Resonators

Industry

CPC
H01J37/32247

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J37/00Discharge tubes with provision for introducing objects or material to be exposed to the discharge

Current Industry

H01J37/32247Resonators

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Modular reactor for microwave plasma-assisted deposition
- Patent number 11,859,279
- Issue date Jan 2, 2024
- DIAM CONCEPT
- Alix Gicquel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular microwave source with local lorentz force
- Patent number 11,721,532
- Issue date Aug 8, 2023
- Applied Materials, Inc.
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Atmospheric cold plasma jet coating and surface treatment
- Patent number 11,560,627
- Issue date Jan 24, 2023
- Starfire Industries LLC
- Brian Edward Jurczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spacecraft propulsion devices and systems with microwave excitation
- Patent number 11,527,387
- Issue date Dec 13, 2022
- MOMENTUS SPACE LLC
- Jason Hummelt
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Grant
Ion implantation system and linear accelerator having novel acceler...
- Patent number 11,476,087
- Issue date Oct 18, 2022
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Microwave plasma chemical vapor deposition device and application t...
- Patent number 11,469,077
- Issue date Oct 11, 2022
- FD3M, Inc.
- Yi Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular microwave plasma source
- Patent number 11,404,248
- Issue date Aug 2, 2022
- Applied Materials, Inc.
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
System and method for decapsulation of plastic integrated circuit p...
- Patent number 11,295,968
- Issue date Apr 5, 2022
- JIACO Instruments Holding B.V.
- Jiaqi Tang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focalized microwave plasma reactor
- Patent number 11,183,369
- Issue date Nov 23, 2021
- Industrial Technology Research Institute
- Chih-Chen Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonator coil having an asymmetrical profile
- Patent number 11,094,504
- Issue date Aug 17, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Resonant structure for electron cyclotron resonant (ECR) plasma ion...
- Patent number 11,037,765
- Issue date Jun 15, 2021
- Tokyo Electron Limited
- Barton Lane
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular microwave source with local Lorentz force
- Patent number 11,037,764
- Issue date Jun 15, 2021
- Applied Materials, Inc.
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Spacecraft propulsion devices and systems with microwave excitation
- Patent number 10,910,198
- Issue date Feb 2, 2021
- MOMENTUS INC.
- Jason Hummelt
- B64 - AIRCRAFT AVIATION COSMONAUTICS
Information Patent Grant
Portable plasma source for optical spectroscopy
- Patent number 10,900,907
- Issue date Jan 26, 2021
- Radom Corporation
- Ashok Menon
- G01 - MEASURING TESTING
Information Patent Grant
Plasma processing apparatus and gas introduction mechanism
- Patent number 10,804,078
- Issue date Oct 13, 2020
- Tokyo Electron Limited
- Yutaka Fujino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular microwave plasma source
- Patent number 10,748,745
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave plasma reactor for manufacturing synthetic diamond material
- Patent number 10,734,198
- Issue date Aug 4, 2020
- Element Six Technologies Limited
- John Robert Brandon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Symmetric and irregular shaped plasmas using modular microwave sources
- Patent number 10,707,058
- Issue date Jul 7, 2020
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma generator assembly for mass spectroscopy
- Patent number 10,337,998
- Issue date Jul 2, 2019
- Radom Corporation
- Jovan Jevtic
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for plasma ignition with a self-resonating device
- Patent number 10,076,020
- Issue date Sep 11, 2018
- MKS Instruments, Inc.
- Shaun T. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for manufacturing insulating film laminated structure
- Patent number 9,887,081
- Issue date Feb 6, 2018
- Tokyo Electron Limited
- Junya Miyahara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual signal coaxial cavity resonator plasma generation
- Patent number 9,873,315
- Issue date Jan 23, 2018
- West Virginia University
- Michael J. Spencer
- B60 - VEHICLES IN GENERAL
Information Patent Grant
Apparatus and method for plasma ignition with a self-resonating device
- Patent number 9,736,920
- Issue date Aug 15, 2017
- MKS Instruments, Inc.
- Shaun T. Smith
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus for performing a plasma chemical vapour deposition process
- Patent number 9,580,808
- Issue date Feb 28, 2017
- Draka Comteq B.V.
- Igor Milicevic
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma tuning rods in microwave resonator processing systems
- Patent number 9,396,955
- Issue date Jul 19, 2016
- Tokyo Electron Limited
- Jianping Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Microwave processing apparatus and control method thereof
- Patent number 9,337,001
- Issue date May 10, 2016
- Tokyo Electron Limited
- Mitsutoshi Ashida
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma generation device with microstrip resonator
- Patent number 9,330,889
- Issue date May 3, 2016
- Agilent Technologies Inc.
- Mark Denning
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Microwave resonant cavity
- Patent number 9,237,639
- Issue date Jan 12, 2016
- Recarbon, Inc.
- Sang Hun Lee
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Plasma tuning rods in microwave resonator plasma sources
- Patent number 9,111,727
- Issue date Aug 18, 2015
- Tokyo Electron Limited
- Jianping Zhao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma microwave resonant cavity
- Patent number 8,807,078
- Issue date Aug 19, 2014
- Yangze Optical Fibre and Cable Company Ltd.
- Jinyan Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MICROWAVE PLASMA APPLICATOR WITH REPLACEABLE DIELECTRIC PLATE
- Publication number 20240379331
- Publication date Nov 14, 2024
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Apparatus
- Publication number 20240339300
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240242936
- Publication date Jul 18, 2024
- TOKYO ELECTRON LIMITED
- Masaki HIRAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND ASSEMBLY METHOD OF RESONATOR ARRAY...
- Publication number 20240186114
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240186115
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240186113
- Publication date Jun 6, 2024
- TOKYO ELECTRON LIMITED
- Kazushi KANEKO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20240014010
- Publication date Jan 11, 2024
- Hitachi High-Tech Corporation
- Tetsuo KAWANABE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTA...
- Publication number 20230395356
- Publication date Dec 7, 2023
- Applied Materials, Inc.
- Anantha Subramani
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230352274
- Publication date Nov 2, 2023
- Hitachi High-Tech Corporation
- Hitoshi Tamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
AUXILIARY PLASMA SOURCE FOR ROBUST IGNITION AND RESTRIKES IN A PLAS...
- Publication number 20230187176
- Publication date Jun 15, 2023
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT
- Publication number 20230160067
- Publication date May 25, 2023
- Starfire Industires, LLC
- Brian Edward Jurczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Spacecraft Propulsion Devices and Systems with Microwave Excitation
- Publication number 20230068871
- Publication date Mar 2, 2023
- MOMENTUS SPACE LLC
- Jason Hummelt
- B64 - AIRCRAFT AVIATION COSMONAUTICS
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20230031447
- Publication date Feb 2, 2023
- TOKYO ELECTRON LIMITED
- Taro IKEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR MICROWAVE PLASMA SOURCE
- Publication number 20220344131
- Publication date Oct 27, 2022
- Applied Materials, Inc.
- Philip Allan KRAUS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION SYSTEM AND LINEAR ACCELERATOR HAVING NOVEL ACCELER...
- Publication number 20220037116
- Publication date Feb 3, 2022
- Applied Materials, Inc.
- Frank Sinclair
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE
- Publication number 20210343500
- Publication date Nov 4, 2021
- Applied Materials, Inc.
- Costel Biloiu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR MICROWAVE SOURCE WITH LOCAL LORENTZ FORCE
- Publication number 20210287882
- Publication date Sep 16, 2021
- Applied Materials, Inc.
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Spacecraft Propulsion Devices and Systems with Microwave Excitation
- Publication number 20210183624
- Publication date Jun 17, 2021
- MOMENTUS INC.
- Jason Hummelt
- B64 - AIRCRAFT AVIATION COSMONAUTICS
Information Patent Application
MODULAR REACTOR FOR MICROWAVE PLASMA-ASSISTED DEPOSITION
- Publication number 20210087676
- Publication date Mar 25, 2021
- DIAM CONCEPT
- Alix GICQUEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYMMETRIC AND IRREGULAR SHAPED PLASMAS USING MODULAR MICROWAVE SOURCES
- Publication number 20200402769
- Publication date Dec 24, 2020
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR MICROWAVE PLASMA SOURCE
- Publication number 20200381217
- Publication date Dec 3, 2020
- Philip Allan Kraus
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Spacecraft Propulsion Devices and Systems with Microwave Excitation
- Publication number 20200294772
- Publication date Sep 17, 2020
- MOMENTUS INC.
- Jason Hummelt
- F03 - MACHINES OR ENGINES FOR LIQUIDS WIND, SPRING WEIGHT AND MISCELLANEOUS M...
Information Patent Application
FOCALIZED MICROWAVE PLASMA REACTOR
- Publication number 20200211825
- Publication date Jul 2, 2020
- Industrial Technology Research Institute
- Chih-Chen Chang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RESONANT STRUCTURE FOR ELECTRON CYCLOTRON RESONANT (ECR) PLASMA ION...
- Publication number 20200013594
- Publication date Jan 9, 2020
- TOKYO ELECTRON LIMITED
- Barton Lane
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION DEVICE AND APPLICATION T...
- Publication number 20190326097
- Publication date Oct 24, 2019
- FD3M, Inc.
- Yi Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT
- Publication number 20180342379
- Publication date Nov 29, 2018
- Starfire Industries LLC
- Brian Edward Jurczyk
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR MICROWAVE SOURCE WITH LOCAL LORENTZ FORCE
- Publication number 20180323043
- Publication date Nov 8, 2018
- Applied Materials, Inc.
- Philip Allan Kraus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYMMETRIC AND IRREGULAR SHAPED PLASMAS USING MODULAR MICROWAVE SOURCES
- Publication number 20180294143
- Publication date Oct 11, 2018
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Portable Plasma Source for Optical Spectroscopy
- Publication number 20180238807
- Publication date Aug 23, 2018
- Radom Corporation
- Ashok Menon
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUAL SIGNAL COAXIAL CAVITY RESONATOR PLASMA GENERATION
- Publication number 20170361694
- Publication date Dec 21, 2017
- Plasma Igniter, LLC
- Michael J. Spencer
- B60 - VEHICLES IN GENERAL

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Modular reactor for microwave plasma-assisted deposition

Modular microwave source with local lorentz force

Atmospheric cold plasma jet coating and surface treatment

Spacecraft propulsion devices and systems with microwave excitation

Ion implantation system and linear accelerator having novel acceler...

Microwave plasma chemical vapor deposition device and application t...

Modular microwave plasma source

System and method for decapsulation of plastic integrated circuit p...

Focalized microwave plasma reactor

Resonator coil having an asymmetrical profile

Resonant structure for electron cyclotron resonant (ECR) plasma ion...

Modular microwave source with local Lorentz force

Spacecraft propulsion devices and systems with microwave excitation

Portable plasma source for optical spectroscopy

Plasma processing apparatus and gas introduction mechanism

Modular microwave plasma source

Microwave plasma reactor for manufacturing synthetic diamond material

Symmetric and irregular shaped plasmas using modular microwave sources

Plasma generator assembly for mass spectroscopy

Apparatus and method for plasma ignition with a self-resonating device

Method for manufacturing insulating film laminated structure

Dual signal coaxial cavity resonator plasma generation

Apparatus and method for plasma ignition with a self-resonating device

Apparatus for performing a plasma chemical vapour deposition process

Plasma tuning rods in microwave resonator processing systems

Microwave processing apparatus and control method thereof

Plasma generation device with microstrip resonator

Microwave resonant cavity

Plasma tuning rods in microwave resonator plasma sources

Plasma microwave resonant cavity

Patents Applicationslast 30 patents

MICROWAVE PLASMA APPLICATOR WITH REPLACEABLE DIELECTRIC PLATE

Plasma Processing Apparatus

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS AND ASSEMBLY METHOD OF RESONATOR ARRAY...

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA PROCESSING APPARATUS

PLASMA CHAMBER WITH GAS CROSS-FLOW, MICROWAVE RESONATORS AND A ROTA...

PLASMA PROCESSING APPARATUS

AUXILIARY PLASMA SOURCE FOR ROBUST IGNITION AND RESTRIKES IN A PLAS...

ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT

Spacecraft Propulsion Devices and Systems with Microwave Excitation

PLASMA PROCESSING APPARATUS

MODULAR MICROWAVE PLASMA SOURCE

ION IMPLANTATION SYSTEM AND LINEAR ACCELERATOR HAVING NOVEL ACCELER...

RESONATOR COIL HAVING AN ASYMMETRICAL PROFILE

MODULAR MICROWAVE SOURCE WITH LOCAL LORENTZ FORCE

Spacecraft Propulsion Devices and Systems with Microwave Excitation

MODULAR REACTOR FOR MICROWAVE PLASMA-ASSISTED DEPOSITION

SYMMETRIC AND IRREGULAR SHAPED PLASMAS USING MODULAR MICROWAVE SOURCES

MODULAR MICROWAVE PLASMA SOURCE

Spacecraft Propulsion Devices and Systems with Microwave Excitation

FOCALIZED MICROWAVE PLASMA REACTOR

RESONANT STRUCTURE FOR ELECTRON CYCLOTRON RESONANT (ECR) PLASMA ION...

MICROWAVE PLASMA CHEMICAL VAPOR DEPOSITION DEVICE AND APPLICATION T...

ATMOSPHERIC COLD PLASMA JET COATING AND SURFACE TREATMENT

MODULAR MICROWAVE SOURCE WITH LOCAL LORENTZ FORCE

SYMMETRIC AND IRREGULAR SHAPED PLASMAS USING MODULAR MICROWAVE SOURCES

Portable Plasma Source for Optical Spectroscopy

DUAL SIGNAL COAXIAL CAVITY RESONATOR PLASMA GENERATION