Reducing size of gun

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CPC
H01J2237/062

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/062Reducing size of gun

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electron gun, electron microscope, three-dimensional additive manuf...
- Patent number 11,398,364
- Issue date Jul 26, 2022
- Jeol Ltd.
- Shinichi Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Nano vacuum tube
- Patent number 11,152,188
- Issue date Oct 19, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsien-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ionization chamber chip for a nano-aperture ion source, method of f...
- Patent number 11,056,315
- Issue date Jul 6, 2021
- National University of Singapore
- Jeroen Anton Van Kan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasmon-excited electron beam array for complementary patterning
- Patent number 10,861,668
- Issue date Dec 8, 2020
- Purdue Research Foundation
- Liang Pan
- G02 - OPTICS
Information Patent Grant
Nano vacuum tube
- Patent number 10,566,173
- Issue date Feb 18, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hsien-Yu Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron gun, charged particle gun, and charged particle beam appar...
- Patent number 9,570,268
- Issue date Feb 14, 2017
- Hitachi High-Technologies Corporation
- Yuta Imai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Photocathode high-frequency electron-gun cavity apparatus
- Patent number 9,224,571
- Issue date Dec 29, 2015
- INTER-UNIVERSITY RESEARCH INSTITUTE CORPORATION
- Junji Urakawa
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Sample observing device and sample observing method
- Patent number 8,884,225
- Issue date Nov 11, 2014
- Ebara Corporation
- Tsutomu Karimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low-power gaseous plasma source
- Patent number 8,664,862
- Issue date Mar 4, 2014
- Centre National de la Recherche Scientifique
- Pascal Sortais
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Small electron gun
- Patent number 8,232,712
- Issue date Jul 31, 2012
- Hitachi I High-Technologies Corporation
- Soichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated sub-nanometer-scale electron beam systems
- Patent number 7,279,686
- Issue date Oct 9, 2007
- Biomed Solutions, LLC
- Conrad W. Schneiker
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Small electron gun
- Patent number 7,238,939
- Issue date Jul 3, 2007
- Hitachi High-Technologies Corporation
- Soichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pattern inspection apparatus and electron beam apparatus
- Patent number 5,557,105
- Issue date Sep 17, 1996
- Fujitsu Limited
- Ichiro Honjo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Self aligning electron beam gun having enhanced thermal and mechani...
- Patent number 5,416,381
- Issue date May 16, 1995
- The United States of America as represented by the United States Department o...
- Raymond D. Scarpetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron optic column and scanning electron microscope
- Patent number 5,399,860
- Issue date Mar 21, 1995
- Kabushiki Kaisha Toshiba
- Motosuke Miyoshi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam projection apparatus
- Patent number 5,319,198
- Issue date Jun 7, 1994
- Pioneer Electronic Corporation
- Yasumitsu Wada
- G11 - INFORMATION STORAGE
Information Patent Grant
Electron beam apparatus and method for driving the same
- Patent number 5,233,196
- Issue date Aug 3, 1993
- Canon Kabushiki Kaisha
- Masahiko Okunuki
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON GUN, ELECTRON MICROSCOPE, THREE-DIMENSIONAL ADDITIVE MANUF...
- Publication number 20210151278
- Publication date May 20, 2021
- JEOL Ltd.
- Shinichi Kitamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AN IONIZATION CHAMBER CHIP FOR A NANO-APERTURE ION SOURCE, METHOD O...
- Publication number 20200211822
- Publication date Jul 2, 2020
- National University of Singapore
- Jeroen Anton VAN KAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
NANO VACUUM TUBE
- Publication number 20200161085
- Publication date May 21, 2020
- Taiwan Semiconductor Manufacturing Co., LTD
- Hsien-Yu CHANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMON-EXCITED ELECTRON BEAM ARRAY FOR COMPLEMENTARY PATTERNING
- Publication number 20190019648
- Publication date Jan 17, 2019
- Purdue Research Foundation
- Liang Pan
- G02 - OPTICS
Information Patent Application
PHOTOCATHODE HIGH-FREQUENCY ELECTRON-GUN CAVITY APPARATUS
- Publication number 20130187541
- Publication date Jul 25, 2013
- Junji Urakawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE OBSERVING DEVICE AND SAMPLE OBSERVING METHOD
- Publication number 20130161511
- Publication date Jun 27, 2013
- EBARA CORPORATION
- Tsutomu Karimata
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE MICROSCOPE
- Publication number 20120217391
- Publication date Aug 30, 2012
- Hiroyasu Shichi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW-POWER GASEOUS PLASMA SOURCE
- Publication number 20110260621
- Publication date Oct 27, 2011
- Pascal Sortais
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
IMPROVED PARTICLE BEAM GENERATOR
- Publication number 20100187433
- Publication date Jul 29, 2010
- NFAB LIMITED
- Derek Anthony Eastham
- B82 - NANO-TECHNOLOGY
Information Patent Application
Small electron gun
- Publication number 20090289186
- Publication date Nov 26, 2009
- Hitachi High-Technologies Corporation
- Soichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Small electron gun
- Publication number 20070236143
- Publication date Oct 11, 2007
- Hitachi High-Technologies Corporation
- Soichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Integrated sub-nanometer-scale electron beam systems
- Publication number 20050092929
- Publication date May 5, 2005
- Conrad W. Schneiker
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
Small electron gun
- Publication number 20050052103
- Publication date Mar 10, 2005
- Soichi Katagiri
- H01 - BASIC ELECTRIC ELEMENTS

Reducing size of gun

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electron gun, electron microscope, three-dimensional additive manuf...

Nano vacuum tube

Ionization chamber chip for a nano-aperture ion source, method of f...

Plasmon-excited electron beam array for complementary patterning

Nano vacuum tube

Electron gun, charged particle gun, and charged particle beam appar...

Photocathode high-frequency electron-gun cavity apparatus

Sample observing device and sample observing method

Low-power gaseous plasma source

Small electron gun

Integrated sub-nanometer-scale electron beam systems

Small electron gun

Pattern inspection apparatus and electron beam apparatus

Self aligning electron beam gun having enhanced thermal and mechani...

Electron optic column and scanning electron microscope

Electron beam projection apparatus

Electron beam apparatus and method for driving the same

Patents Applicationslast 30 patents

ELECTRON GUN, ELECTRON MICROSCOPE, THREE-DIMENSIONAL ADDITIVE MANUF...

AN IONIZATION CHAMBER CHIP FOR A NANO-APERTURE ION SOURCE, METHOD O...

NANO VACUUM TUBE

PLASMON-EXCITED ELECTRON BEAM ARRAY FOR COMPLEMENTARY PATTERNING

PHOTOCATHODE HIGH-FREQUENCY ELECTRON-GUN CAVITY APPARATUS

SAMPLE OBSERVING DEVICE AND SAMPLE OBSERVING METHOD

CHARGED PARTICLE MICROSCOPE

LOW-POWER GASEOUS PLASMA SOURCE

IMPROVED PARTICLE BEAM GENERATOR

Small electron gun

Small electron gun

Integrated sub-nanometer-scale electron beam systems

Small electron gun