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ELECTRICITY
H01
Electric elements
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam
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H01J2237/30483
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Patents Grants
last 30 patents
Information
Patent Grant
Closed loop faraday correction of a horizontal beam current profile...
Patent number
12,283,460
Issue date
Apr 22, 2025
Applied Materials, Inc.
Tyler Wills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Systems and methods for optimizing full horizontal scanned beam dis...
Patent number
12,191,113
Issue date
Jan 7, 2025
Applied Materials, Inc.
Tyler Wills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam drawing device and method of controlling char...
Patent number
11,694,875
Issue date
Jul 4, 2023
Jeol Ltd.
Masakazu Iwanaga
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Ion implantation method and ion implanter for performing the same
Patent number
11,482,401
Issue date
Oct 25, 2022
Shanghai Huali Integrated Circuit Mfg. Co. Ltd.
Chaorong Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Techniques for determining and correcting for expected dose variati...
Patent number
11,264,205
Issue date
Mar 1, 2022
Applied Materials, Inc.
Eric Donald Wilson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Additive manufacturing device utilizing EB-laser composite scan
Patent number
11,192,187
Issue date
Dec 7, 2021
Tsinghua University
Feng Lin
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Ion implanter and ion implantation method
Patent number
11,145,488
Issue date
Oct 12, 2021
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Kazuhisa Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
Patent number
11,037,759
Issue date
Jun 15, 2021
NuFlare Technology, Inc.
Ryoichi Kakehi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods and apparatus for determining, using, and indicating ion be...
Patent number
11,004,656
Issue date
May 11, 2021
Gatan, Inc.
John Andrew Hunt
G01 - MEASURING TESTING
Information
Patent Grant
Defect observation system and defect observation method for semicon...
Patent number
10,971,325
Issue date
Apr 6, 2021
HITACHI HIGH-TECH CORPORATION
Minoru Harada
G01 - MEASURING TESTING
Information
Patent Grant
Charged particle beam steering arrangement
Patent number
10,854,422
Issue date
Dec 1, 2020
RELIANCE PRECISION LIMITED
Nigel Crosland
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Three-dimensional layer-by-layer shaping apparatus, three-dimension...
Patent number
10,566,171
Issue date
Feb 18, 2020
TECHNOLOGY RESEARCH ASSOCIATION FOR FUTURE ADDITIVE MANUFACTURING
Zhixiong Yuan
B22 - CASTING POWDER METALLURGY
Information
Patent Grant
Angular control of ion beam for vertical surface treatment
Patent number
10,535,522
Issue date
Jan 14, 2020
Varian Semiconductor Equipment Associates, Inc.
Gang Shu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Beam profiling speed enhancement for scanned beam implanters
Patent number
10,483,086
Issue date
Nov 19, 2019
Axcelis Technologies, Inc.
Andy M. Ray
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Particle beam scanning
Patent number
10,456,591
Issue date
Oct 29, 2019
Mevion Medical Systems, Inc.
Gerrit Townsend Zwart
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Particle beam scanning
Patent number
10,258,810
Issue date
Apr 16, 2019
Mevion Medical Systems, Inc.
Gerrit Townsend Zwart
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information
Patent Grant
Method for high throughput using beam scan size and beam position i...
Patent number
10,256,095
Issue date
Apr 9, 2019
TEL Epion Inc.
Soo Doo Chae
G05 - CONTROLLING REGULATING
Information
Patent Grant
Three-dimensional shaping apparatus, control method thereof, and co...
Patent number
10,166,628
Issue date
Jan 1, 2019
TECHNOLOGY RESEARCH ASSOCIATION FOR FUTURE ADDITIVE MANUFACTURING
Kazuya Goto
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Charged particle system and methods for irradiating a planning targ...
Patent number
10,020,161
Issue date
Jul 10, 2018
The Trustees of the University of Pennsylvania
Alejandro Carabe-Fernandez
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Grant
Cross-section processing and observation method and cross-section p...
Patent number
9,966,226
Issue date
May 8, 2018
Hitachi High-Tech Science Corporation
Atsushi Uemoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion beam dimension control for ion implantation process and apparat...
Patent number
9,805,913
Issue date
Oct 31, 2017
Taiwan Semiconductor Manufacturing Co., Ltd.
Chih-Hong Hwang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing method, and multi charged parti...
Patent number
9,805,907
Issue date
Oct 31, 2017
NuFlare Technology, Inc.
Hiroshi Matsumoto
G11 - INFORMATION STORAGE
Information
Patent Grant
Apparatus and method for controlling implant process
Patent number
9,738,968
Issue date
Aug 22, 2017
Varian Semiconductor Equipment Associates, Inc.
George M. Gammel
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Method for generating parameter pattern, ion implantation method an...
Patent number
9,697,989
Issue date
Jul 4, 2017
Taiwan Semiconductor Manufacturing Company Ltd.
Cheng-Ta Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Multi charged particle beam writing method, and multi charged parti...
Patent number
9,691,585
Issue date
Jun 27, 2017
NuFlare Technology, Inc.
Hiroshi Matsumoto
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Ion implantation apparatus and ion implantation method
Patent number
9,601,314
Issue date
Mar 21, 2017
Sen Corporation
Shiro Ninomiya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for correcting drift of charged particle beam, and charged p...
Patent number
9,536,705
Issue date
Jan 3, 2017
NuFlare Technology, Inc.
Osamu Iizuka
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Using wafer geometry to improve scanner correction effectiveness fo...
Patent number
9,513,565
Issue date
Dec 6, 2016
KLA-Tencor Corporation
Craig MacNaughton
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Hybrid scanning for ion implantation
Patent number
9,443,698
Issue date
Sep 13, 2016
Axcelis Technologies, Inc.
Bo H. Vanderberg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam treatment apparatus
Patent number
9,378,924
Issue date
Jun 28, 2016
Sumitomo Heavy Industries, Ltd.
Yutaka Touchi
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Patents Applications
last 30 patents
Information
Patent Application
HIGH BANDWIDTH VARIABLE DOSE ION IMPLANTATION SYSTEM AND METHOD
Publication number
20250166959
Publication date
May 22, 2025
Axcelis Technologies, Inc.
Andy Ray
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR TWO-DIMENSIONAL ION BEAM PROFILING
Publication number
20250140520
Publication date
May 1, 2025
Axcelis Technologies, Inc.
Michael Cristoforo
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUBSTRATE STRESS MANAGEMENT USING VARIABLE ENERGY AND VARIABLE DOSE...
Publication number
20250140523
Publication date
May 1, 2025
Applied Materials, Inc.
Stanislav S. TODOROV
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
BEAM ANGLE ROTATION AND SAMPLE ROTATION
Publication number
20250104963
Publication date
Mar 27, 2025
Carl Zeiss SMT GMBH
Thomas Korb
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ELECTRON GUN, ELECTRON BEAM APPLICATOR, AND EMISSION METHOD OF ELEC...
Publication number
20240212967
Publication date
Jun 27, 2024
PHOTO ELECTRON SOUL INC.
Tomohiro NISHITANI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Focused Ion Beam Apparatus
Publication number
20240071718
Publication date
Feb 29, 2024
JEOL Ltd.
Yusuke Kagaya
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CLOSED LOOP FARADAY CORRECTION OF A HORIZONTAL BEAM CURRENT PROFILE...
Publication number
20240071719
Publication date
Feb 29, 2024
Applied Materials, Inc.
Tyler Wills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged Particle Beam Device
Publication number
20240062986
Publication date
Feb 22, 2024
Hitachi High-Tech Corporation
Naho TERAO
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DIS...
Publication number
20230386785
Publication date
Nov 30, 2023
Applied Materials, Inc.
Tyler Wills
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DOSE MAPPING AND SUBSTRATE ROTATION FOR SUBSTRATE CURVATURE CONTROL...
Publication number
20230369014
Publication date
Nov 16, 2023
Applied Materials, Inc.
Pradeep Subrahmanyan
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Focused Ion Beam System and Method of Correcting Deviation of Field...
Publication number
20230230801
Publication date
Jul 20, 2023
JEOL Ltd.
Yuichiro Ohori
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
TECHNIQUES FOR DETERMINING AND CORRECTING FOR EXPECTED DOSE VARIATI...
Publication number
20210175048
Publication date
Jun 10, 2021
Applied Materials, Inc.
Eric Donald Wilson
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
Publication number
20210043421
Publication date
Feb 11, 2021
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Kazuhisa Ishibashi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTER FOR PERFORMING THE SAME
Publication number
20200388465
Publication date
Dec 10, 2020
Shanghai Huali Integrated Circuit Mfg. Co., Ltd.
Chaorong Lai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEFECT OBSERVATION SYSTEM AND DEFECT OBSERVATION METHOD FOR SEMICON...
Publication number
20200083017
Publication date
Mar 12, 2020
Hitachi High-Technologies Corporation
Minoru HARADA
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
METHOD AND DEVICE FOR PROCESSING A SURFACE OF A SUBSTRATE BY MEANS...
Publication number
20200043699
Publication date
Feb 6, 2020
SCIA SYSTEMS GMBH
Thoralf Dunger
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
CHARGED PARTICLE BEAM STEERING ARRANGEMENT
Publication number
20190252152
Publication date
Aug 15, 2019
RELIANCE PRECISION LIMITED
Nigel CROSLAND
B22 - CASTING POWDER METALLURGY
Information
Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
Publication number
20190103252
Publication date
Apr 4, 2019
NuFlare Technology, Inc.
Ryoichi KAKEHI
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
THREE-DIMENSIONAL LAYER-BY-LAYER SHAPING APPARATUS, THREE-DIMENSION...
Publication number
20180166251
Publication date
Jun 14, 2018
TECHNOLOGY RESEARCH ASSOCIATION FOR FUTURE ADDITIVE MANUFACTURING
Zhixiong YUAN
B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information
Patent Application
PARTICLE BEAM SCANNING
Publication number
20180043181
Publication date
Feb 15, 2018
Mevion Medical Systems, Inc.
Gerrit Townsend Zwart
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
CHARGED PARTICLE SYSTEM AND METHODS FOR IRRADIATING A PLANNING TARG...
Publication number
20170213690
Publication date
Jul 27, 2017
The Trustees of the University of Pennsylvania
Alejandro Carabe-Fernandez
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
PARTICLE BEAM IRRADIATION SYSTEM
Publication number
20160332002
Publication date
Nov 17, 2016
Hitachi, Ltd
Kenichi TAKIZAWA
A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information
Patent Application
DEVICE, MANUFACTURING METHOD, AND EXPOSURE APPARATUS
Publication number
20160314930
Publication date
Oct 27, 2016
Advantest Corporation
Akio YAMADA
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Beam Profiling Speed Enhancement for Scanned Beam Implanters
Publication number
20160189926
Publication date
Jun 30, 2016
Axcelis Technologies, Inc.
Andy M. Ray
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods and Apparatus for Determining, Using, and Indicating Ion Be...
Publication number
20160111249
Publication date
Apr 21, 2016
GATAN, INC.
John Andrew Hunt
G01 - MEASURING TESTING
Information
Patent Application
ION IMPLANTATION APPARATUS
Publication number
20150340197
Publication date
Nov 26, 2015
Sumitomo Heavy Industries Ion Technology Co., Ltd.
Hiroshi Matsushita
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ION BEAM DIMENSION CONTROL FOR ION IMPLANTATION PROCESS AND APPARAT...
Publication number
20150270103
Publication date
Sep 24, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Chih-Hong HWANG
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
CHARGED PARTICLE BEAM TREATMENT APPARATUS
Publication number
20150270097
Publication date
Sep 24, 2015
Sumitomo Heavy Industries, Ltd.
Yutaka TOUCHI
G01 - MEASURING TESTING
Information
Patent Application
CROSS-SECTION PROCESSING AND OBSERVATION METHOD AND CROSS-SECTION P...
Publication number
20150262788
Publication date
Sep 17, 2015
HITACHI HIGH-TECH SCIENCE CORPORATION
Atsushi UEMOTO
G01 - MEASURING TESTING
Information
Patent Application
METHOD AND APPARATUS FOR THREE DIMENSIONAL ION IMPLANTATION
Publication number
20150228445
Publication date
Aug 13, 2015
Varian Semiconductor Equipment Associates, Inc.
Shengwu Chang
H01 - BASIC ELECTRIC ELEMENTS