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Reduction of the copper oxide, treatment of the oxide layer

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  • H01L21/165
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HELECTRICITY H01Electric elements H01LSEMICONDUCTOR DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

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H01L21/165Reduction of the copper oxide, treatment of the oxide layer
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    • Kevin K. Chan
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    2496721
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Patents Applicationslast 30 patents