Scattered primary beam

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H01J2237/2804

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HELECTRICITY H01Electric elements H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS H01J2237/00Discharge tubes exposing object to beam

Current Industry

H01J2237/2804Scattered primary beam

Industries

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Patents Grantslast 30 patents

Information Patent Grant
Electron beam probing techniques and related structures
- Patent number 11,996,336
- Issue date May 28, 2024
- Micron Technology, Inc.
- Amitava Majumdar
- G11 - INFORMATION STORAGE
Information Patent Grant
Hyperdimensional scanning transmission electron microscopy and exam...
- Patent number 11,852,598
- Issue date Dec 26, 2023
- Battelle Energy Alliance, LLC
- Jeffery A. Aguiar
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of measuring relative rotational angle and scanning transmis...
- Patent number 11,837,433
- Issue date Dec 5, 2023
- Jeol Ltd.
- Akiho Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High framerate and high dynamic range electron microscopy
- Patent number 11,804,359
- Issue date Oct 31, 2023
- INTEGRATED DYNAMIC ELECTRON SOLUTIONS, INC.
- Ruth Bloom
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for bare wafer inspection
- Patent number 11,791,127
- Issue date Oct 17, 2023
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 11,721,521
- Issue date Aug 8, 2023
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method of examining a sample using a charged particle microscope, w...
- Patent number 11,417,497
- Issue date Aug 16, 2022
- FEI Company
- Remco Schoenmakers
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam probing techniques and related structures
- Patent number 11,302,589
- Issue date Apr 12, 2022
- Micron Technology, Inc.
- Amitava Majumdar
- G11 - INFORMATION STORAGE
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 11,282,675
- Issue date Mar 22, 2022
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Method and system for charged particle microscopy with improved ima...
- Patent number 11,120,969
- Issue date Sep 14, 2021
- KLA Corporation
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for bare wafer inspection
- Patent number 11,087,954
- Issue date Aug 10, 2021
- ASML Netherlands B.V.
- Wei Fang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for detecting voids and an inspection system
- Patent number 10,922,809
- Issue date Feb 16, 2021
- Applied Materials, Inc.
- Dror Shemesh
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of image acquisition and electron microscope
- Patent number 10,923,314
- Issue date Feb 16, 2021
- Jeol Ltd.
- Akiho Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combined SEM-CL and FIB-IOE microscopy
- Patent number 10,896,802
- Issue date Jan 19, 2021
- FEI Company
- Mostafa Maazouz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam inspection apparatus with improved detection performance...
- Patent number 10,892,138
- Issue date Jan 12, 2021
- ASML Netherlands B.V.
- Weiming Ren
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Scanning electron microscope and measurement method for obtaining i...
- Patent number 10,879,035
- Issue date Dec 29, 2020
- Jeol Ltd.
- Noriaki Mizuno
- G01 - MEASURING TESTING
Information Patent Grant
Image capture assembly and method for electron back scatter diffrac...
- Patent number 10,692,689
- Issue date Jun 23, 2020
- VG Systems Limited
- Zoran Pesic
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Intelligent pre-scan in scanning transmission charged particle micr...
- Patent number 10,665,419
- Issue date May 26, 2020
- FEI Company
- Erik Michiel Franken
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and system for charged particle microscopy with improved ima...
- Patent number 10,643,819
- Issue date May 5, 2020
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,586,681
- Issue date Mar 10, 2020
- ASML Netherlands B.V.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imaging system and imaging method
- Patent number 10,515,779
- Issue date Dec 24, 2019
- NGR Inc.
- Kotaro Maruyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope and image processing apparatus
- Patent number 10,483,083
- Issue date Nov 19, 2019
- Hitachi, Ltd.
- Thantip Krasienapibal
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Nondestructive sample imaging
- Patent number 10,468,230
- Issue date Nov 5, 2019
- BAE Systems Information and Electronic Systems Integration Inc.
- Eugene M. Lavely
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device
- Patent number 10,424,459
- Issue date Sep 24, 2019
- Hitachi High-Technologies Corporation
- Wen Li
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Imaging of crystalline defects
- Patent number 10,347,462
- Issue date Jul 9, 2019
- Applied Materials Israel Ltd.
- Dror Shemesh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Scanning electron microscope
- Patent number 10,269,531
- Issue date Apr 23, 2019
- Jeol Ltd.
- Tatsuru Kuramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-beam dark field imaging
- Patent number 10,192,716
- Issue date Jan 29, 2019
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus
- Patent number 10,020,164
- Issue date Jul 10, 2018
- Hermes Microvision Inc.
- Zhongwei Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Focused ion beam apparatus, method for observing cross-section of s...
- Patent number 9,934,938
- Issue date Apr 3, 2018
- Hitachi High-Tech Science Corporation
- Atsushi Uemoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of performing spectroscopy in a transmission charged-particl...
- Patent number 9,778,377
- Issue date Oct 3, 2017
- FEI Company
- Luigi Mele
- H04 - ELECTRIC COMMUNICATION TECHNIQUE

Patents Applicationslast 30 patents

Information Patent Application
ELECTRON BEAM PROBING TECHNIQUES AND RELATED STRUCTURES
- Publication number 20240355685
- Publication date Oct 24, 2024
- Micron Technology, Inc.
- Amitava Majumdar
- G11 - INFORMATION STORAGE
Information Patent Application
HIGH FRAMERATE AND HIGH DYNAMIC RANGE ELECTRON MICROSCOPY
- Publication number 20240105418
- Publication date Mar 28, 2024
- Integrated Dynamic Electron Solutions, Inc.
- Ruth BLOOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device and Image Acquisition Method
- Publication number 20230402252
- Publication date Dec 14, 2023
- JEOL Ltd.
- Nobuyuki Ikeo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBSERVATION SYSTEM, OBSERVATION METHOD, AND PROGRAM
- Publication number 20230238210
- Publication date Jul 27, 2023
- HITACHI HIGH-TECH CORPORATION
- Hiroaki KASAI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF GENERATING A CRYSTALLINE ORIENTATION MAP OF A SURFACE POR...
- Publication number 20230178332
- Publication date Jun 8, 2023
- CARL ZEISS MICROSCOPY GMBH
- Luyang Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electron Microscope and Method of Correcting Aberration
- Publication number 20230026970
- Publication date Jan 26, 2023
- JEOL Ltd.
- Keito Aibara
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
- Publication number 20220319808
- Publication date Oct 6, 2022
- ASML NETHERLANDS B.V.
- Weiming REN
- B82 - NANO-TECHNOLOGY
Information Patent Application
Method of Measuring Relative Rotational Angle and Scanning Transmis...
- Publication number 20220262597
- Publication date Aug 18, 2022
- JEOL Ltd.
- Akiho Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERN MEASUREMENT SYSTEM AND PATTERN MEASUREMENT METHOD
- Publication number 20220230842
- Publication date Jul 21, 2022
- HITACHI HIGH-TECH CORPORATION
- Wei SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR BARE WAFER INSPECTION
- Publication number 20220068592
- Publication date Mar 3, 2022
- ASML NETHERLANDS B.V.
- Wei FANG
- G01 - MEASURING TESTING
Information Patent Application
HYPERDIMENSIONAL SCANNING TRANSMISSION ELECTRON MICROSCOPY AND EXAM...
- Publication number 20210381992
- Publication date Dec 9, 2021
- Battelle Energy Alliance, LLC
- Jeffrey A. Aguiar
- G01 - MEASURING TESTING
Information Patent Application
MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...
- Publication number 20210151291
- Publication date May 20, 2021
- ASML NETHERLANDS B.V.
- Weiming REN
- B82 - NANO-TECHNOLOGY
Information Patent Application
HIGH FRAMERATE AND HIGH DYNAMIC RANGE ELECTRON MICROSCOPY
- Publication number 20210082661
- Publication date Mar 18, 2021
- Integrated Dynamic Electron Solutions, Inc.
- Ruth BLOOM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SCANNING ELECTRON MICROSCOPE
- Publication number 20210042943
- Publication date Feb 11, 2021
- Shimadzu Corporation
- Ryuta MATSUMOTO
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS
- Publication number 20200251305
- Publication date Aug 6, 2020
- ASML NETHERLANDS B.V.
- Zhongwei CHEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Charged Particle Microscopy with Improved Ima...
- Publication number 20200227232
- Publication date Jul 16, 2020
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- G01 - MEASURING TESTING
Information Patent Application
SYSTEM AND METHOD FOR BARE WAFER INSPECTION
- Publication number 20200027693
- Publication date Jan 23, 2020
- ASML Netherlands B.V.
- Wei FANG
- G01 - MEASURING TESTING
Information Patent Application
NONDESTRUCTIVE SAMPLE IMAGING
- Publication number 20190311881
- Publication date Oct 10, 2019
- BAE SYSTEMS INFORMATION AND ELECTRONIC SYSTEMS INTEGRATION INC
- Eugene M. Lavely
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope and Measurement Method
- Publication number 20190228948
- Publication date Jul 25, 2019
- JEOL Ltd.
- Noriaki Mizuno
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMBINED SEM-CL AND FIB-IOE MICROSCOPY
- Publication number 20190198288
- Publication date Jun 27, 2019
- FEI Company
- Mostafa Maazouz
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGING OF CRYSTALLINE DEFECTS
- Publication number 20190180975
- Publication date Jun 13, 2019
- APPLIED MATERIALS ISRAEL LTD.
- Dror Shemesh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMAGING SYSTEM AND IMAGING METHOD
- Publication number 20190019651
- Publication date Jan 17, 2019
- NGR Inc.
- Kotaro MARUYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Scanning Electron Microscope
- Publication number 20180261422
- Publication date Sep 13, 2018
- JEOL Ltd.
- Tatsuru Kuramoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Image Capture Assembly and Method for Electron Back Scatter Diffrac...
- Publication number 20180166253
- Publication date Jun 14, 2018
- VG Systems Limited
- Zoran PESIC
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method of Image Acquisition and Electron Microscope
- Publication number 20180158646
- Publication date Jun 7, 2018
- JEOL Ltd.
- Akiho Nakamura
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20170271121
- Publication date Sep 21, 2017
- Hitachi High-Technologies Corporation
- Wen LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRUCTURE ANALYSIS METHOD USING A SCANNING ELECTRON MICROSCOPE
- Publication number 20170162363
- Publication date Jun 8, 2017
- Samsung Electronics Co., Ltd.
- JIN KWAN KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and System for Charged Particle Microscopy with Improved Ima...
- Publication number 20160372304
- Publication date Dec 22, 2016
- KLA-Tencor Corporation
- Doug K. Masnaghetti
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Charged Particle Beam Device
- Publication number 20160329186
- Publication date Nov 10, 2016
- Hitachi High-Technologies Corporation
- Wen LI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVE CHARGED PARTICLE TOMOGRAPHY
- Publication number 20160260578
- Publication date Sep 8, 2016
- DECISION SCIENCES INTERNATIONAL CORPORATION
- Michael James Sossong
- G01 - MEASURING TESTING

Scattered primary beam

Industry

Parent Industries

Current Industry

Patents Grantslast 30 patents

Electron beam probing techniques and related structures

Hyperdimensional scanning transmission electron microscopy and exam...

Method of measuring relative rotational angle and scanning transmis...

High framerate and high dynamic range electron microscopy

System and method for bare wafer inspection

Multi-beam inspection apparatus with improved detection performance...

Method of examining a sample using a charged particle microscope, w...

Electron beam probing techniques and related structures

Multi-beam inspection apparatus with improved detection performance...

Method and system for charged particle microscopy with improved ima...

System and method for bare wafer inspection

Method for detecting voids and an inspection system

Method of image acquisition and electron microscope

Combined SEM-CL and FIB-IOE microscopy

Multi-beam inspection apparatus with improved detection performance...

Scanning electron microscope and measurement method for obtaining i...

Image capture assembly and method for electron back scatter diffrac...

Intelligent pre-scan in scanning transmission charged particle micr...

Method and system for charged particle microscopy with improved ima...

Charged particle beam apparatus

Imaging system and imaging method

Scanning electron microscope and image processing apparatus

Nondestructive sample imaging

Charged particle beam device

Imaging of crystalline defects

Scanning electron microscope

Multi-beam dark field imaging

Charged particle beam apparatus

Focused ion beam apparatus, method for observing cross-section of s...

Method of performing spectroscopy in a transmission charged-particl...

Patents Applicationslast 30 patents

ELECTRON BEAM PROBING TECHNIQUES AND RELATED STRUCTURES

HIGH FRAMERATE AND HIGH DYNAMIC RANGE ELECTRON MICROSCOPY

Charged Particle Beam Device and Image Acquisition Method

OBSERVATION SYSTEM, OBSERVATION METHOD, AND PROGRAM

METHOD OF GENERATING A CRYSTALLINE ORIENTATION MAP OF A SURFACE POR...

Electron Microscope and Method of Correcting Aberration

MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...

Method of Measuring Relative Rotational Angle and Scanning Transmis...

PATTERN MEASUREMENT SYSTEM AND PATTERN MEASUREMENT METHOD

SYSTEM AND METHOD FOR BARE WAFER INSPECTION

HYPERDIMENSIONAL SCANNING TRANSMISSION ELECTRON MICROSCOPY AND EXAM...

MULTI-BEAM INSPECTION APPARATUS WITH IMPROVED DETECTION PERFORMANCE...

HIGH FRAMERATE AND HIGH DYNAMIC RANGE ELECTRON MICROSCOPY

SCANNING ELECTRON MICROSCOPE

CHARGED PARTICLE BEAM APPARATUS

Method and System for Charged Particle Microscopy with Improved Ima...

SYSTEM AND METHOD FOR BARE WAFER INSPECTION

NONDESTRUCTIVE SAMPLE IMAGING

Scanning Electron Microscope and Measurement Method

COMBINED SEM-CL AND FIB-IOE MICROSCOPY

IMAGING OF CRYSTALLINE DEFECTS

IMAGING SYSTEM AND IMAGING METHOD

Scanning Electron Microscope

Image Capture Assembly and Method for Electron Back Scatter Diffrac...

Method of Image Acquisition and Electron Microscope

Charged Particle Beam Device

STRUCTURE ANALYSIS METHOD USING A SCANNING ELECTRON MICROSCOPE

Method and System for Charged Particle Microscopy with Improved Ima...

Charged Particle Beam Device

ACTIVE CHARGED PARTICLE TOMOGRAPHY