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H01J2237/2823

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2823Resolution

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Method and system for automatic zone axis alignment
- Patent number 11,211,222
- Issue date Dec 28, 2021
- FEI Company
- John J. Flanagan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration measurement method and electron microscope
- Patent number 10,840,058
- Issue date Nov 17, 2020
- Jeol Ltd.
- Yuji Kohno
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus, observation method using charged p...
- Patent number 10,763,074
- Issue date Sep 1, 2020
- HITACHI HIGH-TECH CORPORATION
- Hiroyuki Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus, observation method using charged p...
- Patent number 10,453,650
- Issue date Oct 22, 2019
- Hitachi High-Technologies Corporation
- Hiroyuki Chiba
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and electron trajectory adjustment met...
- Patent number 10,262,830
- Issue date Apr 16, 2019
- Hitachi, Ltd.
- Daisuke Bizen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Transmission electron microscope sample alignment system and method
- Patent number 10,067,078
- Issue date Sep 4, 2018
- King Abdullah University of Science and Technology
- Daliang Zhang
- G01 - MEASURING TESTING
Information Patent Grant
Pattern dimension measurement method using electron microscope, pat...
- Patent number 9,671,223
- Issue date Jun 6, 2017
- Hitachi High-Technologies Corporation
- Chie Shishido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope and a method for measuring the defocus variatio...
- Patent number 9,076,630
- Issue date Jul 7, 2015
- Forschungszentrum Juelich GmbH
- Andreas Thust
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for determining distortions in a particle-optical apparatus
- Patent number 8,885,973
- Issue date Nov 11, 2014
- FEI Company
- Bernd Rieger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of use for a multipole detector for a transmission electron...
- Patent number 8,692,196
- Issue date Apr 8, 2014
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope
- Patent number 8,664,599
- Issue date Mar 4, 2014
- Jeol Ltd.
- Fumio Hosokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for determining distortions in a particle-optical apparatus
- Patent number 8,447,133
- Issue date May 21, 2013
- FEI Company
- Bernd Rieger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and electron microscope for measuring the similarity of two-...
- Patent number 8,351,710
- Issue date Jan 8, 2013
- Forschungszentrum Juelich GmbH
- Andreas Thust
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and its system for calibrating measured data between differe...
- Patent number 8,214,166
- Issue date Jul 3, 2012
- Hitachi High-Technologies Corporation
- Maki Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Variable rate scanning in an electron microscope
- Patent number 8,207,499
- Issue date Jun 26, 2012
- Applied Materials Israel, Ltd.
- Amir Shoham
- G01 - MEASURING TESTING
Information Patent Grant
Sample and method for evaluating resolution of scanning electron mi...
- Patent number 8,022,356
- Issue date Sep 20, 2011
- Hitachi High-Technologies Corporation
- Mayuka Oosaki
- G01 - MEASURING TESTING
Information Patent Grant
Image evaluation method and microscope
- Patent number 7,805,023
- Issue date Sep 28, 2010
- Hitachi, Ltd.
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for measuring information transfer limit in transmission ele...
- Patent number 7,732,766
- Issue date Jun 8, 2010
- Hitachi, Ltd.
- Takaho Yoshida
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and charged particle beam resolutio...
- Patent number 7,612,347
- Issue date Nov 3, 2009
- Nuflare Technology, Inc.
- Makoto Hiramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Standard reference component for calibration, fabrication method fo...
- Patent number 7,612,334
- Issue date Nov 3, 2009
- Hitachi High-Technologies Corporation
- Yoshinori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Sample and method for evaluating resolution of scanning electron mi...
- Patent number 7,605,364
- Issue date Oct 20, 2009
- Hitachi High-Technologies Corporation
- Mayuka Oosaki
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle microscopy using super resolution
- Patent number 7,598,492
- Issue date Oct 6, 2009
- KLA-Tencor Technologies Corporation
- Kenneth J. Krzeczowski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for generating a focused beam using duality mo...
- Patent number 7,528,380
- Issue date May 5, 2009
- Stuart G. Mirell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron microscope, measuring method using the same, electron micr...
- Patent number 7,399,964
- Issue date Jul 15, 2008
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Grant
Measurement of critical dimension and quantification of electron be...
- Patent number 7,397,252
- Issue date Jul 8, 2008
- International Business Machines Corporation
- Lin Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electric charged particle beam microscopy, electric charged particl...
- Patent number 7,372,051
- Issue date May 13, 2008
- Hitachi High-Technologies Corporation
- Ruriko Tsuneta
- G01 - MEASURING TESTING
Information Patent Grant
Image evaluation method and microscope
- Patent number 7,340,111
- Issue date Mar 4, 2008
- Hitachi, Ltd.
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Image evaluation method and microscope
- Patent number 7,236,651
- Issue date Jun 26, 2007
- Hitachi, Ltd.
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged-particle-beam mapping projection-optical systems and method...
- Patent number 7,183,562
- Issue date Feb 27, 2007
- Nikon Corporation
- Hiroshi Nishimura
- G01 - MEASURING TESTING
Information Patent Grant
Charged-particle-beam mapping projection-optical systems and method...
- Patent number 7,064,339
- Issue date Jun 20, 2006
- Nikon Corporation
- Hiroshi Nishimura
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
METHOD AND SYSTEM FOR AUTOMATIC ZONE AXIS ALIGNMENT
- Publication number 20220076917
- Publication date Mar 10, 2022
- FEI Company
- John J. FLANAGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND SYSTEM FOR AUTOMATIC ZONE AXIS ALIGNMENT
- Publication number 20210202205
- Publication date Jul 1, 2021
- FEI Company
- John J. FLANAGAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS
- Publication number 20210065335
- Publication date Mar 4, 2021
- Covidien LP
- RYAN C. ARTALE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, OBSERVATION METHOD USING CHARGED P...
- Publication number 20200013583
- Publication date Jan 9, 2020
- Hitachi High-Technologies Corporation
- Hiroyuki CHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS
- Publication number 20190172185
- Publication date Jun 6, 2019
- Covidien LP
- RYAN C. ARTALE
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
ABERRATION MEASUREMENT METHOD AND ELECTRON MICROSCOPE
- Publication number 20190066968
- Publication date Feb 28, 2019
- JEOL Ltd.
- Yuji Kohno
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS, OBSERVATION METHOD USING CHARGED P...
- Publication number 20180323035
- Publication date Nov 8, 2018
- Hitachi High-Technologies Corporation
- Hiroyuki CHIBA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE AND ELECTRON TRAJECTORY ADJUSTMENT MET...
- Publication number 20170263415
- Publication date Sep 14, 2017
- Hitachi, Ltd
- Daisuke BIZEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETERMINING DISTORTIONS IN A PARTICLE-OPTICAL APPARATUS
- Publication number 20130266240
- Publication date Oct 10, 2013
- FEI Company
- Bernd Rieger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Pattern Dimension Measurement Method Using Electron Microscope, Pat...
- Publication number 20130166240
- Publication date Jun 27, 2013
- Hitachi High-Technologies Corporation
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR DETERMINING DISTORTIONS IN A PARTICLE-OPTICAL APPARATUS
- Publication number 20100246993
- Publication date Sep 30, 2010
- FEI Company
- Bernd Rieger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Electron Microscope
- Publication number 20100224781
- Publication date Sep 9, 2010
- JEOL Ltd.
- Fumio Hosokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Sample and method for evaluating resolution of scanning electron mi...
- Publication number 20100133426
- Publication date Jun 3, 2010
- Mayuka Oosaki
- G01 - MEASURING TESTING
Information Patent Application
METHOD FOR CORRECTING DISTORTIONS IN A PARTICLE-OPTICAL APPARATUS
- Publication number 20100072366
- Publication date Mar 25, 2010
- FEI Company
- Peter Christiaan Tiemeijer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VARIABLE RATE SCANNING IN AN ELECTRON MICROSCOPE
- Publication number 20100072365
- Publication date Mar 25, 2010
- Amir Shoham
- G01 - MEASURING TESTING
Information Patent Application
ELECTRON MICROSCOPE AND A METHOD FOR MEASURING THE DEFOCUS VARIATIO...
- Publication number 20100032565
- Publication date Feb 11, 2010
- Andreas Thust
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND ELECTRON MICROSCOPE FOR MEASURING THE SIMILARITY OF TWO-...
- Publication number 20090268969
- Publication date Oct 29, 2009
- FORSCHUNGSZENTRUM JUELICH GMBH
- Andreas Thust
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method of determination of resolution of scanning electron microscope
- Publication number 20090121131
- Publication date May 14, 2009
- Arkady Nikitin
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Method and Its System for Calibrating Measured Data Between Differe...
- Publication number 20080319696
- Publication date Dec 25, 2008
- Maki Tanaka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STANDARD REFERENCE COMPONENT FOR CALIBRATION, FABRICATION METHOD FO...
- Publication number 20080121791
- Publication date May 29, 2008
- Yoshinori Nakayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for measuring information transfer limit in transmission ele...
- Publication number 20080099677
- Publication date May 1, 2008
- Hitachi, Ltd.
- Takaho YOSHIDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron microscope and scanning probe microscope calibration device
- Publication number 20080067370
- Publication date Mar 20, 2008
- John Patrick McCaffrey
- G01 - MEASURING TESTING
Information Patent Application
MEASUREMENT OF CRITICAL DIMENSION AND QUANTIFICATION OF ELECTRON BE...
- Publication number 20080067373
- Publication date Mar 20, 2008
- International Business Machines Corporation
- Lin Zhou
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SAMPLE AND METHOD FOR EVALUATING RESOLUTION OF SCANNING ELECTRON MI...
- Publication number 20080067337
- Publication date Mar 20, 2008
- Mayuka Oosaki
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND CHARGED PARTICLE BEAM RESOLUTIO...
- Publication number 20080011963
- Publication date Jan 17, 2008
- NuFlare Technology, Inc.
- Makoto HIRAMOTO
- B82 - NANO-TECHNOLOGY
Information Patent Application
Image evaluation method and microscope
- Publication number 20070280559
- Publication date Dec 6, 2007
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged-particle-beam mapping projection-optical systems and method...
- Publication number 20060192120
- Publication date Aug 31, 2006
- NIKON CORPORATION
- Hiroshi Nishimura
- G01 - MEASURING TESTING
Information Patent Application
Electric charged particle beam microscopy, electric charged particl...
- Publication number 20060038125
- Publication date Feb 23, 2006
- Ruriko Tsuneta
- G01 - MEASURING TESTING
Information Patent Application
Electron microscope, measuring method using the same, electron micr...
- Publication number 20050247860
- Publication date Nov 10, 2005
- Chie Shishido
- G01 - MEASURING TESTING
Information Patent Application
Image evaluation method and microscope
- Publication number 20050199811
- Publication date Sep 15, 2005
- Tohru Ishitani
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Method and system for automatic zone axis alignment

Aberration measurement method and electron microscope

Charged particle beam apparatus, observation method using charged p...

Charged particle beam apparatus, observation method using charged p...

Scanning electron microscope and electron trajectory adjustment met...

Transmission electron microscope sample alignment system and method

Pattern dimension measurement method using electron microscope, pat...

Electron microscope and a method for measuring the defocus variatio...

Method for determining distortions in a particle-optical apparatus

Method of use for a multipole detector for a transmission electron...

Electron microscope

Method for determining distortions in a particle-optical apparatus

Method and electron microscope for measuring the similarity of two-...

Method and its system for calibrating measured data between differe...

Variable rate scanning in an electron microscope

Sample and method for evaluating resolution of scanning electron mi...

Image evaluation method and microscope

Method for measuring information transfer limit in transmission ele...

Charged particle beam apparatus and charged particle beam resolutio...

Standard reference component for calibration, fabrication method fo...

Sample and method for evaluating resolution of scanning electron mi...

Charged particle microscopy using super resolution

Method and apparatus for generating a focused beam using duality mo...

Electron microscope, measuring method using the same, electron micr...

Measurement of critical dimension and quantification of electron be...

Electric charged particle beam microscopy, electric charged particl...

Image evaluation method and microscope

Image evaluation method and microscope

Charged-particle-beam mapping projection-optical systems and method...

Charged-particle-beam mapping projection-optical systems and method...

Patents Applicationslast 30 patents

METHOD AND SYSTEM FOR AUTOMATIC ZONE AXIS ALIGNMENT

METHOD AND SYSTEM FOR AUTOMATIC ZONE AXIS ALIGNMENT

BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS

CHARGED PARTICLE BEAM APPARATUS, OBSERVATION METHOD USING CHARGED P...

BLADE DEPLOYMENT MECHANISMS FOR SURGICAL FORCEPS

ABERRATION MEASUREMENT METHOD AND ELECTRON MICROSCOPE

CHARGED PARTICLE BEAM APPARATUS, OBSERVATION METHOD USING CHARGED P...

SCANNING ELECTRON MICROSCOPE AND ELECTRON TRAJECTORY ADJUSTMENT MET...

METHOD FOR DETERMINING DISTORTIONS IN A PARTICLE-OPTICAL APPARATUS

Pattern Dimension Measurement Method Using Electron Microscope, Pat...

METHOD FOR DETERMINING DISTORTIONS IN A PARTICLE-OPTICAL APPARATUS

Electron Microscope

Sample and method for evaluating resolution of scanning electron mi...

METHOD FOR CORRECTING DISTORTIONS IN A PARTICLE-OPTICAL APPARATUS

VARIABLE RATE SCANNING IN AN ELECTRON MICROSCOPE

ELECTRON MICROSCOPE AND A METHOD FOR MEASURING THE DEFOCUS VARIATIO...

METHOD AND ELECTRON MICROSCOPE FOR MEASURING THE SIMILARITY OF TWO-...

Method of determination of resolution of scanning electron microscope

Method and Its System for Calibrating Measured Data Between Differe...

STANDARD REFERENCE COMPONENT FOR CALIBRATION, FABRICATION METHOD FO...

Method for measuring information transfer limit in transmission ele...

Electron microscope and scanning probe microscope calibration device

MEASUREMENT OF CRITICAL DIMENSION AND QUANTIFICATION OF ELECTRON BE...

SAMPLE AND METHOD FOR EVALUATING RESOLUTION OF SCANNING ELECTRON MI...

CHARGED PARTICLE BEAM APPARATUS AND CHARGED PARTICLE BEAM RESOLUTIO...

Image evaluation method and microscope

Charged-particle-beam mapping projection-optical systems and method...

Electric charged particle beam microscopy, electric charged particl...

Electron microscope, measuring method using the same, electron micr...

Image evaluation method and microscope