURFACE SOLUTIONS AG, PFÄFFIKON
- Peter POLCIK
- B22 - CASTING POWDER METALLURGY
Information Patent Application
Air Gap Formation by Physical Vapor Deposition
- Publication number 20240271266
- Publication date Aug 15, 2024
- Applied Materials, Inc.
- Chengyu LIU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDUCTIVE SILICON SPUTTERING TARGETS
- Publication number 20240271270
- Publication date Aug 15, 2024
- SOLERAS ADVANCED COATINGS BV
- Wilmert DE BOSSCHER
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Optical Filter Structure For Arbitrary Combination Of RGB And IR Wa...
- Publication number 20240274728
- Publication date Aug 15, 2024
- Kingray Technology Co., Ltd.
- Cheng-Hsing TSOU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR COATING A SUBSTRATE WITH A CO-PI MODIFIED BIVO4/WO3 HETE...
- Publication number 20240229218
- Publication date Jul 11, 2024
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Amar Kamal Mohmeadkhair SALIH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS FOR THE PREPARATION OF ALUMINUM SCANDIUM NITRIDE FILMS
- Publication number 20240229221
- Publication date Jul 11, 2024
- Yeda Research and Development Co. Ltd.
- Igor LUBOMIRSKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Ultraviolet Radiation and Atomic Oxygen Barrier Films and Methods o...
- Publication number 20240229227
- Publication date Jul 11, 2024
- 3M Innovative Properties Company
- Sean M. Sweetnam
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
A METHOD OF PASSIVATING SURFACE EFFECTS IN METAL OXIDE LAYERS AND D...
- Publication number 20240224553
- Publication date Jul 4, 2024
- SYDDANSK UNIVERSITET
- Morten MADSEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR DEPOSITION OF DENSE CHROMIUM ON A SUBSTRATE
- Publication number 20240209493
- Publication date Jun 27, 2024
- HYDROMECANIQUE ET FROTTEMENT
- Christophe Heau
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MULTILAYER FILM STRUCTURE AND METHOD FOR PRODUCING SAME
- Publication number 20240158954
- Publication date May 16, 2024
- TOSOH CORPORATION
- Yuya TSUCHIDA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR COATING A SUBSTRATE WITH A CO-PI MODIFIED BIVO4/WO3 HETE...
- Publication number 20240133017
- Publication date Apr 25, 2024
- KING FAHD UNIVERSITY OF PETROLEUM AND MINERALS
- Amar Kamal Mohmeadkhair SALIH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PIEZOELECTRIC BULK LAYERS WITH TILTED C-AXIS ORIENTATION AND METHOD...
- Publication number 20240124968
- Publication date Apr 18, 2024
- Qorvo US, Inc.
- Derya Deniz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Semiconductor Device, Method and Machine of Manufacture
- Publication number 20240093357
- Publication date Mar 21, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Jen-Chun Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
STRAIN SENSOR, FUNCTIONAL FILM, AND METHOD FOR MANUFACTURING SAME
- Publication number 20240003762
- Publication date Jan 4, 2024
- NITTO DENKO CORPORATION
- Satoshi YASUI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEFORMABLE COMPOSITE MATERIAL FOR UNCOVERED SOLAR ENERGY ABSORBENT...
- Publication number 20230400224
- Publication date Dec 14, 2023
- ALMECO GMBH
- Reinhard DASBACH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL FILTER STRUCTURE FOR ARBITRARY COMBINATION OF RGB AND IR WA...
- Publication number 20230335652
- Publication date Oct 19, 2023
- Kingray Technology Co., Ltd.
- Cheng-Hsing TSOU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...
- Publication number 20230257866
- Publication date Aug 17, 2023
- Carl Zeiss SMT GMBH
- Anastasia GONCHAR
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
COATED SUBSTRATES AND METHODS FOR THE PREPARATION THEREOF
- Publication number 20230257885
- Publication date Aug 17, 2023
- National Research Council of Canada
- Dongfang Yang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
OPTICAL DEVICE AND MANUFACTURING METHOD THEREFOR
- Publication number 20230228914
- Publication date Jul 20, 2023
- Canon Kabushiki Kaisha
- Hideo Akiba
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Reactive sputtering

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Device and method for producing layers with improved uniformity in...

Methods for in-situ chamber monitoring

Method for coating a substrate with a Co-PI modified BiVO4/WO3 hete...

Metal foil with carrier

Optical filter and method for manufacturing same

Multilayer film structure and method for producing same

Sanitary equipment part

Method of deposition

Electrolysis electrode and preparation method therefor, electrolysi...

Stain-resistant cooking surface and cookware item or electrical hou...

Ultraviolet radiation and atomic oxygen barrier films and methods o...

Method for coating a substrate with tantalum nitride

Decorative member

Film forming apparatus and film forming method

Coated glass pane

Decoration member and method for manufacturing same

Optical filter structure for arbitrary combination of RGB and IR wa...

Decoration member

Electrostatic jamming devices and methods of making such devices

Jamming device with jamming sheets

Optical device and manufacturing method therefor

Decorative member and manufacturing method therefor

Decoration member

Conductive structure, manufacturing method therefor, and electrode...

Oxidized surface layer on transition metal nitrides: active catalys...

Decoration member

Decoration member

Piezoelectric bulk layers with tilted c-axis orientation and method...

Alkali semi-metal films and method and apparatus for fabricating them

Optical interference filter

Patents Applicationslast 30 patents

METHOD FOR FORMING A BISMUTH/TUNGSTEN OXIDE HETEROSTRUCTURE FILM

METAL/METAL OXIDE DECORATED POLYMER SUBSTRATE-BASED MULTIFUNCTIONAL...

ELECTROLYSIS ELECTRODE AND PREPARATION METHOD THEREFOR, ELECTROLYSI...

REACTIVE-ION DEPOSITION PROCESSES FOR DIELECTRIC MATERIAL FORMATION

FAR-INFRARED TRANSMITTING MEMBER AND METHOD OF MANUFACTURING FAR-IN...

FOLDABLE SUBSTRATES AND METHODS OF MAKING

PROCESS CHAMBERS HAVING MULTIPLE COOLING PLATES

COATED GLASS PANE

PROCESSING KIT SHIELD

METAL OXIDE FILM, SEMICONDUCTOR DEVICE, AND METHOD FOR EVALUATING M...

Heatable Windshield

Superalloy Target

Air Gap Formation by Physical Vapor Deposition

CONDUCTIVE SILICON SPUTTERING TARGETS

Optical Filter Structure For Arbitrary Combination Of RGB And IR Wa...

METHOD FOR COATING A SUBSTRATE WITH A CO-PI MODIFIED BIVO4/WO3 HETE...

PROCESS FOR THE PREPARATION OF ALUMINUM SCANDIUM NITRIDE FILMS

Ultraviolet Radiation and Atomic Oxygen Barrier Films and Methods o...

A METHOD OF PASSIVATING SURFACE EFFECTS IN METAL OXIDE LAYERS AND D...

METHOD FOR DEPOSITION OF DENSE CHROMIUM ON A SUBSTRATE

MULTILAYER FILM STRUCTURE AND METHOD FOR PRODUCING SAME

METHOD FOR COATING A SUBSTRATE WITH A CO-PI MODIFIED BIVO4/WO3 HETE...

PIEZOELECTRIC BULK LAYERS WITH TILTED C-AXIS ORIENTATION AND METHOD...

Semiconductor Device, Method and Machine of Manufacture

STRAIN SENSOR, FUNCTIONAL FILM, AND METHOD FOR MANUFACTURING SAME

DEFORMABLE COMPOSITE MATERIAL FOR UNCOVERED SOLAR ENERGY ABSORBENT...

OPTICAL FILTER STRUCTURE FOR ARBITRARY COMBINATION OF RGB AND IR WA...

METHOD FOR PRODUCING AN OPTICAL ELEMENT, OPTICAL ELEMENT, DEVICE FO...

COATED SUBSTRATES AND METHODS FOR THE PREPARATION THEREOF

OPTICAL DEVICE AND MANUFACTURING METHOD THEREFOR