Scanning

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H01J2237/30483

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Parent Industries

HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/30483Scanning

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Closed loop faraday correction of a horizontal beam current profile...
- Patent number 12,283,460
- Issue date Apr 22, 2025
- Applied Materials, Inc.
- Tyler Wills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for optimizing full horizontal scanned beam dis...
- Patent number 12,191,113
- Issue date Jan 7, 2025
- Applied Materials, Inc.
- Tyler Wills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam drawing device and method of controlling char...
- Patent number 11,694,875
- Issue date Jul 4, 2023
- Jeol Ltd.
- Masakazu Iwanaga
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Ion implantation method and ion implanter for performing the same
- Patent number 11,482,401
- Issue date Oct 25, 2022
- Shanghai Huali Integrated Circuit Mfg. Co. Ltd.
- Chaorong Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for determining and correcting for expected dose variati...
- Patent number 11,264,205
- Issue date Mar 1, 2022
- Applied Materials, Inc.
- Eric Donald Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Additive manufacturing device utilizing EB-laser composite scan
- Patent number 11,192,187
- Issue date Dec 7, 2021
- Tsinghua University
- Feng Lin
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Ion implanter and ion implantation method
- Patent number 11,145,488
- Issue date Oct 12, 2021
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing apparatus and multi charged par...
- Patent number 11,037,759
- Issue date Jun 15, 2021
- NuFlare Technology, Inc.
- Ryoichi Kakehi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for determining, using, and indicating ion be...
- Patent number 11,004,656
- Issue date May 11, 2021
- Gatan, Inc.
- John Andrew Hunt
- G01 - MEASURING TESTING
Information Patent Grant
Defect observation system and defect observation method for semicon...
- Patent number 10,971,325
- Issue date Apr 6, 2021
- HITACHI HIGH-TECH CORPORATION
- Minoru Harada
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam steering arrangement
- Patent number 10,854,422
- Issue date Dec 1, 2020
- RELIANCE PRECISION LIMITED
- Nigel Crosland
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Three-dimensional layer-by-layer shaping apparatus, three-dimension...
- Patent number 10,566,171
- Issue date Feb 18, 2020
- TECHNOLOGY RESEARCH ASSOCIATION FOR FUTURE ADDITIVE MANUFACTURING
- Zhixiong Yuan
- B22 - CASTING POWDER METALLURGY
Information Patent Grant
Angular control of ion beam for vertical surface treatment
- Patent number 10,535,522
- Issue date Jan 14, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Gang Shu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam profiling speed enhancement for scanned beam implanters
- Patent number 10,483,086
- Issue date Nov 19, 2019
- Axcelis Technologies, Inc.
- Andy M. Ray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Particle beam scanning
- Patent number 10,456,591
- Issue date Oct 29, 2019
- Mevion Medical Systems, Inc.
- Gerrit Townsend Zwart
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Particle beam scanning
- Patent number 10,258,810
- Issue date Apr 16, 2019
- Mevion Medical Systems, Inc.
- Gerrit Townsend Zwart
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method for high throughput using beam scan size and beam position i...
- Patent number 10,256,095
- Issue date Apr 9, 2019
- TEL Epion Inc.
- Soo Doo Chae
- G05 - CONTROLLING REGULATING
Information Patent Grant
Three-dimensional shaping apparatus, control method thereof, and co...
- Patent number 10,166,628
- Issue date Jan 1, 2019
- TECHNOLOGY RESEARCH ASSOCIATION FOR FUTURE ADDITIVE MANUFACTURING
- Kazuya Goto
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Charged particle system and methods for irradiating a planning targ...
- Patent number 10,020,161
- Issue date Jul 10, 2018
- The Trustees of the University of Pennsylvania
- Alejandro Carabe-Fernandez
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Grant
Cross-section processing and observation method and cross-section p...
- Patent number 9,966,226
- Issue date May 8, 2018
- Hitachi High-Tech Science Corporation
- Atsushi Uemoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion beam dimension control for ion implantation process and apparat...
- Patent number 9,805,913
- Issue date Oct 31, 2017
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chih-Hong Hwang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing method, and multi charged parti...
- Patent number 9,805,907
- Issue date Oct 31, 2017
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- G11 - INFORMATION STORAGE
Information Patent Grant
Apparatus and method for controlling implant process
- Patent number 9,738,968
- Issue date Aug 22, 2017
- Varian Semiconductor Equipment Associates, Inc.
- George M. Gammel
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for generating parameter pattern, ion implantation method an...
- Patent number 9,697,989
- Issue date Jul 4, 2017
- Taiwan Semiconductor Manufacturing Company Ltd.
- Cheng-Ta Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi charged particle beam writing method, and multi charged parti...
- Patent number 9,691,585
- Issue date Jun 27, 2017
- NuFlare Technology, Inc.
- Hiroshi Matsumoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion implantation apparatus and ion implantation method
- Patent number 9,601,314
- Issue date Mar 21, 2017
- Sen Corporation
- Shiro Ninomiya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for correcting drift of charged particle beam, and charged p...
- Patent number 9,536,705
- Issue date Jan 3, 2017
- NuFlare Technology, Inc.
- Osamu Iizuka
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Using wafer geometry to improve scanner correction effectiveness fo...
- Patent number 9,513,565
- Issue date Dec 6, 2016
- KLA-Tencor Corporation
- Craig MacNaughton
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Hybrid scanning for ion implantation
- Patent number 9,443,698
- Issue date Sep 13, 2016
- Axcelis Technologies, Inc.
- Bo H. Vanderberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam treatment apparatus
- Patent number 9,378,924
- Issue date Jun 28, 2016
- Sumitomo Heavy Industries, Ltd.
- Yutaka Touchi
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE

Patents Applicationslast 30 patents

Information Patent Application
HIGH BANDWIDTH VARIABLE DOSE ION IMPLANTATION SYSTEM AND METHOD
- Publication number 20250166959
- Publication date May 22, 2025
- Axcelis Technologies, Inc.
- Andy Ray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR TWO-DIMENSIONAL ION BEAM PROFILING
- Publication number 20250140520
- Publication date May 1, 2025
- Axcelis Technologies, Inc.
- Michael Cristoforo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE STRESS MANAGEMENT USING VARIABLE ENERGY AND VARIABLE DOSE...
- Publication number 20250140523
- Publication date May 1, 2025
- Applied Materials, Inc.
- Stanislav S. TODOROV
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
BEAM ANGLE ROTATION AND SAMPLE ROTATION
- Publication number 20250104963
- Publication date Mar 27, 2025
- Carl Zeiss SMT GMBH
- Thomas Korb
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON GUN, ELECTRON BEAM APPLICATOR, AND EMISSION METHOD OF ELEC...
- Publication number 20240212967
- Publication date Jun 27, 2024
- PHOTO ELECTRON SOUL INC.
- Tomohiro NISHITANI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focused Ion Beam Apparatus
- Publication number 20240071718
- Publication date Feb 29, 2024
- JEOL Ltd.
- Yusuke Kagaya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLOSED LOOP FARADAY CORRECTION OF A HORIZONTAL BEAM CURRENT PROFILE...
- Publication number 20240071719
- Publication date Feb 29, 2024
- Applied Materials, Inc.
- Tyler Wills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20240062986
- Publication date Feb 22, 2024
- Hitachi High-Tech Corporation
- Naho TERAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DIS...
- Publication number 20230386785
- Publication date Nov 30, 2023
- Applied Materials, Inc.
- Tyler Wills
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DOSE MAPPING AND SUBSTRATE ROTATION FOR SUBSTRATE CURVATURE CONTROL...
- Publication number 20230369014
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- Pradeep Subrahmanyan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Focused Ion Beam System and Method of Correcting Deviation of Field...
- Publication number 20230230801
- Publication date Jul 20, 2023
- JEOL Ltd.
- Yuichiro Ohori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR DETERMINING AND CORRECTING FOR EXPECTED DOSE VARIATI...
- Publication number 20210175048
- Publication date Jun 10, 2021
- Applied Materials, Inc.
- Eric Donald Wilson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTER AND ION IMPLANTATION METHOD
- Publication number 20210043421
- Publication date Feb 11, 2021
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Kazuhisa Ishibashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION IMPLANTATION METHOD AND ION IMPLANTER FOR PERFORMING THE SAME
- Publication number 20200388465
- Publication date Dec 10, 2020
- Shanghai Huali Integrated Circuit Mfg. Co., Ltd.
- Chaorong Lai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEFECT OBSERVATION SYSTEM AND DEFECT OBSERVATION METHOD FOR SEMICON...
- Publication number 20200083017
- Publication date Mar 12, 2020
- Hitachi High-Technologies Corporation
- Minoru HARADA
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD AND DEVICE FOR PROCESSING A SURFACE OF A SUBSTRATE BY MEANS...
- Publication number 20200043699
- Publication date Feb 6, 2020
- SCIA SYSTEMS GMBH
- Thoralf Dunger
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CHARGED PARTICLE BEAM STEERING ARRANGEMENT
- Publication number 20190252152
- Publication date Aug 15, 2019
- RELIANCE PRECISION LIMITED
- Nigel CROSLAND
- B22 - CASTING POWDER METALLURGY
Information Patent Application
MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...
- Publication number 20190103252
- Publication date Apr 4, 2019
- NuFlare Technology, Inc.
- Ryoichi KAKEHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THREE-DIMENSIONAL LAYER-BY-LAYER SHAPING APPARATUS, THREE-DIMENSION...
- Publication number 20180166251
- Publication date Jun 14, 2018
- TECHNOLOGY RESEARCH ASSOCIATION FOR FUTURE ADDITIVE MANUFACTURING
- Zhixiong YUAN
- B33 - ADDITIVE MANUFACTURING TECHNOLOGY
Information Patent Application
PARTICLE BEAM SCANNING
- Publication number 20180043181
- Publication date Feb 15, 2018
- Mevion Medical Systems, Inc.
- Gerrit Townsend Zwart
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
CHARGED PARTICLE SYSTEM AND METHODS FOR IRRADIATING A PLANNING TARG...
- Publication number 20170213690
- Publication date Jul 27, 2017
- The Trustees of the University of Pennsylvania
- Alejandro Carabe-Fernandez
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
PARTICLE BEAM IRRADIATION SYSTEM
- Publication number 20160332002
- Publication date Nov 17, 2016
- Hitachi, Ltd
- Kenichi TAKIZAWA
- A61 - MEDICAL OR VETERINARY SCIENCE HYGIENE
Information Patent Application
DEVICE, MANUFACTURING METHOD, AND EXPOSURE APPARATUS
- Publication number 20160314930
- Publication date Oct 27, 2016
- Advantest Corporation
- Akio YAMADA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Beam Profiling Speed Enhancement for Scanned Beam Implanters
- Publication number 20160189926
- Publication date Jun 30, 2016
- Axcelis Technologies, Inc.
- Andy M. Ray
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Methods and Apparatus for Determining, Using, and Indicating Ion Be...
- Publication number 20160111249
- Publication date Apr 21, 2016
- GATAN, INC.
- John Andrew Hunt
- G01 - MEASURING TESTING
Information Patent Application
ION IMPLANTATION APPARATUS
- Publication number 20150340197
- Publication date Nov 26, 2015
- Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Hiroshi Matsushita
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ION BEAM DIMENSION CONTROL FOR ION IMPLANTATION PROCESS AND APPARAT...
- Publication number 20150270103
- Publication date Sep 24, 2015
- Taiwan Semiconductor Manufacturing Co., LTD
- Chih-Hong HWANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM TREATMENT APPARATUS
- Publication number 20150270097
- Publication date Sep 24, 2015
- Sumitomo Heavy Industries, Ltd.
- Yutaka TOUCHI
- G01 - MEASURING TESTING
Information Patent Application
CROSS-SECTION PROCESSING AND OBSERVATION METHOD AND CROSS-SECTION P...
- Publication number 20150262788
- Publication date Sep 17, 2015
- HITACHI HIGH-TECH SCIENCE CORPORATION
- Atsushi UEMOTO
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR THREE DIMENSIONAL ION IMPLANTATION
- Publication number 20150228445
- Publication date Aug 13, 2015
- Varian Semiconductor Equipment Associates, Inc.
- Shengwu Chang
- H01 - BASIC ELECTRIC ELEMENTS

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Closed loop faraday correction of a horizontal beam current profile...

Systems and methods for optimizing full horizontal scanned beam dis...

Charged particle beam drawing device and method of controlling char...

Ion implantation method and ion implanter for performing the same

Techniques for determining and correcting for expected dose variati...

Additive manufacturing device utilizing EB-laser composite scan

Ion implanter and ion implantation method

Multi charged particle beam writing apparatus and multi charged par...

Methods and apparatus for determining, using, and indicating ion be...

Defect observation system and defect observation method for semicon...

Charged particle beam steering arrangement

Three-dimensional layer-by-layer shaping apparatus, three-dimension...

Angular control of ion beam for vertical surface treatment

Beam profiling speed enhancement for scanned beam implanters

Particle beam scanning

Particle beam scanning

Method for high throughput using beam scan size and beam position i...

Three-dimensional shaping apparatus, control method thereof, and co...

Charged particle system and methods for irradiating a planning targ...

Cross-section processing and observation method and cross-section p...

Ion beam dimension control for ion implantation process and apparat...

Multi charged particle beam writing method, and multi charged parti...

Apparatus and method for controlling implant process

Method for generating parameter pattern, ion implantation method an...

Multi charged particle beam writing method, and multi charged parti...

Ion implantation apparatus and ion implantation method

Method for correcting drift of charged particle beam, and charged p...

Using wafer geometry to improve scanner correction effectiveness fo...

Hybrid scanning for ion implantation

Charged particle beam treatment apparatus

Patents Applicationslast 30 patents

HIGH BANDWIDTH VARIABLE DOSE ION IMPLANTATION SYSTEM AND METHOD

APPARATUS AND METHOD FOR TWO-DIMENSIONAL ION BEAM PROFILING

SUBSTRATE STRESS MANAGEMENT USING VARIABLE ENERGY AND VARIABLE DOSE...

BEAM ANGLE ROTATION AND SAMPLE ROTATION

ELECTRON GUN, ELECTRON BEAM APPLICATOR, AND EMISSION METHOD OF ELEC...

Focused Ion Beam Apparatus

CLOSED LOOP FARADAY CORRECTION OF A HORIZONTAL BEAM CURRENT PROFILE...

Charged Particle Beam Device

SYSTEMS AND METHODS FOR OPTIMIZING FULL HORIZONTAL SCANNED BEAM DIS...

DOSE MAPPING AND SUBSTRATE ROTATION FOR SUBSTRATE CURVATURE CONTROL...

Focused Ion Beam System and Method of Correcting Deviation of Field...

TECHNIQUES FOR DETERMINING AND CORRECTING FOR EXPECTED DOSE VARIATI...

ION IMPLANTER AND ION IMPLANTATION METHOD

ION IMPLANTATION METHOD AND ION IMPLANTER FOR PERFORMING THE SAME

DEFECT OBSERVATION SYSTEM AND DEFECT OBSERVATION METHOD FOR SEMICON...

METHOD AND DEVICE FOR PROCESSING A SURFACE OF A SUBSTRATE BY MEANS...

CHARGED PARTICLE BEAM STEERING ARRANGEMENT

MULTI CHARGED PARTICLE BEAM WRITING APPARATUS AND MULTI CHARGED PAR...

THREE-DIMENSIONAL LAYER-BY-LAYER SHAPING APPARATUS, THREE-DIMENSION...

PARTICLE BEAM SCANNING

CHARGED PARTICLE SYSTEM AND METHODS FOR IRRADIATING A PLANNING TARG...

PARTICLE BEAM IRRADIATION SYSTEM

DEVICE, MANUFACTURING METHOD, AND EXPOSURE APPARATUS

Beam Profiling Speed Enhancement for Scanned Beam Implanters

Methods and Apparatus for Determining, Using, and Indicating Ion Be...

ION IMPLANTATION APPARATUS

ION BEAM DIMENSION CONTROL FOR ION IMPLANTATION PROCESS AND APPARAT...

CHARGED PARTICLE BEAM TREATMENT APPARATUS

CROSS-SECTION PROCESSING AND OBSERVATION METHOD AND CROSS-SECTION P...

METHOD AND APPARATUS FOR THREE DIMENSIONAL ION IMPLANTATION