Rigid and flat substrates

Industry

CPC
C23C16/4582

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CCHEMISTRY METALLURGY C23Surface treatment C23CCOATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating

Current Industry

C23C16/4582Rigid and flat substrates

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Atomic layer deposition part coating chamber
- Patent number 12,074,010
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Michael R. Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Thin substrate handling via edge clamping
- Patent number 11,996,315
- Issue date May 28, 2024
- Applied Materials, Inc.
- Abhishek Chowdhury
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus and plasma processing method
- Patent number 11,996,268
- Issue date May 28, 2024
- Tokyo Electron Limited
- Toshihiko Iwao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Directional deposition for semiconductor fabrication
- Patent number 11,955,338
- Issue date Apr 9, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Chun Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Automated conveyance of articles in chemical vapor processing
- Patent number 11,946,141
- Issue date Apr 2, 2024
- Hewlett-Packard Development Company, L.P.
- Michael Anthony Crockett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Runout and wobble measurement fixtures
- Patent number 11,946,137
- Issue date Apr 2, 2024
- ASM IP Holding B.V.
- Aniket Nitin Patil
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Susceptor with ring to limit backside deposition
- Patent number 11,885,019
- Issue date Jan 30, 2024
- ASM IP Holding B.V.
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Metal plate for manufacturing deposition mask, method for manufactu...
- Patent number 11,732,361
- Issue date Aug 22, 2023
- Dai Nippon Printing Co., Ltd.
- Hiroki Oka
- C21 - METALLURGY OF IRON
Information Patent Grant
Substrate processing method and substrate processing apparatus
- Patent number 11,732,357
- Issue date Aug 22, 2023
- Tokyo Electron Limited
- Tsuyoshi Takahashi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Film forming apparatus
- Patent number 11,732,360
- Issue date Aug 22, 2023
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Takahiro Hiramatsu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma induced modification of silicon carbide surface
- Patent number 11,692,267
- Issue date Jul 4, 2023
- Applied Materials, Inc.
- Francis Kanyiri Mungai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, recording medium, and fluid circula...
- Patent number 11,694,907
- Issue date Jul 4, 2023
- Kokusai Electric Corporation
- Toshiki Fujino
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thin film forming apparatus and radical unit for forming thin film
- Patent number 11,661,656
- Issue date May 30, 2023
- EQ TECH PLUS CO., LTD.
- Dong Hwa Shin
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Directional deposition for semiconductor fabrication
- Patent number 11,569,090
- Issue date Jan 31, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Chun Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for etching substrate
- Patent number 11,424,128
- Issue date Aug 23, 2022
- Tokyo Electron Limited
- Yuji Asakawa
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas supplying unit of substrate treating apparatus
- Patent number 11,408,071
- Issue date Aug 9, 2022
- Semes Co., Ltd.
- Hyoung Kyu Son
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing device having connection plates, substrate pro...
- Patent number 11,339,476
- Issue date May 24, 2022
- ASM IP Holding B.V.
- Naoto Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate loading in an ALD reactor
- Patent number 11,280,001
- Issue date Mar 22, 2022
- Picosun Oy
- Vaino Kilpi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum chamber arrangement and method for processing a substrate
- Patent number 11,244,845
- Issue date Feb 8, 2022
- VON ARDENNE Asset GmbH & Co. KG
- Joerg Pollack
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Susceptor with ring to limit backside deposition
- Patent number 11,085,112
- Issue date Aug 10, 2021
- ASM IP Holding B.V.
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Directional deposition for semiconductor fabrication
- Patent number 11,075,079
- Issue date Jul 27, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Shih-Chun Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reactor system for sublimation of pre-clean byproducts and method t...
- Patent number 11,053,585
- Issue date Jul 6, 2021
- John Tolle
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate carrier
- Patent number 10,964,568
- Issue date Mar 30, 2021
- Meyer Burger (Germany) GmbH
- Sebastian Raschke
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus
- Patent number 10,950,449
- Issue date Mar 16, 2021
- ASM IP Holding B.V.
- Wataru Adachi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Protective plate, substrate processing apparatus, and method of man...
- Patent number 10,731,254
- Issue date Aug 4, 2020
- Kokusai Electric Corporation
- Shuhei Saido
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate holder for graphene film synthesis, and uses thereof
- Patent number 10,704,140
- Issue date Jul 7, 2020
- International Business Machines Corporation
- Ageeth A. Bol
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Film forming apparatus and film forming method
- Patent number 10,643,839
- Issue date May 5, 2020
- Tokyo Electron Limited
- Ayuta Suzuki
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas diffusion device and film-forming apparatus
- Patent number 10,619,240
- Issue date Apr 14, 2020
- WUHAN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO., LTD.
- Gaozhen Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate processing apparatus, method of manufacturing semiconduct...
- Patent number 10,529,605
- Issue date Jan 7, 2020
- Kokusai Electric Corporation
- Takayuki Nakada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for forming boron-doped silicon germanium film...
- Patent number 10,529,721
- Issue date Jan 7, 2020
- Tokyo Electron Limited
- Mitsuhiro Okada
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20240420926
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RUNOUT AND WOBBLE MEASUREMENT FIXTURES
- Publication number 20240218508
- Publication date Jul 4, 2024
- ASM IP HOLDING B.V.
- Aniket Nitin Patil
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
SUBSTRATE PROCESSING APPARATUS FOR TEMPERATURE MEASUREMENT OF A MOV...
- Publication number 20240068099
- Publication date Feb 29, 2024
- Evatec AG
- Silvio GEES
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT PLATE FOR DEPOSITING MATERIAL ON EDGES OF A SUBST...
- Publication number 20230197880
- Publication date Jun 22, 2023
- Commissariat A L'Energie Atomique et Aux Energies Alternatives
- Wilfried FAVRE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOUND STRUCTURE AND FORMING METHOD THEREOF
- Publication number 20230175122
- Publication date Jun 8, 2023
- Seoul National University R&DB Foundation
- Jungwon PARK
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20230167554
- Publication date Jun 1, 2023
- TOKYO ELECTRON LIMITED
- Tatsuo MATSUDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Directional Deposition for Semiconductor Fabrication
- Publication number 20230170218
- Publication date Jun 1, 2023
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Chun Huang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20230074149
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Michael R. RICE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEMICONDUCTOR FABRICATION APPARATUS AND FABRICATION METHOD
- Publication number 20230045027
- Publication date Feb 9, 2023
- Samsung Electronics Co., Ltd.
- Myoung-Kyu Oh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE TREATING METHOD
- Publication number 20220307130
- Publication date Sep 29, 2022
- SCREEN Holdings Co., Ltd.
- Shogo Kunieda
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEM...
- Publication number 20220223440
- Publication date Jul 14, 2022
- LAM RESEARCH CORPORATION
- Ravi KUMAR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA INDUCED MODIFICATION OF SILICON CARBIDE SURFACE
- Publication number 20220205095
- Publication date Jun 30, 2022
- Applied Materials, Inc.
- Francis Kanyiri Mungai
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AUTOMATED CONVEYANCE OF ARTICLES IN CHEMICAL VAPOR PROCESSING
- Publication number 20220195596
- Publication date Jun 23, 2022
- Hewlett-Packard Development Company, L.P.
- Michael Anthony Crockett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RUNOUT AND WOBBLE MEASUREMENT FIXTURES
- Publication number 20220186369
- Publication date Jun 16, 2022
- ASM IP HOLDING B.V.
- Aniket Nitin Patil
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FIXTURE AND METHOD FOR DETERMINING POSITION OF A TARGET IN A REACTI...
- Publication number 20220189804
- Publication date Jun 16, 2022
- ASM IP HOLDING B.V.
- Siyao Luan
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN SUBSTRATE HANDLING VIA EDGE CLAMPING
- Publication number 20220157635
- Publication date May 19, 2022
- Applied Materials, Inc.
- Abhishek CHOWDHURY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK WITH POWDER COATING
- Publication number 20220130705
- Publication date Apr 28, 2022
- LAM RESEARCH CORPORATION
- Jeremy George SMITH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUSCEPTOR WITH RING TO LIMIT BACKSIDE DEPOSITION
- Publication number 20210363637
- Publication date Nov 25, 2021
- ASM IP HOLDING B.V.
- Mark Hawkins
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Directional Deposition for Semiconductor Fabrication
- Publication number 20210358752
- Publication date Nov 18, 2021
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih-Chun Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
- Publication number 20210351004
- Publication date Nov 11, 2021
- Toshihiko IWAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INJECTOR CONFIGURED FOR ARRANGEMENT WITHIN A REACTOR OF A VERTICAL...
- Publication number 20210324518
- Publication date Oct 21, 2021
- ASM IP HOLDING B.V.
- Christianus G.M. de Ridder
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS
- Publication number 20210230748
- Publication date Jul 29, 2021
- TOSHIBA MITSUBISHI-ELECTRIC INDUSTRIAL SYSTEMS CORPORATION
- Takahiro HIRAMATSU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
THIN FILM FORMING APPARATUS AND RADICAL UNIT FOR FORMING THIN FILM
- Publication number 20210222301
- Publication date Jul 22, 2021
- EQ TECH PLUS CO., LTD.
- Dong Hwa SHIN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VAPOR DEPOSITION STRUCTURE, VAPOR DEPOSITION DEVICE, VAPOR DEPOSITI...
- Publication number 20210214840
- Publication date Jul 15, 2021
- BOE TECHNOLOGY GROUP CO., LTD.
- Yong Rao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METAL PLATE FOR MANUFACTURING DEPOSITION MASK, METHOD FOR MANUFACTU...
- Publication number 20210108312
- Publication date Apr 15, 2021
- DAI NIPPON PRINTING CO., LTD.
- Hiroki OKA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE PROCESSING DEVICE HAVING CONNECTION PLATES, SUBSTRATE PRO...
- Publication number 20210102289
- Publication date Apr 8, 2021
- ASM IP HOLDING B.V.
- Naoto Tsuji
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20200392622
- Publication date Dec 17, 2020
- TOKYO ELECTRON LIMITED
- Tsuyoshi TAKAHASHI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS AND METHOD FOR ETCHING SUBSTRATE
- Publication number 20200312668
- Publication date Oct 1, 2020
- TOKYO ELECTRON LIMITED
- Yuji ASAKAWA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLYING UNIT OF SUBSTRATE TREATING APPARATUS
- Publication number 20200277702
- Publication date Sep 3, 2020
- SEMES CO., LTD.
- Hyoung Kyu SON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROTECTIVE PLATE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MAN...
- Publication number 20200165722
- Publication date May 28, 2020
- Kokusai Electric Corporation
- Shuhei SAIDO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Rigid and flat substrates

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Atomic layer deposition part coating chamber

Thin substrate handling via edge clamping

Plasma processing apparatus and plasma processing method

Directional deposition for semiconductor fabrication

Automated conveyance of articles in chemical vapor processing

Runout and wobble measurement fixtures

Susceptor with ring to limit backside deposition

Metal plate for manufacturing deposition mask, method for manufactu...

Substrate processing method and substrate processing apparatus

Film forming apparatus

Plasma induced modification of silicon carbide surface

Substrate processing apparatus, recording medium, and fluid circula...

Thin film forming apparatus and radical unit for forming thin film

Directional deposition for semiconductor fabrication

Apparatus and method for etching substrate

Gas supplying unit of substrate treating apparatus

Substrate processing device having connection plates, substrate pro...

Substrate loading in an ALD reactor

Vacuum chamber arrangement and method for processing a substrate

Susceptor with ring to limit backside deposition

Directional deposition for semiconductor fabrication

Reactor system for sublimation of pre-clean byproducts and method t...

Substrate carrier

Substrate processing apparatus

Protective plate, substrate processing apparatus, and method of man...

Substrate holder for graphene film synthesis, and uses thereof

Film forming apparatus and film forming method

Gas diffusion device and film-forming apparatus

Substrate processing apparatus, method of manufacturing semiconduct...

Method and apparatus for forming boron-doped silicon germanium film...

Patents Applicationslast 30 patents

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

RUNOUT AND WOBBLE MEASUREMENT FIXTURES

SUBSTRATE PROCESSING APPARATUS FOR TEMPERATURE MEASUREMENT OF A MOV...

SUBSTRATE SUPPORT PLATE FOR DEPOSITING MATERIAL ON EDGES OF A SUBST...

COMPOUND STRUCTURE AND FORMING METHOD THEREOF

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

Directional Deposition for Semiconductor Fabrication

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

SEMICONDUCTOR FABRICATION APPARATUS AND FABRICATION METHOD

SUBSTRATE TREATING METHOD

RAPID TUNING OF CRITICAL DIMENSION NON-UNIFORMITY BY MODULATING TEM...

PLASMA INDUCED MODIFICATION OF SILICON CARBIDE SURFACE

AUTOMATED CONVEYANCE OF ARTICLES IN CHEMICAL VAPOR PROCESSING

RUNOUT AND WOBBLE MEASUREMENT FIXTURES

FIXTURE AND METHOD FOR DETERMINING POSITION OF A TARGET IN A REACTI...

THIN SUBSTRATE HANDLING VIA EDGE CLAMPING

ELECTROSTATIC CHUCK WITH POWDER COATING

SUSCEPTOR WITH RING TO LIMIT BACKSIDE DEPOSITION

Directional Deposition for Semiconductor Fabrication

PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD

INJECTOR CONFIGURED FOR ARRANGEMENT WITHIN A REACTOR OF A VERTICAL...

FILM FORMING APPARATUS

THIN FILM FORMING APPARATUS AND RADICAL UNIT FOR FORMING THIN FILM

VAPOR DEPOSITION STRUCTURE, VAPOR DEPOSITION DEVICE, VAPOR DEPOSITI...

METAL PLATE FOR MANUFACTURING DEPOSITION MASK, METHOD FOR MANUFACTU...

SUBSTRATE PROCESSING DEVICE HAVING CONNECTION PLATES, SUBSTRATE PRO...

SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS

APPARATUS AND METHOD FOR ETCHING SUBSTRATE

GAS SUPPLYING UNIT OF SUBSTRATE TREATING APPARATUS

PROTECTIVE PLATE, SUBSTRATE PROCESSING APPARATUS, AND METHOD OF MAN...